KR100209345B1 - A semiconductor device and a method of manufacturing the same. - Google Patents

A semiconductor device and a method of manufacturing the same.

Info

Publication number
KR100209345B1
KR100209345B1 KR19980028220A KR19980028220A KR100209345B1 KR 100209345 B1 KR100209345 B1 KR 100209345B1 KR 19980028220 A KR19980028220 A KR 19980028220A KR 19980028220 A KR19980028220 A KR 19980028220A KR 100209345 B1 KR100209345 B1 KR 100209345B1
Authority
KR
South Korea
Prior art keywords
manufacturing
same
semiconductor device
semiconductor
Prior art date
Application number
KR19980028220A
Other languages
English (en)
Inventor
Koichi Hashimoto
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of KR100209345B1 publication Critical patent/KR100209345B1/ko

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/12Static random access memory [SRAM] devices comprising a MOSFET load element
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/903FET configuration adapted for use as static memory cell
KR19980028220A 1993-09-20 1998-07-13 A semiconductor device and a method of manufacturing the same. KR100209345B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25638693A JP3256048B2 (ja) 1993-09-20 1993-09-20 半導体装置及びその製造方法
KR1019940023781A KR0185432B1 (ko) 1993-09-20 1994-09-17 반도체장치 및 그 제조방법

Publications (1)

Publication Number Publication Date
KR100209345B1 true KR100209345B1 (en) 1999-07-15

Family

ID=17291962

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1019940023781A KR0185432B1 (ko) 1993-09-20 1994-09-17 반도체장치 및 그 제조방법
KR19980028220A KR100209345B1 (en) 1993-09-20 1998-07-13 A semiconductor device and a method of manufacturing the same.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1019940023781A KR0185432B1 (ko) 1993-09-20 1994-09-17 반도체장치 및 그 제조방법

Country Status (5)

Country Link
US (2) US5717254A (ko)
EP (1) EP0645820B1 (ko)
JP (1) JP3256048B2 (ko)
KR (2) KR0185432B1 (ko)
DE (1) DE69433337T2 (ko)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3256048B2 (ja) * 1993-09-20 2002-02-12 富士通株式会社 半導体装置及びその製造方法
US5395785A (en) * 1993-12-17 1995-03-07 Sgs-Thomson Microelectronics, Inc. SRAM cell fabrication with interlevel dielectric planarization
KR0165370B1 (ko) 1995-12-22 1999-02-01 김광호 차아지 업에 의한 반도체장치의 손상을 방지하는 방법
KR100198634B1 (ko) * 1996-09-07 1999-06-15 구본준 반도체 소자의 배선구조 및 제조방법
JPH10199991A (ja) * 1996-12-09 1998-07-31 Texas Instr Inc <Ti> 基板にコンタクトを形成する方法及びそのコンタクト
US6034401A (en) * 1998-02-06 2000-03-07 Lsi Logic Corporation Local interconnection process for preventing dopant cross diffusion in shared gate electrodes
JP3120389B2 (ja) * 1998-04-16 2000-12-25 日本電気株式会社 半導体装置
US6222240B1 (en) 1998-07-22 2001-04-24 Advanced Micro Devices, Inc. Salicide and gate dielectric formed from a single layer of refractory metal
US6140167A (en) * 1998-08-18 2000-10-31 Advanced Micro Devices, Inc. High performance MOSFET and method of forming the same using silicidation and junction implantation prior to gate formation
US6410967B1 (en) 1998-10-15 2002-06-25 Advanced Micro Devices, Inc. Transistor having enhanced metal silicide and a self-aligned gate electrode
US6084280A (en) * 1998-10-15 2000-07-04 Advanced Micro Devices, Inc. Transistor having a metal silicide self-aligned to the gate
US7098506B2 (en) * 2000-06-28 2006-08-29 Renesas Technology Corp. Semiconductor device and method for fabricating the same
JP2000196075A (ja) * 1998-12-25 2000-07-14 Hitachi Ltd 半導体装置及びその製造方法
WO2001004946A1 (en) * 1999-07-08 2001-01-18 Hitachi, Ltd. Semiconductor device and method for producing the same
JP3467689B2 (ja) 2000-05-31 2003-11-17 セイコーエプソン株式会社 静電気保護回路が内蔵された半導体装置
JP3675303B2 (ja) 2000-05-31 2005-07-27 セイコーエプソン株式会社 静電気保護回路が内蔵された半導体装置及びその製造方法
US6535413B1 (en) * 2000-08-31 2003-03-18 Micron Technology, Inc. Method of selectively forming local interconnects using design rules
TW594993B (en) 2001-02-16 2004-06-21 Sanyo Electric Co Semiconductor device and manufacturing process therefor
JP2003133444A (ja) * 2001-08-10 2003-05-09 Mitsubishi Electric Corp 半導体記憶装置およびその製造方法
KR20030079298A (ko) * 2002-04-03 2003-10-10 삼성전자주식회사 반도체 소자 및 그 제조방법
US7936062B2 (en) * 2006-01-23 2011-05-03 Tessera Technologies Ireland Limited Wafer level chip packaging
WO2010116653A1 (ja) * 2009-03-30 2010-10-14 Jsr株式会社 着色組成物、カラーフィルタ及びカラー液晶表示素子
US8587068B2 (en) * 2012-01-26 2013-11-19 International Business Machines Corporation SRAM with hybrid FinFET and planar transistors

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7604986A (nl) * 1976-05-11 1977-11-15 Philips Nv Werkwijze voor het vervaardigen van een halfgeleider- inrichting, en inrichting vervaardigd door toe- passing van de werkwijze.
JPS5519857A (en) * 1978-07-28 1980-02-12 Nec Corp Semiconductor
US4384301A (en) * 1979-11-07 1983-05-17 Texas Instruments Incorporated High performance submicron metal-oxide-semiconductor field effect transistor device structure
JPS59121868A (ja) * 1982-12-28 1984-07-14 Toshiba Corp 相補型misスタテイツクメモリセル
US4545116A (en) * 1983-05-06 1985-10-08 Texas Instruments Incorporated Method of forming a titanium disilicide
DE3686490T2 (de) * 1985-01-22 1993-03-18 Fairchild Semiconductor Halbleiterstruktur.
CA1258320A (en) * 1985-04-01 1989-08-08 Madhukar B. Vora Small contactless ram cell
US5010032A (en) * 1985-05-01 1991-04-23 Texas Instruments Incorporated Process for making CMOS device with both P+ and N+ gates including refractory metal silicide and nitride interconnects
US4804636A (en) * 1985-05-01 1989-02-14 Texas Instruments Incorporated Process for making integrated circuits having titanium nitride triple interconnect
US4657628A (en) * 1985-05-01 1987-04-14 Texas Instruments Incorporated Process for patterning local interconnects
US4975756A (en) * 1985-05-01 1990-12-04 Texas Instruments Incorporated SRAM with local interconnect
US4821085A (en) * 1985-05-01 1989-04-11 Texas Instruments Incorporated VLSI local interconnect structure
US4890141A (en) * 1985-05-01 1989-12-26 Texas Instruments Incorporated CMOS device with both p+ and n+ gates
US4746219A (en) * 1986-03-07 1988-05-24 Texas Instruments Incorporated Local interconnect
US4675073A (en) * 1986-03-07 1987-06-23 Texas Instruments Incorporated Tin etch process
US4793896C1 (en) * 1988-02-22 2001-10-23 Texas Instruments Inc Method for forming local interconnects using chlorine bearing agents
US4957590A (en) * 1988-02-22 1990-09-18 Texas Instruments Incorporated Method for forming local interconnects using selective anisotropy
US5418179A (en) * 1988-05-31 1995-05-23 Yamaha Corporation Process of fabricating complementary inverter circuit having multi-level interconnection
US5196233A (en) * 1989-01-18 1993-03-23 Sgs-Thomson Microelectronics, Inc. Method for fabricating semiconductor circuits
JPH02202054A (ja) * 1989-01-31 1990-08-10 Texas Instr Japan Ltd 半導体装置及びその製造方法
US4980020A (en) * 1989-12-22 1990-12-25 Texas Instruments Incorporated Local interconnect etch technique
US5279990A (en) * 1990-03-02 1994-01-18 Motorola, Inc. Method of making a small geometry contact using sidewall spacers
JPH0463435A (ja) * 1990-07-03 1992-02-28 Fujitsu Ltd 半導体装置及びその製造方法
US5122225A (en) * 1990-11-21 1992-06-16 Texas Instruments Incorporated Selective etch method
JPH0541378A (ja) * 1991-03-15 1993-02-19 Mitsubishi Electric Corp 半導体装置およびその製造方法
US5190893A (en) * 1991-04-01 1993-03-02 Motorola Inc. Process for fabricating a local interconnect structure in a semiconductor device
DE69226987T2 (de) * 1991-05-03 1999-02-18 Sgs Thomson Microelectronics Lokalverbindungen für integrierte Schaltungen
US5298782A (en) * 1991-06-03 1994-03-29 Sgs-Thomson Microelectronics, Inc. Stacked CMOS SRAM cell with polysilicon transistor load
KR930020669A (ko) * 1992-03-04 1993-10-20 김광호 고집적 반도체장치 및 그 제조방법
US5616934A (en) * 1993-05-12 1997-04-01 Micron Technology, Inc. Fully planarized thin film transistor (TFT) and process to fabricate same
JP3256048B2 (ja) * 1993-09-20 2002-02-12 富士通株式会社 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPH0794595A (ja) 1995-04-07
DE69433337D1 (de) 2003-12-24
EP0645820A2 (en) 1995-03-29
KR950010067A (ko) 1995-04-26
EP0645820B1 (en) 2003-11-19
DE69433337T2 (de) 2004-04-15
US5717254A (en) 1998-02-10
JP3256048B2 (ja) 2002-02-12
EP0645820A3 (en) 1996-07-31
KR0185432B1 (ko) 1999-03-20
US6160294A (en) 2000-12-12

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