JPH01145125U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の露光装置の外観図、第２図は
第１図の試料、レンズ群、フオトマスク、照射源
の位置関係を示す図、第３図は従来の露光装置の
外観図である。 １……試料、２……レンズ群、３……フオトマ
スク、４……照射源、５……駆動機構。 Figure 1 is an external view of the exposure apparatus of the present invention, Figure 2 is a diagram showing the positional relationship of the sample, lens group, photomask, and irradiation source in Figure 1, and Figure 3 is an external view of a conventional exposure apparatus. . 1... Sample, 2... Lens group, 3... Photomask, 4... Irradiation source, 5... Drive mechanism.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 数μｍ〜十数μｍの厚さのフオトレジストを表
面に形成した矩形状の試料と、透明な硝子板又は
プラスチツクフイルムの一面に該試料に転写すべ
きパターンを形成したフオトマスクと、該試料と
該フオトマスクとの間に位置し、該フオトマスク
のパターンを該試料表面に結像させるレンズ群と
、水銀灯、キセノンランプ等の光源及び該光源か
らの光を平行にするレンズを内部に備え、その先
を該フオトマスク、該レンズ群を通して試料に照
射する照射源と、該フオトマスクと該試料とを光
源の照射方向に対し、直角に平行移動させる駆動
機構とを備えたことを特徴とする露光装置。 A rectangular sample on which a photoresist with a thickness of several μm to more than 10 μm is formed; a photomask with a pattern to be transferred to the sample formed on one side of a transparent glass plate or plastic film; A lens group located between the photomask and the image of the photomask pattern on the sample surface, a light source such as a mercury lamp or a xenon lamp, and a lens that parallelizes the light from the light source are provided inside. An exposure apparatus comprising: an irradiation source that irradiates a sample through the photomask and the lens group; and a drive mechanism that moves the photomask and the sample in parallel at right angles to the irradiation direction of the light source.