EP3693610B1 - Pompe à vide moléculaire - Google Patents

Pompe à vide moléculaire Download PDF

Info

Publication number
EP3693610B1
EP3693610B1 EP20153779.2A EP20153779A EP3693610B1 EP 3693610 B1 EP3693610 B1 EP 3693610B1 EP 20153779 A EP20153779 A EP 20153779A EP 3693610 B1 EP3693610 B1 EP 3693610B1
Authority
EP
European Patent Office
Prior art keywords
holweck
intermediate connection
blocking element
pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20153779.2A
Other languages
German (de)
English (en)
Other versions
EP3693610A1 (fr
Inventor
Jan Hofmann
Florian Bader
Maximilian Birkenfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP20153779.2A priority Critical patent/EP3693610B1/fr
Publication of EP3693610A1 publication Critical patent/EP3693610A1/fr
Priority to JP2020178180A priority patent/JP6998439B2/ja
Priority to EP20217527.9A priority patent/EP3851680B1/fr
Priority to JP2021009273A priority patent/JP7252990B2/ja
Application granted granted Critical
Publication of EP3693610B1 publication Critical patent/EP3693610B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the present invention relates to a molecular vacuum pump with at least one molecular pumping stage, namely a Holweck pumping stage, by means of which a gas can be conveyed from an inlet to an outlet of the molecular vacuum pump, the pumping stage having a pumping direction and a passage cross-section transversely to the pumping direction; and with an intermediate connection which is arranged downstream within the pump stage or the pump stage.
  • a molecular vacuum pump with at least one molecular pumping stage, namely a Holweck pumping stage, by means of which a gas can be conveyed from an inlet to an outlet of the molecular vacuum pump, the pumping stage having a pumping direction and a passage cross-section transversely to the pumping direction; and with an intermediate connection which is arranged downstream within the pump stage or the pump stage.
  • a passage cross section is the open area within a pumping stage in cross section measured at a selected point along the pumping direction.
  • the passage cross-section is thus formed in particular by the sum of the openings in the relevant cross-section through which the gas particles to be conveyed can pass.
  • the passage cross section relates in particular to a cross section at a selected point along the rotor axis, the sectional plane running in particular perpendicular to the rotor axis.
  • a molecular vacuum pump according to the preamble of claim 1 is in US Pat WO 2006/048603 A1 disclosed.
  • a molecular vacuum pump with the features according to claim 1, and in particular in that a preferably static blocking element is arranged in front of the intermediate connection in the pumping direction, by means of which the passage cross-section is locally reduced.
  • the pump stage is a Holweck pump stage. Examples are also described below in which a turbo-molecular pumping stage is provided. These are presented because - but not within the scope of the present invention, in addition to the Holweck pump stage defined in claim 1, a turbo-molecular pump stage with an intermediate connection and blocking element can be provided.
  • the blocking element reduces, in a structurally simple manner, a backflow of gas starting from the intermediate connection counter to the pumping direction or into an area upstream of the intermediate connection in the pumping direction, and the pumping action for the gas at the intermediate connection is improved.
  • the blocking element is a static element and / or is arranged on a stator of the pump, since, in particular, due to dynamic forces on the rotor, its structural change would generally be significantly more complex.
  • the invention can thus be implemented by modifying an existing pump without having to change its rotor. In principle, however, a blocking element can also be arranged on the rotor, for example.
  • the blocking element is arranged in particular directly in front of the intermediate connection.
  • the blocking element can have an advantageous conduction effect and / or screen effect for the gas or for the particles and / or give the particles a preferred direction which runs with at least one component in the pumping direction.
  • the blocking element can form a guide and / or diaphragm element, for example.
  • the passage cross section of the pumping stage is defined in particular by one or more stator elements, in the case of a turbo-molecular pumping stage which is not stressed, in particular stator disks, namely in particular one or more stator elements which are arranged upstream of the blocking element in the pumping direction.
  • the pump stage can in principle have a variable passage cross section along its axial extent. The local reduction before the intermediate connection is decisive.
  • the local reduction or downsizing of the passage cross-section is designed in particular in such a way that the compression of the pump stage is locally increased upstream of the intermediate connection.
  • the pumping speed can be locally reduced in this area. At least for certain applications, however, this is justifiable in view of the improved pumping effect for the gas present at the intermediate connection.
  • the invention is particularly suitable for applications where compression is critical and which in particular do not require a particularly high pumping speed at the main inlet, such as, for example, in a leak detector.
  • the passage cross-section is only reduced by the blocking element, but not completely blocked.
  • the blocking element can therefore cover part of the passage cross section, for example. It is therefore still possible to convey gas through the pumping stage past the blocking element and to the next pumping stage.
  • the reduced passage cross-section thus in particular connects the pump stage with the axial region of the intermediate connection and / or with a further pump stage which is arranged downstream of the intermediate connection and / or the pump stage, in particular in series.
  • the intermediate connection can be arranged, for example, in particular axially, within the pump stage between a first section of the pump stage and a second section of the pump stage arranged downstream.
  • the intermediate connection can be arranged downstream of the pump stage, in particular axially, and upstream of a second pump stage, in particular axially, arranged downstream of it.
  • the pump stages or sections of pump stages can therefore generally be connected in series in particular.
  • the pump stages or sections have, in particular, rotors or rotor sections which are arranged on a common rotor shaft.
  • the passage cross section is formed in particular by the open area of a cross section through a rotor of the pump in the area of the pumping stage.
  • a passage cross-section of a turbostator disk is limited, for example radially outward, by a radially outer boundary of the turbostator blades. Inwardly, the passage cross-section is limited by a radially inner delimitation of the turbostator blades, namely by a so-called blade base.
  • the passage cross-section has open sections separated by the blades in the circumferential direction. The same applies to a turbo rotor or a turbo rotor disk.
  • the passage cross-section In the case of a Holweck pump, the passage cross-section is limited to the outside or to the inside by a respective base of several Holweck grooves. In the opposite direction, i.e. inwards or outwards, the passage cross-section is limited by a Holweck rotor.
  • the passage cross-section has open sections separated by webs in the circumferential direction, the webs separating the Holweck grooves.
  • the passage cross-section in a Holweck pumping stage corresponds in particular essentially to the sum of the cross-sections of the Holweck grooves.
  • the passage cross-section through the blocking element can be reduced by at least 20%, in particular at least 30%, in particular based on the cross-sectional area of the passage cross-section of the pumping stage before and / or after the intermediate connection, in the case of an unstressed turbo-molecular pump, in particular an upstream stator disk.
  • An intermediate connection of a multistage molecular pump is also referred to, for example, as an “interstage port” and a molecular pump with such an intermediate connection is also referred to as a “split-flow vacuum pump”.
  • the passage cross section through the blocking element can be locally asymmetrical, in particular with respect to a rotor axis of the pump stage.
  • the blocking element can be arranged in such a way that on a side of a rotor shaft of the pump stage facing the intermediate connection the blocking element blocks a larger proportion of the passage cross-section than on a side of the rotor facing away from the intermediate connection.
  • the blocking element can be arranged on a side of the rotor shaft facing the intermediate connection.
  • the blocking element can only be arranged in a partial angular region with respect to the rotor axis, which is in particular assigned to the intermediate connection.
  • the blocking element can block the passage cross section in particular in an area which lies radially between the rotor axis and the intermediate connection.
  • the arrangement of the blocking element at the intermediate connection causes, in addition to a reduced backflow from the intermediate connection, a reduction in the probability that gas molecules will escape from the upstream pump stage through the intermediate connection.
  • the blocking element is impermeable at least in a circumferential section assigned to the intermediate connection, in particular essentially only in this circumferential section.
  • a region radially opposite the intermediate connection can in particular be free of the blocking element or the passage cross section can be open here.
  • the stator can in particular be designed to be permeable and generally like a “normal” stator.
  • the blocking element can extend over a circumferential area extend, which corresponds at least to the angular range of the intermediate connection and / or at most 180 °.
  • the passage cross section can be completely or, in particular radially, partially blocked by the blocking element.
  • the geometry of the blocking element can, for example, be changeable. Depending on the geometry selected, a different performance can be set with regard to the return flow from the intermediate connection and also with regard to the pumping stage in the pumping direction.
  • the blocking element extends in the radial direction only over part of the passage cross section of the pumping stage, in particular with respect to the adjacent, in particular upstream and / or downstream passage cross section before or after the local reduction.
  • the blocking element can, for example, only extend over a radial part of the passage cross section with less compression than the respective other part.
  • a radial area left free by the blocking element has, in particular, high compression but possibly low suction capacity. The high compression favors a low backflow, otherwise the blocking element also reduces the backflow.
  • the blocking element can cover a radially inner part and / or not cover a radially outer part. For example, a combination with a blocking element or a section of the same blocking element in a different circumferential area extending over the entire radial width is also possible.
  • a turbo-molecular pump stage can be provided in an embodiment not claimed, by means of which a gas can be conveyed from the inlet to the outlet of the molecular vacuum pump, the turbo-molecular pump stage having a pumping direction and a passage cross-section transversely to the pumping direction having; wherein a second intermediate connection is arranged within the turbo-molecular pumping stage or downstream of the turbo-molecular pumping stage, a particularly static, second blocking element, by means of which the passage cross-section is locally reduced, is arranged upstream of the second intermediate connection in the pumping direction.
  • the turbo-molecular pumping stage can for example have one or more turbo rotor disks and / or one or more turbo stator disks.
  • the second intermediate connection can, for example, be arranged downstream of the turbo-molecular pumping stage, in particular a last turbo-stator or turbo-rotor disk in the pumping direction of the turbo-molecular pumping stage.
  • the second intermediate connection can be arranged, for example, at the axial height of a turbo rotor disk or open at such a disk, that is to say can be arranged generally within the turbo-molecular pumping stage.
  • the second blocking element can, for example, be designed as a wall and / or as a continuous surface element and / or extend transversely to the pumping direction. This is a structurally simple option.
  • the second blocking element can in particular extend perpendicularly and / or transversely to the pumping direction and / or to the rotor axis.
  • a surface element or a wall can be arranged, for example, parallel to a delimitation of the second intermediate connection and / or obliquely or perpendicularly with respect to the rotor axis.
  • the second blocking element is designed as part of a turbostator disk.
  • the second blocking element can, for example, be directly connected to a stator disk, in particular a partial stator disk, and / or be axially assigned to such a disk.
  • Axially assigned means that the second blocking element is at least partially arranged in the same axial area as the stator disk or partial stator disk.
  • the second blocking element can replace a section of the turbostator disk facing the second intermediate connection.
  • stator blades can be provided on one side of the rotor shaft, in particular facing away from the second intermediate connection, while the second blocking element and in particular no stator blades are provided on another side of the rotor shaft facing the second intermediate connection.
  • the second blocking element can be designed as a sheet metal.
  • Turbostator disks are often also designed as sheet metal parts and the second blocking element can generally be produced or configured in a manner similar to a turbostator disk, but in particular no separate blades are provided.
  • the second blocking element defines a, in particular radially inner, blade base for some or all of the stator blades of a turbostator disk.
  • a blade base diameter defined by the second blocking element can be greater than the blade base diameter of an upstream rotor and / or stator disk; in particular larger by at least 20%.
  • the second blocking element can, for example, be shell-shaped and / or funnel-shaped, in particular part-ring, part-shell and / or part-funnel-shaped, the term "partial” referring in particular to an angular range around the rotor axis.
  • Such a second blocking element can in particular be arranged between two spaced-apart disk packs and / or pump stages.
  • the pump stage is a Holweck pump stage.
  • the blocking element is designed as a transverse wall in at least one Holwecknut.
  • the blocking element can, for example, be perpendicular to the groove or to the channel, to the pumping direction or to the rotor axis.
  • At least one web which laterally delimits a Holweck groove, has a clearance with respect to the intermediate connection in an area downstream of the intermediate connection in the pumping direction.
  • the web does not extend against the pumping direction as far as the intermediate connection, at least not with its full radial height, but the web end is spaced from it.
  • the clearance facilitates the gas inlet from the intermediate connection into the section of the Holweck pumping stage downstream of the intermediate connection in the pumping direction by providing a better conductance for the gas.
  • At least one web which laterally delimits a Holweck groove, is exposed to the blocking element in an area upstream of the blocking element in the pumping direction. This release enables gas particles to be conveyed to pass along the blocking element from one to the next Holwecknut.
  • the Holweck groove which has the blocking element, is not blocked in the pumping direction in the sense of a dead end, but the pumping action of the Holweck groove in the area upstream of the blocking element can continue to be used, in that the particles pass through the opening into the next Holweck groove and are pumped further there be able.
  • this reduces the probability that a particular particle will pass between the blocking element and the Holweck rotor from the relevant Holweck groove to the intermediate connection, thereby avoiding a cross flow from the main inlet or from the Holweck groove to the intermediate connection.
  • the release connects in particular a blocked groove with one in the direction of rotation of the Holweck rotor's next groove, which can also have a corresponding clearance to the next groove, and so on, until a groove passing through the intermediate connection is reached.
  • the intermediate connection with its delimitation can extend over several Holweck grooves and / or be assigned to several Holweck grooves.
  • the boundary of the intermediate connection is assigned to only one Holweck groove.
  • An assignment is seen in the fact that the intermediate connection opens into the relevant Holweck groove.
  • An intermediate connection is basically formed on the Holweck stator in that the groove base is open there. The groove base of that Holweck groove to which the intermediate connection is assigned is open. If an intermediate connection is assigned multiple times, the opening extends over several Holweck grooves, in the case of a single assignment only within a Holweck groove.
  • the delimitation of the intermediate connection can in particular only be provided within a Holweck groove. In principle, however, it is also conceivable that the delimitation extends into a web area and / or that the web has a lateral recess defining the delimitation.
  • the intermediate connection can, for example, be aligned with at least one delimitation and / or a longitudinal extension parallel to a Holweck groove.
  • the intermediate connection can also be oriented perpendicular and / or parallel to the rotor axis with at least one delimitation.
  • a preferred embodiment provides that the boundary of the intermediate connection is assigned to at least one first Holweck groove and at least one of the next Holweck groove in the direction of rotation of a Holweck rotor is not assigned, a web between the first and the second Holweck groove having a recess that includes the intermediate connection the second Holwecknut connects.
  • the recess can in particular be arranged adjacent to the intermediate connection and / or in the axial region of the intermediate connection.
  • the blocking element can be designed as a transverse wall in the first Holwecknut.
  • the particles can enter the first Holweck groove freely from the intermediate connection in the pumping direction.
  • the blocking element blocks in particular the entry of particles into the first Holweck groove against the pumping direction.
  • the particles can in particular freely enter the second Holweck groove, in particular with at least one movement component in the pumping direction.
  • the first Holweck groove or generally one of the Holweck grooves to which the intermediate connection is assigned with its delimitation can generally preferably be separated from a Holweck groove next to it counter to the direction of rotation of the Holweck rotor, in particular a third Holweck groove, in particular by a web, at least in an axial area of the intermediate connection.
  • several intermediate connections can also be provided on a pump stage or between or on several pump stages, in particular Holweck and / or turbo-molecular pump stages.
  • the pump can have several, in particular different, pump stages which are preferably connected in series.
  • the pump can have, for example, a pumping-active rotor section upstream of the intermediate connection in relation to the pumping direction and a pumping-active rotor section downstream in relation to the pumping direction, wherein in particular both rotor sections can be connected to the same rotor shaft and / or connected in series.
  • the vacuum pump can, for example, have only one rotor shaft, wherein in particular all pump stages and pump stage sections can be driven by the rotor shaft and / or can be connected in series.
  • the intermediate connection can preferably open into an axial region, in particular in a pump housing, via which the pumping stage or the pumping stage section upstream of the intermediate connection is connected in series with a pumping stage or the pumping stage section downstream of the intermediate connection.
  • This axial area can be, for example, an intermediate stage area or an axial area within a pump stage, for example an axial area of a turbo rotor disk.
  • the conveyance of gas can take place in particular over the axial region into which the intermediate connection opens and / or over the intermediate stage region.
  • the blocking element is passed by the gas through the remaining passage cross section in the pumping direction.
  • the blocking element and / or a stator element which is arranged on the intermediate connection and which has the blocking element is produced by means of a generative manufacturing process, in particular 3D printing.
  • a generative manufacturing process in particular 3D printing.
  • Generative manufacturing processes are understood to mean the manufacture or shaping of a component by joining volume elements, such as layers, for example.
  • the generative manufacturing method preferably includes the component being manufactured using at least one of the methods stereolithography, laser melting, laser sintering, selective laser sintering, layer laminate methods, extrusion, fused deposition modeling, laminated object modeling or 3D printing.
  • the turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally.
  • the electronics housing 123 are electrical and / or electronic Components of the vacuum pump 111 housed, for. B. for operating an electric motor 125 arranged in the vacuum pump.
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a barrier gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two attached to and supported by the rotor hub 161 Cylinder jacket-shaped Holweck rotor sleeves 163, 165, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested one inside the other.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 with an outer diameter that increases towards the roller bearing 181 is provided on the rotor shaft 153.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each comprise a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 radially outside and the stator-side ring magnets 197 are arranged radially inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or backup bearing 215 is provided within the magnetic bearing, which runs idle during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the structures on the rotor side with the structures on the stator side under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve better sealing of the motor compartment 217 from the radially outside Holweck pump stages.
  • a vacuum pump 20 is shown, which is designed as a turbo-molecular vacuum pump.
  • the schematic illustration shows a rotor shaft 22 to which a plurality of turbo rotor disks 24 are connected and which, during operation, rotates together with the turbo rotor disks 24 about a rotor axis that is perpendicular here.
  • Turbostator disks 26 are provided between the turbo rotor disks 24. Together they cause a gas to be conveyed along a pumping direction 28 indicated here by an arrow.
  • the vacuum pump 20 comprises an intermediate connection 30, which is indicated here in a simplified manner as an arrow.
  • the intermediate connection 30 is arranged approximately at the axial height of one of the turbo rotor disks 24, that is to say opens into its axial or effective area.
  • turbo stator disks 26 are shown downstream of the intermediate connection 30 in the pumping direction. It goes without saying, however, that turbostator disks 26 can also be provided there.
  • a known stator disk 24 is arranged upstream of the intermediate connection 30 in the pumping direction 28.
  • the pump 20 delivers in the pumping direction 28, it is possible to a certain extent that particles of a gas present at the intermediate connection 30 move against the pumping direction 28 after entering the vacuum pump 20.
  • the particles can also pass through the turbostator disk 26 arranged upstream of the intermediate connection 30 and, in principle, also through further turbo rotor disks 24 and turbostator disks 26. There is thus a certain return flow 32, which is indicated here by an arrow.
  • Fig. 7 shows a spacer ring 34, which can be provided, for example, for mounting two turbostator disks 26 at a distance.
  • the spacer ring 34 has a recess 36 which defines a delimitation for an intermediate inlet, for example the intermediate inlet 30 or one of the intermediate inlets described below.
  • the gas should be pumped out as well as possible from the intermediate connection 30 and / or should not flow back.
  • a structural change to the rotor, in particular the turbo rotor disks 24, can be undesirable. If possible, it should be possible to retain an existing rotor construction.
  • the present approach pursues in particular the approach of increasing the internal compression between the intermediate connection and the main inlet, that is to say the first inlet in the pumping direction, and of making a structural change, in particular on static components.
  • Fig. 8 is a vacuum pump 20 designed as a turbo molecular pump in one of the Fig. 6 Similar representation shown, the reference numerals being used accordingly.
  • a blocking element 38 is provided upstream of the intermediate connection 30 in the pumping direction 28. This is for example as a continuous Surface or wall formed and extends only around a partial angular range of the rotor shaft 22.
  • a turbostator disk 26 is provided in the remaining partial angular region of the relevant axial region.
  • the blocking element 38 prevents a backflow 32, as shown in FIG Fig. 6 is indicated.
  • the movement of the particles is indicated here by an arrow 40.
  • Such particles which initially move counter to the pumping direction 28 from the intermediate connection 30, strike the blocking element 38 and cannot move any further counter to the pumping direction 28.
  • a respective particle After desorption from the blocking element 38, a respective particle has a fundamentally statistically distributed direction of movement, which, however, runs in the pumping direction 28 with at least one component in particular.
  • the blocking element 38 therefore reduces the probability that a particular particle will move in the vacuum pump 20 against the pumping direction 28.
  • the turbo stator disks 26 are axially permeable, that is, in the pumping direction 28, although not in such a way that the particles can fly exactly axially, but in such a way that the gas can be conveyed axially between the positioned stator blades.
  • the turbostator disks 26 thus have a passage cross section.
  • the passage cross-section of the turbostator disks 26 is constant over the axial extent of the only turbomolecular pump stage 41 here, but with the exception of that axial region in which the blocking element 38 is arranged.
  • the blocking element 38 is impermeable and / or closed and therefore reduces the passage cross section of the pumping stage in a locally limited axial area, namely in the pumping direction 28 directly in front of the intermediate connection 30.
  • the blocking element 28 is shown here significantly thicker than the turbo stator disks 26. However, this only serves to distinguish it from each other.
  • the blocking element 38 can, for example, be, in particular thin sheet metal, and in particular even be thinner than the stator disks 26.
  • the vacuum pump 20 of the Fig. 9 has two axially spaced disk packs which form a first turbo-molecular pump stage 42 and a second turbo-molecular pump stage 44. Between the pump stages 42 and 44 there is an intermediate stage region 46 into which the intermediate connection 30 opens. Unlike in Fig. 8 The intermediate connection 30 does not open onto a turbo rotor disk 24, for example, but into a free space between the pump stages 42 and 44 Pumping speed is desired and / or the conductance in the area of the intermediate connection 30 should be large.
  • a blocking element 38 can, for example, be oriented obliquely to the rotor axis or rotor shaft 22 and / or to the pumping direction 28 with respect to a longitudinal section.
  • the blocking element 38 can act as a guide element, in particular it can be designed as a guide plate. In this way, the particles can be guided particularly advantageously in the pumping direction 28.
  • a blocking element 38 for example according to Fig. 8 or Fig. 9 , can be designed, for example, as a partial ring, in particular a half ring, which can be arranged on a side of the rotor axis or rotor shaft 22 facing the intermediate connection 30 and / or can be arranged in an angular region associated with the intermediate connection 30 with respect to the rotor axis.
  • a typical turbostator disk 26 is shown, for example, shown in FIGS Figures 8 and 9 one of the upper two turbostator disks 26 or in Fig. 6 one of the three illustrated turbostator disks 26 can accordingly.
  • the turbostator disk 26 of the Fig. 10 is shown in a top view, with the direction of view runs parallel to the pumping direction and to the rotor axis.
  • the turbostator disk 26 comprises a plurality of turbostator blades 48 distributed over its circumference, between which the particles of the gas to be conveyed can pass.
  • the spaces between the turbostator blades 48 thus form a passage cross-section, but the spaces are not only formed by the free areas between the stator blades 48 that are visible here, but also partially extend below or above the stator blades 48 due to the angle of incidence of the stator blades 48, which is not visible here Stator blades 48.
  • Fig. 11 is one of those who Fig. 10 A similar perspective is chosen, with a turbostator disk 26 being visible, which here only fills a partial angular range. The remaining partial angle range is covered by a blocking element 38. An intermediate connection 30 is indicated, the blocking element 38 being provided upstream of the intermediate connection 30 in the pumping direction. The pumping direction runs towards the viewer here.
  • the blocking element 38 is designed as a continuous surface element, for example as a sheet metal. In this example it forms a partial ring, which here extends, for example, over approximately 180 ° around the rotor axis.
  • the blocking element 38 itself does not have a passage cross section or is embodied in an impermeable manner.
  • the passage cross section of the pump stage is therefore locally reduced in the axial area shown here, namely, by way of example, to that angular area in which the blocking element 38 is not arranged or which the blocking element 38 does not cover.
  • the passage cross-section is here, in particular, locally asymmetrical in relation to the rotor axis.
  • the blocking element blocks on a side of the rotor axis facing the intermediate connection 30 38 a larger proportion of the passage cross section than on a side of the rotor facing away from the intermediate connection 30.
  • the angular area which the blocking element 38 covers is arranged in particular in such a way that the intermediate connection 30 is arranged at least essentially in the middle of the angular area.
  • the blocking element 38 according to Fig. 11 can for example in relation to a longitudinal section according to Fig. 8 or Fig. 9 be trained.
  • the blocking element 38 can be designed, for example, as a flat surface element and / or extend perpendicular to the rotor axis.
  • the blocking element 38 can taper, for example be designed in the form of a part funnel and / or part shell, in particular as a half funnel or half shell.
  • the blocking element 38 can in particular be designed in the form of a partial ring.
  • the blocking element 38 can, for example, simply be a normal turbostator disk, such as that of the Fig. 10 , cover or replace the corresponding cross-sectional area.
  • a partial stator disk 26 is provided, in particular, which is connected in particular to the blocking element 38 and / or is axially assigned to it.
  • FIG. 12 Another approach to reducing the backflow is to use a stator disk in the relevant section, which has a particularly high compression and thus a blocking effect.
  • Fig. 12 the course of the compression for a typical turbostator disk is plotted qualitatively along the radial extent of a respective turbostator blade.
  • the horizontal axis shows the radius R of a radial position and the vertical axis shows the compression K.
  • the curve which is shown here in simplified form as a straight line, illustrates that the compression K is greatest in a radially outer region 49.
  • the radially outer region 49 of a stator disk can be used. Only particles with a very large momentum pass through the rotor disk into this area; it is an area with high compression. In contrast, the radially inner area has a lower compression, in particular because of the lower peripheral speed. It is therefore preferred to allow only a high level of compression by utilizing a specific radial area.
  • a blocking element 38 covers a radially inner region of the rotor blades 48 if it is assumed that the stator disk 26 is otherwise like that of the Fig. 10 is constructed. In principle, however, the stator blades 48 do not have to extend into the radial region of the blocking element 38. Rather, it is intended to illustrate that the blocking element 38 advantageously reduces the passage cross-section locally to a passage cross-section that has a larger internal diameter than the other passage cross-section of the pumping stage or the passage cross-section of an upstream turbo rotor or turbostator disk. In this example, the blocking element 38 thus effectively defines the inside diameter of the passage cross section and the respective blade bases 51 between the turbostator blades 48.
  • This example also reduces a backflow of gas particles from the intermediate connection 30. While in the Figures 8, 9 and 11th a blocking element 38 is arranged in particular "in the path" of the particles in order to reduce backflow, in particular a passage cross-section with low compression is covered or only a passage cross-section with high compression is left, even if it extends directly above the intermediate connection.
  • the high compression itself means that there is a low likelihood of that a particle passes through the passage cross-section against the pumping direction.
  • a region with less compression, namely the radially inner region, would have a relatively high probability of a particle passing through, but is covered by the blocking element 38.
  • the blade bases of the individual turbo rotor and turbo stator disks of a pump stage and / or of a pair of rotor disks and stator disks assigned to one another are typically of comparable diameters.
  • a blade base diameter is therefore essentially the same or similar.
  • the passage cross-sections within a pumping stage are often similar. This is particularly useful so that the discs have approximately the same suction capacity.
  • only the radially outer area 49 of the stator disks can preferably be used. This is exemplified in the Fig. 13 the case. In principle, it is possible for this purpose to use existing stator disks, for example as in FIG Fig.
  • stator disk can be provided, the stator blades of which only extend over the desired radial area.
  • the, in particular effective, blade base diameter of the stator disk upstream of the intermediate connection 30 may differ, preferably significantly, from that of another stator and / or rotor disk, in particular the stator disk and / or rotor disk upstream of this stator disk.
  • a Holweck pumping stage 50 is shown in a simplified manner in such a way that a Holweck stator 52 is conceptually developed and shown as a flat surface.
  • the Holweck stator 52 comprises a plurality of Holweck grooves 54 which are laterally delimited and separated from one another by webs 56.
  • a Holweck rotor (not shown here, in particular a Holweck sleeve) rotates relative to the Holweck stator 52 with a direction of rotation 58 indicated by an arrow.
  • the Holweck rotor moves thus with this idealized view from right to left across the stator 52. This produces a pumping effect along a pumping direction 28.
  • An intermediate connection 30 is provided within the Holweck pump stage 50, which is designed as a recess, in particular as a milled elongated hole, in the Holweck stator 52.
  • the intermediate connection 30 is arranged downstream of a first section of the Holweck pumping stage 50 in the pumping direction 28 and upstream of a second section of the pumping stage 50 in the pumping direction 28.
  • the Holweck pumping stage 50 effects a delivery of gas along the pumping direction 28, a movement of gas particles starting from the intermediate connection 30 into the first section of the Holweck pumping stage 50 and thus against the pumping direction 28 is fundamentally possible.
  • the pumping stage 50 of the Fig. 14 thus points - similar to that of the Fig. 6 - The risk of a backflow 32, which should be avoided.
  • the Holweck pump stage 50 has the Fig. 15 a blocking element 38. Otherwise, the elements shown in a similar manner are constructed accordingly with the same reference numerals.
  • the pumping direction 28 and the direction of rotation 58 run according to the arrows in FIG Fig. 14 .
  • the blocking element 38 is designed here as a transverse wall which blocks several Holweck grooves 54, namely those to which the intermediate connection 30 is assigned with its delimitation. Particle movement starting from the intermediate connection 30 counter to the pumping direction 28 and into the sections of the Holweck grooves 54 upstream of the intermediate connection 30 is thus effectively restricted.
  • the blocking element 38 can be designed, for example, as a horizontal web and / or those directly adjacent to the intermediate connection 30 Shut off Holweck grooves 54 opposite the intermediate connection.
  • the blocking element 38 significantly reduces the likelihood of particles flowing back directly from the intermediate connection 30 against the pumping direction 28.
  • a turbo-molecular pump stage can be provided upstream of a Holweck pump stage 50.
  • the blocking element 38 in the Holweck pump stage 50 thus reduces the risk of a backflow to the turbo molecular pump stage.
  • One of the effects is, for example, an increase in the pressure ratio between the intermediate connection and the connection or port that is next opposite to the pumping direction 28.
  • This can, for example, be an intermediate connection on or after a turbo-molecular pump stage or, in principle, also a main inlet.
  • a passage cross section of the pump stage 50 is formed for a given axial area by the sum of the cross sections of the Holweck grooves 54. Some of the Holweck grooves 54 or their cross sections are blocked by the blocking element 38. The other Holweck grooves 54, however, remain open.
  • Figures 14 to 16 show the unwound Holweck stator 52 in particular only partially and that further Holweck grooves 54 and webs 56 are preferably provided. Rather, the illustrations concentrate on the area of the intermediate connection 30, which, however, in particular does not have to extend around almost the entire Holweck stator 52.
  • the blocking element 38 blocks the passage cross section, in particular in an angular region associated with the intermediate connection 30 with respect to the rotor axis.
  • the intermediate connection 30 is aligned with at least one of its delimitations and with its longitudinal extension perpendicular to the rotor axis. Also other orientations, for example perpendicular to the webs 56 are possible.
  • the Holweck webs in particular are specifically removed directly below the intermediate connection.
  • the pumping speed to be achieved there is increased in that the inflow area into the section of the Holweck pump stage 50 downstream of the intermediate connection is increased.
  • the webs 56 also have a clearance 62 with respect to the blocking element 38 in an area upstream of the blocking element 38.
  • the webs 56 therefore do not extend in the pumping direction 28 to the blocking element 38 or end at a certain distance therefrom.
  • the clearances 62 form a connection between a Holweck groove 54 blocked by the blocking element 38 and a Holweck groove 54 which is next in the direction of rotation 58 of the Holweck rotor 52.
  • the blocking element 38 extends here over several Holweck grooves 54 and so many clearances 62 are provided that all Holweck grooves 54 blocked by the blocking element 38 are connected to an unblocked or free Holweck groove 54.
  • the blocking element 38, the clearances in the area 60 and the clearances 62 lead to a particularly strong reduction in the return flow from the intermediate connection 30 in the direction of the high vacuum side, i.e. against the pumping direction 28, with a simultaneous increase in the pumping speed at the intermediate connection 30.
  • Fig. 16 shows a further embodiment of a Holweck pumping stage 50 with several Holweck grooves 54 which are laterally limited or separated by webs 56.
  • the pumping direction 28 and the direction of rotation 58 of the Holweck rotor, not shown here, are indicated by arrows and run according to the Figures 14 and 15 .
  • the embodiment of the Fig. 16 comprises two intermediate connections 30, which are arranged and designed similarly, which is why the following explanations are limited to the left one of the intermediate connections 30 shown here. It goes without saying, however, that in principle one or more such intermediate connections 30 can be provided and the number selected here is an example.
  • the intermediate connection 30 is assigned to only one Holweck groove 54. Its delimitation therefore does not extend over several Holweck grooves 54.
  • the intermediate connection 30 is advantageously arranged with its delimitation essentially parallel to this Holweck groove 54.
  • a blocking element 38 is provided, which prevents a backflow along the relevant Holweck groove 54 restricts.
  • the Holweck groove 54 in question is connected to the next Holweck groove 54 in the direction of rotation 58 via an opening 62 of a web 56 laterally delimiting the groove 54, so that gas particles from the Holweck groove 54, which is blocked by the blocking element 38 and to which the intermediate connection 30 is assigned, are not get into a dead end, but are pumped out through the next Holwecknut 54.
  • the movement of the gas particles is indicated here schematically by dotted arrows.
  • the particles can flow, on the one hand, into a section of the Holweck groove 54 downstream of the intermediate connection 30, to which the intermediate connection 30 is assigned.
  • the web 56 which is arranged between the relevant Holweck groove 54 and the next Holweck groove 54 in the direction of rotation 58, has a recess 64 which connects the Holweck grooves 54 to one another.
  • a respective particle can also get from the intermediate connection 30 into the Holweck groove 54 which is next in the direction of rotation 58.
  • the intermediate connection 30 is thus opposed to a low conductance, so that a flow of gas into the Holweck pump stage 50 is facilitated.
  • the aim is in particular to reduce the probability of entry and again immediate exit through the same intermediate connection 30.
  • the particles move either directly into the associated Holweck groove 54 or through the preferred direction after hitting the Holweck sleeve into the neighboring Holweck groove 54.
  • the blocking element 38 prevents a particle from being transported in the direction of the high vacuum side.
  • the exposure 62 advantageously serves to ensure that particles from the Holweck groove 54 blocked by the blocking element 38 get into the neighboring Holweck groove 54, and that the conveyance in the pumping direction can thus be maintained.
  • the Holweck stators 52 of Fig. 15 and 16 have a very complex geometry and can therefore preferably be produced in a particularly simple manner by means of 3D printing or generally by a generative manufacturing process.
  • the other stators and / or blocking elements presented here can also be produced by means of a generative process, such as, for example, 3D printing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (8)

  1. Pompe à vide moléculaire (20) comprenant
    au moins un étage de pompe moléculaire (50), à savoir un étage de pompe Holweck, au moyen duquel un gaz peut être transporté d'une entrée à une sortie de la pompe à vide moléculaire (20), l'étage de pompe (50) ayant une direction de pompage (28) et une section transversale de passage transversalement à la direction de pompage (28) ; et
    un raccord intermédiaire (30) disposé à l'intérieur de l'étage de pompe (50) ou en aval de l'étage de pompe, un élément de blocage (38), en particulier statique, étant disposé en amont du raccord intermédiaire (30) dans la direction de pompage (28) et réduisant localement la section transversale de passage,
    caractérisée en ce que
    l'élément de blocage (38) est réalisé sous forme de paroi transversale dans au moins une rainure Holweck (54).
  2. Pompe à vide moléculaire (20) selon la revendication 1,
    dans laquelle l'élément de blocage (38) est disposé sur un côté d'un arbre de rotor (22) de l'étage de pompe tourné vers le raccord intermédiaire (30) ; et/ou
    la géométrie de l'élément de blocage (38) est variable.
  3. Pompe à vide moléculaire (20) selon l'une au moins des revendications précédentes,
    dans laquelle l'élément de blocage (38) s'étend en direction radiale uniquement sur une partie de la section transversale de passage de l'étage de pompe.
  4. Pompe à vide moléculaire (20) selon l'une au moins des revendications précédentes,
    dans laquelle au moins une barrette (56), qui délimite latéralement une rainure Holweck (54) et/ou qui sépare des rainures Holweck (54) voisines les unes des autres, présente un dégagement par rapport au raccord intermédiaire (30) dans une zone (60) disposée en aval du raccord intermédiaire (30) dans la direction de pompage (28).
  5. Pompe à vide moléculaire (20) selon l'une au moins des revendications précédentes,
    dans laquelle au moins une barrette (56), qui délimite latéralement une rainure Holweck (54) et/ou qui sépare des rainures Holweck (54) voisines les unes des autres, présente un dégagement (62) par rapport à l'élément de blocage (38) dans une zone disposée en amont de l'élément de blocage (38) dans la direction de pompage (28).
  6. Pompe à vide moléculaire (20) selon l'une au moins des revendications précédentes,
    dans laquelle le raccord intermédiaire (30) est associé, avec sa délimitation, à une seule rainure Holweck (54) ;
    et/ou le raccord intermédiaire (30) est orienté, avec au moins une délimitation et/ou avec une extension longitudinale, au moins sensiblement parallèlement à une rainure Holweck (54).
  7. Pompe à vide moléculaire (20) selon l'une au moins des revendications précédentes,
    dans laquelle le raccord intermédiaire (30) est associé, avec sa délimitation, à au moins une première rainure Holweck (54) et n'est pas associé à au moins une deuxième rainure Holweck (54) suivante dans le sens de rotation d'un rotor Holweck, et une barrette (56) entre la première et la deuxième rainure Holweck présente un évidement qui relie le raccord intermédiaire (30) à la deuxième rainure Holweck (54).
  8. Pompe à vide moléculaire (20) selon l'une au moins des revendications précédentes,
    dans laquelle l'élément de blocage (38) et/ou un élément de stator (52) disposé au niveau du raccord intermédiaire (30) et comprenant l'élément de blocage (38) est réalisé par un procédé de fabrication additive, en particulier une impression 3D.
EP20153779.2A 2020-01-27 2020-01-27 Pompe à vide moléculaire Active EP3693610B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP20153779.2A EP3693610B1 (fr) 2020-01-27 2020-01-27 Pompe à vide moléculaire
JP2020178180A JP6998439B2 (ja) 2020-01-27 2020-10-23 分子真空ポンプ
EP20217527.9A EP3851680B1 (fr) 2020-01-27 2020-12-29 Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe
JP2021009273A JP7252990B2 (ja) 2020-01-27 2021-01-25 分子真空ポンプ及び分子真空ポンプの排気速度に影響を及ぼす方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20153779.2A EP3693610B1 (fr) 2020-01-27 2020-01-27 Pompe à vide moléculaire

Publications (2)

Publication Number Publication Date
EP3693610A1 EP3693610A1 (fr) 2020-08-12
EP3693610B1 true EP3693610B1 (fr) 2021-12-22

Family

ID=69326364

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20153779.2A Active EP3693610B1 (fr) 2020-01-27 2020-01-27 Pompe à vide moléculaire
EP20217527.9A Active EP3851680B1 (fr) 2020-01-27 2020-12-29 Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP20217527.9A Active EP3851680B1 (fr) 2020-01-27 2020-12-29 Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe

Country Status (2)

Country Link
EP (2) EP3693610B1 (fr)
JP (2) JP6998439B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3693610B1 (fr) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2657164B1 (fr) * 1990-01-16 1992-04-03 Cit Alcatel Installation de detection de fuite a pompe holweck a prise intermediaire.
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JPH11211604A (ja) * 1998-01-22 1999-08-06 Osaka Vacuum Ltd ヘリウムリークデテクタ
DE60101898T2 (de) * 2001-03-15 2004-11-18 Varian S.P.A., Leini Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
CN102889219B (zh) 2011-07-18 2016-05-11 李晨 盘式分子泵
DE202013010204U1 (de) * 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP3085963B1 (fr) * 2015-04-20 2019-09-04 Pfeiffer Vacuum Gmbh Pompe à vide
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique
EP3693610B1 (fr) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

Also Published As

Publication number Publication date
EP3851680A1 (fr) 2021-07-21
EP3851680B1 (fr) 2023-09-13
JP7252990B2 (ja) 2023-04-05
JP6998439B2 (ja) 2022-01-18
EP3693610A1 (fr) 2020-08-12
JP2021116806A (ja) 2021-08-10
JP2021116814A (ja) 2021-08-10

Similar Documents

Publication Publication Date Title
EP2829734B1 (fr) Pompe à vide
EP2826999B1 (fr) Pompe à vide
EP3657021B1 (fr) Pompe à vide
EP2933497B1 (fr) Pompe à vide
EP3693610B1 (fr) Pompe à vide moléculaire
EP3608545B1 (fr) Pompe à vide
EP3734078B1 (fr) Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe
EP4108932A1 (fr) Reciate et pompe à vide élevé
EP3196471B1 (fr) Pompe a vide
EP3683447B1 (fr) Pompe à vide
EP3135932B1 (fr) Pompe à vide et palier à aimant permanent
EP3267040B1 (fr) Pompe turbomoléculaire
DE102015113821A1 (de) Vakuumpumpe
EP3327293B1 (fr) Pompe à vide avec une pluralté d'entrées
EP3767109B1 (fr) Système à vide
EP4194700A1 (fr) Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable
EP3564538B1 (fr) Système à vide et procédé de fabrication d'un tel système à vide
EP3628883B1 (fr) Pompe à vide
EP3845764B1 (fr) Pompe à vide et système de pompe à vide
EP4293232A1 (fr) Pompe
EP4273405A1 (fr) Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable
EP3462036B1 (fr) Pompe à vide turbomoléculaire
EP4155549A1 (fr) Pompe à vide à capacité d'aspiration améliorée de l'étage de pompage holweck
EP4379216A1 (fr) Pompe à vide turbomoléculaire compacte
EP4390144A2 (fr) Pompe à vide

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20210203

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20210324

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20210812

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502020000455

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1457257

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220115

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220322

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220322

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220323

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220422

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502020000455

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220422

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20220131

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220127

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

26N No opposition filed

Effective date: 20220923

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220127

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230131

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211222

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240326

Year of fee payment: 5

Ref country code: CZ

Payment date: 20240119

Year of fee payment: 5

Ref country code: GB

Payment date: 20240123

Year of fee payment: 5

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20200127

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240129

Year of fee payment: 5