EP2039941B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2039941B1
EP2039941B1 EP08016073.2A EP08016073A EP2039941B1 EP 2039941 B1 EP2039941 B1 EP 2039941B1 EP 08016073 A EP08016073 A EP 08016073A EP 2039941 B1 EP2039941 B1 EP 2039941B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
rotor
vacuum
gas
gas path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP08016073.2A
Other languages
German (de)
English (en)
Other versions
EP2039941A3 (fr
EP2039941A2 (fr
Inventor
Andreas Zipp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2039941A2 publication Critical patent/EP2039941A2/fr
Publication of EP2039941A3 publication Critical patent/EP2039941A3/fr
Application granted granted Critical
Publication of EP2039941B1 publication Critical patent/EP2039941B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump with gas inlet and fast-rotating rotor, which is connectable to a provided with a plurality of separated by a partition suction port flange of a multi-chamber vacuum system.
  • multiple vacuum chambers are arranged in series and interconnected by low conductance holes. From one end of the row to the other, the gas pressure within the vacuum chambers decreases. The holes are designed so that a particle beam can pass through them and thus through the row of vacuum chambers.
  • the vacuum chamber with the lowest pressure often contains an analyzer, such as a mass spectrometer.
  • a first common way is to provide each vacuum chamber with its own flange. At this then a suitable for the pressure range vacuum pump is connected. This approach is unpopular due to the high cost of the plurality of vacuum pumps. There is also a need for compact devices. However, these can not be realized with a large number of vacuum pumps.
  • a turbomolecular pump has a plurality of suction ports, each of which is connected to one of the vacuum chambers.
  • the suction ports deliver gas to various axially spaced locations of the rotor.
  • Along the rotor axis are several so-called rotor-stator packages arranged, each compressing gas.
  • a high vacuum side rotor-stator pack creates a pressure ratio between its inlet and outlet.
  • the inlet is connected to a first vacuum chamber.
  • the outlet is connected to the inlet of the next rotor-stator pack.
  • this area is connected between two rotor-stator packages with a second vacuum chamber.
  • the WO 2006/000745 A1 discloses a vacuum pump according to the preamble of claim 1. Further prior art is made GB 2 360 066 A . DE 600 02 966 T2 .
  • the present invention has for its object to provide a vacuum pump for connection to a multi-chamber vacuum system, which is in a simple structure in a position to maintain a pressure difference between at least two chambers. This object is achieved by a vacuum pump with the features of the first claim.
  • the further claims represent advantageous developments.
  • a gas path separating structure disposed in the gas inlet, dividing it into suction regions, and configured to seal the chambers together with the partition wall makes it possible to control the suction capacity of the gas inlet at the gas inlet Divide vacuum pump on two or more chambers.
  • the gas path separation structure ensures due to their Arrangement in the gas inlet for the substantial suppression of the interaction of the chambers. This is achieved by suppressing flows between the suction regions through the gas path separation structure. Together with the sealing effect is made possible to achieve different pressures in the chambers.
  • sealing in this context means that the amount of gas passing between the dividing wall and the gas path separating structure is so small that the pressure difference between the chambers can be maintained.
  • the gas path separating structure is designed such that it supports at least a part of one of the bearings rotatably supporting the fast-rotating rotor of the vacuum pump.
  • This part includes, for example, a permanent magnet ring or the outer ring of a ball bearing.
  • the bearing is arranged on the high-vacuum-side shaft end, which has rotor dynamic advantages. These can be exploited without the expense of additional components, costs and space required.
  • blades are arranged in a suction area. These reduce the return flow from the vacuum pump into the chamber. As a result, a larger pressure difference can be established between the chambers.
  • the arrangement of standing blades in the gas inlet in the gas flow direction in front of the first rotor disk can be further improved by providing an entire stator disk. This approach is very unusual and has not yet been taken because the pump's pumping speed has been degraded by the conductivity of the disk. However, it has been found that this conductance leads to an improvement in the pressure ratio between the chambers.
  • the sealant can be further developed by enclosing a whole intake area. As a result, the intake areas are separated from each other.
  • a simple embodiment of the sealing means comprises a groove in which a sealing ring is arranged. This sealing ring leads to a reduced transmission of vibrations between the partition and Gaswegtrenn Modell.
  • the sealing of the suction regions against each other can be improved, in which the gas path separating structure is formed integrally with the housing of the vacuum pump. At the same time, this increases the mechanical stability.
  • the gas inlet designates the space between the flange opening and the first rotating pump-active components following in the gas flow direction.
  • turbomolecular vacuum pumps in short: turbopumps.
  • the invention is also applicable to other molecular pumping principles.
  • FIGS. 1 and 2 serve to explain a first embodiment.
  • a multi-chamber vacuum system 101 is equipped with a first chamber 102 and a second chamber 103, which are separated by a partition 106 from each other.
  • a particle beam can pass from the first into the second chamber through a bore 110.
  • the chambers are evacuated to different pressures.
  • the multi-chamber vacuum system has a flange 118 to which a vacuum pump 100 is releasably attached. The partition wall is pulled into the flange and thus divides the flange surface.
  • the vacuum pump in turn has a flange 120 which contacts the flange of the chamber. Fasteners, such as screws 119, releasably connect the flanges together.
  • the vacuum pump of this embodiment is designed as a turbomolecular pump.
  • a rotor 124 has blades 122 which are arranged in several planes, each extending radially along the circumference. Stator vanes 123 are provided on the stator side between these planes. These stator-side planes are spaced apart by spacers 121.
  • the flange-side end of the rotor is supported by a passive magnetic bearing. This has permanent magnets which are attached to Lagerstator 125 and bearing rotor 126.
  • the bearing stator is supported by a center plate 129, which in turn is fixed by webs 127 and 129 in the gas inlet. Webs and center plate together form the gas path separation structure, which divides the gas inlet in this case into two intake areas. These suction areas are each in communication with one of the chambers.
  • FIG. 2 A view in the conveying direction on the flange 120 of the vacuum pump shows FIG. 2 , For clarity of illustration, only the components in the gas inlet of the vacuum pump are shown within the flange opening. The actually visible rotor and stator components have been omitted.
  • the center plate 129 is fixed by three webs 127, 128 and 133 in the gas inlet.
  • the center plate 129 forms together with the webs 133 and 127, the gas path separation structure, wherein the webs 127 and 133 are in contact over their entire length with the partition of the multi-chamber vacuum system in contact. You divide that Gas inlet and create in the case shown two suction areas 140 and 141. To better seal these suction against each other runs an inner seal 131 to the suction 140.
  • This seal is designed as a sealing ring, which is inserted into a groove. Within the suction area 140 there are blades 134 which suppress the back flow of gas from the vacuum pump into the chamber.
  • the inner seal 131 reduces the transmission of vibrations from the partition wall to the gas path separation structure or vice versa.
  • the area ratio of the suction ranges is determined. This ratio affects the ratio of the pumping speeds, which reach both intake areas respectively.
  • FIG. 3 shows the partial section through a multi-chamber vacuum system 201 to which a vacuum pump 200 is detachably connected.
  • the connection is achieved via a chamber-side flange 218 and a pump-side flange 220, wherein the flanges are held by screws 219 in position to each other.
  • a first chamber 202 and a second chamber 203 are arranged, which are separated by a partition 206 from each other.
  • a bore 210 allows the guidance of a particle beam from the first to the second chamber or vice versa.
  • the partition is pulled into the flange 218.
  • the vacuum pump 200 has a high-speed rotor 224. This has blades 222 which are arranged in a plurality of planes each radially extending along the circumference.
  • Stator blades 223 are provided on the stator side between these planes. These stator-side planes are spaced apart by spacers 221.
  • the rotor may be cantilevered or bell-shaped in a known manner. As a result, no storage is necessary at the vacuum end.
  • the gas path separation structure in this example includes a paddle-bearing stator disk 234 disposed in the gas inlet. Between the chambers 202 and 203 and the first blade plane of the rotor 224 is thus contrary to the general teaching of the prior art, a quiescent pump-active element. Furthermore, the gas path separating structure comprises a middle plate 229 and two webs not shown in this figure. Middle disk and webs are in touching contact with the partition 206.
  • FIG. 4 A view in the conveying direction on the flange of the vacuum pump shows FIG. 4 ,
  • the center disk 229 is held in position by a first web 227 and a second web 228.
  • These three aforementioned elements are in touching contact with the partition 206 over their entire length, thereby effecting separation of the chambers from each other.
  • the three elements divide the gas inlet into two suction regions 240 and 241, each in gas flow communication with a chamber.
  • a stator is arranged, which has blades 235. Both intake areas are enclosed by a seal 232. This seal is designed as a lying in a groove sealing ring.
  • the flange 220 has distributed over the circumference holes through which screws, bolts, or the like can be passed as a connecting means.
  • the dividing wall 106 or 206 of the multi-chamber vacuum system is drawn into the flange 118 or 218.
  • the Gaswegtrenn minimalist can be designed so that it protrudes so far into the flange 118 and 218, that it comes into contact with the partition wall 106 and 206 in contact.
  • the area ratio of the suction areas is set. This ratio affects the ratio of the pumping speeds, which reach both intake areas respectively.
  • the FIG. 5 serves to explain a third embodiment.
  • the multi-chamber vacuum system 301 includes first to fourth chambers 302, 303, 304, and 305 with the gas pressure increasing in this order.
  • the chambers are separated by partitions, with holes connect.
  • these holes are arranged and dimensioned so that a particle beam can pass through all the chambers.
  • the first partition wall 306 separates the first 302 and second 303 chambers from one another, while the second partition wall 307 separates third 304 and fourth 305 chambers from each other.
  • the example shows how the invention can be applied to such a multi-chamber vacuum system, which saves considerable costs and construction volume. Dashed arrows illustrate the gas flow.
  • the vacuum pump of the third embodiment has two rotor-stator packages.
  • the spacer rings 321, rotor blades 322 and stator blades 323 form a high-vacuum-side rotor-stator packet 328.
  • An intermediate-vacuum-side rotor-stator packet 329 is formed from spacer rings 325, rotor blades 326 and stator blades 327.
  • the blades in both packages are, as known in the art, both stator and Rotor side attached to support rings or integrally formed with this.
  • a first gas inlet 350 is located in front of the high-vacuum-side rotor-stator package, and a second gas inlet 351 is located in front of the fore-vacuum-side rotor-stator package.
  • a first gas path separation structure 330 is arranged and divides it into two intake regions.
  • the gas path separating structure contacts the first partition wall 306.
  • Each suction region communicates with only one of the chambers 302 and 303, so that the pumping action of the first rotor-stator packet causes the evacuation of both chambers.
  • the gas passage 335 in the gas path separation structure 330 communicates a portion of the first rotor disk of the first rotor-stator pack into communication with the first chamber 302. The size of the passage determines the conductance and thereby affects the effective pumping rate present at the chamber.
  • a second gas path separating structure 331 is arranged in the second gas inlet 351. This has a shaft passage whose free opening is so large that at maximum radial deflection of the rotor takes place no contact.
  • the second gas path separation structure is in touching contact with the second partition wall 307.
  • a gas passage 336 brings a portion of the first rotor disk of the second rotor-stator package in communication with the third chamber 303. The size of the passage determines the conductance and thus affects the at the Chamber pending effective suction.
  • the invention makes it possible to use a vacuum pump with two rotor-stator packages for evacuating a multi-chamber vacuum system with four chambers.
  • fewer components are required, in particular fewer rotor-stator packages, than in the prior art. This means a shortening of the shaft over the prior art, which simplifies the mechanical design.
  • FIGS. 6 to 9 serve to explain the design of the partition and Gaswegtrenn Modell which causes a seal of the chambers.
  • Gaswegtrenn Quilt 60 and partition 61 are in touching contact. Since metals and metal alloys are usually used as the material, it is a metallic, contacting contact. The amount of gas which can pass through this contact point from one side of the assembly to the other is small. It can be further reduced by one or more steps 65, which produce a labyrinth-like course of the contact point.
  • FIG. 7 is provided between the gas path separating structure 70 and the partition wall 71, a sealing ring 72 which is arranged in a groove 73.
  • the groove may be in the gas path separating structure, in the partition or in both.
  • a gap 74 is formed between the partition wall and the gas path separation structure.
  • the seal is effected by the sealing ring, which is designed for example as an elastomeric ring.
  • the elastomer ring has an advantageous vibration damping effect. The transmission of vibrations between Gaswegtrenn Vietnamese and partition is reduced. Such vibrations arise for example in the vacuum pump by the rapid rotation of the rotor.
  • FIG. 8 For example, a configuration of gas path separation structure 80 and partition 81 is shown in which there is no contact between the two. Gas separation structure and partition are arranged at a small distance from each other, for example, a tenth of a millimeter. In this way, a sealing gap 84 is formed with the gap width S.
  • the gap width is dimensioned so that in the pressure range to be considered, the gas flow through the gap is so small that the pressure difference between the chambers can be maintained.
  • the gas flow can be reduced by a step 85, whereby several stages can be provided.
  • the seal means in this example that the gas flow through the arrangement of Gaswegtrenn Modell and partition although different from zero but is tolerable small. A design as described in this example is advantageous when a very low vibration transmission is required.
  • FIG. 9 applies to the same sealing as in the example of FIG. 8 .
  • a gap 94 is provided with the gap S '.
  • the design of the gas path separation structure is adjusted by fitting an edge 96 on one side of the partition wall one piece at a time.
  • the gap is dimensioned such that the gas flow therethrough is small enough to maintain the pressure difference between the chambers surrounds.
  • Such a design can be used when a vacuum pump to be connected to an existing multi-chamber vacuum system and a change of the partition is not possible.
  • Such an edge is also in the design examples after the FIGS. 6 to 8 applicable.
  • FIG. 10 finally shows an example for the design of the transition from a Gaswegtrenn Modell 10 to a partition wall 11, which is used in high tightness requirements.
  • a ring 14 of soft metal, such as copper, is provided between the gas path separating structure and the partition wall.
  • a cutting edge 15 is provided so that it is pressed into the ring after connecting the vacuum pump with the multi-chamber vacuum system.
  • the partition has a cutting edge 16, which is also pressed into the ring. In this way gas flows between the intake areas can be greatly reduced. They are so small that the arrangement can be used in the ultra-high vacuum range.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (7)

  1. Pompe à vide (100) comportant une entrée de gaz et un rotor tournant rapidement (124), pompe qui est susceptible d'être reliée à une bride (108) d'un système à vide à plusieurs chambres, bride qui est pourvue de plusieurs ouvertures d'aspiration séparées par une cloison de séparation (106),
    dans laquelle, dans l'entrée de gaz, il est prévu une structure (127, 128, 129) séparant le trajet de gaz, qui le subdivise en zones d'aspiration (14) et qui est conçue de manière à assurer conjointement avec la cloison de séparation (106) un étanchement des chambres (102, 103), caractérisée en ce que
    au moins une partie de l'un des paliers (125, 126) soutenant avec faculté de rotation le rotor (124) est montée dans la structure (127, 128, 129) séparant le trajet de gaz.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    des aubes (135, 235) sont prévues dans une zone d'aspiration (140, 141, 240, 241).
  3. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    la structure (127, 128, 129) séparant le trajet de gaz comprend un disque stator (134, 234) comprenant des aubes (135, 235).
  4. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    la structure (60, 70, 80, 90, 10) séparant le de trajet de gaz comprend un moyen d'étanchéité côté bride (65, 72, 14, S, S').
  5. Pompe à vide selon la revendication 4,
    caractérisée en ce que
    le moyen d'étanchéité (65, 72, 14, S, S') enferme une zone d'aspiration (140, 240).
  6. Pompe à vide selon la revendication 4 ou 5,
    caractérisée en ce que
    le moyen d'étanchéité comprend une rainure (73) dans laquelle est agencée une bague d'étanchéité (72, 131).
  7. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    la structure (127, 128, 129) séparant le trajet de gaz est réalisée d'un seul tenant avec le boîtier de la pompe à vide (100).
EP08016073.2A 2007-09-20 2008-09-12 Pompe à vide Active EP2039941B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007044945A DE102007044945A1 (de) 2007-09-20 2007-09-20 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2039941A2 EP2039941A2 (fr) 2009-03-25
EP2039941A3 EP2039941A3 (fr) 2016-06-01
EP2039941B1 true EP2039941B1 (fr) 2017-11-08

Family

ID=40019211

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08016073.2A Active EP2039941B1 (fr) 2007-09-20 2008-09-12 Pompe à vide

Country Status (3)

Country Link
US (1) US8070418B2 (fr)
EP (1) EP2039941B1 (fr)
DE (1) DE102007044945A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5315100B2 (ja) * 2009-03-18 2013-10-16 株式会社ニューフレアテクノロジー 描画装置
JP6113071B2 (ja) * 2011-06-03 2017-04-12 エドワーズ株式会社 真空ポンプ
DE102014117487B4 (de) * 2014-11-28 2024-06-20 VON ARDENNE Asset GmbH & Co. KG Vakuumpumpenanordnung und Vakuumkammeranordnung
EP3112688B2 (fr) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
EP3693610B1 (fr) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2337226A1 (de) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
GB2360066A (en) * 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE102007044945A1 (de) 2009-04-09
EP2039941A3 (fr) 2016-06-01
US20090092484A1 (en) 2009-04-09
EP2039941A2 (fr) 2009-03-25
US8070418B2 (en) 2011-12-06

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