JP6601360B2 - 物品搬送設備 - Google Patents

物品搬送設備 Download PDF

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Publication number
JP6601360B2
JP6601360B2 JP2016193915A JP2016193915A JP6601360B2 JP 6601360 B2 JP6601360 B2 JP 6601360B2 JP 2016193915 A JP2016193915 A JP 2016193915A JP 2016193915 A JP2016193915 A JP 2016193915A JP 6601360 B2 JP6601360 B2 JP 6601360B2
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JP
Japan
Prior art keywords
port
cleaning
container
article
cleaning port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016193915A
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English (en)
Japanese (ja)
Other versions
JP2018052724A (ja
Inventor
田中　　誠
淳一 嶋村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2016193915A priority Critical patent/JP6601360B2/ja
Priority to TW106131409A priority patent/TWI741028B/zh
Priority to KR1020170124957A priority patent/KR102419509B1/ko
Priority to CN201710907212.1A priority patent/CN107878983B/zh
Publication of JP2018052724A publication Critical patent/JP2018052724A/ja
Application granted granted Critical
Publication of JP6601360B2 publication Critical patent/JP6601360B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0478—Storage devices mechanical for matrix-arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Mathematical Physics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2016193915A 2016-09-30 2016-09-30 物品搬送設備 Active JP6601360B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016193915A JP6601360B2 (ja) 2016-09-30 2016-09-30 物品搬送設備
TW106131409A TWI741028B (zh) 2016-09-30 2017-09-13 物品搬送設備
KR1020170124957A KR102419509B1 (ko) 2016-09-30 2017-09-27 물품 반송 설비
CN201710907212.1A CN107878983B (zh) 2016-09-30 2017-09-29 物品搬运设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016193915A JP6601360B2 (ja) 2016-09-30 2016-09-30 物品搬送設備

Publications (2)

Publication Number Publication Date
JP2018052724A JP2018052724A (ja) 2018-04-05
JP6601360B2 true JP6601360B2 (ja) 2019-11-06

Family

ID=61781035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016193915A Active JP6601360B2 (ja) 2016-09-30 2016-09-30 物品搬送設備

Country Status (4)

Country Link
JP (1) JP6601360B2 (zh)
KR (1) KR102419509B1 (zh)
CN (1) CN107878983B (zh)
TW (1) TWI741028B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6835031B2 (ja) * 2018-04-27 2021-02-24 株式会社ダイフク 物品搬送設備

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0179405B1 (ko) * 1993-04-12 1999-04-15 마스다 쇼오이치로오 크린장치가 부착된 하물보관설비
JPH07122531A (ja) * 1993-10-22 1995-05-12 Dainippon Screen Mfg Co Ltd 基板処理液収容装置およびそれを備えた基板処理装置
JP3143700B2 (ja) * 1995-06-27 2001-03-07 東京エレクトロン株式会社 位置合せ装置
JP3682170B2 (ja) * 1998-09-09 2005-08-10 株式会社東芝 カセット搬送システム、半導体露光装置、及びレチクル運搬方法
DE19922936B4 (de) * 1999-05-19 2004-04-29 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
JP3911624B2 (ja) * 2001-11-30 2007-05-09 東京エレクトロン株式会社 処理システム
TWI272229B (en) * 2002-07-22 2007-02-01 Dainippon Printing Co Ltd Production line system and automated warehouse used in the system
JP2004303835A (ja) * 2003-03-28 2004-10-28 Ｆａｓｌ Ｊａｐａｎ 株式会社 基板保管装置
JP4493955B2 (ja) * 2003-09-01 2010-06-30 東京エレクトロン株式会社 基板処理装置及び搬送ケース
CN100413047C (zh) * 2005-01-28 2008-08-20 大日本网目版制造株式会社 基板处理装置
JP4744426B2 (ja) * 2006-12-27 2011-08-10 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP2009057117A (ja) * 2007-08-29 2009-03-19 Sharp Corp 搬送制御システム、搬送制御方法、及び搬送制御プログラム
JP5545498B2 (ja) * 2011-12-21 2014-07-09 株式会社ダイフク 物品保管設備及び物品保管設備におけるメンテナンス方法
JP5610009B2 (ja) * 2013-02-26 2014-10-22 東京エレクトロン株式会社 基板処理装置

Also Published As

Publication number Publication date
JP2018052724A (ja) 2018-04-05
KR102419509B1 (ko) 2022-07-08
CN107878983A (zh) 2018-04-06
TWI741028B (zh) 2021-10-01
CN107878983B (zh) 2021-05-14
TW201814815A (zh) 2018-04-16
KR20180036576A (ko) 2018-04-09

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