EP0828080A2 - Pompe à effet visqueux - Google Patents
Pompe à effet visqueux Download PDFInfo
- Publication number
- EP0828080A2 EP0828080A2 EP97111700A EP97111700A EP0828080A2 EP 0828080 A2 EP0828080 A2 EP 0828080A2 EP 97111700 A EP97111700 A EP 97111700A EP 97111700 A EP97111700 A EP 97111700A EP 0828080 A2 EP0828080 A2 EP 0828080A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas
- cylindrical
- pump
- cylindrical components
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a gas friction pump according to the preamble of the first Claim.
- Gas friction pumps of various types are used to convey gases known. Their mode of operation is based on the transmission of impulses from moving Walls on the gas particles. In this way a gas flow is made into the desired one Direction generated.
- Gas friction pumps operating in a pressure range work in which the free path length of the gas molecules is large compared to geometric dimensions of the pump, i.e. in the molecular flow area, are called molecular pumps.
- the first gas friction pump of this type was presented by Gaede [1].
- a Technical modification of the Gaedeschen pump while maintaining the basic principle is a development of Siegbahn [2].
- Siegbahn is a moving wall rotating disc used.
- the gas friction pumps of the Gaede, Siegbahn and Holweck type are for the area of application in the pressure area adjoining the top is well suited. she can be used separately in this printing area as well as in Series connected with a turbomolecular pump. This last combination of Turbomolecular pump and friction pump is an elegant way the working range of a turbomolecular pump after higher discharge pressures to move there.
- Gas friction pumps according to Gaede and Siegbahn show their construction no possibility of being redesigned for a higher pumping speed, without questioning their basic function. Besides, they are specific disadvantages, for example the fact that the friction pump after Siegbahn the gas is pumped against the centrifugal force which reduce their effectiveness in practical use.
- the object of the invention is a gas friction pump for the molecular flow area to imagine which compared to the conventional constructions has a significantly higher pumping speed and its working range is molecular Flow area does not leave.
- the geometric dimensions of the pump should be be comparable to conventional constructions and in combination can be operated with a turbomolecular pump.
- Claims 2 to 10 represent further design options of the Invention.
- the invention enables the parallel arrangement of the conveying spaces the same space requirement the pumping speed compared to conventional constructions to multiply, the working area being the molecular flow area does not leave. This is important to the characteristic pump switches such as. maintain a high pressure ratio.
- Special structures in the Input area of the pump, as represented in claims 3 to 6 lead to a high conductance in this area and contribute to the fact that the Gas flow as freely as possible from the suction opening into the coaxial delivery rooms can reach.
- the shape of the stator components can be designed according to claim 7 be that it has a minimal footprint and rational manufacturing methods allowed.
- the advantages of the gas friction pump according to the invention become particularly clear, when combined with a turbomolecular pump.
- the parallel Arrangement of the funding rooms and the design of the entrance area such a high pumping speed is available that it is possible that the the gas emitted to the turbomolecular pump on its fore-vacuum side in full Scope can be taken over without losses and up to molecular flow can be further promoted and compressed to the gas outlet. It will possible to work the turbomolecular pump by up to two orders of magnitude expand towards higher pressures.
- the work area can be expanded further by one or more additional gas friction pumps take place, which are on the fore-vacuum side of the connected arrangement according to the invention and operated with this in series will.
- the gas friction pump is in a housing 1 with a suction opening 2 and gas outlet opening 3 shown.
- the shaft 4 With the shaft 4, they are coaxial with each other arranged cylindrical components 5 connected via a component 10.
- the wave 4, the component 10 and the cylindrical components 5 form the rotor unit. drive and storage of this rotor unit are not shown here, since they are known per se Constructions can be derived and for the basic idea of the invention have no meaning.
- the stator element consists of several cylindrical components 6 arranged coaxially to each other, each of which surrounded cylindrical components 5 of the rotor element.
- the components 6 of the Stator element are provided with spiral conveyor channels 7, which through Web 8 are separated from each other.
- These delivery channels are the outer ones or inner smooth surfaces of the cylindrical components 5 arranged opposite and designed in such a way that the resulting coaxial conveying spaces 9 form parallel pumping spaces which draw the gas from the intake opening 2 pump to gas outlet 3.
- the parallel gas flows will end the funding areas e.g. through suitable openings 12 in the stator parts again merged and fed to the gas outlet opening 3.
- Fig. 2 shows another embodiment.
- the cylindrical components 5 the rotor element with conveyor channels 7, and the cylindrical components 6 of the stator element have a smooth surface.
- the component 10, which connects the cylindrical components 5 to each other, is with Opening 11 provided which the connection between the suction opening 2 and produce the delivery rooms 9.
- the supporting parts 13 of this component can be designed so that they form a gas-promoting structure with the openings 11.
- Fig. 3 shows, for example, that the gas-producing structure is at an angle to the intake opening 2 standing blades 14 can exist and
- Fig. 4 shows the gas-producing Structure consisting of oblique holes 15.
- Fig. 5 shows an embodiment of the cylindrical components, which with delivery channels are provided. These are shaped so that they are meandering Have structure. There are one component on the inside and one on the outside Delivery channels 7 and webs 8 arranged against each other. This leads to an optimal one Space utilization and enables a more compact with the same pumping speed Construction.
- Fig. 6 shows an example of how the gas friction pump according to the invention with a door bomolecular pump 20 can be combined.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19632375 | 1996-08-10 | ||
DE19632375A DE19632375A1 (de) | 1996-08-10 | 1996-08-10 | Gasreibungspumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0828080A2 true EP0828080A2 (fr) | 1998-03-11 |
EP0828080A3 EP0828080A3 (fr) | 1998-10-14 |
Family
ID=7802360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97111700A Withdrawn EP0828080A3 (fr) | 1996-08-10 | 1997-07-10 | Pompe à effet visqueux |
Country Status (4)
Country | Link |
---|---|
US (1) | US5893702A (fr) |
EP (1) | EP0828080A3 (fr) |
JP (1) | JP3971821B2 (fr) |
DE (1) | DE19632375A1 (fr) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
DE19846188A1 (de) | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
DE19930952A1 (de) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
GB9927493D0 (en) * | 1999-11-19 | 2000-01-19 | Boc Group Plc | Improved vacuum pumps |
DE10114585A1 (de) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE10149366A1 (de) | 2001-10-06 | 2003-04-17 | Leybold Vakuum Gmbh | Axial fördernde Reibungsvakuumpumpe |
JP3961273B2 (ja) | 2001-12-04 | 2007-08-22 | Bocエドワーズ株式会社 | 真空ポンプ |
GB0229355D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
FR2854933B1 (fr) * | 2003-05-13 | 2005-08-05 | Cit Alcatel | Pompe moleculaire, turbomoleculaire ou hybride a vanne integree |
ITTO20030420A1 (it) * | 2003-06-05 | 2004-12-06 | Varian Spa | Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti |
GB0424199D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Vacuum pump |
GB0614928D0 (en) * | 2006-07-27 | 2006-09-06 | Boc Group Plc | Molecular Drag Pumping Mechanism |
JP4935509B2 (ja) * | 2007-06-05 | 2012-05-23 | 株式会社島津製作所 | ターボ分子ポンプ |
DE102007044945A1 (de) * | 2007-09-20 | 2009-04-09 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102008063131A1 (de) | 2008-12-24 | 2010-07-01 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
GB2474507B (en) | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
US9790946B2 (en) * | 2010-09-28 | 2017-10-17 | Edwards Japan Limited | Exhaust pump |
DE202011002809U1 (de) | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
DE102011112691A1 (de) | 2011-09-05 | 2013-03-07 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102011119506A1 (de) | 2011-11-26 | 2013-05-29 | Pfeiffer Vacuum Gmbh | Schnell drehender Rotor für eine Vakuumpumpe |
GB2498816A (en) * | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
EP2620649B1 (fr) | 2012-01-27 | 2019-03-13 | Edwards Limited | Pompe à vide de transfert gazeux |
DE102012003680A1 (de) * | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US8597553B1 (en) | 2012-05-31 | 2013-12-03 | Mohawk Industries, Inc. | Systems and methods for manufacturing bulked continuous filament |
US10695953B2 (en) | 2012-05-31 | 2020-06-30 | Aladdin Manufacturing Corporation | Methods for manufacturing bulked continuous carpet filament |
US9636860B2 (en) | 2012-05-31 | 2017-05-02 | Mohawk Industries, Inc. | Method of manufacturing bulked continuous filament |
US10538016B2 (en) | 2012-05-31 | 2020-01-21 | Aladdin Manufacturing Corporation | Methods for manufacturing bulked continuous carpet filament |
US10487422B2 (en) | 2012-05-31 | 2019-11-26 | Aladdin Manufacturing Corporation | Methods for manufacturing bulked continuous filament from colored recycled pet |
US11045979B2 (en) | 2012-05-31 | 2021-06-29 | Aladdin Manufacturing Corporation | Methods for manufacturing bulked continuous filament from recycled PET |
US10532495B2 (en) | 2012-05-31 | 2020-01-14 | Aladdin Manufacturing Corporation | Methods for manufacturing bulked continuous filament from recycled PET |
US9630353B2 (en) | 2012-05-31 | 2017-04-25 | Mohawk Industries, Inc. | Method of manufacturing bulked continuous filament |
JP6208141B2 (ja) | 2012-09-26 | 2017-10-04 | エドワーズ株式会社 | ロータ、及び、このロータを備えた真空ポンプ |
DE102012110691A1 (de) * | 2012-11-08 | 2014-05-08 | Pfeiffer Vacuum Gmbh | Vorrichtung zur kinetischen Energiespeicherung |
DE102013207269A1 (de) | 2013-04-22 | 2014-10-23 | Pfeiffer Vacuum Gmbh | Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe |
EP3205884B1 (fr) * | 2016-02-12 | 2020-11-11 | Enrichment Technology Company Ltd. Zweigniederlassung Deutschland | Système de rotor à vide auto-pompant |
US10751915B2 (en) | 2016-11-10 | 2020-08-25 | Aladdin Manufacturing Corporation | Polyethylene terephthalate coloring systems and methods |
WO2018140884A1 (fr) | 2017-01-30 | 2018-08-02 | Mohawk Industries, Inc. | Procédés de fabrication d'un filament continu gonflant à partir de pet recyclé coloré |
EP3589473A1 (fr) | 2017-03-03 | 2020-01-08 | Aladdin Manufactuing Corporation | Procédé de fabrication de filament de tapis continu gonflant |
WO2019055762A1 (fr) | 2017-09-15 | 2019-03-21 | Mohawk Industries, Inc. | Procédé et système de coloration de polyéthylène téréphtalate pour fabriquer un filament de tapis continu gonflant |
US11242622B2 (en) | 2018-07-20 | 2022-02-08 | Aladdin Manufacturing Corporation | Bulked continuous carpet filament manufacturing from polytrimethylene terephthalate |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2730297A (en) * | 1950-04-12 | 1956-01-10 | Hartford Nat Bank & Trust Co | High-vacuum molecular pump |
DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
DE2526164A1 (de) * | 1975-06-12 | 1976-12-30 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
JPS61145394A (ja) * | 1984-12-18 | 1986-07-03 | Tokuda Seisakusho Ltd | 分子ポンプ |
JPH0765592B2 (ja) * | 1986-02-22 | 1995-07-19 | 守彦 木俣 | タ−ボ分子ポンプ |
JPS62261696A (ja) * | 1986-05-08 | 1987-11-13 | Mitsubishi Electric Corp | タ−ボ分子ポンプ装置 |
NL8602052A (nl) * | 1986-08-12 | 1988-03-01 | Ultra Centrifuge Nederland Nv | Hoogvacuumpomp. |
JPH046593U (fr) * | 1990-04-25 | 1992-01-21 | ||
DE69016198T2 (de) * | 1990-07-06 | 1995-05-18 | Cit Alcatel | Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit. |
JPH05248386A (ja) * | 1992-03-04 | 1993-09-24 | Osaka Shinku Kiki Seisakusho:Kk | ねじ溝型真空ポンプ |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
GB9525337D0 (en) * | 1995-12-12 | 1996-02-14 | Boc Group Plc | Improvements in vacuum pumps |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
-
1996
- 1996-08-10 DE DE19632375A patent/DE19632375A1/de not_active Withdrawn
-
1997
- 1997-07-10 EP EP97111700A patent/EP0828080A3/fr not_active Withdrawn
- 1997-07-28 JP JP20148797A patent/JP3971821B2/ja not_active Expired - Fee Related
- 1997-08-05 US US08/906,362 patent/US5893702A/en not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
None |
Also Published As
Publication number | Publication date |
---|---|
JPH1077990A (ja) | 1998-03-24 |
EP0828080A3 (fr) | 1998-10-14 |
DE19632375A1 (de) | 1998-02-19 |
US5893702A (en) | 1999-04-13 |
JP3971821B2 (ja) | 2007-09-05 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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AKX | Designation fees paid |
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17Q | First examination report despatched |
Effective date: 20020228 |
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STAA | Information on the status of an ep patent application or granted ep patent |
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18D | Application deemed to be withdrawn |
Effective date: 20020711 |