TWI371819B - Lid opening/closing system for closed container and substrate processing method using same - Google Patents
Lid opening/closing system for closed container and substrate processing method using sameInfo
- Publication number
- TWI371819B TWI371819B TW097124558A TW97124558A TWI371819B TW I371819 B TWI371819 B TW I371819B TW 097124558 A TW097124558 A TW 097124558A TW 97124558 A TW97124558 A TW 97124558A TW I371819 B TWI371819 B TW I371819B
- Authority
- TW
- Taiwan
- Prior art keywords
- processing method
- same
- substrate processing
- closed container
- lid opening
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007198618A JP4309935B2 (ja) | 2007-07-31 | 2007-07-31 | 密閉容器の蓋開閉システム及び当該システムを用いた基板処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200917407A TW200917407A (en) | 2009-04-16 |
TWI371819B true TWI371819B (en) | 2012-09-01 |
Family
ID=40338315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097124558A TWI371819B (en) | 2007-07-31 | 2008-06-30 | Lid opening/closing system for closed container and substrate processing method using same |
Country Status (4)
Country | Link |
---|---|
US (2) | US7789609B2 (zh) |
JP (1) | JP4309935B2 (zh) |
KR (1) | KR101030884B1 (zh) |
TW (1) | TWI371819B (zh) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4278676B2 (ja) | 2005-11-30 | 2009-06-17 | Tdk株式会社 | 密閉容器の蓋開閉システム |
JP4194051B2 (ja) * | 2006-05-31 | 2008-12-10 | Tdk株式会社 | 防塵機能を備えたロードポート装置及びミニエンバイロンメントシステム |
TWI475627B (zh) * | 2007-05-17 | 2015-03-01 | Brooks Automation Inc | 基板運送機、基板處理裝置和系統、於基板處理期間降低基板之微粒污染的方法,及使運送機與處理機結合之方法 |
JP4343253B1 (ja) * | 2008-03-27 | 2009-10-14 | Tdk株式会社 | 密閉容器の蓋開閉装置及び該開閉装置を用いたガス置換装置 |
US8186927B2 (en) * | 2008-05-27 | 2012-05-29 | Tdk Corporation | Contained object transfer system |
JP4748816B2 (ja) * | 2008-11-28 | 2011-08-17 | Tdk株式会社 | 密閉容器の蓋開閉システム |
KR20100062392A (ko) * | 2008-12-02 | 2010-06-10 | 삼성전자주식회사 | 반도체 제조설비 및 그의 제조방법 |
JP5093621B2 (ja) * | 2009-09-18 | 2012-12-12 | Tdk株式会社 | ロードポート装置及び該ロードポート装置の排塵方法 |
JP5562759B2 (ja) * | 2009-11-04 | 2014-07-30 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5564271B2 (ja) * | 2010-01-20 | 2014-07-30 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
JP2012204645A (ja) * | 2011-03-25 | 2012-10-22 | Tokyo Electron Ltd | 蓋体開閉装置 |
JP5729148B2 (ja) * | 2011-06-07 | 2015-06-03 | 東京エレクトロン株式会社 | 基板搬送容器の開閉装置、蓋体の開閉装置及び半導体製造装置 |
JP5494734B2 (ja) * | 2011-08-15 | 2014-05-21 | Tdk株式会社 | パージ装置及び該パージ装置を有するロードポート装置 |
JP5842628B2 (ja) * | 2012-01-25 | 2016-01-13 | Tdk株式会社 | ガスパージ装置及び該ガスパージ装置を有するロードポート装置 |
JP2013161924A (ja) | 2012-02-03 | 2013-08-19 | Tokyo Electron Ltd | 基板収容容器のパージ装置及びパージ方法 |
JP5998640B2 (ja) * | 2012-05-29 | 2016-09-28 | Tdk株式会社 | ロードポート装置 |
JP6008169B2 (ja) * | 2012-05-29 | 2016-10-19 | Tdk株式会社 | ロードポート装置 |
JP5993252B2 (ja) * | 2012-09-06 | 2016-09-14 | 東京エレクトロン株式会社 | 蓋体開閉装置及びこれを用いた熱処理装置、並びに蓋体開閉方法 |
TW201413780A (zh) * | 2012-09-24 | 2014-04-01 | Eugene Technology Co Ltd | 煙氣移除設備及基板處理設備 |
US20140157722A1 (en) * | 2012-12-04 | 2014-06-12 | Tdk Corporation | Lid opening/closing system for closed container, and substrate processing method using the same |
JP6206126B2 (ja) * | 2012-12-04 | 2017-10-04 | Tdk株式会社 | 密閉容器の蓋開閉システム及び当該システムを用いた基板処理方法 |
KR101361545B1 (ko) * | 2013-03-27 | 2014-02-13 | 주식회사 싸이맥스 | 링크바를 통해 포트도어가 개폐되는 도어개폐장치 |
JP6198043B2 (ja) | 2013-06-06 | 2017-09-20 | Tdk株式会社 | ロードポートユニット及びefemシステム |
WO2015005192A1 (ja) * | 2013-07-09 | 2015-01-15 | 株式会社日立国際電気 | 基板処理装置、ガスパージ方法、半導体装置の製造方法、及び異常処理プログラムが格納された記録媒体 |
JP6268425B2 (ja) * | 2013-07-16 | 2018-01-31 | シンフォニアテクノロジー株式会社 | Efem、ロードポート、ウェーハ搬送方法 |
KR20160043027A (ko) | 2013-08-12 | 2016-04-20 | 어플라이드 머티어리얼스, 인코포레이티드 | 팩토리 인터페이스 환경 제어들을 갖는 기판 프로세싱 시스템들, 장치, 및 방법들 |
US9435025B2 (en) * | 2013-09-25 | 2016-09-06 | Applied Materials, Inc. | Gas apparatus, systems, and methods for chamber ports |
KR102162366B1 (ko) * | 2014-01-21 | 2020-10-06 | 우범제 | 퓸 제거 장치 |
US20150214084A1 (en) * | 2014-01-30 | 2015-07-30 | Infineon Technologies Ag | Frame cassette |
JP6136084B2 (ja) * | 2014-03-17 | 2017-05-31 | 村田機械株式会社 | パージ装置とパージ方法 |
JP6287515B2 (ja) * | 2014-04-14 | 2018-03-07 | Tdk株式会社 | Efemシステム及び蓋開閉方法 |
KR102418431B1 (ko) | 2014-10-24 | 2022-07-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 팩토리 인터페이스에서 기판 캐리어를 퍼징하기 위한 시스템들, 장치, 및 방법들 |
KR20210080633A (ko) * | 2014-11-25 | 2021-06-30 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 캐리어 및 퍼지 챔버 환경 제어들을 이용하는 기판 프로세싱 시스템들, 장치, 및 방법들 |
JP6459682B2 (ja) * | 2015-03-20 | 2019-01-30 | Tdk株式会社 | ガスパージ装置、ロードポート装置およびガスパージ方法 |
JP6492884B2 (ja) * | 2015-03-31 | 2019-04-03 | Tdk株式会社 | ロードポート装置 |
JP6451453B2 (ja) * | 2015-03-31 | 2019-01-16 | Tdk株式会社 | ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法 |
US20180174875A1 (en) * | 2015-06-17 | 2018-06-21 | Entegris, Inc. | Flow modification fixture for an equipment front end module |
JP2015207786A (ja) * | 2015-06-24 | 2015-11-19 | シンフォニアテクノロジー株式会社 | ロードポート |
JP6048770B2 (ja) * | 2015-06-26 | 2016-12-21 | Tdk株式会社 | パージノズル |
KR101636242B1 (ko) | 2016-03-21 | 2016-07-05 | 주식회사 제이디티 | 반도체 제조 설비용 배출유량 센서의 내구성 향상 장치 |
JP6701966B2 (ja) * | 2016-03-31 | 2020-05-27 | Tdk株式会社 | ロードポート装置及びefem |
JP6874303B2 (ja) * | 2016-08-31 | 2021-05-19 | Tdk株式会社 | ロードポート装置 |
US10262884B2 (en) | 2016-11-10 | 2019-04-16 | Applied Materials, Inc. | Systems, apparatus, and methods for an improved load port |
JP6269788B2 (ja) * | 2016-11-22 | 2018-01-31 | シンフォニアテクノロジー株式会社 | ロードポート |
EP3573093A4 (en) * | 2017-01-23 | 2020-11-04 | Murata Machinery, Ltd. | ARTICLE TRANSFER DEVICE AND FILLER |
US10741432B2 (en) * | 2017-02-06 | 2020-08-11 | Applied Materials, Inc. | Systems, apparatus, and methods for a load port door opener |
JP7158133B2 (ja) * | 2017-03-03 | 2022-10-21 | アプライド マテリアルズ インコーポレイテッド | 雰囲気が制御された移送モジュール及び処理システム |
KR102206194B1 (ko) * | 2017-09-26 | 2021-01-22 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치 및 반도체 장치의 제조 방법 |
CN109969595B (zh) * | 2017-12-28 | 2021-01-19 | 沈阳新松机器人自动化股份有限公司 | 一种foup盒用自动门及foup盒自动开启和密封方法 |
KR102146517B1 (ko) | 2018-11-14 | 2020-08-21 | 주식회사 저스템 | 웨이퍼 용기로의 외기 유입을 차단하는 외기 차단 장치 및 이를 포함하는 반도체 장치 |
KR102212996B1 (ko) * | 2019-01-02 | 2021-02-08 | 피에스케이홀딩스 (주) | 기판 처리 장치 및 기판 처리 방법 |
TWI723329B (zh) * | 2019-01-19 | 2021-04-01 | 春田科技顧問股份有限公司 | 裝載埠及其氣簾裝置與吹淨方法 |
WO2021034008A1 (ko) * | 2019-08-22 | 2021-02-25 | 주식회사 저스템 | 로드포트모듈의 웨이퍼 용기의 습도저감장치 및 이를 구비한 반도체 공정장치 |
KR102289650B1 (ko) * | 2019-08-22 | 2021-08-17 | 주식회사 저스템 | 로드포트모듈의 웨이퍼 용기의 습도저감장치 및 이를 구비한 반도체 공정장치 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3722604B2 (ja) | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US8348583B2 (en) * | 1999-10-19 | 2013-01-08 | Rorze Corporation | Container and loader for substrate |
JP3581310B2 (ja) * | 2000-08-31 | 2004-10-27 | Tdk株式会社 | 防塵機能を備えた半導体ウェーハ処理装置 |
JP2003007799A (ja) | 2001-06-21 | 2003-01-10 | Tokyo Electron Ltd | 処理システム |
JP3880343B2 (ja) * | 2001-08-01 | 2007-02-14 | 株式会社ルネサステクノロジ | ロードポート、基板処理装置および雰囲気置換方法 |
JP2004119627A (ja) * | 2002-09-25 | 2004-04-15 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
JP2004235516A (ja) | 2003-01-31 | 2004-08-19 | Trecenti Technologies Inc | ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法 |
US20040237244A1 (en) * | 2003-05-26 | 2004-12-02 | Tdk Corporation | Purge system for product container and interface seal used in the system |
US7621714B2 (en) * | 2003-10-23 | 2009-11-24 | Tdk Corporation | Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit |
WO2005124853A1 (ja) | 2004-06-21 | 2005-12-29 | Right Mfg,Co.,Ltd. | ロードポート |
JP4012190B2 (ja) * | 2004-10-26 | 2007-11-21 | Tdk株式会社 | 密閉容器の蓋開閉システム及び開閉方法 |
JP4278676B2 (ja) * | 2005-11-30 | 2009-06-17 | Tdk株式会社 | 密閉容器の蓋開閉システム |
JP4301456B2 (ja) | 2005-11-30 | 2009-07-22 | Tdk株式会社 | 密閉容器の蓋開閉システム |
US8128333B2 (en) | 2006-11-27 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and manufacturing method for semiconductor devices |
JP4891199B2 (ja) * | 2006-11-27 | 2012-03-07 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
JP4264115B2 (ja) | 2007-07-31 | 2009-05-13 | Tdk株式会社 | 被収容物の処理方法及び当該方法に用いられる蓋開閉システム |
-
2007
- 2007-07-31 JP JP2007198618A patent/JP4309935B2/ja active Active
-
2008
- 2008-04-21 US US12/106,619 patent/US7789609B2/en active Active
- 2008-06-30 TW TW097124558A patent/TWI371819B/zh active
- 2008-07-30 KR KR1020080074412A patent/KR101030884B1/ko active IP Right Grant
-
2010
- 2010-07-27 US US12/844,457 patent/US9349627B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW200917407A (en) | 2009-04-16 |
US20090035099A1 (en) | 2009-02-05 |
JP4309935B2 (ja) | 2009-08-05 |
KR101030884B1 (ko) | 2011-04-22 |
US9349627B2 (en) | 2016-05-24 |
KR20090013097A (ko) | 2009-02-04 |
JP2009038073A (ja) | 2009-02-19 |
US7789609B2 (en) | 2010-09-07 |
US20100290888A1 (en) | 2010-11-18 |
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