JPS62106237U - - Google Patents
Info
- Publication number
- JPS62106237U JPS62106237U JP1985202190U JP20219085U JPS62106237U JP S62106237 U JPS62106237 U JP S62106237U JP 1985202190 U JP1985202190 U JP 1985202190U JP 20219085 U JP20219085 U JP 20219085U JP S62106237 U JPS62106237 U JP S62106237U
- Authority
- JP
- Japan
- Prior art keywords
- glass plate
- transparent glass
- photolithography
- mask
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Description
第１図はこの発明の一実施例による写真製版用
マスクを用いた露光系を示す断面図、第２図は従
来のペリクル付きフクオトマスクを用いた露光系
を示す断面図である。
図に於て、１３はフオトマスク、１４は透明ガ
ラス板である。
FIG. 1 is a cross-sectional view showing an exposure system using a photolithographic mask according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing an exposure system using a conventional mask with a pellicle. In the figure, 13 is a photomask, and 14 is a transparent glass plate.
Claims (1)
ス板を密着してなる写真製版用マスク。 (2) 透明ガラス板は石英ガラスよりなることを
特徴とする実用新案登録請求の範囲第１項記載の
写真製版用マスク。[Claims for Utility Model Registration] (1) A mask for photolithography consisting of a transparent glass plate in close contact with the pattern-forming surface of a photomask. (2) The photolithography mask according to claim 1, wherein the transparent glass plate is made of quartz glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985202190U JPS62106237U (en) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985202190U JPS62106237U (en) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106237U true JPS62106237U (en) | 1987-07-07 |
Family
ID=31166339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985202190U Pending JPS62106237U (en) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106237U (en) |
-
1985
- 1985-12-24 JP JP1985202190U patent/JPS62106237U/ja active Pending
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