US6825907B2 - TFT array substrate, and liquid crystal display device using the same - Google Patents

TFT array substrate, and liquid crystal display device using the same Download PDF

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US6825907B2
US6825907B2 US10/049,715 US4971502A US6825907B2 US 6825907 B2 US6825907 B2 US 6825907B2 US 4971502 A US4971502 A US 4971502A US 6825907 B2 US6825907 B2 US 6825907B2
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electrode
semiconductor layer
gate
drain
drain electrode
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US20020113916A1 (en
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Takafumi Hashiguchi
Takehisa Yamaguchi
Naoki Nakagawa
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Trivale Technologies LLC
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Advanced Display Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device

Definitions

  • the present invention relates to an active matrix TFT array substrate incorporating thin-film transistors (hereinafter referred to as “TFTs”) as switching elements as well as to a liquid crystal display device using it.
  • TFTs thin-film transistors
  • FIG. 7 ( a ) is a plan view showing one pixel of a conventional TFT array substrate
  • FIG. 7 ( b ) is a plan view showing a TFT portion as a switching element
  • FIG. 7 ( c ) is a sectional view taken along line D-D′ in FIG. 7 ( b ).
  • reference numeral 1 denotes a transparent insulative substrate
  • 2 a plurality of gate lines formed on the transparent insulative substrate 1 and gate electrodes provided in the gate lines
  • 3 a plurality of source lines that have source electrodes 7 and cross the gate lines 2
  • 5 a semiconductor layer formed on each gate electrode 2 with a gate insulating film 4 interposed in between.
  • a source electrode 7 and a drain electrode 6 that are connected to the semiconductor layer 5 constitute a TFT.
  • Reference numeral 8 denotes a pixel electrode that is a transparent conductive film and is connected to the drain electrode 6 through a contact hole 10 that is formed through an interlayer insulating film 9 .
  • Reference numeral 11 represents a channel width.
  • a manufacturing method of the conventional TFT array substrate will be described below briefly. Firstly, a metal film of Cr or the like is deposited on a transparent insulative substrate 1 by sputtering method or the like and then patterned by photolithography method or the like, whereby gate lines 2 including gate electrodes are formed. Then, a gate insulating film 4 and a semiconductor layer 5 are deposited consecutively by plasma CVD method or the like. After semiconductor layers 5 are patterned, a metal film is deposited and drain electrodes 6 , source electrodes 7 , and source lines 3 are formed. Then, an interlayer insulating film 9 made of silicon nitride or the like is formed so as to cover the TFTs. After contact holes 10 are formed, pixel electrodes 8 that are transparent conductive films made of ITO or the like are formed by sputtering method or the like. A TFT array substrate is thus completed.
  • a liquid crystal display device performs video display by controlling a liquid crystal interposed between the above-described TFT array substrate and a counter electrode substrate according to voltages that are applied between the pixel electrodes 8 on the array substrate and the counter electrode. In this case, if the voltages applied to the pixel electrodes 8 vary in the display area, display defects such as luminance unevenness, shot unevenness, a flicker, etc. may occur.
  • FIG. 8 shows a relationship between a pixel electrode voltage and each signal voltage.
  • reference character A denotes a gate electrode voltage
  • B denotes a pixel electrode voltage
  • C denotes a source electrode voltage.
  • the pixel electrode voltage B is applied to the source electrode 7 and transmitted to the pixel electrode 8 via the drain electrode 6 .
  • the pixel electrode voltage B reaches the source electrode voltage C in the charging period CP.
  • the gate electrode voltage A turns off as a transition occurs from the charging period CP to a holding period HP, the pixel electrode voltage B lowers due to capacitance coupling etc.
  • This voltage drop at the pixel electrode 8 is a feedthrough voltage D, which is expressed by the following equation in a simplified manner.
  • ⁇ Vgd is a feedthrough voltage
  • Cgd is a parasitic capacitance between the gate electrode and the drain electrode
  • Cs is an auxiliary capacitance of the pixel electrode
  • Clc is a liquid crystal capacitance.
  • Vgd ⁇ V ⁇ Cgd /( Clc+Cs+Cgd )
  • Cgd the parasitic capacitance between the gate electrode 2 and the drain electrode 6 .
  • each pattern is formed by photolithography method and one manufacturing step is completed by using a plurality of shots. If an alignment error occurs in each shot in a photolithography apparatus, the pattern arrangement relationships among the gate electrode 2 , the semiconductor layer 5 , the source electrode 7 , the drain electrode 6 , etc. vary from one shot to another. Therefore, Cgd which is determined by the overlap area of the gate electrode 2 and the drain electrode 6 varies from one shot to another.
  • the feedthrough voltage varies from one shot to another and shot unevenness, a flicker, etc. become easy to recognize visually.
  • a portion of the semiconductor layer 5 that is located over the gate line 2 and is located outside the drain electrode 6 is kept at the same potential as the potential of the drain electrode 6 until the gate electrode voltage A turns off. This also contributes to the Cgd variation.
  • Japanese laid Opened Patent Publication No. Hei. 2-10331 proposes a TFT array substrate in which that part of a drain electrode which is formed, with a gate insulating film interposed in between, on a step portion that is formed by the presence of a gate electrode is made narrower than the other portion of the drain electrode, to thereby prevent short-circuiting between layers arranged in the vertical direction that would otherwise occur due to the presence of the step portion.
  • this publication has no disclosure relating to the width of a semiconductor layer on the step portion.
  • the present invention has been made to solve the above problems, and an object of the invention is to provide a TFT array substrate having a large aperture ratio in which the frequency of occurrence of display defects such as shot unevenness and a flicker due to alignment errors in a photolithography apparatus in an array substrate manufacturing process can be decreased and the load capacitance of the gate line can be reduced, as well as a liquid crystal display device using it.
  • the invention provides a TFT array substrate comprising a plurality of gate lines formed on an insulative substrate, each of the gate lines including a gate electrode, a plurality of source lines crossing the gate lines, each of the source lines including a source electrode, a semiconductor layer formed on the gate electrode with a gate insulating film interposed in between, a thin-film transistor formed by the source electrode and a drain electrode, the source electrode and the drain electrode are connected to the semiconductor layer, and a pixel electrode connected to a drain line extending from the drain electrode, characterized in that the widths of crossing portions of the semiconductor layer and the drain line overlapping with it that cross an edge line of the gate electrode are made smaller than the width of the drain electrode that is equal to a channel width of the thin-film transistor.
  • drain electrode and the drain line have portions that are located over the gate electrode and do not coextend with the semiconductor layer.
  • the invention also provides a TFT array substrate comprising a plurality of gate lines formed on an insulative substrate, each of the gate lines including a gate electrode, a plurality of source lines crossing the gate lines, each of said source lines including a source electrode, a semiconductor layer formed on the gate electrode with a gate insulating film interposed in between, a thin-film transistor formed by the source electrode and a drain electrode, the source electrode and the drain electrode are connected to the semiconductor layer, and a pixel electrode having a pixel line connected to the drain electrode, characterized in that the widths of crossing portions of the semiconductor layer and the pixel line overlapping with it that cross an edge line of the gate electrode are made smaller than the width of the drain electrode that is equal to a channel width of the thin-film transistor.
  • drain electrode and the pixel line have portions that are located over the gate electrode and do not coextend with the semiconductor layer.
  • the invention also provides a TFT array substrate comprising a plurality of gate lines formed on an insulative substrate, each of the gate lines including a gate electrode, a plurality of source lines crossing the gate lines, each of the source lines including a source electrode, a semiconductor layer formed on the gate electrode with a gate insulating film interposed in between, a thin-film transistor formed by the source electrode and a drain electrode, the source electrode and the drain electrode are connected to the semiconductor layer, and a pixel electrode having a pixel line connected to the drain electrode, characterized in that the width of a crossing portion of the pixel line that crosses an edge line of the gate electrode is made smaller than the width of the drain electrode that is equal to a channel width of the thin-film transistor.
  • the drain electrode has a portion that is located over the gate electrode and does not coextend with the semiconductor layer.
  • a liquid crystal display device characterized in that a liquid crystal is interposed between one of the above TFT array substrates and a counter electrode substrate having a transparent electrode, color filters, etc. or a counter electrode substrate having a transparent electrode.
  • a TFT array substrate comprising a plurality of gate lines formed on an insulative substrate, each of the gate lines including a gate electrode, a plurality of source lines crossing the gate lines, each of the source lines including a source electrode, a semiconductor layer formed on the gate electrode with a gate insulating film interposed in between, a thin-film transistor formed by the source electrode and a drain electrode, the source electrode and drain electrode are connected to the semiconductor layer, and a pixel electrode connected to a drain line extending from the drain electrode, the widths of crossing portions of the semiconductor layer and the drain line overlapping with it that cross an edge line of the gate electrode are made smaller than the width of the drain electrode that is equal to a channel width of the thin-film transistor.
  • the drain electrode and the drain line have a portions that are located over the gate electrode and do not coextend with the semiconductor layer. Therefore, the area of the semiconductor layer that is located outside the drain electrode and the drain line becomes small and the capacitance formed by the gate electrode and the portion of the semiconductor layer that is located outside the drain electrode becomes small and hence has almost no influence on the feedthrough voltage. Therefore, the frequency of occurrence of display defects such as shot unevenness and a flicker can further be decreased. Still further, the invention can make the load capacitance of the gate line smaller than in the conventional TFT structure. In addition, employment of the pixel line makes it possible to provide a TFT array substrate having a larger aperture ratio than conventional ones do, as well as a liquid crystal display device having superior display characteristics.
  • FIGS. 1 ( a ) and 1 ( b ) are a plan view and a sectional view, respectively, showing the structure of a TFT array substrate according to a first embodiment of the present invention
  • FIG. 2 is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a second embodiment of the invention
  • FIGS. 3 ( a ) and 3 ( b ) are a plan view and a sectional view, respectively, showing the structure of a TFT array substrate according to a third embodiment of the present invention
  • FIG. 4 is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a fourth embodiment of the invention.
  • FIGS. 5 ( a ) and 5 ( b ) are a plan view and a sectional view, respectively, showing the structure of a TFT array substrate according to a fifth embodiment of the present invention.
  • FIG. 6 is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a sixth embodiment of the invention.
  • FIGS. 7 ( a ) and 7 ( b ) are plan views and FIG. 7 ( c ) is a sectional view showing the structure of a conventional TFT array substrate;
  • FIG. 8 shows a relationship between a pixel electrode voltage and each signal voltage.
  • FIG. 1 ( a ) is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a first embodiment of the invention
  • FIG. 1 ( b ) is a sectional view taken along line A-A′ in FIG. 1 ( a ).
  • reference numeral 1 denotes a transparent insulative substrate; 2 , a plurality of gate lines formed on the transparent insulative substrate 1 and gate electrodes provided in the gate lines; and 3 , a plurality of source lines that have source electrodes 7 and cross the gate lines 2 .
  • Reference numeral 5 denotes a semiconductor layer formed on each gate electrode 2 with a gate insulating film 4 interposed in between.
  • a source electrode 7 and a drain electrode 6 that are connected to the semiconductor layer 5 constitute a TFT.
  • Reference numeral 8 denotes a pixel electrode that is a transparent conductive film and is connected to a drain line 6 a extending from the drain electrode 6 through a contact hole 10 that is formed through an interlayer insulating film 9 .
  • Reference numeral 11 represents a channel width of the TFT.
  • the widths of those crossing portions of the semiconductor layer 5 and the drain line 6 a overlapping with it which cross the edge line of the gate electrode 2 are made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • a manufacturing method of the TFT array substrate according to this embodiment will be described below briefly. Firstly, a metal film of Cr or the like is deposited on a transparent insulative substrate 1 by sputtering method or the like. After a resist is exposed to light by photolithography method or the like, the metal film is patterned, whereby gate lines 2 including gate electrodes are formed. Then, a gate insulating film 4 and a semiconductor layer 5 are deposited consecutively by plasma CVD method or the like. After the semiconductor layer 5 is patterned, a metal film of Cr or the like is deposited by sputtering method or the like and drain electrodes 6 , drain lines 6 a , source lines 3 , and source electrodes 7 are formed.
  • an interlayer insulating film 9 made of silicon nitride or the like is formed so as to cover the TFTS.
  • a transparent conductive film made of ITO or the like is formed by sputtering method or the like and pixel electrodes 8 are patterned.
  • a TFT array substrate according to this embodiment is thus completed.
  • a liquid crystal display device according to this embodiment is obtained by interposing a liquid crystal between this TFT substrate and a counter electrode substrate having a transparent electrode, color filters, etc. or a counter electrode substrate having a transparent electrode.
  • the widths of those crossing portions of the semiconductor layer 5 and the drain line 6 a overlapping with it which cross the edge line of the gate electrode 2 are made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the portion of the semiconductor layer 5 that is formed over the gate electrode 2 contributes to Cgd.
  • L 1 In a range that the distance L 1 between one sideline of the drain electrode 6 and one sideline of the semiconductor layer 5 is longer than about 5 ⁇ m, the feedthrough voltage due to the semiconductor layer 5 increases steeply with respect to the distance L 1 . Therefore, it is desirable that L 1 be designed so as to be smaller than 5 ⁇ m.
  • the conventional TFT structure has a problem that short-circuiting tends to occur between the gate electrode 2 and the drain electrode 6 in the step portion where the drain electrode 6 bridges the end of the gate electrode 2 with the gate insulating film 4 interposed in between.
  • the drain line 6 a since the drain line 6 a is employed and hence the drain electrode is made narrower in the step portion, the probability of occurrence of short-circuiting can be decreased. Further, disconnection can also be prevented by making the drain line 6 a thicker.
  • FIG. 2 is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a second embodiment of the invention. The same or corresponding parts are given the same symbols in the figure and will not be described.
  • the widths of those crossing portions of the semiconductor layer 5 and the drain line 6 a overlapping with it which cross the edge line of the gate electrode 2 are made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the drain electrode 6 and the drain line 6 a have portions that are located over the gate electrode 2 and do not coextend with the semiconductor layer 5 . With this measure, the area of the portion of the semiconductor layer 5 that is located over the gate electrode 2 and is located outside the drain electrode 6 is made smaller than in the first embodiment.
  • the area of the portion of the semiconductor layer 5 that is located over the gate electrode 2 and is located outside the drain electrode 6 is large and hence it may influence the feedthrough voltage.
  • the drain electrode 6 and the drain line 6 a have the portions that are located over the gate electrode 2 and do not coextend with the semiconductor layer 5 , whereby the area of the portion of the semiconductor layer 5 that is located outside the drain electrode 6 , that is, the portion of the semiconductor layer 5 that will have the same potential as the drain electrode 6 will.
  • the value of Cgd which is a parameter representing the feedthrough voltage is almost entirely determined by the overlap area of the drain electrode 6 and the gate electrode 2 .
  • This embodiment provides the following advantage in addition to the advantages of the first embodiment.
  • the capacitance formed by the gate electrode 2 and the portion of the semiconductor layer 5 that is located outside the drain electrode 6 can be reduced (this capacitance contributes to Cgd). Therefore, the feedthrough voltage is prevented from increasing and the frequency of occurrence of shot unevenness and a flicker can further be decreased.
  • FIG. 3 ( a ) is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a third embodiment of the invention
  • FIG. 3 ( b ) is a sectional view taken along line B-B′ in FIG. 3 ( a ).
  • reference symbol 8 a denotes a pixel line that extends from the pixel electrode 8 and is connected to the drain electrode 6 .
  • the same or corresponding parts are given the same symbols.
  • the manufacturing method of the TFT array substrate according to this embodiment is approximately the same as in the first embodiment except that pixel electrodes 8 having pixel lines 8 a are patterned and the pixel lines 8 a are connected to drain electrodes 6 through contact holes 10 , and hence will not be described.
  • the contact hole 10 is formed above the drain electrode 6 , and the drain electrode 6 is electrically connected to the pixel line 8 a , the widths of those crossing portions of the semiconductor layer 5 and the pixel line 8 a overlapping with it which cross the edge line of the gate electrode 2 are made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the portion of the semiconductor layer 5 that is formed over the gate electrode 2 contributes to Cgd.
  • the distance L 2 between one sideline of the drain electrode 6 and one sideline of the semiconductor layer 5 is longer than about 5 ⁇ m, the feedthrough voltage due to the semiconductor layer 5 increases steeply with respect to the distance L 2 . Therefore, it is desirable that L 2 be designed so as to be smaller than 5 ⁇ m.
  • FIG. 4 is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a fourth embodiment of the invention. The same or corresponding parts are given the same symbols in the figure and will not be described.
  • the widths of those crossing portions of the semiconductor layer 5 and the pixel line 8 a overlapping with it which cross the edge line of the gate electrode 2 are made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the drain electrode 6 and the electrode line 8 a have portions that are located over the gate electrode 2 and do not coextend with the semiconductor layer 5 . With this measure, the area of the portion of the semiconductor layer 5 that is located over the gate electrode 2 and is located outside the drain electrode 6 and the pixel line 8 a is made smaller than in the third embodiment.
  • This embodiment provides the following advantage in addition to the advantages of the third embodiment.
  • the capacitance formed by the gate electrode 2 and the portion of the semiconductor layer 5 that is located outside the drain electrode 6 and the pixel line 8 a can be reduced (this capacitance contributes to Cgd). Therefore, the feedthrough voltage is prevented from increasing and the frequency of occurrence of shot unevenness and a flicker can further be decreased.
  • FIG. 5 ( a ) is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a fifth embodiment of the invention
  • FIG. 5 ( b ) is a sectional view taken along line C-C′ in FIG. 5 ( a ).
  • the same or corresponding parts are given the same symbols in the figures and will not be described.
  • the width of the crossing portion at the step portion of the pixel line 8 a that crosses the edge line of the gate electrode 2 is made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the portion of the semiconductor layer 5 that is formed over the gate electrode 2 contributes to Cgd.
  • the distance L 3 between one sideline of the drain electrode 6 and one sideline of the semiconductor layer 5 is longer than about 5 ⁇ m, the feedthrough voltage due to the semiconductor layer 5 increases steeply with respect to the distance L 3 . Therefore, it is desirable that L 3 be designed so as to be smaller than 5 ⁇ m.
  • FIG. 6 is a plan view showing a TFT portion as a switching element of a TFT array substrate according to a sixth embodiment of the invention. The same or corresponding parts are given the same symbols in the figure and will not be described.
  • the width of the crossing portion of the pixel line 8 a that crosses the edge line of the gate electrode 2 is made smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the drain electrode 6 has a portion that is located over the gate electrode 2 and does not coextend with the semiconductor layer 5 . With this measure, the area of the portion of the semiconductor layer 5 that is located over the gate electrode 2 and is located outside the drain electrode 6 is made smaller than in the fifth embodiment.
  • This embodiment provides the following advantage in addition to the advantages of the fifth embodiment.
  • the capacitance formed by the gate electrode 2 and the portion of the semiconductor layer 5 that is located outside the drain electrode 6 can be reduced (this capacitance contributes to Cgd). Therefore, the feedthrough voltage is prevented from increasing and the frequency of occurrence of shot unevenness and a flicker can further be decreased.
  • the shapes of the drain electrode 6 , the drain line 6 a , the pixel line 8 a , and the semiconductor layer 5 in the first to sixth embodiments are not limited to those shown in the figures. Similar advantages are expected with arbitrary patterns as long as the width of the portion of the drain line 6 a or the pixel line 8 a that bridges the end of the gate line 2 is smaller than the width of the drain electrode 6 that is equal to the channel width 11 of the TFT.
  • the application range of the invention is not limited to the TFT structures described in the above first to sixth embodiments.
  • similar advantages can be obtained also in a TFT in which a drain electrode and a source electrode are formed over a projection-shaped gate electrode extending from a gate line, by making the widths of those portions of a semiconductor layer and a drain line or a metal pattern such as a pixel line that is electrically connected to a pixel which belong to a step portion that is formed by presence of the gate electrode smaller than the channel width of the TFT.
  • the TFT array substrate according to the invention is used in a liquid crystal display device and is effective in decreasing the frequency of occurrence of display defects of the liquid crystal display device and reducing the load capacitance of the gate line. Further, the liquid crystal display device according to the invention is used as display panels of various display devices.

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Cited By (7)

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US20040246424A1 (en) * 2003-03-28 2004-12-09 Fujitsu Display Technologies Corporation Substrate for liquid crystal display and liquid crystal display utilizing the same
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US20050088599A1 (en) 2005-04-28
WO2002001286A1 (fr) 2002-01-03
KR100735853B1 (ko) 2007-07-04
KR20020060153A (ko) 2002-07-16
US7098969B2 (en) 2006-08-29
JP2002014371A (ja) 2002-01-18
US20020113916A1 (en) 2002-08-22

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