HK1066262A1 - Method for treating exhaust gas - Google Patents

Method for treating exhaust gas

Info

Publication number: HK1066262A1
Authority: HK; Hong Kong
Prior art keywords: exhaust gas; treating exhaust; treating; gas; exhaust
Prior art date: 2002-02-14

Application number

HK04109106A

Other languages

English (en)

Inventor

Hiroyasu Taguchi

Yasuyiki Hoshino

Byoung-Sup Park

Bingzhe Jin

Original Assignee

Showa Denko Kk

Koike Sanso Kogyo Kk

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-02-14

Filing date

2004-11-18

Publication date

2005-03-18

2004-11-18 Application filed by Showa Denko Kk, Koike Sanso Kogyo Kk filed Critical Showa Denko Kk

2005-03-18 Publication of HK1066262A1 publication Critical patent/HK1066262A1/xx

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2215/00—Preventing emissions
- F23J2215/30—Halogen; Compounds thereof

Landscapes

Engineering & Computer Science (AREA)
Environmental & Geological Engineering (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Treating Waste Gases (AREA)
Incineration Of Waste (AREA)
Drying Of Semiconductors (AREA)

HK04109106A 2002-02-14 2004-11-18 Method for treating exhaust gas HK1066262A1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2002037344A JP4172938B2 (ja)	2002-02-14	2002-02-14	排ガスの処理方法および処理装置
PCT/JP2003/001507 WO2003069228A1 (fr)	2002-02-14	2003-02-13	Procede de traitement de gaz d'echappement

Publications (1)

Publication Number	Publication Date
HK1066262A1 true HK1066262A1 (en)	2005-03-18

Family

ID=27678109

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
HK04109106A HK1066262A1 (en)	2002-02-14	2004-11-18	Method for treating exhaust gas

Country Status (8)

Country	Link
US (1)	US20050115674A1 (xx)
JP (1)	JP4172938B2 (xx)
KR (1)	KR100544760B1 (xx)
CN (1)	CN1259524C (xx)
AU (1)	AU2003211966A1 (xx)
HK (1)	HK1066262A1 (xx)
TW (1)	TW592797B (xx)
WO (1)	WO2003069228A1 (xx)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4751091B2 (ja) *	2005-04-08	2011-08-17	関東電化工業株式会社	排ガスの処理方法
GB0509944D0 (en) *	2005-05-16	2005-06-22	Boc Group Plc	Gas combustion apparatus
JP4912163B2 (ja) *	2007-01-12	2012-04-11	ステラケミファ株式会社	フッ化不動態膜を形成した炭素鋼又は特殊鋼及びその形成方法
JP5659491B2 (ja) *	2009-01-30	2015-01-28	セントラル硝子株式会社	フッ素ガス発生装置を含む半導体製造設備
JP2010276307A (ja) *	2009-05-29	2010-12-09	Japan Pionics Co Ltd	熱分解装置
CN102163643B (zh) *	2010-10-09	2013-01-02	浙江哈氟龙新能源有限公司	废气处理热循环烘干***
KR101970807B1 (ko) *	2012-08-20	2019-04-19	사빅 글로벌 테크놀러지스 비.브이.	근적외선 분광법 및 케모메트릭스를 이용한 공정 스크러버 내의 부식제의 실시간 온라인 결정
JP6257442B2 (ja) *	2014-05-15	2018-01-10	東京エレクトロン株式会社	減圧処理装置における排ガス防爆方法
FR3043080B1 (fr) *	2015-11-04	2021-01-08	Haffner Energy	Procede de production de gaz synthetique hypergaz
CN106884134B (zh) *	2015-12-16	2020-07-03	中国科学院上海应用物理研究所	一种镍基合金的表面钝化处理方法
GB2554406A (en) *	2016-09-26	2018-04-04	Edwards Korea Ltd	Plasma abatement
CN106524191A (zh) *	2016-10-31	2017-03-22	江苏优瑞德环境科技有限公司	含氟烷烃废气焚烧处理工艺及装置
EP4067300A4 (en) *	2019-11-27	2024-01-03	Resonac Corp	METHOD FOR MEASURING THE FLUORINE GAS CONCENTRATION IN HALOGEN FLUORIDE CONTAINING GAS USING A MASS SPECTROMETER
CN113785190A (zh) *	2019-11-27	2021-12-10	昭和电工株式会社	由紫外光谱法测定含卤素氟化物气体所含的氟气浓度的测定方法
CN112827341B (zh) *	2020-12-25	2022-05-17	北京京仪自动化装备技术股份有限公司	一种半导体工艺的废气处理***及其废气的处理方法

Family Cites Families (13)

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US4236464A (en) *	1978-03-06	1980-12-02	Aerojet-General Corporation	Incineration of noxious materials
JPS63166783A (ja) *	1986-12-27	1988-07-09	三石耐火煉瓦株式会社	塵埃焼却炉用耐火煉瓦
DE68907366T2 (de) *	1988-04-11	1993-12-02	Mitsui Toatsu Chemicals	Verfahren zur Raffinierung von Stickstofftrifluoridgas.
JPH01261208A (ja) *	1988-04-11	1989-10-18	Mitsui Toatsu Chem Inc	三弗化窒素ガスの精製方法
US5009963A (en) *	1988-07-20	1991-04-23	Tadahiro Ohmi	Metal material with film passivated by fluorination and apparatus composed of the metal material
FR2667134B1 (fr) *	1990-09-24	1995-07-21	Pavese Guy	Procede d'amelioration de la combustion pour bruleur a air souffle et moyens destines a le mettre en óoeuvre.
US5510093A (en) *	1994-07-25	1996-04-23	Alzeta Corporation	Combustive destruction of halogenated compounds
JPH1179871A (ja) *	1997-08-27	1999-03-23	Harima Ceramic Co Ltd	焼却炉の内張り構造
US6146606A (en) *	1999-02-09	2000-11-14	Showa Denko Kabushiki Kaisha	Reactive agent and process for decomposing nitrogen fluoride
US6630421B1 (en) *	1999-04-28	2003-10-07	Showa Denko Kabushiki Kaisha	Reactive agent and process for decomposing fluorine compounds and use thereof
JP3460122B2 (ja) *	1999-07-14	2003-10-27	日本酸素株式会社	燃焼式除害装置及び燃焼式除害装置用バーナー
JP4127447B2 (ja) *	1999-08-26	2008-07-30	日新製鋼株式会社	耐高温腐食性に優れた焼却炉体および焼却炉付帯設備
KR100729253B1 (ko) *	1999-11-02	2007-06-15	가부시키가이샤 에바라 세이사꾸쇼	배기가스처리용 연소기

2002
- 2002-02-14 JP JP2002037344A patent/JP4172938B2/ja not_active Expired - Fee Related
2003
- 2003-02-13 AU AU2003211966A patent/AU2003211966A1/en not_active Abandoned
- 2003-02-13 CN CNB038001454A patent/CN1259524C/zh not_active Expired - Fee Related
- 2003-02-13 KR KR1020037013443A patent/KR100544760B1/ko not_active IP Right Cessation
- 2003-02-13 WO PCT/JP2003/001507 patent/WO2003069228A1/ja active Application Filing
- 2003-02-13 US US10/474,765 patent/US20050115674A1/en not_active Abandoned
- 2003-02-14 TW TW092103139A patent/TW592797B/zh not_active IP Right Cessation
2004
- 2004-11-18 HK HK04109106A patent/HK1066262A1/xx not_active IP Right Cessation

Also Published As

Publication number	Publication date
US20050115674A1 (en)	2005-06-02
TW592797B (en)	2004-06-21
CN1498328A (zh)	2004-05-19
JP4172938B2 (ja)	2008-10-29
CN1259524C (zh)	2006-06-14
WO2003069228A1 (fr)	2003-08-21
KR20030085596A (ko)	2003-11-05
AU2003211966A1 (en)	2003-09-04
JP2003236337A (ja)	2003-08-26
KR100544760B1 (ko)	2006-01-24
TW200303236A (en)	2003-09-01

Legal Events

Date	Code	Title	Description
2012-09-21	PC	Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)	Effective date: 20120213

Publication	Publication Date	Title
EP1544425A4 (en)	2005-09-07	DEVICE FOR TREATING EXHAUST GAS
AU2003280632A1 (en)	2004-06-07	Exhaust gas treating apparatus
AU2003275215A8 (en)	2004-04-23	Exhaust gas treatment device and method for making the same
EP1514013A4 (en)	2009-12-02	PROCESS FOR EXHAUST EMISSION CONTROL
EP1450936A4 (en)	2006-02-01	METHOD AND DEVICE FOR TREATMENT OF EXHAUST GAS
EP1491249A4 (en)	2005-04-13	FILTER FOR DECONTAMINATION OF EXHAUST GASES
EP1716912A4 (en)	2008-02-06	METHOD AND APPARATUS FOR TREATING COMBUSTION GAS
AU2003244203A8 (en)	2004-01-23	Method for producing catalyst for clarifying exhaust gas
AU2003299290A8 (en)	2004-06-18	Exhaust gas system
ZA200610604B (en)	2012-06-27	Exhaust gas treatment device and method for making the same
EP1683565A4 (en)	2007-10-17	EXHAUST TREATMENT PROCESS AND TREATMENT DEVICE
EP1579911A4 (en)	2010-06-02	EXHAUST GAS CLEANING CATALYST AND METHOD FOR CLEANING EXHAUST GAS
AU2003287210A1 (en)	2004-06-18	Method for treating emissions
GB0326707D0 (en)	2003-12-17	Exhaust gas treatment
EP1637717A4 (en)	2011-07-20	EXHAUST GAS CLEANING PROCEDURE AND EMISSION CONTROL SYSTEM
HK1066262A1 (en)	2005-03-18	Method for treating exhaust gas
EP1570903A4 (en)	2010-06-02	EXHAUST GAS PURIFYING CATALYST AND EXHAUST GAS PURIFYING METHOD
IL165326A0 (en)	2006-01-15	Method and apparatus for gas purification
EP1610883A4 (en)	2007-06-13	METHOD AND APPARATUS FOR TREATING EXHAUST GAS
AU2002319276A1 (en)	2003-01-21	Method for purifying exhaust gases
GB0314243D0 (en)	2003-07-23	Engine exhaust gas treatment
EP1518598A4 (en)	2006-10-04	PROCESS FOR EXHAUST GAS PURIFICATION
GB0207284D0 (en)	2002-05-08	Semiconductor exhaust gas treatment
PL376932A1 (pl)	2006-01-09	Sposób traktowania żużla
GB0106452D0 (en)	2001-05-02	Apparatus and method for treating exhaust emissions