WO2012056893A1 - Dispositif de distribution de pièce à usiner et dispositif de traitement de pièce à usiner - Google Patents

Dispositif de distribution de pièce à usiner et dispositif de traitement de pièce à usiner Download PDF

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Publication number
WO2012056893A1
WO2012056893A1 PCT/JP2011/073512 JP2011073512W WO2012056893A1 WO 2012056893 A1 WO2012056893 A1 WO 2012056893A1 JP 2011073512 W JP2011073512 W JP 2011073512W WO 2012056893 A1 WO2012056893 A1 WO 2012056893A1
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
work
carry
cassette
unloading
Prior art date
Application number
PCT/JP2011/073512
Other languages
English (en)
Japanese (ja)
Inventor
月本浩明
池田早人
Original Assignee
タツモ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by タツモ株式会社 filed Critical タツモ株式会社
Priority to JP2012540766A priority Critical patent/JP5606546B2/ja
Publication of WO2012056893A1 publication Critical patent/WO2012056893A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Definitions

  • the present invention relates to a workpiece supply device that supplies sheet-like workpieces such as solar cell wafers one by one from a cassette to a carry-in position of a transfer device, and a workpiece processing apparatus including the workpiece supply device.
  • a plurality of processes at the time of manufacturing a solar cell wafer include an inspection process of a sheet-like workpiece.
  • the workpiece inspection process for example, a predetermined portion of the workpiece is imaged by an imaging device.
  • the workpiece is transported to the inspection position where the imaging device is provided by the transport device.
  • a transport device for transporting a workpiece there is one using an endless belt (for example, see Patent Document 1).
  • a workpiece supply device for supplying workpieces to a transfer device
  • a device using a cassette in which a plurality of storage units for storing workpieces one by one are stacked in multiple stages in the vertical direction. After reciprocating the cassette in a horizontal plane in a direction perpendicular to the conveying direction of the conveying device, placing the workpiece in the cassette on the endless belt at the loading position of the conveying device, and lowering or raising the cassette by one stage Move the cassette back and forth.
  • An object of the present invention is to supply workpieces one by one to a transport device even when a plurality of workpieces are stored in a single storage section in a cassette, and appropriately perform processing on the workpiece being transferred.
  • An object of the present invention is to provide a workpiece supply device and a workpiece processing device.
  • a workpiece supply device includes a cassette, a lifting mechanism, a first carry-out member, and a second carry-out member, and supplies the workpiece to a workpiece loading position in a conveyance device that conveys a sheet-shaped workpiece along the main conveyance direction.
  • a conveyance device that conveys a sheet-shaped workpiece along the main conveyance direction.
  • the elevating mechanism lowers or raises the cassette so that the positions of the plurality of storage units in the vertical direction sequentially coincide with the positions of the transport surface.
  • a 1st carrying-out mechanism carries out the workpiece
  • the second unloading mechanism unloads the workpiece unloaded by the first unloading member from the upper surface side to the loading position along a second direction different from the first direction.
  • the workpieces can be supplied one by one to the loading position of the transfer device, and processing on the workpiece being transferred can be performed. It can be done properly.
  • a workpiece supply apparatus 10 constitutes a part of a workpiece processing apparatus 100.
  • the workpiece processing apparatus 100 performs, for example, an inspection process based on image data captured by the imaging apparatus 121 on a transport apparatus 110 that transports, for example, a solar cell wafer as a sheet-shaped work, and a work transported by the transport apparatus 110.
  • Part 120 is provided.
  • the conveyance device 110 is configured by an endless belt stretched around a plurality of rollers as an example.
  • the conveying apparatus 110 can also be configured by a plurality of rollers or chains. Further, the processing performed by the processing unit 120 is not limited to the inspection processing using the imaging device 121.
  • the workpiece supply device 10 is disposed in the vicinity of the carry-in unit 111 of the transfer device 110, and supplies the workpieces one by one to the carry-in unit 111.
  • the workpiece supply apparatus 10 includes a cassette 1, an elevating mechanism 2, a first carry-out mechanism 3, a second carry-out mechanism 4, and a collection tray 5.
  • the cassette 1 includes a plurality of storage portions 11 stacked in multiple stages in the vertical direction. Each of the plurality of storage units 11 stores one sheet-like workpiece in principle.
  • the lifting device 2 raises and lowers the cassette 1 so that the respective positions of the plurality of storage portions 11 in the vertical direction sequentially coincide with the positions of the transport surfaces in the carry-in portion 111 of the transport device 110.
  • the first carry-out mechanism 3 is composed of an endless belt 31 stretched around a plurality of rollers as an example.
  • the first carry-out mechanism 3 moves the work housed in the housing part 11 whose vertical position coincides with the position of the transport surface among the plurality of housing parts 11 along the first direction X from the bottom surface side. Carry out toward the collection tray 5.
  • the first unloading mechanism 3 unloads the work placed on the upper surface of the endless belt 31.
  • the first direction X is parallel to the transport direction of the transport device 110.
  • the second carry-out mechanism 4 includes a vacuum chuck 41 and a slide mechanism 42 as an example.
  • the second carry-out mechanism 4 moves the work carried out by the first carry-out mechanism 3 along the second direction Y orthogonal to the first direction X from the upper surface side between the first carry-out mechanism 3 and the collection tray 5.
  • the slide mechanism 42 reciprocates the vacuum chuck 41 along the second direction Y between the upper part of the second carry-out mechanism 4 and the carry-in part 111 of the carrying device 110.
  • the work stored in the storage unit 11 is moved by the first carry-out mechanism 3. It is unloaded along the first direction X from the bottom side.
  • the work carried out in the first direction X is carried out by the second carrying-out mechanism 4 from the upper surface side along the second direction Y to the carrying-in part 111 of the carrying device 110.
  • the collection tray 5 is a collection unit of the present invention and accommodates unprocessed workpieces.
  • the collection tray 5 can be omitted when a work other than the work located at the top of the plurality of works stored in the single storage unit 11 is unnecessary.
  • the cassette 1, the lifting mechanism 2, the first carry-out mechanism 3, and the collection tray 5 are arranged on both sides with the carry-in part 111 interposed therebetween. It only has to be arranged on one side. However, by disposing these on both sides of the carry-in part 111, after supplying all the workpieces stored in one cassette 1, the supply of workpieces from the other cassette 1 is continued. One cassette 1 can be replaced with a new cassette 1.
  • the installation space for the workpiece supply apparatus 10 can be minimized. It is not limited.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)

Abstract

La présente invention permet de distribuer des pièces à usiner une feuille à la fois sur le dispositif de transport, même lorsqu'une seule unité de logement contient des feuilles de pièces à usiner multiples, et de réaliser le traitement approprié des pièces à usiner transportées. Ce dispositif de distribution de pièces à usiner comporte une cassette (1), un mécanisme de levage/abaissement (2), un premier élément de transfert (3), et un second élément de transfert (4). La cassette (1) comprend une pluralité d'unités de logement (11) qui contiennent des feuilles de pièces à usiner, et les unités de logement sont agencées en étages multiples empilés vers le haut et vers le bas. Le mécanisme de levage/abaissement (2) abaisse ou élève la cassette (1) de sorte que chacune des positions de la pluralité d'unités de logement (11) vers le haut ou vers le bas coïncide séquentiellement avec la position de la surface de transport. Le premier mécanisme de transfert (3) transfère les pièces à usiner dans une seule unité de logement (11) depuis le côté de la surface inférieure, le long d'une première direction (X). Le second mécanisme de transfert (4) transfère les pièces à usiner qui ont été transférées par le premier mécanisme de transfert (3) depuis le côté de la surface supérieure, le long d'une seconde direction (Y).
PCT/JP2011/073512 2010-10-28 2011-10-13 Dispositif de distribution de pièce à usiner et dispositif de traitement de pièce à usiner WO2012056893A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012540766A JP5606546B2 (ja) 2010-10-28 2011-10-13 ワーク処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010241748 2010-10-28
JP2010-241748 2010-10-28

Publications (1)

Publication Number Publication Date
WO2012056893A1 true WO2012056893A1 (fr) 2012-05-03

Family

ID=45993618

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/073512 WO2012056893A1 (fr) 2010-10-28 2011-10-13 Dispositif de distribution de pièce à usiner et dispositif de traitement de pièce à usiner

Country Status (3)

Country Link
JP (1) JP5606546B2 (fr)
TW (1) TWI443058B (fr)
WO (1) WO2012056893A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109625744A (zh) * 2019-01-29 2019-04-16 佛山市新泓达机械有限公司 一种玻璃仓储***及控制方法
WO2021072973A1 (fr) * 2019-10-14 2021-04-22 苏州赛腾精密电子股份有限公司 Dispositif de transport et système de détection

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6011311B2 (ja) * 2012-12-18 2016-10-19 日本電気硝子株式会社 ワーク搬送装置およびワーク搬送方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331133A (ja) * 1986-07-25 1988-02-09 Nikon Corp ウェハ搬送装置
JPH01321257A (ja) * 1988-06-21 1989-12-27 Nitto Denko Corp 薄板と粘着テープの貼着方法
JPH09181149A (ja) * 1997-02-07 1997-07-11 Hitachi Ltd 真空処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000012652A (ja) * 1998-06-24 2000-01-14 Sony Corp 半導体ウェハ搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331133A (ja) * 1986-07-25 1988-02-09 Nikon Corp ウェハ搬送装置
JPH01321257A (ja) * 1988-06-21 1989-12-27 Nitto Denko Corp 薄板と粘着テープの貼着方法
JPH09181149A (ja) * 1997-02-07 1997-07-11 Hitachi Ltd 真空処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109625744A (zh) * 2019-01-29 2019-04-16 佛山市新泓达机械有限公司 一种玻璃仓储***及控制方法
WO2021072973A1 (fr) * 2019-10-14 2021-04-22 苏州赛腾精密电子股份有限公司 Dispositif de transport et système de détection

Also Published As

Publication number Publication date
JP5606546B2 (ja) 2014-10-15
JPWO2012056893A1 (ja) 2014-03-20
TW201242867A (en) 2012-11-01
TWI443058B (zh) 2014-07-01

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