KR100544760B1 - 배기 가스 처리 방법 및 처리 장치 - Google Patents
배기 가스 처리 방법 및 처리 장치 Download PDFInfo
- Publication number
- KR100544760B1 KR100544760B1 KR1020037013443A KR20037013443A KR100544760B1 KR 100544760 B1 KR100544760 B1 KR 100544760B1 KR 1020037013443 A KR1020037013443 A KR 1020037013443A KR 20037013443 A KR20037013443 A KR 20037013443A KR 100544760 B1 KR100544760 B1 KR 100544760B1
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- fluoride
- combustion chamber
- combustion
- exhaust gas
- Prior art date
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2215/00—Preventing emissions
- F23J2215/30—Halogen; Compounds thereof
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Treating Waste Gases (AREA)
- Incineration Of Waste (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2002-00037344 | 2002-02-14 | ||
JP2002037344A JP4172938B2 (ja) | 2002-02-14 | 2002-02-14 | 排ガスの処理方法および処理装置 |
PCT/JP2003/001507 WO2003069228A1 (fr) | 2002-02-14 | 2003-02-13 | Procede de traitement de gaz d'echappement |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030085596A KR20030085596A (ko) | 2003-11-05 |
KR100544760B1 true KR100544760B1 (ko) | 2006-01-24 |
Family
ID=27678109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020037013443A KR100544760B1 (ko) | 2002-02-14 | 2003-02-13 | 배기 가스 처리 방법 및 처리 장치 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20050115674A1 (ja) |
JP (1) | JP4172938B2 (ja) |
KR (1) | KR100544760B1 (ja) |
CN (1) | CN1259524C (ja) |
AU (1) | AU2003211966A1 (ja) |
HK (1) | HK1066262A1 (ja) |
TW (1) | TW592797B (ja) |
WO (1) | WO2003069228A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4751091B2 (ja) * | 2005-04-08 | 2011-08-17 | 関東電化工業株式会社 | 排ガスの処理方法 |
GB0509944D0 (en) * | 2005-05-16 | 2005-06-22 | Boc Group Plc | Gas combustion apparatus |
JP4912163B2 (ja) * | 2007-01-12 | 2012-04-11 | ステラケミファ株式会社 | フッ化不動態膜を形成した炭素鋼又は特殊鋼及びその形成方法 |
JP5659491B2 (ja) * | 2009-01-30 | 2015-01-28 | セントラル硝子株式会社 | フッ素ガス発生装置を含む半導体製造設備 |
JP2010276307A (ja) * | 2009-05-29 | 2010-12-09 | Japan Pionics Co Ltd | 熱分解装置 |
CN102163643B (zh) * | 2010-10-09 | 2013-01-02 | 浙江哈氟龙新能源有限公司 | 废气处理热循环烘干*** |
KR101970807B1 (ko) * | 2012-08-20 | 2019-04-19 | 사빅 글로벌 테크놀러지스 비.브이. | 근적외선 분광법 및 케모메트릭스를 이용한 공정 스크러버 내의 부식제의 실시간 온라인 결정 |
JP6257442B2 (ja) * | 2014-05-15 | 2018-01-10 | 東京エレクトロン株式会社 | 減圧処理装置における排ガス防爆方法 |
FR3043080B1 (fr) * | 2015-11-04 | 2021-01-08 | Haffner Energy | Procede de production de gaz synthetique hypergaz |
CN106884134B (zh) * | 2015-12-16 | 2020-07-03 | 中国科学院上海应用物理研究所 | 一种镍基合金的表面钝化处理方法 |
GB2554406A (en) * | 2016-09-26 | 2018-04-04 | Edwards Korea Ltd | Plasma abatement |
CN106524191A (zh) * | 2016-10-31 | 2017-03-22 | 江苏优瑞德环境科技有限公司 | 含氟烷烃废气焚烧处理工艺及装置 |
EP4067300A4 (en) * | 2019-11-27 | 2024-01-03 | Resonac Corp | METHOD FOR MEASURING THE FLUORINE GAS CONCENTRATION IN HALOGEN FLUORIDE CONTAINING GAS USING A MASS SPECTROMETER |
CN113785190A (zh) * | 2019-11-27 | 2021-12-10 | 昭和电工株式会社 | 由紫外光谱法测定含卤素氟化物气体所含的氟气浓度的测定方法 |
CN112827341B (zh) * | 2020-12-25 | 2022-05-17 | 北京京仪自动化装备技术股份有限公司 | 一种半导体工艺的废气处理***及其废气的处理方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4236464A (en) * | 1978-03-06 | 1980-12-02 | Aerojet-General Corporation | Incineration of noxious materials |
JPS63166783A (ja) * | 1986-12-27 | 1988-07-09 | 三石耐火煉瓦株式会社 | 塵埃焼却炉用耐火煉瓦 |
DE68907366T2 (de) * | 1988-04-11 | 1993-12-02 | Mitsui Toatsu Chemicals | Verfahren zur Raffinierung von Stickstofftrifluoridgas. |
JPH01261208A (ja) * | 1988-04-11 | 1989-10-18 | Mitsui Toatsu Chem Inc | 三弗化窒素ガスの精製方法 |
US5009963A (en) * | 1988-07-20 | 1991-04-23 | Tadahiro Ohmi | Metal material with film passivated by fluorination and apparatus composed of the metal material |
FR2667134B1 (fr) * | 1990-09-24 | 1995-07-21 | Pavese Guy | Procede d'amelioration de la combustion pour bruleur a air souffle et moyens destines a le mettre en óoeuvre. |
US5510093A (en) * | 1994-07-25 | 1996-04-23 | Alzeta Corporation | Combustive destruction of halogenated compounds |
JPH1179871A (ja) * | 1997-08-27 | 1999-03-23 | Harima Ceramic Co Ltd | 焼却炉の内張り構造 |
US6146606A (en) * | 1999-02-09 | 2000-11-14 | Showa Denko Kabushiki Kaisha | Reactive agent and process for decomposing nitrogen fluoride |
US6630421B1 (en) * | 1999-04-28 | 2003-10-07 | Showa Denko Kabushiki Kaisha | Reactive agent and process for decomposing fluorine compounds and use thereof |
JP3460122B2 (ja) * | 1999-07-14 | 2003-10-27 | 日本酸素株式会社 | 燃焼式除害装置及び燃焼式除害装置用バーナー |
JP4127447B2 (ja) * | 1999-08-26 | 2008-07-30 | 日新製鋼株式会社 | 耐高温腐食性に優れた焼却炉体および焼却炉付帯設備 |
KR100729253B1 (ko) * | 1999-11-02 | 2007-06-15 | 가부시키가이샤 에바라 세이사꾸쇼 | 배기가스처리용 연소기 |
-
2002
- 2002-02-14 JP JP2002037344A patent/JP4172938B2/ja not_active Expired - Fee Related
-
2003
- 2003-02-13 AU AU2003211966A patent/AU2003211966A1/en not_active Abandoned
- 2003-02-13 CN CNB038001454A patent/CN1259524C/zh not_active Expired - Fee Related
- 2003-02-13 KR KR1020037013443A patent/KR100544760B1/ko not_active IP Right Cessation
- 2003-02-13 WO PCT/JP2003/001507 patent/WO2003069228A1/ja active Application Filing
- 2003-02-13 US US10/474,765 patent/US20050115674A1/en not_active Abandoned
- 2003-02-14 TW TW092103139A patent/TW592797B/zh not_active IP Right Cessation
-
2004
- 2004-11-18 HK HK04109106A patent/HK1066262A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20050115674A1 (en) | 2005-06-02 |
TW592797B (en) | 2004-06-21 |
CN1498328A (zh) | 2004-05-19 |
JP4172938B2 (ja) | 2008-10-29 |
CN1259524C (zh) | 2006-06-14 |
WO2003069228A1 (fr) | 2003-08-21 |
KR20030085596A (ko) | 2003-11-05 |
AU2003211966A1 (en) | 2003-09-04 |
JP2003236337A (ja) | 2003-08-26 |
HK1066262A1 (en) | 2005-03-18 |
TW200303236A (en) | 2003-09-01 |
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