JPS6415236U - - Google Patents
Info
- Publication number
- JPS6415236U JPS6415236U JP1987109333U JP10933387U JPS6415236U JP S6415236 U JPS6415236 U JP S6415236U JP 1987109333 U JP1987109333 U JP 1987109333U JP 10933387 U JP10933387 U JP 10933387U JP S6415236 U JPS6415236 U JP S6415236U
- Authority
- JP
- Japan
- Prior art keywords
- light
- shielding pattern
- pattern member
- reticle
- embedded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
Description
第１図は本考案の実施例に係るレチクルの縦断
面図、第２図は従来のレチクルの縦断面図、第３
図は従来のレチクルに装着されたペリクルを示す
縦断面図である。
１；ガラス板、２；クロムパターン、３；異物
、４；ペリクル、７；ガラス板、８；クロムパタ
ーン、９；中心面。
FIG. 1 is a vertical cross-sectional view of a reticle according to an embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of a conventional reticle, and FIG.
The figure is a longitudinal cross-sectional view showing a pellicle attached to a conventional reticle. 1; glass plate, 2; chrome pattern, 3; foreign matter, 4; pellicle, 7; glass plate, 8; chrome pattern, 9; central plane.
Claims (1)
部材と、この遮光パターン部材が埋設され光を透
過する材料で形成された基板とを有することを特
徴とする投影露光用レチクル。 A reticle for projection exposure comprising: a light-shielding pattern member made of a material that does not transmit light; and a substrate in which the light-shielding pattern member is embedded and made of a material that transmits light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987109333U JPS6415236U (en) | 1987-07-16 | 1987-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987109333U JPS6415236U (en) | 1987-07-16 | 1987-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6415236U true JPS6415236U (en) | 1989-01-25 |
Family
ID=31345481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987109333U Pending JPS6415236U (en) | 1987-07-16 | 1987-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6415236U (en) |
-
1987
- 1987-07-16 JP JP1987109333U patent/JPS6415236U/ja active Pending