KR100508470B1 - 액정패널용기판과액정패널및그것을사용한전자기기와투사형표시장치 - Google Patents
액정패널용기판과액정패널및그것을사용한전자기기와투사형표시장치 Download PDFInfo
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- KR100508470B1 KR100508470B1 KR1019970054084A KR19970054084A KR100508470B1 KR 100508470 B1 KR100508470 B1 KR 100508470B1 KR 1019970054084 A KR1019970054084 A KR 1019970054084A KR 19970054084 A KR19970054084 A KR 19970054084A KR 100508470 B1 KR100508470 B1 KR 100508470B1
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
- G02F1/133555—Transflectors
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
- H04N9/3105—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying all colours simultaneously, e.g. by using two or more electronic spatial light modulators
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7441—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of liquid crystal cells
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Abstract
Description
Claims (19)
- 기판 위에 청색광을 반사하기 위한 반사전극을 매트릭스 형상으로 배치하여 이루어지고, 상기 반사전극에 대응하여 트랜지스터가 형성되며 상기 트랜지스터를 통해 상기 반사전극에 전압이 인가되도록 구성되고, 매트릭스 형상으로 배치된 상기 청색광을 반사하기 위한 반사전극 위에는, 패시베이션막이 형성되며 상기 패시 베이션막은 산화 실리콘으로 형성되어 이루어지고, 상기 패시베이션막은 900 내지 1200 옹스트롬의 막두께를 갖는 것을 특징으로 하는 액정 패널용 기판.
- 기판 위에 녹색광을 반사하기 위한 반사전극을 매트릭스 형상으로 배치하여 이루어지고, 상기 반사전극에 대응하여 트랜지스터가 형성되며 상기 트랜지스터를 통해 상기 반사전극에 전압이 인가되도록 구성되고, 매트릭스 형상으로 배치된 상기 녹색광을 반사하기 위한 반사전극 위에는, 패시베이션막이 형성되며 상기 패시 베이션막은 산화 실리콘으로 형성되어 이루어지고, 상기 패시베이션막은 1200 내지 1600 옹스트롬의 막두께를 갖는 것을 특징으로 하는 액정 패널용 기판.
- 기판 위에 적색광을 반사하기 위한 반사전극을 매트릭스 형상으로 배치하여 이루어지고, 상기 반사전극에 대응하여 트랜지스터가 형성되며 상기 트랜지스터를 통해 상기 반사전극에 전압이 인가되도록 구성되고, 매트릭스 형상으로 배치된 상기 적색광을 반사하기 위한 반사전극 위에는, 패시베이션막이 형성되며 상기 패시베이션막은 산화 실리콘으로 형성되어 이루어지고, 상기 패시베이션막은 1300 내지 1900 옹스트롬의 막두께를 갖는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 중 어느 한 항에 있어서,상기 패시베이션막은 입사되는 색광의 파장에 대한 상기 반사전극의 반사율의 특성 변화에 있어서, 반사율의 변화가 약 1% 이내에 포함될 정도로 선택된 막두께인 것을 특징으로 하는 액정 패널용 기판.
- 적색광을 반사하기 위한 반사전극과, 녹색광을 반사하기 위한 반사전극과, 청색광을 반사하기 위한 반사전극을 구비한 액정 패널용 기판으로서,각 상기 반사전극 위에는 패시베이션막이 형성되고, 상기 패시베이션막은 산화 실리콘으로 형성되어 이루어지고, 상기 적색광을 반사하기 위한 반사전극 위에 형성된 상기 패시베이션막은 1300 내지 1900 옹스트롬의 막두께를 가지고, 상기 녹색광을 반사하기 위한 반사전극 위에 형성된 상기 패시베이션막은 1200 내지 1600 옹스트롬의 막두께를 가지며, 상기 청색광을 반사하기 위한 반사전극 위에 형성된 상기 패시베이션막은 900 내지 1200 옹스트롬의 막두께를 갖는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 패시베이션막 위에는 막두께가 300 내지 1400 옹스트롬의 배향막이 형성되는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극 하부층의 층간 절연막에는 컨택트홀이 형성되어 있고, 상기 컨택트홀 내에는 기둥형상의 접속 플러그가 충전되어 있는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극과 그 아래의 금속층 사이에 질화 실리콘으로 이루어진 층간 절연막이 형성되는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극과 그 아래의 금속층 사이의 층간 절연막이 질화 실리콘막과 산화 실리콘막으로 구성되는 동시에, 상기 산화 실리콘막 위에 상기 질화 실리콘막이 형성된 적층 구조로 하는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극과 그 아래의 금속층 사이의 층간 절연막이 질화 실리콘막과 산화 실리콘막으로 구성되는 동시에, 상기 질화 실리콘막 위에 상기 산화 실리콘막이 형성된 적층 구조로 하는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극 아래에 차광층이 되는 금속층을 형성하고, 상기 반사전극과 상기 차광층 사이에 층간 절연막을 구비하여 이루어진 것을 특징으로 하는 액정 패널용 기판.
- 제 11 항에 있어서,상기 반사전극 및 이것에 접속된 상기 트랜지스터로 이루어진 화소가 매트릭스 형상으로 배치된 화소영역을 형성하고, 상기 화소영역 주변의 상기 기판 위에 주변회로를 설치하여 이루어진 액정 패널용 기판에 있어서,상기 화소영역의 상기 금속층과 동일한 층이 상기 주변회로의 접속 배선층과 상기 주변회로 위에 배치된 제 1 차광층으로서 사용되고, 상기 제 1 차광층 위에는 상기 반사전극과 동일한 층으로 이루어진 제 2 차광층이 배치되는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극 및 이것에 접속된 제 1 트랜지스터 및 축적용량으로 이루어진 화소가 매트릭스 형상으로 배치된 화소영역을 형성하고, 상기 화소영역 주변의 상기 기판 위에 제 2 트랜지스터로 구성된 주변회로를 설치하여 이루어진 액정 패널용 기판에 있어서,상기 축적용량의 절연막 또는 상기 제 2 트랜지스터의 게이트 절연막은 상기 제 1 트랜지스터의 게이트 절연막의 3분의 1 내지 5분의 1의 막두께를 갖는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극 및 이것에 접속된 상기 트랜지스터로 이루어진 화소가 매트릭스 형상으로 배치된 화소영역이 형성된 액정 패널용 기판에 있어서,상기 화소영역의 주변영역에 형성된 층간 절연막과 상기 주변영역을 차광하는 금속층의 적층체 단부에는 상기 산화 실리콘막으로 이루어진 패시베이션막 위에 질화 실리콘막을 형성한 적층 구조가 형성되어 있는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 있어서,상기 반사전극 및 이것에 접속된 상기 트랜지스터로 이루어진 화소가 매트릭스 형상으로 배치된 화소영역이 형성되는 액정 패널용 기판에 있어서,상기 화소영역의 상측에는 산화 실리콘막으로 이루어진 패시베이션막이 형성되고, 상기 화소영역의 주변영역에는 질화 실리콘막으로 이루어진 패시베이션막이 형성되어 있는 것을 특징으로 하는 액정 패널용 기판.
- 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 기재된 상기 액정 패널용 기판과 대향전극을 구비하는 입사측의 투명 기판이 적당한 간격을 두고 대향 배치되는 동시에, 상기 액정 패널용 기판과 상기 투명 기판의 간극 내에 액정이 봉입되어 구성되는 것을 특징으로 하는 액정 패널.
- 제 16 항에 기재된 액정 패널을 표시부로서 구비하는 것을 특징으로 하는 전자기기.
- 광원;상기 광원으로부터의 광을 변조하는 제 1 항 내지 제 3 항 또는 제 5 항 중 어느 한 항에 기재된 구성의 반사형 액정 패널; 및상기 반사형 액정 패널에 의해 변조된 광을 투사하는 투사렌즈를 구비하고 있는 것을 특징으로 하는 투사형 표시장치.
- 광원의 광을 세가지 색광으로 분광하는 색분리수단과, 상기 색분리수단에 의해 분리된 적색광을 변조하는 제 1 액정 패널과, 상기 색분리수단에 의해 분리된 녹색광을 변조하는 제 2 액정 패널과, 상기 색분리수단에 의해 분리된 청색광을 변조하는 제 3 액정 패널을 구비하고, 상기 제 1 액정 패널, 상기 제 2 액정 패널 및 상기 제 3 액정 패널에 의해 변조된 광을 합성하여 투사하는 투사형 표시장치에 있어서,상기 제 1 액정 패널은 적색광을 반사하기 위한 반사전극과, 이 반사전극 위에 형성되며 산화 실리콘으로 형성된 패시베이션막을 구비하고, 이 패시베이션막이 1300 내지 1900 옹스트롬의 막두께를 가지며 이루어지고,상기 제 2 액정 패널은 녹색광을 반사하기 위한 반사전극과, 이 반사전극 위에 형성되며 산화 실리콘으로 형성된 패시베이션막을 구비하고, 이 패시베이션막이 1200 내지 1600 옹스트롬의 막두께를 가지며 이루어지고,상기 제 3 반사형 액정 패널은 청색광을 반사하기 위한 반사전극과, 이 반사 전극 위에 형성되며 산화 실리콘으로 형성된 패시베이션막을 구비하고, 이 패시베이션막이 900 내지 1200 옹스트롬의 막두께를 가지며 이루어진 것을 특징으로 하는 투사형 표시장치.
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- 1997-10-21 EP EP08075566A patent/EP1967899B1/en not_active Expired - Lifetime
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