RU2009102208A - Межсоединение методом перевернутого кристалла на основе сформированных соединений - Google Patents
Межсоединение методом перевернутого кристалла на основе сформированных соединений Download PDFInfo
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- RU2009102208A RU2009102208A RU2009102208/28A RU2009102208A RU2009102208A RU 2009102208 A RU2009102208 A RU 2009102208A RU 2009102208/28 A RU2009102208/28 A RU 2009102208/28A RU 2009102208 A RU2009102208 A RU 2009102208A RU 2009102208 A RU2009102208 A RU 2009102208A
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Abstract
1. Электрическое соединение по методу перевернутого кристалла между первым и вторым электрическими компонентами (250, 260), включающее в себя ! выступ (210), имеющий первую и вторую электрически соединяющиеся поверхности (214, 215), где первая соединяющаяся поверхность (214) выступа (210) электрически соединена с первым электрическим компонентом (250); и ! площадку (220), имеющую первую и вторую электрически соединяющиеся поверхности (224, 228), где первая соединяющаяся поверхность (224) площадки (220) электрически соединена со вторым электрическим компонентом (260), а вторая электрически соединяющаяся поверхность (228) площадки (220) электрически соединена и по размерам меньше, чем вторая электрически соединяющаяся поверхность (215) выступа (210). ! 2. Соединение по п.1, в котором выступ (210) является столбиковым выступом. ! 3. Соединение по п.1, в котором выступ (210) является шариковым выступом. ! 4. Соединение по п.1, в котором выступ (210) сконфигурирован с высотой выступа в диапазоне 50-150 мкм. ! 5. Соединение по п.1, в котором первая соединяющаяся поверхность (214) выступа (210) имеет диаметр в диапазоне 50-120 мкм. ! 6. Соединение по п.1, в котором площадка (220) сконфигурирована, имеющей диаметр в диапазоне 10-70 мкм. ! 7. Соединение по п.1, в котором первый электрический компонент (250) является акустическим элементом. ! 8. Соединение по п.1, в котором второй электрический компонент (260) является специализированной интегральной схемой (ASIC). ! 9. Соединение по п.8, в котором специализированная интегральная схема (ASIC) сконфигурирована имеющей электронные схемы, размещенные под упомянутой площадкой. ! 10. Соединение по п.1, в котором соединение сконфигурировано как одно из множества �
Claims (18)
1. Электрическое соединение по методу перевернутого кристалла между первым и вторым электрическими компонентами (250, 260), включающее в себя
выступ (210), имеющий первую и вторую электрически соединяющиеся поверхности (214, 215), где первая соединяющаяся поверхность (214) выступа (210) электрически соединена с первым электрическим компонентом (250); и
площадку (220), имеющую первую и вторую электрически соединяющиеся поверхности (224, 228), где первая соединяющаяся поверхность (224) площадки (220) электрически соединена со вторым электрическим компонентом (260), а вторая электрически соединяющаяся поверхность (228) площадки (220) электрически соединена и по размерам меньше, чем вторая электрически соединяющаяся поверхность (215) выступа (210).
2. Соединение по п.1, в котором выступ (210) является столбиковым выступом.
3. Соединение по п.1, в котором выступ (210) является шариковым выступом.
4. Соединение по п.1, в котором выступ (210) сконфигурирован с высотой выступа в диапазоне 50-150 мкм.
5. Соединение по п.1, в котором первая соединяющаяся поверхность (214) выступа (210) имеет диаметр в диапазоне 50-120 мкм.
6. Соединение по п.1, в котором площадка (220) сконфигурирована, имеющей диаметр в диапазоне 10-70 мкм.
7. Соединение по п.1, в котором первый электрический компонент (250) является акустическим элементом.
8. Соединение по п.1, в котором второй электрический компонент (260) является специализированной интегральной схемой (ASIC).
9. Соединение по п.8, в котором специализированная интегральная схема (ASIC) сконфигурирована имеющей электронные схемы, размещенные под упомянутой площадкой.
10. Соединение по п.1, в котором соединение сконфигурировано как одно из множества электрических соединений, расположенных с шагом менее 150 мкм.
11. Способ образования электрического соединения по методу перевернутого кристалла между первым и вторым электрическими компонентами (250, 260), содержащий следующие шаги:
соединяют часть выступа (210) с первым электрическим компонентом (250);
соединяют часть площадки (220) со вторым электрическим компонентом (260); и
соединяют часть выступа (210) с частью площадки (220), причем поверхность (228) части площадки (220), которая соединена с частью выступа (210), меньшего размера, чем соответствующая соединяющаяся поверхность (215) части выступа (210).
12. Способ по п.11, включающий в себя процесс формирования части выступа (210) как части выступа столбиковой формы.
13. Способ по п.11, включающий в себя шаг изготовления части выступа (210), имеющего высоту в диапазоне 50-150 мкм и поверхность (214), соединяющуюся с первым электрическим компонентом (250), имеющую диаметр в диапазоне 50-120 мкм.
14. Способ по п.11, включающий в себя шаг формирования части площадки (220), имеющей диаметр в диапазоне 10-70 мкм.
15. Способ по п.11, в котором шаг соединения части выступа (210) с площадкой (220) выполняется с использованием метода соединения при низкой температуре и низком сваривающем давлении.
16. Способ по п.15, в котором метод соединения при низкой температуре и низком связывающем давлении является ультразвуковой сварки головки выступа.
17. Способ по п.11, включающий в себя шаг формирования электрического соединения по методу перевернутого кристалла как одного из множества электрических соединений, в шаговом расположении менее, чем 150 мкм.
18. Способ по п.11, в котором шаг соединения части выступа (210) с частью площадки (220) выполняется с использованием проводящей эпоксидной смолы.
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US80576006P | 2006-06-26 | 2006-06-26 | |
US60/805,760 | 2006-06-26 |
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RU2009102208A true RU2009102208A (ru) | 2010-08-10 |
RU2441298C2 RU2441298C2 (ru) | 2012-01-27 |
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RU2009102208/28A RU2441298C2 (ru) | 2006-06-26 | 2007-06-20 | Межсоединение методом перевернутого кристалла на основе сформированных соединений |
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US (1) | US20090294991A1 (ru) |
EP (1) | EP2036125B1 (ru) |
JP (1) | JP5204101B2 (ru) |
CN (1) | CN101479846B (ru) |
RU (1) | RU2441298C2 (ru) |
TW (1) | TW200814209A (ru) |
WO (1) | WO2008001283A2 (ru) |
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US8129220B2 (en) | 2009-08-24 | 2012-03-06 | Hong Kong Polytechnic University | Method and system for bonding electrical devices using an electrically conductive adhesive |
JP5995508B2 (ja) | 2012-04-27 | 2016-09-21 | キヤノン株式会社 | 半導体装置および半導体装置の製造方法 |
US9180490B2 (en) | 2012-05-22 | 2015-11-10 | General Electric Company | Ultrasound transducer and method for manufacturing an ultrasound transducer |
US10956828B2 (en) | 2019-06-19 | 2021-03-23 | International Business Machines Corporation | Transmon qubit flip-chip structures for quantum computing devices |
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JP3152796B2 (ja) * | 1993-05-28 | 2001-04-03 | 株式会社東芝 | 半導体装置およびその製造方法 |
JPH10303252A (ja) * | 1997-04-28 | 1998-11-13 | Nec Kansai Ltd | 半導体装置 |
US6015652A (en) * | 1998-02-27 | 2000-01-18 | Lucent Technologies Inc. | Manufacture of flip-chip device |
FI105880B (fi) * | 1998-06-18 | 2000-10-13 | Nokia Mobile Phones Ltd | Mikromekaanisen mikrofonin kiinnitys |
JP2001085470A (ja) * | 1999-09-16 | 2001-03-30 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US6815252B2 (en) * | 2000-03-10 | 2004-11-09 | Chippac, Inc. | Method of forming flip chip interconnection structure |
JP3506233B2 (ja) * | 2000-06-28 | 2004-03-15 | シャープ株式会社 | 半導体装置及びその製造方法 |
JP4105409B2 (ja) * | 2001-06-22 | 2008-06-25 | 株式会社ルネサステクノロジ | マルチチップモジュールの製造方法 |
JP3717899B2 (ja) * | 2002-04-01 | 2005-11-16 | Necエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
US20060116584A1 (en) * | 2002-12-11 | 2006-06-01 | Koninklijke Philips Electronic N.V. | Miniaturized ultrasonic transducer |
US7353056B2 (en) * | 2003-03-06 | 2008-04-01 | General Electric Company | Optimized switching configurations for reconfigurable arrays of sensor elements |
JP4056424B2 (ja) * | 2003-05-16 | 2008-03-05 | シャープ株式会社 | 半導体装置の製造方法 |
US6849944B2 (en) * | 2003-05-30 | 2005-02-01 | Texas Instruments Incorporated | Using a supporting structure to control collapse of a die towards a die pad during a reflow process for coupling the die to the die pad |
JP4024773B2 (ja) * | 2004-03-30 | 2007-12-19 | シャープ株式会社 | 配線基板、半導体装置およびその製造方法並びに半導体モジュール装置 |
CN101006361A (zh) * | 2004-08-18 | 2007-07-25 | 皇家飞利浦电子股份有限公司 | 二维超声换能器阵列 |
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Publication number | Publication date |
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US20090294991A1 (en) | 2009-12-03 |
JP2009542030A (ja) | 2009-11-26 |
EP2036125B1 (en) | 2019-05-22 |
JP5204101B2 (ja) | 2013-06-05 |
RU2441298C2 (ru) | 2012-01-27 |
CN101479846A (zh) | 2009-07-08 |
EP2036125A2 (en) | 2009-03-18 |
TW200814209A (en) | 2008-03-16 |
WO2008001283A2 (en) | 2008-01-03 |
WO2008001283A3 (en) | 2008-05-29 |
CN101479846B (zh) | 2011-11-23 |
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