JP5938111B2 - 感圧センサ - Google Patents

感圧センサ Download PDF

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Publication number
JP5938111B2
JP5938111B2 JP2014559737A JP2014559737A JP5938111B2 JP 5938111 B2 JP5938111 B2 JP 5938111B2 JP 2014559737 A JP2014559737 A JP 2014559737A JP 2014559737 A JP2014559737 A JP 2014559737A JP 5938111 B2 JP5938111 B2 JP 5938111B2
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JP
Japan
Prior art keywords
electrode
electrode layer
substrate
pressure
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Active
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JP2014559737A
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English (en)
Japanese (ja)
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JPWO2014119658A1 (ja
Inventor
泰之 立川
泰之 立川
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Fujikura Ltd
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Fujikura Ltd
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Publication of JP5938111B2 publication Critical patent/JP5938111B2/ja
Publication of JPWO2014119658A1 publication Critical patent/JPWO2014119658A1/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2014559737A 2013-02-04 2014-01-30 感圧センサ Active JP5938111B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013019176 2013-02-04
JP2013019176 2013-02-04
PCT/JP2014/052083 WO2014119658A1 (ja) 2013-02-04 2014-01-30 感圧センサ

Publications (2)

Publication Number Publication Date
JP5938111B2 true JP5938111B2 (ja) 2016-06-22
JPWO2014119658A1 JPWO2014119658A1 (ja) 2017-01-26

Family

ID=51262369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014559737A Active JP5938111B2 (ja) 2013-02-04 2014-01-30 感圧センサ

Country Status (4)

Country Link
JP (1) JP5938111B2 (zh)
CN (1) CN104884920B (zh)
TW (1) TWI586946B (zh)
WO (1) WO2014119658A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6316371B2 (ja) * 2016-10-13 2018-04-25 Ｎｉｓｓｈａ株式会社 圧力センサ
WO2019200463A1 (en) 2018-04-16 2019-10-24 Orpyx Medical Technologies Inc. High-resistance sensor and method for using same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4978775U (zh) * 1972-10-26 1974-07-08
JP2001165788A (ja) * 1999-12-06 2001-06-22 Alps Electric Co Ltd 感圧装置
JP2002131155A (ja) * 2000-10-30 2002-05-09 Denso Corp 感圧抵抗センサ
JP2008175570A (ja) * 2007-01-16 2008-07-31 Fujikura Ltd 感圧メンブレンセンサ
WO2009075403A1 (en) * 2007-12-10 2009-06-18 Korea Research Institute Of Standards And Science High-temperature tactile sensor and method of manufacturing the same
WO2011024902A1 (ja) * 2009-08-28 2011-03-03 日本写真印刷株式会社 圧力検出ユニット及び圧力検出装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3771425B2 (ja) * 2000-07-04 2006-04-26 株式会社山武 容量式圧力センサおよびその製造方法
JP3980300B2 (ja) * 2000-09-07 2007-09-26 株式会社フジクラ 膜状感圧抵抗体および感圧センサ
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP2004028883A (ja) * 2002-06-27 2004-01-29 Denso Corp 感圧センサ
JP2004205377A (ja) * 2002-12-25 2004-07-22 Kyocera Corp 圧力検出装置用パッケージ
CN100346143C (zh) * 2004-12-17 2007-10-31 电子科技大学 一种复合封装的箔式锰铜超高压力传感器
CN101079342B (zh) * 2007-05-28 2010-09-08 上海神沃电子有限公司 表面贴装型高分子esd保护元件及其制备方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4978775U (zh) * 1972-10-26 1974-07-08
JP2001165788A (ja) * 1999-12-06 2001-06-22 Alps Electric Co Ltd 感圧装置
JP2002131155A (ja) * 2000-10-30 2002-05-09 Denso Corp 感圧抵抗センサ
JP2008175570A (ja) * 2007-01-16 2008-07-31 Fujikura Ltd 感圧メンブレンセンサ
WO2009075403A1 (en) * 2007-12-10 2009-06-18 Korea Research Institute Of Standards And Science High-temperature tactile sensor and method of manufacturing the same
WO2011024902A1 (ja) * 2009-08-28 2011-03-03 日本写真印刷株式会社 圧力検出ユニット及び圧力検出装置

Also Published As

Publication number Publication date
JPWO2014119658A1 (ja) 2017-01-26
CN104884920A (zh) 2015-09-02
CN104884920B (zh) 2017-03-15
TWI586946B (zh) 2017-06-11
WO2014119658A1 (ja) 2014-08-07
TW201447249A (zh) 2014-12-16

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