EP0260733A1 - Pompe sous vide élevé - Google Patents
Pompe sous vide élevé Download PDFInfo
- Publication number
- EP0260733A1 EP0260733A1 EP87201531A EP87201531A EP0260733A1 EP 0260733 A1 EP0260733 A1 EP 0260733A1 EP 87201531 A EP87201531 A EP 87201531A EP 87201531 A EP87201531 A EP 87201531A EP 0260733 A1 EP0260733 A1 EP 0260733A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- stator
- pipes
- pump
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Definitions
- the invention relates to a high-vacuum pump comprising a rotor arranged for high-speed rotation around a longitudinal axis , and a stator disposed coaxially with said rotor, said rotor and said stator having opposing surfaces spaced a short distance apart, at least a portion of one of which surfaces is provided with a vertical or spiral-shaped groove.
- a pump of this kind is known from Netherlands patent application 8105614.
- the inner wall of the stator casing is provided with a spiral-shaped groove.
- the rotor is dimensioned so that there is a relatively narrow gap between the outer wall of the rotor and the inner wall of the stator casing.
- the volume of the pump should be large, if at least a reasonable performance of the pump is required.
- the pumping speed is not very high, and the compression ratio, that is to say, the ratio between the pre-vacuum pressure and the high-vacuum pressure (measured at the same moment) is relatively low.
- a high rotary speed of the rotor should be maintained.'0wing to the size of the rotor, this leads to a very high velocity of the outer surface of the rotor, and hence to substantial mechanical stresses.
- a relatively low pre-pressure is required, which means that starting is only possible after the pressure in the entire system has, in one way or another, already been decreased to a given low value.
- the object contemplated is achieved,according to the invention, with a pump in which the rotor and the stator are each built up, through part of their length, of one of more coaxial sleeves or pipes of different diameter and having one free end, the systems of rotor pipes and stator sleeves being mutually oppositely directed and fittingly disposed one within the other, so that a pipe of the system of rotor pipes is disposed between two pipes or between a pipe and the wall of the system of stator sleeves, and at least one of each pair of closely-spaced opposing surfaces of stator pipe or wall and rotor pipe or wall is provided with a helical or spiral-shaped groove.
- the pump according to the invention comprises at least three pairs of opposing surfaces, at least one of which is provided with a helical or spiral-shaped groove.
- the prior pump needs a larger height - (about twice the length of the coaxial sleeve more).
- the pump according to the invention can thus be constructed in more compact form.
- the pump according to the invention is further much better optically blind than the prior pump (In the prior pump, a gas molecule present at the pre-vacuum side "sees" the high vacuum side - in the pump according to the invention this is impossible).
- back-leakage in particular of light gases, is prevented better than in the'prior pump, which for light gases was found not to have a good pumping speed in practice, just because of the occurring back-leakage.
- the rotor-connected pipes or sleeves having the smaller or smallest diameters will have a lower surface velocity at a given rotation frequency than the pipes of larger diameter located more outwardly.
- the smaller pipes are subjected to lower mechanical stresses during rotation, and will expand to a lesser extent than do the larger pipes.
- the walls (of the stator sleeves) adjoining the smaller pipes will adjoin the rotor pipes more closely. This also results in a high compression ratio of the pump.
- the radial dimension of the rotation gap decreases from the side of high vacuum in the pump to the side of higher pressures.
- the grooves in the surfaces concerned will preferably be dimensioned so that the depth of the grooves decreases from the side of high vacuum in the pump to the side of higher pressures. This, too, contributes towards improving the compression ratio and hence the pumping speed.
- the construction is dimensioned more liberally, and the tolerances with regard to the dimensions are much larger than at the pre-vacuum side, where it is especially the compression ratio which is important, and where the dimensions of grooves and the rotation gap are much smaller.
- the dimensions of the rotation gap are partly determined by the dynamic behaviour of the rotor, in particular wobble and vibration during run-up and during particular conditions, such as the ingress of air.
- the use at the top of a magnetic bearing with a high radial stiffness is favourable in this case.
- a magnetic bearing has additionally good properties from the point of view of vacuum engineering.
- the required pumping velocity becomes lower as the pressure is increasing; for this reason, therefore, it is here sufficient to have lower circumferential velocity and smaller radial groove and rotation gap dimensions; at the pre-vacuum side, the specific dimensions are generally much smaller than at the high-vacuum side.
- the pump according to the invention can be provided with a rotor having a bladed wheel, for example, as described in Netherlands patent application 8303927.
- an outlet duct is provided in the stator between one or more pairs of successive sleeves and/or between a sleeve and an adjacent wall, said duct having a non-return valve, and said duct or ducts communicating with the surrounding space or with a pre-vacuum pump.
- the pump When, at high pressures in the space to be evacuated, the pump is started, the pump is capable of building up a pressure higher than 1 bar already after one single compression stage, depending on the pressure in the space to be evacuated and on the rotation frequency.
- the first non-return valve is opened automatically, mechanically or electronically, and the gas is pumped at a high rate, even during run-up. In this way it is avoided that the gas must be compressed still further for it to be transported, i.e., pressed, through the ducts which ultimately become very narrow. As the same time it is thus achieved that even at reasonably high pressures the pump can yet be started up.
- valves When the pressure in the high-vacuum space decreases during the starting-up procedure or thereafter, the pressure at the first valve will also decrease below 1 bar, and the valve will close automatically. A process similar to that described for the first valve will subsequently be repeated at the second valve. Thus successively all valves will be closed as evacuation is increasing, except for the last valve, and this will often be effected already before the operational speed is reached. When the pump is switched off, all valves,including the last one will normally be continuously closed.
- the valves should preferably be designed so, and the choice of material should be such that the leak-tightness per valve is much less than the local volume rate of the pump.
- the pump it is even possible for the pump to be constructed with rotation gaps and grooves which are so small that, at the high-pressure side, the pump directly pumps to the outside pressure of 1 atmosphere.
- the last pressure stage (at the side of the high pressures) may, if desired, function as an air bearing. If this is not done, a conventional bearing, for example, a ball bearing or magnetic bearing, can be used.
- an embodiment of the pump according to the invention comprises a rotor 1.
- Rotor 1 which is rotationally symmetrical, is only shown as to one half (the half left of the axis of rotation, which-is also the axis of symmetry 2 ).
- the rotor 1 consists essentially of a cylindrical casing 3, which at the bottom terminates in a frusto-conical end 4.
- rotor 1 comprises a cylindrical portion 5 of a diameter larger than that of casing 3.
- Casing 3 and cylindrical portion 5 are interconnected by disc 6.
- blades 7 may be provided in known manner, which blades 7 with cylindrical portion 5 form a bladed wheel with the function described in Netherlands patent application 8303927.
- Rotor 1 further comprises two cylindrical pipes or sleeves 8 and 9, which pipes extend coaxially with the cylindrical casing 3, have mutually different diameters, larger than that of casing 3, and are fixedly secured to disc 6.
- Rotor 1 is journalled at the top in a magnetic bearing 10.
- Such magnetic bearings are generally-known.
- Stator 11 Disposed coaxially with rotor 1 is stator 11.
- Stator 11 comprises an outermost wall 12 which at the inside is provided with spiral-shaped groove 13.
- Groove 13 has a depth which decreases from the side opposite blades 7 on cylindrical portion 5 of rotor 1 to the bottom of the casing formed by stator 11.
- sleeve 14 Disposed coaxially within the outermost wall 12 of stator 11 is sleeve 14, which extends outwardly from the bottom of the stator casing.
- Sleeve 14 is provided on opposite sides with a spiral-shaped groove 15, 16, respectively.
- the depth of groove 15 at the outside of sleeve 14 decreases from the bottom to the free end of sleeve 14.
- the depth of groove 16 on the inside surface of sleeve 14 decreases from the free end to the bottom.
- sleeve 17 Disposed coaxially within sleeve 14 is sleeve 17, which extends upwardly from the bottom of the stator casing. Sleeve 17 is also provided on opposite sides with spiral-shaped grooves 18, 19, respectively with decreasing depths in corresponding directions as with grooves 15, 16, respectively,in sleeve 14.
- Rotor pipes 8 and 9 extend into the system of stator sleeves 14 and 17 and stator wall 12.
- Rotor pipe 8 thus opposes wall 12 and the outside of stator sleeve 14 at a short distance.
- Rotor pipe 9 opposes the inside of stator sleeve 14 and the outside of stator sleeve 17 at a short distance.
- the inside of stator sleeve 17 is spaced a short distance from the outer wall of cylindrical casing 3 of rotor 1. As shown in the figure, at least one of each pair of opposing walls of rotor parts and stator parts is always provided with a spiral-shaped groove.
- outlet ducts 20, 21 are provided, which respectively connect the space between wall 12 and sleeve 14, into which rotor pipe 8 extends, and the space between sleeve 14 and sleeve 17, into which rotor pipe 9 extends, with the surrounding space or with a pre-vacuum pump.
- Duct 20 may be provided with a non-return valve 22 and duct 21 with a non-return valve 23.
- a recessed portion Formed in the bottom of the stator casing, in the centre thereof, is a recessed portion which accommodates the conical end 4 of rotor 1.
- the wall of the recessed portion of the stator casing is provided with a spiral-shaped groove 24.
- the recessed portion provided with groove 24 forms an air bearing for the conical end 4 of rotor 1.
- the end 4 is provided with a small cone 25, the end of which rests on the flat bottom of the recessed portion.
- Cone 25 prevents the bearing surfaces of the conical end 4 of rotor 1 from seizing to the air bearing formed by the grooved, recessed portion of the bottom of the stator casing.
- a duct 26 Formed in the flat portion of the bottom of the recessed portion is a duct 26, in which a non-return valve 27 is incorporated. Duct 26 communicates with the surrounding space or with a pre-vacuum pump.
- rotor 1 is driven by means of an electric motor 28 disposed within the stator casing and a driving ring 29, which is secured to the cylindrical casing 3 of rotor 1.
- rotor pipes 8 and 9 may consist, for example, of stainless steel and have a thickness of several tenths to half a millimeter and more.
- the stator walls and sleeves preferably consist of an easily machined material, for example, of aluminium. The dimensions of rotor, rotor pipes, stator wall and stator sleeves are further such that the distance between pairs of opposing walls decreases from the outermost stator wall 12 to the cylindrical casing 3 of rotor 1.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8602052A NL8602052A (nl) | 1986-08-12 | 1986-08-12 | Hoogvacuumpomp. |
NL8602052 | 1986-08-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0260733A1 true EP0260733A1 (fr) | 1988-03-23 |
EP0260733B1 EP0260733B1 (fr) | 1991-03-13 |
Family
ID=19848399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19870201531 Revoked EP0260733B1 (fr) | 1986-08-12 | 1987-08-12 | Pompe sous vide élevé |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0260733B1 (fr) |
DE (1) | DE3768593D1 (fr) |
NL (1) | NL8602052A (fr) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01124396U (fr) * | 1988-02-17 | 1989-08-24 | ||
GB2226081A (en) * | 1988-12-14 | 1990-06-20 | Rolls Royce Plc | Fluid friction pump or turbine |
US5154572A (en) * | 1990-01-26 | 1992-10-13 | Hitachi Koki Company Limited | Vacuum pump with helically threaded cylinders |
EP0779434A1 (fr) * | 1995-12-12 | 1997-06-18 | The BOC Group plc | Améliorations dans les pompes à vide |
EP0805275A2 (fr) * | 1996-05-03 | 1997-11-05 | The BOC Group plc | Pompes à vide |
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE19756837A1 (de) * | 1997-12-19 | 1999-07-01 | K Busch Gmbh Druck & Vakuum Dr | Molekular- und Viskositätspumpe |
EP1101945A3 (fr) * | 1999-11-19 | 2002-06-19 | The BOC Group plc | Pompes à vide |
WO2003031823A1 (fr) * | 2001-10-06 | 2003-04-17 | Leybold Vakuum Gmbh | Pompe a vide rotative a refoulement axial |
EP1318309A2 (fr) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Pompe à vide |
EP1318308A2 (fr) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Pompe à vide |
WO2006089823A1 (fr) * | 2005-02-25 | 2006-08-31 | Oerlikon Leybold Vacuum Gmbh | Pompe a vide holweck |
US7134835B2 (en) | 2003-06-05 | 2006-11-14 | Varian S.P.A. | Process for manufacturing a stator for vacuum pump and stator obtained thereby |
JP2015025453A (ja) * | 2013-07-26 | 2015-02-05 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
EP3657021A1 (fr) * | 2018-11-21 | 2020-05-27 | Pfeiffer Vacuum Gmbh | Pompe à vide |
WO2022112745A1 (fr) * | 2020-11-25 | 2022-06-02 | Edwards Limited | Mécanisme de pompage de traînée pour pompe turbomoléculaire |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL75723C (fr) * | 1900-01-01 | |||
US2730297A (en) * | 1950-04-12 | 1956-01-10 | Hartford Nat Bank & Trust Co | High-vacuum molecular pump |
DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
-
1986
- 1986-08-12 NL NL8602052A patent/NL8602052A/nl not_active Application Discontinuation
-
1987
- 1987-08-12 EP EP19870201531 patent/EP0260733B1/fr not_active Revoked
- 1987-08-12 DE DE8787201531T patent/DE3768593D1/de not_active Revoked
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL75723C (fr) * | 1900-01-01 | |||
US2730297A (en) * | 1950-04-12 | 1956-01-10 | Hartford Nat Bank & Trust Co | High-vacuum molecular pump |
DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01124396U (fr) * | 1988-02-17 | 1989-08-24 | ||
GB2226081A (en) * | 1988-12-14 | 1990-06-20 | Rolls Royce Plc | Fluid friction pump or turbine |
US5154572A (en) * | 1990-01-26 | 1992-10-13 | Hitachi Koki Company Limited | Vacuum pump with helically threaded cylinders |
US5772395A (en) * | 1995-12-12 | 1998-06-30 | The Boc Group Plc | Vacuum pumps |
EP0779434A1 (fr) * | 1995-12-12 | 1997-06-18 | The BOC Group plc | Améliorations dans les pompes à vide |
EP0805275A2 (fr) * | 1996-05-03 | 1997-11-05 | The BOC Group plc | Pompes à vide |
EP1363027A1 (fr) * | 1996-05-03 | 2003-11-19 | The BOC Group plc | Pompe à vide |
EP0805275A3 (fr) * | 1996-05-03 | 1998-07-29 | The BOC Group plc | Pompes à vide |
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
US5893702A (en) * | 1996-08-10 | 1999-04-13 | Pfeiffer Vacuum Gmbh | Gas friction pump |
DE19756837A1 (de) * | 1997-12-19 | 1999-07-01 | K Busch Gmbh Druck & Vakuum Dr | Molekular- und Viskositätspumpe |
DE19756837C2 (de) * | 1997-12-19 | 1999-09-30 | K Busch Gmbh Druck & Vakuum Dr | Molekular- und Viskositätspumpe |
EP1101945A3 (fr) * | 1999-11-19 | 2002-06-19 | The BOC Group plc | Pompes à vide |
WO2003031823A1 (fr) * | 2001-10-06 | 2003-04-17 | Leybold Vakuum Gmbh | Pompe a vide rotative a refoulement axial |
EP1318308A2 (fr) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Pompe à vide |
EP1318309A2 (fr) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Pompe à vide |
EP1318309A3 (fr) * | 2001-12-04 | 2003-12-03 | BOC Edwards Technologies, Limited | Pompe à vide |
EP1318308A3 (fr) * | 2001-12-04 | 2003-12-03 | BOC Edwards Technologies, Limited | Pompe à vide |
US6779969B2 (en) | 2001-12-04 | 2004-08-24 | Boc Edwards Technologies Limited | Vacuum pump |
US7134835B2 (en) | 2003-06-05 | 2006-11-14 | Varian S.P.A. | Process for manufacturing a stator for vacuum pump and stator obtained thereby |
WO2006089823A1 (fr) * | 2005-02-25 | 2006-08-31 | Oerlikon Leybold Vacuum Gmbh | Pompe a vide holweck |
JP2015025453A (ja) * | 2013-07-26 | 2015-02-05 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
EP2829734B1 (fr) * | 2013-07-26 | 2018-09-05 | Pfeiffer Vacuum Gmbh | Pompe à vide |
EP3657021A1 (fr) * | 2018-11-21 | 2020-05-27 | Pfeiffer Vacuum Gmbh | Pompe à vide |
JP2020094582A (ja) * | 2018-11-21 | 2020-06-18 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
WO2022112745A1 (fr) * | 2020-11-25 | 2022-06-02 | Edwards Limited | Mécanisme de pompage de traînée pour pompe turbomoléculaire |
Also Published As
Publication number | Publication date |
---|---|
NL8602052A (nl) | 1988-03-01 |
DE3768593D1 (de) | 1991-04-18 |
EP0260733B1 (fr) | 1991-03-13 |
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