JPS6181657U - - Google Patents
Info
- Publication number
- JPS6181657U JPS6181657U JP1984166348U JP16634884U JPS6181657U JP S6181657 U JPS6181657 U JP S6181657U JP 1984166348 U JP1984166348 U JP 1984166348U JP 16634884 U JP16634884 U JP 16634884U JP S6181657 U JPS6181657 U JP S6181657U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- light
- transmitting
- mask
- transparent mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Description
第１図は本考案の一実施例に係るマスクの断面
図、第２図は投影露光方式による片面露光工程の
断面図で、第３図は同じく両面露光工程の断面図
である。
４…半導体ウエーハ、５，５′…レジスト、６
，６′…凸レンズ、７，７′…光、９…透光性マ
スク、１１…パターン、１０，１２…透光板。
FIG. 1 is a sectional view of a mask according to an embodiment of the present invention, FIG. 2 is a sectional view of a single-sided exposure process using a projection exposure method, and FIG. 3 is a sectional view of a double-sided exposure process. 4...Semiconductor wafer, 5,5'...Resist, 6
, 6'... Convex lens, 7, 7'... Light, 9... Translucent mask, 11... Pattern, 10, 12... Translucent plate.
Claims (1)
なパターンが印刷されている透光性マスクを対向
・配置し、上記透光性マスクを透過した光をレン
ズを介して上記ウエーハ上に照射し、該ウエーハ
上に上記パターンを縮小して結像させる投影露光
方式による露光工程で用いられる透光性マスクに
おいて、上記パターンを２枚の透光板で挾み込み
サンドイツチ状に形成したことを特徴とするマス
ク。 A transparent mask on which an opaque pattern is printed is placed facing a semiconductor wafer coated with a resist, and the light transmitted through the transparent mask is irradiated onto the wafer through a lens. A light-transmitting mask used in an exposure process using a projection exposure method in which the pattern is reduced in size and formed into an image, characterized in that the pattern is sandwiched between two light-transmitting plates to form a sandwich-like pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984166348U JPS6181657U (en) | 1984-10-31 | 1984-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984166348U JPS6181657U (en) | 1984-10-31 | 1984-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6181657U true JPS6181657U (en) | 1986-05-30 |
Family
ID=30724169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984166348U Pending JPS6181657U (en) | 1984-10-31 | 1984-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6181657U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05134391A (en) * | 1991-11-14 | 1993-05-28 | Mitsubishi Electric Corp | Mask for exposing |
-
1984
- 1984-10-31 JP JP1984166348U patent/JPS6181657U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05134391A (en) * | 1991-11-14 | 1993-05-28 | Mitsubishi Electric Corp | Mask for exposing |
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