JP6056292B2 - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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- JP6056292B2 JP6056292B2 JP2012200180A JP2012200180A JP6056292B2 JP 6056292 B2 JP6056292 B2 JP 6056292B2 JP 2012200180 A JP2012200180 A JP 2012200180A JP 2012200180 A JP2012200180 A JP 2012200180A JP 6056292 B2 JP6056292 B2 JP 6056292B2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 71
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 70
- 239000004065 semiconductor Substances 0.000 title claims description 44
- 238000000034 method Methods 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 63
- 229910052710 silicon Inorganic materials 0.000 claims description 63
- 239000010703 silicon Substances 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 55
- 238000005530 etching Methods 0.000 claims description 52
- 239000007789 gas Substances 0.000 claims description 22
- 230000003647 oxidation Effects 0.000 claims description 21
- 238000007254 oxidation reaction Methods 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000001590 oxidative effect Effects 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 238000001312 dry etching Methods 0.000 claims description 5
- 229910018503 SF6 Inorganic materials 0.000 claims description 3
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims description 3
- 229960000909 sulfur hexafluoride Drugs 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 86
- 239000013078 crystal Substances 0.000 description 26
- 239000002131 composite material Substances 0.000 description 16
- 125000004429 atom Chemical group 0.000 description 11
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
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- 238000005468 ion implantation Methods 0.000 description 7
- 150000001721 carbon Chemical group 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000004630 atomic force microscopy Methods 0.000 description 3
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
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- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
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- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
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- 229920005591 polysilicon Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
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Description
図1に示すように、本実施の形態の縦型MOSFET500(炭化珪素半導体装置)は、エピタキシャル基板100(炭化珪素基板)と、ゲート絶縁膜201と、ゲート電極202と、層間絶縁膜203と、ソース電極221と、ドレイン電極211と、ソース配線222と、保護電極212とを有する。
図5に示すように、単結晶基板110上にn-層121がエピタキシャル成長により形成される。このエピタキシャル成長は、たとえば原料ガスとしてシラン(SiH4)とプロパン(C3H8)との混合ガスを用い、キャリアガスとしてたとえば水素ガス(H2)を用いたCVD(Chemical Vapor Deposition)法により行うことができる。また、このときドナーとしてたとえば窒素(N)やリン(P)を導入することが好ましい。
図22に示すように、本実施の形態のMOSFET500v(炭化珪素半導体装置)は、トレンチTR(図4)の代わりに、V字状のトレンチTRvを有する。トレンチTRvは、底部BT(図4)の代わりに底部BTvを有する。底部BTvは断面視(図22)において、互いに対向する側壁SWがV字形状をなすように接する部分である。なお、上記以外の構成については、上述した実施の形態1の構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。
上述したように、トレンチTRの側壁SW(図1)は好ましくは、特にp型ボディ層122上において、所定の結晶面(特殊面とも称する)を有する。このような側壁SWは、図23に示すように、面方位{0−33−8}を有する面S1(第1の面)を含む。面S1は好ましくは面方位(0−33−8)を有する。
一般に、ポリタイプ4Hの炭化珪素単結晶を(000−1)面から見ると、図24に示すように、Si原子(またはC原子)は、A層の原子(図中の実線)と、この下に位置するB層の原子(図中の破線)と、この下に位置するC層の原子(図中の一点鎖線)と、この下に位置するB層の原子(図示せず)とが繰り返し設けられている。つまり4つの層ABCBを1周期としてABCBABCBABCB・・・のような周期的な積層構造が設けられている。
今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。
Claims (9)
- 第1の導電型を有する第1の層と、前記第1の層上に設けられ第2の導電型を有する第2の層と、前記第2の層上に設けられ前記第2の層によって前記第1の層と分離され前記第1の導電型を有する第3の層とを含む炭化珪素基板を準備する工程と、
前記炭化珪素基板に、前記第3の層および前記第2の層を貫通して前記第1の層に至る側壁と、前記第1の層からなる底部とを有するトレンチを形成する工程と、
前記底部および前記側壁の各々を覆うトレンチ絶縁膜を形成する工程と、
前記トレンチ絶縁膜を介して前記トレンチを埋めるシリコン膜を形成する工程と、
前記トレンチ絶縁膜のうち前記側壁上において前記第2の層を覆う部分が露出されるように、かつ、前記シリコン膜のうち前記トレンチ絶縁膜を介して前記底部上に位置する部分が残存するように、前記シリコン膜を部分的にエッチングする工程と、
前記シリコン膜を部分的にエッチングする工程の後に、前記トレンチ絶縁膜のうち前記側壁上において前記第2の層を覆う部分を除去することによって、前記側壁上において前記第2の層を露出する工程と、
前記第2の層を露出する工程の後に、前記シリコン膜を酸化することによって前記トレンチの側壁上の前記トレンチ絶縁膜の厚さよりも大きい厚さの底絶縁膜を形成する工程と、
前記第2の層を露出する工程の後に、前記側壁上において前記第2の層を覆う側壁絶縁膜を形成する工程と、
前記側壁絶縁膜を介して前記側壁上にゲート電極を形成する工程とを備える、炭化珪素半導体装置の製造方法。 - 前記側壁絶縁膜を形成する工程は熱酸化によって行われる、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記トレンチ絶縁膜を形成する工程は熱酸化によって行われる、請求項1または請求項2に記載の炭化珪素半導体装置の製造方法。
- 前記シリコン膜を部分的にエッチングする工程は、物理的エッチング作用を有するエッチングを行う工程を含む、請求項1〜請求項3のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記シリコン膜を部分的にエッチングする工程の前に、前記シリコン膜を平坦化する工程をさらに備える、請求項1〜請求項4のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記底絶縁膜を形成する工程は、シリコンの900℃以上1100℃以下での熱酸化によって前記シリコン膜を完全に酸化する工程を含む、請求項1〜請求項5のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記側壁絶縁膜を形成する工程は、前記炭化珪素基板を熱酸化するために前記炭化珪素基板を加熱する工程を含み、前記炭化珪素基板を加熱する工程は、前記炭化珪素基板の温度の上昇中に前記炭化珪素基板へ酸素を供給する工程を含む、請求項1〜請求項6のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記シリコン膜を部分的にエッチングする工程は、六フッ化硫黄を含有するガスを用いたドライエッチングを行う工程を含む、請求項1〜請求項7のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記シリコン膜を部分的にエッチングする工程は、前記シリコン膜の厚さが300nmよりも小さくなるように行われる、請求項1〜請求項8のいずれか1項に記載の炭化珪素半導体装置の製造方法。
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Publication number | Priority date | Publication date | Assignee | Title |
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EP0676814B1 (en) | 1994-04-06 | 2006-03-22 | Denso Corporation | Process of producing trench semiconductor device |
FR2738394B1 (fr) * | 1995-09-06 | 1998-06-26 | Nippon Denso Co | Dispositif a semi-conducteur en carbure de silicium, et son procede de fabrication |
US5637898A (en) * | 1995-12-22 | 1997-06-10 | North Carolina State University | Vertical field effect transistors having improved breakdown voltage capability and low on-state resistance |
JP3471509B2 (ja) * | 1996-01-23 | 2003-12-02 | 株式会社デンソー | 炭化珪素半導体装置 |
US5998833A (en) * | 1998-10-26 | 1999-12-07 | North Carolina State University | Power semiconductor devices having improved high frequency switching and breakdown characteristics |
US6291298B1 (en) * | 1999-05-25 | 2001-09-18 | Advanced Analogic Technologies, Inc. | Process of manufacturing Trench gate semiconductor device having gate oxide layer with multiple thicknesses |
JP3664158B2 (ja) * | 2002-02-19 | 2005-06-22 | 日産自動車株式会社 | 炭化珪素半導体装置およびその製造方法 |
TWI248136B (en) * | 2002-03-19 | 2006-01-21 | Infineon Technologies Ag | Method for fabricating a transistor arrangement having trench transistor cells having a field electrode |
US6861701B2 (en) | 2003-03-05 | 2005-03-01 | Advanced Analogic Technologies, Inc. | Trench power MOSFET with planarized gate bus |
US6809005B2 (en) | 2003-03-12 | 2004-10-26 | Infineon Technologies Ag | Method to fill deep trench structures with void-free polysilicon or silicon |
JP4867171B2 (ja) | 2005-01-21 | 2012-02-01 | 富士電機株式会社 | 半導体装置の製造方法 |
US7648877B2 (en) * | 2005-06-24 | 2010-01-19 | Fairchild Semiconductor Corporation | Structure and method for forming laterally extending dielectric layer in a trench-gate FET |
US7385248B2 (en) | 2005-08-09 | 2008-06-10 | Fairchild Semiconductor Corporation | Shielded gate field effect transistor with improved inter-poly dielectric |
JP5017865B2 (ja) * | 2006-01-17 | 2012-09-05 | 富士電機株式会社 | 半導体装置 |
JPWO2008062729A1 (ja) | 2006-11-21 | 2010-03-04 | 住友電気工業株式会社 | 炭化珪素半導体装置およびその製造方法 |
KR100824205B1 (ko) * | 2006-12-26 | 2008-04-21 | 매그나칩 반도체 유한회사 | Dmos 트랜지스터 및 그 제조방법 |
US8017404B2 (en) * | 2007-09-12 | 2011-09-13 | Kao Corporation | Steroid hormone assay method |
US8384152B2 (en) | 2007-09-20 | 2013-02-26 | Rohm Co., Ltd. | Semiconductor device having trench gate VDMOSFET and method of manufacturing the same |
JP5452876B2 (ja) * | 2008-03-13 | 2014-03-26 | ローム株式会社 | 半導体装置およびその製造方法 |
KR101535222B1 (ko) * | 2008-04-17 | 2015-07-08 | 삼성전자주식회사 | 반도체 소자 및 그의 제조 방법 |
EP2293336B1 (en) | 2008-05-20 | 2019-11-27 | Rohm Co., Ltd. | Semiconductor device |
US7807576B2 (en) * | 2008-06-20 | 2010-10-05 | Fairchild Semiconductor Corporation | Structure and method for forming a thick bottom dielectric (TBD) for trench-gate devices |
US7872305B2 (en) * | 2008-06-26 | 2011-01-18 | Fairchild Semiconductor Corporation | Shielded gate trench FET with an inter-electrode dielectric having a nitride layer therein |
US8188538B2 (en) | 2008-12-25 | 2012-05-29 | Rohm Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
CN102396070A (zh) * | 2009-04-13 | 2012-03-28 | 罗姆股份有限公司 | 半导体装置及半导体装置的制造方法 |
JP2010263104A (ja) * | 2009-05-08 | 2010-11-18 | Elpida Memory Inc | 半導体装置及びその製造方法 |
US8021947B2 (en) * | 2009-12-09 | 2011-09-20 | Semiconductor Components Industries, Llc | Method of forming an insulated gate field effect transistor device having a shield electrode structure |
US8247296B2 (en) * | 2009-12-09 | 2012-08-21 | Semiconductor Components Industries, Llc | Method of forming an insulated gate field effect transistor device having a shield electrode structure |
US8487370B2 (en) * | 2010-07-30 | 2013-07-16 | Infineon Technologies Austria Ag | Trench semiconductor device and method of manufacturing |
JP5707770B2 (ja) | 2010-08-03 | 2015-04-30 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
WO2012098861A1 (ja) * | 2011-01-17 | 2012-07-26 | パナソニック株式会社 | 半導体装置およびその製造方法 |
WO2012105170A1 (ja) * | 2011-02-02 | 2012-08-09 | パナソニック株式会社 | 半導体装置およびその製造方法 |
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