WO2003031823A1 - Pompe a vide rotative a refoulement axial - Google Patents

Pompe a vide rotative a refoulement axial Download PDF

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Publication number
WO2003031823A1
WO2003031823A1 PCT/EP2002/009223 EP0209223W WO03031823A1 WO 2003031823 A1 WO2003031823 A1 WO 2003031823A1 EP 0209223 W EP0209223 W EP 0209223W WO 03031823 A1 WO03031823 A1 WO 03031823A1
Authority
WO
WIPO (PCT)
Prior art keywords
pump
rotor
pump according
shaft
housing
Prior art date
Application number
PCT/EP2002/009223
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Heinrich Engländer
Jürgen LEINEWEBER
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO2003031823A1 publication Critical patent/WO2003031823A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/024—Multi-stage pumps with contrarotating parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Definitions

  • the invention relates to an essentially axially conveying friction vacuum pump with a housing and with at least two rotationally symmetrical components arranged coaxially in the housing, the mutually facing surfaces of which, during the operation of the pump, move relative to one another, delimit a conveying channel with an annular cross section and effect gas delivery Wearing structures.
  • Known friction vacuum pumps have a stator and a rotor, between which there is a delivery channel with an annular cross section.
  • the gas production Structures causing such a pump can be interlocking stator and rotor blades (turbomolecular vacuum pump), thread webs (Holweck pump) or the like.
  • the properties of pumps of this type largely depend on the relative speed of the pump structures in the delivery channel between the stator and rotor.
  • the delivery cross section available in the pump for the arrangement of annular delivery channels is limited internally by the fact that no high peripheral speeds and thus no sufficiently high relative speeds between the stator and rotor structures can be achieved in the area near the axis.
  • the available funding cross-section is also limited externally. This is due to the maximum load on the rotor materials used with the centrifugal forces that occur.
  • a typical (magnetically mounted) turbomolecular vacuum pump with only one delivery channel with an annular cross section is known from WO 94/04825.
  • a friction vacuum pump of the Holweck type is known from DE-A-196 32 375.
  • Several cylinder sections are arranged coaxially to one another and together form a rotor component.
  • the pumping speed of the pump is increased by multiplying the delivery channels.
  • the overall delivery cross-section available for the arrangement of effective delivery channels is not increased by the proposed measures, especially since Holweck pumps require relatively high relative speeds, ie the unusable area near the axis is even relatively large.
  • the present invention has for its object to increase the power density in a friction vacuum pump with the features mentioned.
  • the relative speed of the pump-effective structures can be significantly increased.
  • this also has the advantage that the diameter of the pumping surfaces can be smaller.
  • a region close to the axis that was previously not usable in a friction vacuum pump is available in a pump designed according to the invention for accommodating pump structures.
  • the delivery cross section in the pump can be increased, the power density increases.
  • the increased relative speed of the pumping surfaces allows not only in the To realize smaller diameter but also shorter (because of the increased efficiency) delivery channels, so that compact pumps with surprisingly high suction power can be built.
  • the advantages according to the invention can therefore be realized in particular in the case of small friction vacuum pumps.
  • FIG. 1 shows a turbomolecular vacuum pump according to the. Invention with rotors mounted in the areas of both end faces,
  • FIG. 2 shows a turbomolecular vacuum pump according to the invention with a Holweck stage as a dynamic seal between the outer rotor and the housing,
  • Figure 3 shows a turbomolecular vacuum pump according to the
  • FIG. 4 shows a turbomolecular vacuum pump according to the invention, of two-flow design
  • Figure 5 is a turbomolecular vacuum pump according to the
  • Figure 6 shows a molecular pump according to the invention
  • Figure 7 shows a turbomolecular pump according to the invention with a screw pump as a backing pump.
  • the pump with 1, its housing with 2, its inlet with 3, its outlet with 4, the inner rotor with 5, the outer rotor with 6 and the two rotors 5, 6 have a common axis of rotation 7 designated.
  • the figures each show only essentially cylindrical rotors; the shape of the rotors and the housing 2 adapted to their shape can also be designed in a manner known per se step-like or conical - preferably tapering in the conveying direction.
  • the housing 2 comprises a cylindrical section
  • the covers 12, 13 are each equipped with inwardly extending, section-shaped supports 14, 15 on which the rotors 5, 6 are supported.
  • Part of the inner rotor 5 is the shaft 17, which is equipped on the outside with rotor blades 18.
  • the rotor coil 19 of the drive motor 21 for the inner rotor 5, which is fastened on the shaft 17, is located in the region of the carrier 14.
  • the stator coil 22 surrounding the rotor coil 19 is supported on the inside of the carrier 14.
  • 17 bearings are located between the inner sides of the carrier 14, 15 and the shaft 24, 25, which support the shaft 17 on both ends.
  • Part of the outer rotor 6 is the cylinder section 27, which is equipped on the inside with blades 28 and on the outside with blades 29.
  • the outer blades 29 are associated with stator blades 30, which on the outer housing 2 or. 11 are fastened or centered therefrom if they are part of a stator disk spacer ring package comprised by the housing 2.
  • the cylinder section 27 of the outer rotor 6 is also supported on both sides. It is supported via the bearings 31, 32 on the outer sides of the supports 14, 15.
  • the drive motor 33 for the rotor 6 is located on the end face opposite the drive motor 21 for the rotor 5. It is designed as an external rotor motor, as is known per se in turbomolecular vacuum pumps (cf. FR-A-1 304 689).
  • the stator coil 34 is fastened to the outside of the carrier 15, the rotor coil 35 to the cylinder section 27.
  • the exemplary embodiment according to FIG. 1 has two conveying spaces 36 and 37 which are circular in cross section and flow through them in parallel or in a single flow (cf. the arrows shown in each case).
  • the cylinder section 27 is provided with openings 38 at the level of the inlet connector 3 and with openings 39 at the level of the connector 4.
  • the rotors 5 and 6 have opposite directions of rotation, so that even in the near-axis conveying space 37, relatively high relative speeds between the Blades 18 of the inner rotor 5 and the inwardly directed blades 28 to the outer rotor • can be achieved.
  • FIG. 1 also shows sealing means which separate the conveying spaces 36, 37 from the storage and engine compartments.
  • sealing means which separate the conveying spaces 36, 37 from the storage and engine compartments.
  • These are fixed washers 41, 42, 43 and 44 with concentric sealing collars 45, 46, 47 and 48, which together with the rotating component form contact-free seals (labyrinth seals, thread bridge seals).
  • the annular disks 41, 42 separate the outer delivery space 36, the annular disks 43, 44 fastened on the inner end faces of the carriers 14, 15 separate the inner delivery space 37 from the two cover-side engine and storage spaces. Seals of the type described are expedient if pumping is to be as free of hydrocarbons as possible and the bearings 24, 25, 31, 32 of the two rotors 5, 6 are not designed as magnetic bearings.
  • FIGS. 2 and 3 show single-flow designs in which the rotors 5, 6 are overhung and driven in the area of only one end face (the lower end face in FIGS. 2 and 3) and in which the upper end face of the housing 2 forms the inlet 3 ,
  • the outer rotor 6 has approximately the shape of a bell open at the bottom, in the cavity of which the drive motors 21 (Inner rotor for the inner rotor 5) and 33 (outer rotor for the outer rotor 6) and the bearings 24, 25 for the inner rotor 5 and the bearings 31, 32 for the outer rotor 6.
  • the pumps shown have a housing cover 12 on the rotor side.
  • a component 50 (only shown in FIG.
  • the carrier 51 extends cylindrically into the engine and storage space and carries the two stator coils of the drive motors 21, 33.
  • the component 50 has a concentric recess 52 in which the lower bearing 25 of the shaft 17 is located.
  • the upper shaft bearing 24 is supported on an inward web 49 of the carrier 51.
  • a disk 53 is supported by the bearing 32 and carries the outer rotor 6.
  • the inner ring of the upper bearing 31 for the outer rotor 6 is also supported on the web 49 of the carrier 51.
  • the outer rotor 6 is equipped with an inwardly directed web 54 which carries a support ring 55.
  • the outer bearing ring of the bearing 31 is supported on this.
  • the bearing 31 could also be located directly between the two opposing rotors 5 and 6; the bearing load would then be relatively high.
  • the web 54 has through openings 56 for the gases flowing in the inner delivery space 37. They are formed in that a plurality of axially offset web sections carry the support ring 55 for the outer bearing ring of the bearing 31. Instead of different web sections cuts, there may also be a helical web 54 which supports the axial-tangential conveyance of the gases.
  • the disk 53 is also equipped with openings 57. Drawn arrows show the path of the extracted gases.
  • the carrier 51, the component 50, the bearings 24, 25, 31, 32 and the stator coils 22, 34 of the drive motors 21, 33 together form a compact bearing and drive unit.
  • the bearing and drive unit can be designed as in the solution according to FIG. 2. It was therefore not shown again. For reasons of freedom from hydrocarbons, it could be expedient in an alternative solution to replace at least some of the mechanical bearings by magnetic bearings in a manner known per se.
  • FIGS. 2 and 3 differ essentially in that the outer pump stage with its delivery chamber 36 is designed once as a Holweck stage (FIG. 2) and once as a turbomolecular pump stage (FIG. 3, rotor blades 29, stator blades 30).
  • the Holweck stage (rotor 6 smooth outside, inner wall of the housing with thread 58) essentially has the function of a dynamic seal with a relatively low pumping speed.
  • Pumps of the type shown in Figure 2 are compact and have a high pumping speed because of the blades 18, 28 rotating in opposite directions in the delivery space 37.
  • Part of the rotor 6 can also be an outer cylinder 59, which consists of CFRP and for example reinforcement function when realizing higher speeds.
  • the outer pump stage with its delivery chamber 36 is designed as a turbomolecular pump stage.
  • the housing 2 centers in a manner known per se a stator, which usually consists of blade and spacer rings.
  • the blade half rings carry the blades 30 which, with the rotating blades 29, promote the gases.
  • the inner pump stage with its delivery space 37 can e.g. - Not shown in detail - should be constructed so that when mounting the pump 1, alternating blade rings, which carry the blades 28 of the rotor 6, and blade rings, which carry the blades 18 of the rotor 5, are superimposed and e.g. be secured by axial bolts.
  • the manufacture and assembly of the pump-effective components are particularly simple if they correspond to the teaching according to patent application DE 198 46 188 A1.
  • the blades of the stator or rotor of a turbomolecular pump are equipped with slots which are designed in such a way that the rotor and stator can be screwed in and out, that is to say they can be assembled by screwing into one another and disassembled by screwing apart.
  • the outer pump stage with its delivery chamber 36 can also be designed in this way, so that the plurality of vane rings and spacer rings can be omitted in this pump stage.
  • the pump according to FIG. 3 could be assembled in such a way that the drive and bearing unit - for. B.
  • stator is then installed. If the stator is constructed in the manner shown in FIG. 3, the stator package, consisting of stator disk and spacer ring halves, is first assembled and centered by sliding on the housing 2. If the stator is constructed in one piece according to the teaching of DE 198 46 188 A 1, the components of the outer pump stage are joined to the delivery chamber 36 by screwing one into the other. The final step is the attachment of the housing cover 12 to the housing 2.
  • Figure 4 shows a double flow version of a friction vacuum pump according to the invention.
  • the cylinder section 27 of the outer rotor 6 is equipped with openings 61 at the level of the inlet 3, so that of the four pump stages that are created with their delivery spaces 36a , 36b, 37a, 37b two each can be operated in parallel.
  • the two turbomolecular pump stages, each operated in parallel, with their delivery spaces 36a and 36b (each outside with their blades 29, 30) and 37a and 37b (each inside with blades 18 and 28 rotating in opposite directions) transport the gases to be delivered in the direction of both ends.
  • the outlet openings 4a and 4b arranged there are brought together via lines 62, 63 and open into the fore-vacuum connection which forms the outlet 4.
  • FIGS. 1 to 4 the conveying channels 36, 37 are each flowed through in parallel.
  • Figure 5 shows schematically an embodiment in which the conveying channels are flowed through in succession.
  • the two rotors 5, 6 are overhung and driven on the bearing side. Bearing and drive are not shown in detail.
  • the inlet 3 opens laterally into the bearing-side end of the outer conveying channel 36.
  • the conveyed gases flow through the conveying channel 36, are deflected in the area of the free end faces of the rotors 5, 6 and then flow through the inner conveying channel 37 in the direction of the outlet 4 (not shown) ).
  • the exemplary embodiments described above each have two delivery channels 36 and 37 with lower different center distances and different relative speeds of the respective pump structures.
  • the speeds of the two rotors 5, 6, it is sufficient if only the outer rotor is operated at the speeds (30 to 100 TU / min) that are customary in friction vacuum pumps, since 36 rotating and stationary structures in the outer delivery channel must meet the desired delivery properties.
  • the inner rotor 5 or inner delivery channel 37 the following applies:
  • the desired increase in the relative speed of the pump structures achieved by the invention also occurs when the inner rotor 5 does not rotate at the speeds customary in friction vacuum pumps, since the rotor 6 already has such speeds Has. Because of the opposite direction of rotation of the inner rotor 5, each speed of this rotor increases the relative speed of the pumping surfaces in the inner delivery channel 37.
  • the desired conveying properties in the conveying channels 36, 37 are set by appropriately designing the pump structures. If the rows of blades are interlocking, the length, width, thickness, spacing, angle of attack, etc. of the blades can be selected in a known manner so that the respective conveying channel has the desired properties. Depending on whether a dynamic seal or a significant transport of the gases is to be achieved in a conveyor channel with a threaded structure, the thread can be adjusted in terms of the number of gears, pitch, depth, width, etc.
  • the only schematically illustrated embodiment according to FIG. 6 is a friction vacuum pump designed as a molecular pump, as is known from DE 196 32 357. What differs from the prior art mentioned is that the pump-effective surfaces rotate in the opposite direction in the sense of the present invention.
  • Each of the rotors 5, 6 has a rotating disk (71, 72) which are axially spaced and between which the pump-active components extend.
  • the disk 71 of the rotor 5 is connected to the shaft 17 and to a central rotor component 73 fixed on the shaft, which is equipped on the outside with pump-effective structures (thread webs).
  • the disk 71 carries a further three cylinder sections 74, 75, 76, the inside and outside of which are designed as pump surfaces.
  • the pumping surfaces located on the outside of the outer cylinder 76 form the outermost delivery space 77 with the inside of the housing 2.
  • the disk 72 of the rotor 6 carries three cylinders 78, 79, 80 which engage in the spaces between the cylinders 73, 74, 75, 76 and form a total of six delivery spaces 81 to 86. Openings 87 and 88 arranged in a ring in the disks 71, 72 and correspondingly designed structures of the effective pumping surfaces result in a total of seven conveying spaces (77, 81 to 86) operated in parallel.
  • FIG. 7 shows an exemplary embodiment in which a friction vacuum pump 1 according to the invention is combined with a backing pump 90.
  • the friction vacuum pump 1 essentially corresponds to the design according to FIG. 2 or 3.
  • the backing pump 90 is designed as a screw vacuum pump. Your housing is labeled 91.
  • the screw vacuum pump 90 comprises two rotors 92 and 93, each having a shaft section 94, 95 and a thread 96, 97.
  • the friction vacuum pump 1 On the input side, the friction vacuum pump 1 has two turbomolecular pump stages connected in parallel (delivery channels 36, 37). This is followed by a molecular pump stage 101 at the level of the engine and storage space, formed by the cylindrical outside of the cylinder 27 of the outer rotor 6 and the lower section of the housing 11 of the pump 1. The inside of this housing section is equipped with the required thread structure 102.
  • the molecular pump stage continues the outer delivery channel 36 of the outer turbomolecular pump stage.
  • the gases flowing in the inner delivery channel 37 enter the delivery channel 36 through openings 103 in the cylinder .27.
  • the pressure-side end face of the lower housing section forms a disk 104, which essentially has the functions of the cover 12 according to FIGS. 2 and 3.
  • the forevacuum pump 90 is attached to this cover with its suction-side end face.
  • the disk 104 is equipped with a central opening 105, which simultaneously forms the outlet 4 of the pump 1 and the inlet of the screw pump 90.
  • the gases are conveyed to the outlet 106 in chambers formed by the threads 96 and 97 and by the housing 91.
  • the shaft 17 of the pump 1 is - in comparison to the solutions according to Figures 2 and 3 - extended on the pressure side.
  • the extension extends through the opening 105 and forms the shaft section 94 of the screw rotor 92.
  • Rotor 5 of the friction vacuum pump 1 and rotor 92 of the screw vacuum pump 91 form a unit.
  • Their bearings are labeled 24 and 25.
  • the suction-side bearing 24 is based on the web 49 of the Carrier 51 (as in the embodiments according to Figures 2 and 3).
  • the pressure-side bearing 25 is located in the housing 91 of the pump 90, specifically in the area of the pressure-side stin side of its housing 91.
  • the second rotor 93 of the screw pump 90 is supported on the bearings 107 and 108.
  • the bearing 107 lies in the plane of the bearing 25.
  • the bearing 108 is located at the level of the disk 104.
  • the shaft sections 94 and 95 carry the synchronization gearwheels 111 and 112 which are customary in screw pumps 114, 115 in the shaft sections 94, 95, coolant can be injected from the pressure side.
  • the solution according to FIG. 7 is a compact vacuum pump which is able to generate very low pressures (high vacuum) and which compresses against atmospheric pressure.
  • the screw vacuum pump 90 it is also possible to use other backing pumps, preferably axially delivering pumps with at least one shaft which, as in the embodiment described, is formed by an extension of the shaft 17 of the friction pump 1.
  • Such pumps are, for example, eccentric screw or internal spindle pumps, as are known from DE-A-198 49 098.
  • a drive alternative for the shaft 17, 94 is also shown in dashed lines in FIG.
  • the shaft 94 is guided to the outside on the pressure side.
  • a drive motor 116 is assigned to this stub shaft.
  • the drive motor 21 in the motor storage space of the friction pump 1 can be omitted.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à vide rotative (1) à refoulement sensiblement axial, comportant un carter (2) , au moins deux éléments (5, 6) à symétrie de rotation, disposés de manière coaxiale dans le carter, dont les surfaces qui se font mutuellement face et se déplacent mutuellement lorsque la pompe est en service, délimitent un canal de refoulement (36, 37) de section transversale en anneau de cercle et portent les structures provoquant le refoulement de gaz. Afin d'augmenter la puissance volumique, il est prévu d'adjoindre un mécanisme d'entraînement (21, 33 et 116) à chacun des deux éléments, pouvant dans chaque cas être mis en marche, de manière à faire tourner les deux éléments (5, 6) en sens contraire.
PCT/EP2002/009223 2001-10-06 2002-08-17 Pompe a vide rotative a refoulement axial WO2003031823A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10149366.5 2001-10-06
DE2001149366 DE10149366A1 (de) 2001-10-06 2001-10-06 Axial fördernde Reibungsvakuumpumpe

Publications (1)

Publication Number Publication Date
WO2003031823A1 true WO2003031823A1 (fr) 2003-04-17

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PCT/EP2002/009223 WO2003031823A1 (fr) 2001-10-06 2002-08-17 Pompe a vide rotative a refoulement axial

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DE (1) DE10149366A1 (fr)
WO (1) WO2003031823A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009246375A (ja) * 2004-11-12 2009-10-22 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
GB2508396A (en) * 2012-11-30 2014-06-04 Edwards Ltd Vacuum pump with pressure regulation
EP2843238A3 (fr) * 2013-08-21 2015-06-24 Pfeiffer Vacuum Gmbh Pompe à vide dans laquelle différents modules peuvent soit être opérés à des vitesses différentes, soit être traversés par des flux de gaz différents
US20190145415A1 (en) * 2017-11-13 2019-05-16 Onesubsea Ip Uk Limited System for moving fluid with opposed axial forces
GB2590627A (en) * 2019-12-20 2021-07-07 Dyson Technology Ltd A fan drive assembly
US11098727B2 (en) * 2018-06-20 2021-08-24 Onesubsea Ip Uk Limited Counter rotating back-to-back fluid movement system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013213815A1 (de) 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe

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JPS5859395A (ja) * 1981-10-06 1983-04-08 Seiko Instr & Electronics Ltd タ−ボ分子ポンプ
JPS58197497A (ja) * 1982-05-12 1983-11-17 Hitachi Ltd タ−ボ分子ポンプ
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
WO1994004825A1 (fr) 1992-08-21 1994-03-03 Leybold Aktiengesellschaft Procede de controle de la position de fonctionnement du systeme rotatif d'une pompe a vide, de preference une pompe turbomoleculaire
US5709537A (en) * 1992-09-03 1998-01-20 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
DE19632357A1 (de) 1996-08-10 1998-02-12 Messer Griesheim Gmbh Verfahren und Anlage zum Fernüberwachen eines Fluidversorgungssystems mit Vorratsbehältern
DE19632375A1 (de) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6050782A (en) * 1997-01-28 2000-04-18 Magnetal Ab Magnetically suspended high velocity vacuum pump

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DE1845883U (de) * 1961-10-19 1962-02-01 Akad Wissenschaften Ddr Molekularpumpe.
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JP2865888B2 (ja) * 1991-03-05 1999-03-08 日本原子力研究所 マルチターボ型真空ポンプ

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JPS5859395A (ja) * 1981-10-06 1983-04-08 Seiko Instr & Electronics Ltd タ−ボ分子ポンプ
JPS58197497A (ja) * 1982-05-12 1983-11-17 Hitachi Ltd タ−ボ分子ポンプ
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
WO1994004825A1 (fr) 1992-08-21 1994-03-03 Leybold Aktiengesellschaft Procede de controle de la position de fonctionnement du systeme rotatif d'une pompe a vide, de preference une pompe turbomoleculaire
US5709537A (en) * 1992-09-03 1998-01-20 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
DE19632357A1 (de) 1996-08-10 1998-02-12 Messer Griesheim Gmbh Verfahren und Anlage zum Fernüberwachen eines Fluidversorgungssystems mit Vorratsbehältern
DE19632375A1 (de) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US5893702A (en) * 1996-08-10 1999-04-13 Pfeiffer Vacuum Gmbh Gas friction pump
US6050782A (en) * 1997-01-28 2000-04-18 Magnetal Ab Magnetically suspended high velocity vacuum pump
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor

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PATENT ABSTRACTS OF JAPAN vol. 007, no. 149 (M - 225) 30 June 1983 (1983-06-30) *
PATENT ABSTRACTS OF JAPAN vol. 008, no. 043 (M - 279) 24 February 1984 (1984-02-24) *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009246375A (ja) * 2004-11-12 2009-10-22 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
GB2508396A (en) * 2012-11-30 2014-06-04 Edwards Ltd Vacuum pump with pressure regulation
GB2508396B (en) * 2012-11-30 2015-10-07 Edwards Ltd Improvements in and relating to vacuum conduits
US10539123B2 (en) 2012-11-30 2020-01-21 Edwards Limited Pressure regulating apparatus including conduit
EP2843238A3 (fr) * 2013-08-21 2015-06-24 Pfeiffer Vacuum Gmbh Pompe à vide dans laquelle différents modules peuvent soit être opérés à des vitesses différentes, soit être traversés par des flux de gaz différents
US20190145415A1 (en) * 2017-11-13 2019-05-16 Onesubsea Ip Uk Limited System for moving fluid with opposed axial forces
US11162497B2 (en) * 2017-11-13 2021-11-02 Onesubsea Ip Uk Limited System for moving fluid with opposed axial forces
US11098727B2 (en) * 2018-06-20 2021-08-24 Onesubsea Ip Uk Limited Counter rotating back-to-back fluid movement system
GB2590627A (en) * 2019-12-20 2021-07-07 Dyson Technology Ltd A fan drive assembly
GB2590627B (en) * 2019-12-20 2022-03-30 Dyson Technology Ltd A fan drive assembly

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Publication number Publication date
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