CN1259524C - 废气处理方法和处理*** - Google Patents

废气处理方法和处理*** Download PDF

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Publication number
CN1259524C
CN1259524C CNB038001454A CN03800145A CN1259524C CN 1259524 C CN1259524 C CN 1259524C CN B038001454 A CNB038001454 A CN B038001454A CN 03800145 A CN03800145 A CN 03800145A CN 1259524 C CN1259524 C CN 1259524C
Authority
CN
China
Prior art keywords
gas
fluoride
combustion chamber
nickel
passivating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB038001454A
Other languages
English (en)
Chinese (zh)
Other versions
CN1498328A (zh
Inventor
田口裕康
星野恭之
朴炳涉
金炳哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koike Sanso Kogyo Co Ltd
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Koike Sanso Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK, Koike Sanso Kogyo Co Ltd filed Critical Showa Denko KK
Publication of CN1498328A publication Critical patent/CN1498328A/zh
Application granted granted Critical
Publication of CN1259524C publication Critical patent/CN1259524C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
  • Drying Of Semiconductors (AREA)
CNB038001454A 2002-02-14 2003-02-13 废气处理方法和处理*** Expired - Fee Related CN1259524C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP37344/2002 2002-02-14
JP2002037344A JP4172938B2 (ja) 2002-02-14 2002-02-14 排ガスの処理方法および処理装置

Publications (2)

Publication Number Publication Date
CN1498328A CN1498328A (zh) 2004-05-19
CN1259524C true CN1259524C (zh) 2006-06-14

Family

ID=27678109

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038001454A Expired - Fee Related CN1259524C (zh) 2002-02-14 2003-02-13 废气处理方法和处理***

Country Status (8)

Country Link
US (1) US20050115674A1 (ja)
JP (1) JP4172938B2 (ja)
KR (1) KR100544760B1 (ja)
CN (1) CN1259524C (ja)
AU (1) AU2003211966A1 (ja)
HK (1) HK1066262A1 (ja)
TW (1) TW592797B (ja)
WO (1) WO2003069228A1 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4751091B2 (ja) * 2005-04-08 2011-08-17 関東電化工業株式会社 排ガスの処理方法
GB0509944D0 (en) * 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
JP4912163B2 (ja) * 2007-01-12 2012-04-11 ステラケミファ株式会社 フッ化不動態膜を形成した炭素鋼又は特殊鋼及びその形成方法
JP5659491B2 (ja) * 2009-01-30 2015-01-28 セントラル硝子株式会社 フッ素ガス発生装置を含む半導体製造設備
JP2010276307A (ja) * 2009-05-29 2010-12-09 Japan Pionics Co Ltd 熱分解装置
CN102163643B (zh) * 2010-10-09 2013-01-02 浙江哈氟龙新能源有限公司 废气处理热循环烘干***
KR101970807B1 (ko) * 2012-08-20 2019-04-19 사빅 글로벌 테크놀러지스 비.브이. 근적외선 분광법 및 케모메트릭스를 이용한 공정 스크러버 내의 부식제의 실시간 온라인 결정
JP6257442B2 (ja) * 2014-05-15 2018-01-10 東京エレクトロン株式会社 減圧処理装置における排ガス防爆方法
FR3043080B1 (fr) * 2015-11-04 2021-01-08 Haffner Energy Procede de production de gaz synthetique hypergaz
CN106884134B (zh) * 2015-12-16 2020-07-03 中国科学院上海应用物理研究所 一种镍基合金的表面钝化处理方法
GB2554406A (en) * 2016-09-26 2018-04-04 Edwards Korea Ltd Plasma abatement
CN106524191A (zh) * 2016-10-31 2017-03-22 江苏优瑞德环境科技有限公司 含氟烷烃废气焚烧处理工艺及装置
EP4067300A4 (en) * 2019-11-27 2024-01-03 Resonac Corp METHOD FOR MEASURING THE FLUORINE GAS CONCENTRATION IN HALOGEN FLUORIDE CONTAINING GAS USING A MASS SPECTROMETER
CN113785190A (zh) * 2019-11-27 2021-12-10 昭和电工株式会社 由紫外光谱法测定含卤素氟化物气体所含的氟气浓度的测定方法
CN112827341B (zh) * 2020-12-25 2022-05-17 北京京仪自动化装备技术股份有限公司 一种半导体工艺的废气处理***及其废气的处理方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4236464A (en) * 1978-03-06 1980-12-02 Aerojet-General Corporation Incineration of noxious materials
JPS63166783A (ja) * 1986-12-27 1988-07-09 三石耐火煉瓦株式会社 塵埃焼却炉用耐火煉瓦
DE68907366T2 (de) * 1988-04-11 1993-12-02 Mitsui Toatsu Chemicals Verfahren zur Raffinierung von Stickstofftrifluoridgas.
JPH01261208A (ja) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
US5009963A (en) * 1988-07-20 1991-04-23 Tadahiro Ohmi Metal material with film passivated by fluorination and apparatus composed of the metal material
FR2667134B1 (fr) * 1990-09-24 1995-07-21 Pavese Guy Procede d'amelioration de la combustion pour bruleur a air souffle et moyens destines a le mettre en óoeuvre.
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
JPH1179871A (ja) * 1997-08-27 1999-03-23 Harima Ceramic Co Ltd 焼却炉の内張り構造
US6146606A (en) * 1999-02-09 2000-11-14 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing nitrogen fluoride
US6630421B1 (en) * 1999-04-28 2003-10-07 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing fluorine compounds and use thereof
JP3460122B2 (ja) * 1999-07-14 2003-10-27 日本酸素株式会社 燃焼式除害装置及び燃焼式除害装置用バーナー
JP4127447B2 (ja) * 1999-08-26 2008-07-30 日新製鋼株式会社 耐高温腐食性に優れた焼却炉体および焼却炉付帯設備
KR100729253B1 (ko) * 1999-11-02 2007-06-15 가부시키가이샤 에바라 세이사꾸쇼 배기가스처리용 연소기

Also Published As

Publication number Publication date
US20050115674A1 (en) 2005-06-02
TW592797B (en) 2004-06-21
CN1498328A (zh) 2004-05-19
JP4172938B2 (ja) 2008-10-29
WO2003069228A1 (fr) 2003-08-21
KR20030085596A (ko) 2003-11-05
AU2003211966A1 (en) 2003-09-04
JP2003236337A (ja) 2003-08-26
HK1066262A1 (en) 2005-03-18
KR100544760B1 (ko) 2006-01-24
TW200303236A (en) 2003-09-01

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