JP6006729B2 - グラファイト基板上のナノワイヤエピタキシー - Google Patents
グラファイト基板上のナノワイヤエピタキシー Download PDFInfo
- Publication number
- JP6006729B2 JP6006729B2 JP2013543715A JP2013543715A JP6006729B2 JP 6006729 B2 JP6006729 B2 JP 6006729B2 JP 2013543715 A JP2013543715 A JP 2013543715A JP 2013543715 A JP2013543715 A JP 2013543715A JP 6006729 B2 JP6006729 B2 JP 6006729B2
- Authority
- JP
- Japan
- Prior art keywords
- nanowires
- substrate
- nanowire
- graphite
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002070 nanowire Substances 0.000 title claims description 265
- 239000000758 substrate Substances 0.000 title claims description 165
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 140
- 229910002804 graphite Inorganic materials 0.000 title claims description 92
- 239000010439 graphite Substances 0.000 title claims description 92
- 238000000407 epitaxy Methods 0.000 title description 4
- 238000000034 method Methods 0.000 claims description 45
- 239000003054 catalyst Substances 0.000 claims description 40
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 39
- 229910021389 graphene Inorganic materials 0.000 claims description 39
- 150000001875 compounds Chemical class 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 15
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 12
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 229910052785 arsenic Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910052733 gallium Inorganic materials 0.000 claims description 8
- 229910005542 GaSb Inorganic materials 0.000 claims description 5
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 3
- 229920000997 Graphane Polymers 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 229910021478 group 5 element Inorganic materials 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910004013 NO 2 Inorganic materials 0.000 claims description 2
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 238000009832 plasma treatment Methods 0.000 claims description 2
- 229910017083 AlN Inorganic materials 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- 229910005540 GaP Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 86
- 239000013078 crystal Substances 0.000 description 58
- 125000004429 atom Chemical group 0.000 description 39
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 38
- 238000001451 molecular beam epitaxy Methods 0.000 description 23
- 239000010410 layer Substances 0.000 description 21
- 239000000463 material Substances 0.000 description 21
- 239000010931 gold Substances 0.000 description 16
- 125000004432 carbon atom Chemical group C* 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 12
- 230000004907 flux Effects 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 229910052737 gold Inorganic materials 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 9
- 230000006911 nucleation Effects 0.000 description 9
- 238000010899 nucleation Methods 0.000 description 9
- 150000001721 carbon Chemical group 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 239000010703 silicon Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 235000011835 quiches Nutrition 0.000 description 6
- 239000000376 reactant Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 239000000370 acceptor Substances 0.000 description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- 229910021480 group 4 element Inorganic materials 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910052984 zinc sulfide Inorganic materials 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- -1 MgSe Chemical class 0.000 description 3
- 229910007709 ZnTe Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910052950 sphalerite Inorganic materials 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002061 nanopillar Substances 0.000 description 2
- 239000002073 nanorod Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000002128 reflection high energy electron diffraction Methods 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000012798 spherical particle Substances 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 229910017115 AlSb Inorganic materials 0.000 description 1
- 229910003771 Gold(I) chloride Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000012705 liquid precursor Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000000603 solid-source molecular beam epitaxy Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 230000029305 taxis Effects 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02603—Nanowires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02376—Carbon, e.g. diamond-like carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
- H01L21/02645—Seed materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02653—Vapour-liquid-solid growth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
- H01L29/0669—Nanowires or nanotubes
- H01L29/0676—Nanowires or nanotubes oriented perpendicular or at an angle to a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1606—Graphene
Description
従って、本発明は、一態様によると、グラファイト基板上にエピタキシャル成長したナノワイヤを1つ以上含む物質の組成物であって、前記ナノワイヤは、1つ以上のIII−V族化合物もしくは1つ以上のII−VI族化合物または1つ以上の非炭素IV族元素(non carbon group IV element)を含むことを特徴とする組成物を提供する。
III−V族化合物は、III族から1つ以上のイオンおよびV族から1つ以上のイオンを含む化合物を意味する。同様に、II−VI族化合物は、1つ以上のII族イオンおよび1つ以上のVI族イオンを含む化合物である。各族から2つ以上のイオンが存在してもよく、例えばInGaAs等である。非炭素IV族ナノワイヤは、1つ以上の非炭素IV族元素のみを含むナノワイヤであり、例えばSiナノワイヤである。
本発明のナノワイヤは、幅広い実用性をもつ。それらは半導体であり、半導体技術が役立つすべての分野における用途提供が期待できる。前記ナノワイヤは、主に集積ナノエレクトロニクスおよびナノオプトエレクトロニクスの用途に使用される。
図1Aは、立方晶結晶構造または六方晶結晶構造のそれぞれ(111)面および(0001)面における、グラファイト基板の炭素原子(灰色の円)の六角形位置および半導体原子(黄色の円)の六角形位置を示す。グラファイト基板と完全な格子整合を達成するために必要な半導体原子間の間隔(4.266Å=3×1.422Å(炭素原子距離))を示す。この実施例において、半導体原子は、六角形炭素環のいくつかの特定のくぼみ(H−サイト)中心上方に配置される。H−サイトの上部に配置する代わりに、全ての半導体原子を、炭素原子間のブリッジ(B−サイト)上方に、または全てを炭素原子の上部(T−サイト)上方に中心を合わせて、六方対称パターンが依然維持されるように厳格に移動させてもよい。
[実施例1]
[実験手順]
Claims (14)
- グラファイト基板上にエピタキシャル成長したナノワイヤを1つ以上含む物質の組成物であって、
前記ナノワイヤは、1つ以上のIII−V族化合物を含み、前記III族元素は、Al、GaまたはInを含み、前記V族元素は、N、P、AsまたはSbを含み、
前記ナノワイヤは、[111]方向または[0001]方向に成長し、
前記グラファイト基板は、厚み20nm以下のグラフェン、グラファン、または酸化グラフェンの基板を含む組成物。 - 前記ナノワイヤは、GaSb、GaP、GaAs、InGaAs、GaN、AlNまたはInAsを含む、請求項1に記載の組成物。
- 前記グラファイト基板は、グラフェンを含む、請求項1または2に記載の組成物。
- 前記グラファイト基板は、フレキシブルで透明である、請求項1〜3のいずれかに記載の組成物。
- 前記ナノワイヤは、直径が200nm以下であり、長さが5μmまでである、請求項1〜4のいずれかに記載の組成物。
- 前記基板は複数のナノワイヤを含み、前記ナノワイヤは実質的に平行である、請求項1〜5のいずれかに記載の組成物。
- 前記ナノワイヤは、前記ナノワイヤの上部に触媒を含む、請求項1〜6のいずれかに記載の組成物。
- グラファイト基板上にエピタキシャル成長したナノワイヤを1つ以上調製する方法であって、
(I)III−V族元素を、前記グラファイト基板の表面に準備する工程と、
(II)前記グラファイト基板の表面からナノワイヤを1つ以上エピタキシャル成長させる工程とを含み、
前記III族元素は、Al、GaまたはInを含み、前記V族元素は、N、P、AsまたはSbを含み、
前記ナノワイヤは、[111]方向または[0001]方向に成長し、
前記グラファイト基板は、厚み20nm以下のグラフェン、グラファン、または酸化グラフェンの基板を含む
方法。 - 触媒が、前記基板上に堆積される、請求項8に記載の方法。
- 前記触媒は、Au、または前記ナノワイヤに成長させる金属である、請求項9に記載の方法。
- 前記基板は孔パターンのマスクでコーティングされ、前記触媒は前記孔パターンを介して露出する前記グラファイト基板の表面上に導入される、請求項9〜10のいずれかに記載の方法。
- 前記孔パターンのマスクは、SiO2またはSi3N4を含む、請求項11に記載の方法。
- 前記孔パターンを介して露出する前記グラファイト基板の表面は、酸素、水素、NO2およびそれらの組み合わせのガスを用いたプラズマ処理により改質される、請求項11または12に記載の方法。
- 請求項1〜7のいずれかに記載の組成物を含む装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1021112.6 | 2010-12-13 | ||
GBGB1021112.6A GB201021112D0 (en) | 2010-12-13 | 2010-12-13 | Nanowires |
PCT/EP2011/072612 WO2012080252A1 (en) | 2010-12-13 | 2011-12-13 | Nanowire epitaxy on a graphitic substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014506222A JP2014506222A (ja) | 2014-03-13 |
JP6006729B2 true JP6006729B2 (ja) | 2016-10-12 |
Family
ID=43567105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013543715A Active JP6006729B2 (ja) | 2010-12-13 | 2011-12-13 | グラファイト基板上のナノワイヤエピタキシー |
Country Status (15)
Country | Link |
---|---|
US (2) | US9966257B2 (ja) |
EP (1) | EP2652771B1 (ja) |
JP (1) | JP6006729B2 (ja) |
KR (1) | KR101931394B1 (ja) |
CN (1) | CN103477418B (ja) |
AU (2) | AU2011344238B2 (ja) |
BR (1) | BR112013014613A2 (ja) |
CA (1) | CA2820904C (ja) |
DK (1) | DK2652771T3 (ja) |
EA (1) | EA026823B1 (ja) |
ES (1) | ES2777951T3 (ja) |
GB (1) | GB201021112D0 (ja) |
MY (1) | MY164032A (ja) |
SG (1) | SG191131A1 (ja) |
WO (1) | WO2012080252A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015528202A (ja) * | 2012-06-21 | 2015-09-24 | ノルウェージャン ユニバーシティ オブ サイエンス アンド テクノロジー(エヌティーエヌユー) | 太陽電池 |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB201021112D0 (en) | 2010-12-13 | 2011-01-26 | Ntnu Technology Transfer As | Nanowires |
GB201200355D0 (en) * | 2012-01-10 | 2012-02-22 | Norwegian Univ Sci & Tech Ntnu | Nanowires |
JP5876408B2 (ja) * | 2012-12-14 | 2016-03-02 | 日本電信電話株式会社 | ナノワイヤの作製方法 |
US10266963B2 (en) | 2013-03-08 | 2019-04-23 | The United States Of America, As Represented By The Secretary Of The Navy | Growth of crystalline materials on two-dimensional inert materials |
US9018056B2 (en) | 2013-03-15 | 2015-04-28 | The United States Of America, As Represented By The Secretary Of The Navy | Complementary field effect transistors using gallium polar and nitrogen polar III-nitride material |
US9236432B2 (en) | 2013-03-20 | 2016-01-12 | The United States Of America, As Represented By The Secretary Of The Navy | Graphene base transistor with reduced collector area |
GB201311101D0 (en) * | 2013-06-21 | 2013-08-07 | Norwegian Univ Sci & Tech Ntnu | Semiconducting Films |
GB2517186A (en) * | 2013-08-14 | 2015-02-18 | Norwegian University Of Science And Technology | Radial P-N junction nanowire solar cells |
CN103531441B (zh) * | 2013-10-23 | 2016-05-04 | 中国科学院半导体研究所 | 基于分叉纳米线的多端量子调控器件的制备方法 |
US10403889B2 (en) | 2014-10-21 | 2019-09-03 | RAMOT AT TEL-AVIV UNlVERSITY LTD. | High-capacity silicon nanowire based anode for lithium-ion batteries |
KR102266615B1 (ko) | 2014-11-17 | 2021-06-21 | 삼성전자주식회사 | 전계 효과 트랜지스터를 포함하는 반도체 소자 및 그 제조 방법 |
KR101694485B1 (ko) * | 2014-12-16 | 2017-01-10 | 한국생산기술연구원 | 태양 전지의 제조 방법 및 이에 의한 태양 전지 |
CN107170510A (zh) * | 2014-12-31 | 2017-09-15 | 重庆元石石墨烯技术开发有限责任公司 | 金属纳米线—石墨烯桥架结构复合材料及其制备方法 |
CN104766910B (zh) * | 2015-02-06 | 2017-07-04 | 中山大学 | 一种GaN纳米线及其制备方法 |
JP2016167534A (ja) * | 2015-03-10 | 2016-09-15 | 日本電信電話株式会社 | ナノワイヤの製造方法 |
AU2016292850B2 (en) | 2015-07-13 | 2019-05-16 | Crayonano As | Nanowires or nanopyramids grown on graphitic substrate |
BR112018000603A2 (pt) * | 2015-07-13 | 2018-09-11 | Crayonano As | fotodetetores e diodos emitindo luz com forma de nanofios/nanopirâmides |
CA2993884A1 (en) * | 2015-07-31 | 2017-02-09 | Crayonano As | Process for growing nanowires or nanopyramids on graphitic substrates |
KR102465353B1 (ko) * | 2015-12-02 | 2022-11-10 | 삼성전자주식회사 | 전계 효과 트랜지스터 및 이를 포함하는 반도체 소자 |
EP3182459A1 (en) * | 2015-12-15 | 2017-06-21 | IMEC vzw | Method of producing a pre-patterned structure for growing vertical nanostructures |
CN105544017B (zh) * | 2016-01-27 | 2017-07-14 | 浙江大学 | 一种高导电石墨烯纤维及其制备方法 |
US9711607B1 (en) * | 2016-04-15 | 2017-07-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | One-dimensional nanostructure growth on graphene and devices thereof |
CN106653567A (zh) * | 2016-12-01 | 2017-05-10 | 中国工程物理研究院电子工程研究所 | 一种基于聚焦离子束诱导的有序砷化镓量子点的制备方法 |
CN106803478B (zh) * | 2016-12-05 | 2019-12-06 | 南京大学 | 一种GaN纳米结构阵列生长方法 |
GB201701829D0 (en) | 2017-02-03 | 2017-03-22 | Norwegian Univ Of Science And Tech (Ntnu) | Device |
CN108572196A (zh) * | 2017-03-08 | 2018-09-25 | 天津大学 | 基于硅-氧化钨纳米线异质结构的气敏元件及其制备方法和应用 |
GB201705755D0 (en) | 2017-04-10 | 2017-05-24 | Norwegian Univ Of Science And Tech (Ntnu) | Nanostructure |
KR102483991B1 (ko) * | 2018-02-13 | 2022-12-30 | 성균관대학교산학협력단 | 마이크로 버블 집적구조체 및 이의 제조방법 |
WO2019206844A1 (en) * | 2018-04-22 | 2019-10-31 | Epinovatech Ab | Reinforced thin-film device |
CN112331553B (zh) * | 2019-07-16 | 2024-04-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | 纳米线单片外延集成结构、制作方法与应用 |
GB201910170D0 (en) | 2019-07-16 | 2019-08-28 | Crayonano As | Nanowire device |
CN110284198B (zh) * | 2019-07-22 | 2020-11-10 | 南京大学 | 一种控制GaN纳米线结构与形貌的分子束外延生长方法 |
CN110504159B (zh) * | 2019-08-21 | 2021-05-11 | 中国科学院半导体研究所 | 硅衬底上立式GaSb纳米线及其制备方法 |
GB201913701D0 (en) | 2019-09-23 | 2019-11-06 | Crayonano As | Composition of matter |
EP3836227A1 (en) | 2019-12-11 | 2021-06-16 | Epinovatech AB | Semiconductor layer structure |
EP3866189B1 (en) | 2020-02-14 | 2022-09-28 | Epinovatech AB | A mmic front-end module |
EP3879706A1 (en) | 2020-03-13 | 2021-09-15 | Epinovatech AB | Field-programmable gate array device |
EP4101945B1 (en) | 2021-06-09 | 2024-05-15 | Epinovatech AB | A device for performing electrolysis of water, and a system thereof |
CN114656274B (zh) * | 2022-03-08 | 2023-05-05 | 西北工业大学 | 一种纳米线阵列改性石墨烯蜂窝增强纳米气凝胶隔热吸波复合材料 |
GB202212397D0 (en) | 2022-08-25 | 2022-10-12 | Crayonano As | Nanowire device with mask layer |
CN117664401B (zh) * | 2023-12-08 | 2024-04-26 | 浙江大学 | 一种铁路监测用柔性无源压力传感器 |
Family Cites Families (110)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4213801A (en) | 1979-03-26 | 1980-07-22 | Bell Telephone Laboratories, Incorporated | Ohmic contact of N-GaAs to electrical conductive substrates by controlled growth of N-GaAs polycrystalline layers |
KR101008294B1 (ko) | 2001-03-30 | 2011-01-13 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | 나노구조체 및 나노와이어의 제조 방법 및 그로부터 제조되는 디바이스 |
JP3823784B2 (ja) | 2001-09-06 | 2006-09-20 | 富士ゼロックス株式会社 | ナノワイヤーおよびその製造方法、並びにそれを用いたナノネットワーク、ナノネットワークの製造方法、炭素構造体、電子デバイス |
FR2840452B1 (fr) | 2002-05-28 | 2005-10-14 | Lumilog | Procede de realisation par epitaxie d'un film de nitrure de gallium separe de son substrat |
US7594982B1 (en) | 2002-06-22 | 2009-09-29 | Nanosolar, Inc. | Nanostructured transparent conducting electrode |
US7335908B2 (en) | 2002-07-08 | 2008-02-26 | Qunano Ab | Nanostructures and methods for manufacturing the same |
JP4701161B2 (ja) * | 2003-04-04 | 2011-06-15 | キューナノ エービー | 正確に位置決めされたナノウィスカおよびナノウィスカアレイ、およびそれらを作成する方法 |
US7354850B2 (en) * | 2004-02-06 | 2008-04-08 | Qunano Ab | Directionally controlled growth of nanowhiskers |
WO2006000790A1 (en) | 2004-06-25 | 2006-01-05 | Btg International Limited | Formation of nanowhiskers on a substrate of dissimilar material |
KR100533645B1 (ko) | 2004-09-13 | 2005-12-06 | 삼성전기주식회사 | 발광 효율을 개선한 발광 다이오드 |
GB2418532A (en) | 2004-09-28 | 2006-03-29 | Arima Optoelectronic | Textured light emitting diode structure with enhanced fill factor |
US7939218B2 (en) | 2004-12-09 | 2011-05-10 | Nanosys, Inc. | Nanowire structures comprising carbon |
EP1829141B1 (en) | 2004-12-09 | 2013-05-29 | Nanosys, Inc. | Nanowire-based membrane electrode assemblies for fuel cells |
EP2410582B1 (en) | 2005-05-24 | 2019-09-04 | LG Electronics Inc. | Nano rod type light emitting diode and method for fabricating a nano rod type light emitting diode |
EP1952467B9 (en) | 2005-11-21 | 2012-03-14 | Nanosys, Inc. | Nanowire structures comprising carbon |
US7570355B2 (en) | 2006-01-27 | 2009-08-04 | Hewlett-Packard Development Company, L.P. | Nanowire heterostructures and methods of forming the same |
US7643136B2 (en) | 2006-02-02 | 2010-01-05 | Optilia Instrument Ab | Device for inspection of narrow spaces and objects in narrow spaces |
WO2008048704A2 (en) | 2006-03-10 | 2008-04-24 | Stc.Unm | Pulsed growth of gan nanowires and applications in group iii nitride semiconductor substrate materials and devices |
FR2904146B1 (fr) | 2006-07-20 | 2008-10-17 | Commissariat Energie Atomique | Procede de fabrication d'une nanostructure a base de nanofils interconnectes,nanostructure et utilisation comme convertisseur thermoelectrique |
JP4106397B2 (ja) | 2006-09-14 | 2008-06-25 | 株式会社島津製作所 | 光または放射線検出器の製造方法 |
US7442575B2 (en) * | 2006-09-29 | 2008-10-28 | Texas Christian University | Method of manufacturing semiconductor nanowires |
US8426224B2 (en) | 2006-12-18 | 2013-04-23 | The Regents Of The University Of California | Nanowire array-based light emitting diodes and lasers |
US20080191317A1 (en) * | 2007-02-13 | 2008-08-14 | International Business Machines Corporation | Self-aligned epitaxial growth of semiconductor nanowires |
JP2010525557A (ja) | 2007-03-28 | 2010-07-22 | クナノ アーベー | ナノワイヤ回路構造物 |
KR100904588B1 (ko) | 2007-07-05 | 2009-06-25 | 삼성전자주식회사 | 코어/쉘 형태의 나노와이어를 제조하는 방법, 그에 의해제조된 나노와이어 및 이를 포함하는 나노와이어 소자 |
US7714317B2 (en) | 2007-08-30 | 2010-05-11 | Brookhaven Science Associates, Llc | Assembly of ordered carbon shells on semiconducting nanomaterials |
KR101541560B1 (ko) | 2007-10-26 | 2015-08-03 | 큐나노 에이비 | 이종 재료상의 나노와이어 성장 |
US8273983B2 (en) | 2007-12-21 | 2012-09-25 | Hewlett-Packard Development Company, L.P. | Photonic device and method of making same using nanowires |
US8435676B2 (en) | 2008-01-09 | 2013-05-07 | Nanotek Instruments, Inc. | Mixed nano-filament electrode materials for lithium ion batteries |
US7871653B2 (en) | 2008-01-30 | 2011-01-18 | Ocean Duke Corporation | Double-stack shrimp tray |
US8129763B2 (en) | 2008-02-07 | 2012-03-06 | International Business Machines Corporation | Metal-oxide-semiconductor device including a multiple-layer energy filter |
JP5386747B2 (ja) | 2008-02-21 | 2014-01-15 | 公益財団法人神奈川科学技術アカデミー | 半導体基板、半導体素子、発光素子及び電子素子 |
KR101445877B1 (ko) * | 2008-03-24 | 2014-09-29 | 삼성전자주식회사 | 산화아연 나노와이어의 제조방법 |
TW200952184A (en) | 2008-06-03 | 2009-12-16 | Univ Nat Taiwan | Structure of mixed type heterojunction thin film solar cells and its manufacturing method |
WO2010014032A1 (en) | 2008-07-07 | 2010-02-04 | Glo Ab | A nanostructured LED |
US8735797B2 (en) | 2009-12-08 | 2014-05-27 | Zena Technologies, Inc. | Nanowire photo-detector grown on a back-side illuminated image sensor |
WO2010056064A2 (ko) | 2008-11-13 | 2010-05-20 | 주식회사 엘지화학 | 리튬 이차전지용 비수 전해액 및 이를 구비한 리튬 이차전지 |
KR101071906B1 (ko) | 2008-11-14 | 2011-10-11 | 한국과학기술원 | 단결정 게르마늄코발트 나노와이어, 게르마늄코발트 나노와이어 구조체, 및 이들의 제조방법 |
CN101504961B (zh) | 2008-12-16 | 2010-08-11 | 华中科技大学 | 面发射多色发光二极管及其制造方法 |
US8389387B2 (en) | 2009-01-06 | 2013-03-05 | Brookhaven Science Associates, Llc | Segmented nanowires displaying locally controllable properties |
KR101650310B1 (ko) | 2009-01-16 | 2016-08-24 | 삼성전자주식회사 | 도광부재 및 이를 구비하는 제전유닛, 화상형성장치, 화상독취장치 |
FR2941688B1 (fr) | 2009-01-30 | 2011-04-01 | Commissariat Energie Atomique | Procede de formation de nano-fils |
WO2010087853A1 (en) | 2009-01-30 | 2010-08-05 | Hewlett-Packard Development Company | Photovoltaic structure and solar cell and method of fabrication employing hidden electrode |
WO2010096035A1 (en) | 2009-02-23 | 2010-08-26 | Nanosys, Inc. | Nanostructured catalyst supports |
US20120135158A1 (en) | 2009-05-26 | 2012-05-31 | Sharp Kabushiki Kaisha | Methods and systems for electric field deposition of nanowires and other devices |
US9162896B2 (en) | 2009-05-31 | 2015-10-20 | College Of William And Mary | Method for making polymer composites containing graphene sheets |
JP5299105B2 (ja) | 2009-06-16 | 2013-09-25 | ソニー株式会社 | 二酸化バナジウムナノワイヤとその製造方法、及び二酸化バナジウムナノワイヤを用いたナノワイヤデバイス |
CN101931507B (zh) | 2009-06-18 | 2012-09-05 | 华为技术有限公司 | 码本生成方法、数据传输方法及装置 |
US8409366B2 (en) | 2009-06-23 | 2013-04-02 | Oki Data Corporation | Separation method of nitride semiconductor layer, semiconductor device, manufacturing method thereof, semiconductor wafer, and manufacturing method thereof |
WO2011016616A2 (ko) * | 2009-08-03 | 2011-02-10 | 인제대학교 산학협력단 | 신규한 구조의 탄소계 나노복합체 및 이의 제조방법 |
US8507797B2 (en) | 2009-08-07 | 2013-08-13 | Guardian Industries Corp. | Large area deposition and doping of graphene, and products including the same |
WO2011048808A1 (ja) | 2009-10-20 | 2011-04-28 | パナソニック株式会社 | 発光ダイオード素子およびその製造方法 |
JP4718652B2 (ja) | 2009-10-21 | 2011-07-06 | パナソニック株式会社 | 太陽電池およびその製造方法 |
KR20110057989A (ko) * | 2009-11-25 | 2011-06-01 | 삼성전자주식회사 | 그래핀과 나노구조체의 복합 구조체 및 그 제조방법 |
US9306099B2 (en) | 2009-12-01 | 2016-04-05 | Samsung Electronics Co., Ltd. | Material including graphene and an inorganic material and method of manufacturing the material |
WO2011067893A1 (ja) | 2009-12-04 | 2011-06-09 | パナソニック株式会社 | 基板およびその製造方法 |
WO2011081440A2 (ko) | 2009-12-30 | 2011-07-07 | 성균관대학교산학협력단 | 그래핀 필름의 롤투롤 도핑 방법 및 도핑된 그래핀 필름 |
WO2011090863A1 (en) | 2010-01-19 | 2011-07-28 | Eastman Kodak Company | Ii-vi core-shell semiconductor nanowires |
US8377729B2 (en) | 2010-01-19 | 2013-02-19 | Eastman Kodak Company | Forming II-VI core-shell semiconductor nanowires |
US8212236B2 (en) | 2010-01-19 | 2012-07-03 | Eastman Kodak Company | II-VI core-shell semiconductor nanowires |
US20110240099A1 (en) | 2010-03-30 | 2011-10-06 | Ellinger Carolyn R | Photovoltaic nanowire device |
TWI440074B (zh) | 2010-04-02 | 2014-06-01 | Univ Nat Chiao Tung | 一種在三族氮化物磊晶過程中降低缺陷產生的方法 |
EP2557597A4 (en) | 2010-04-07 | 2014-11-26 | Shimadzu Corp | RADIATION DETECTOR AND METHOD FOR MANUFACTURING SAME |
BR112012030016B8 (pt) | 2010-05-24 | 2021-05-18 | Siluria Technologies Inc | processo para preparar etileno a partir de metano e método para preparar um produto a jusante de etileno |
JP4949540B2 (ja) | 2010-06-07 | 2012-06-13 | パナソニック株式会社 | 太陽電池及びその製造法 |
KR101781552B1 (ko) | 2010-06-21 | 2017-09-27 | 삼성전자주식회사 | 보론 및 질소로 치환된 그라핀 및 제조방법과, 이를 구비한 트랜지스터 |
KR20130138657A (ko) | 2010-06-24 | 2013-12-19 | 글로 에이비 | 배향된 나노와이어 성장을 위해 버퍼 층을 갖는 기판 |
WO2012021460A2 (en) | 2010-08-07 | 2012-02-16 | Michael Eugene Young | Device components with surface-embedded additives and related manufacturing methods |
CN102376817A (zh) | 2010-08-11 | 2012-03-14 | 王浩 | 一种半导体光电器件的制备方法 |
KR20130093115A (ko) | 2010-09-01 | 2013-08-21 | 샤프 가부시키가이샤 | 발광 소자 및 그 제조 방법, 발광 장치의 제조 방법, 조명 장치, 백라이트, 표시 장치 및 다이오드 |
WO2012029381A1 (ja) | 2010-09-01 | 2012-03-08 | シャープ株式会社 | 発光素子およびその製造方法、発光装置の製造方法、照明装置、バックライト、表示装置、並びにダイオード |
KR101636915B1 (ko) | 2010-09-03 | 2016-07-07 | 삼성전자주식회사 | 그래핀 또는 탄소나노튜브를 이용한 반도체 화합물 구조체 및 그 제조방법과, 반도체 화합물 구조체를 포함하는 반도체 소자 |
KR101691906B1 (ko) | 2010-09-14 | 2017-01-02 | 삼성전자주식회사 | Ⅲ족 질화물 나노로드 발광 소자 제조방법 |
US8901536B2 (en) | 2010-09-21 | 2014-12-02 | The United States Of America, As Represented By The Secretary Of The Navy | Transistor having graphene base |
KR101802374B1 (ko) | 2010-10-05 | 2017-11-29 | 삼성전자주식회사 | 도핑된 그래핀 함유 투명전극, 그의 제조방법, 및 이를 구비하는 표시소자와 태양전지 |
US8321961B2 (en) | 2010-10-07 | 2012-11-27 | International Business Machines Corporation | Production scale fabrication method for high resolution AFM tips |
KR101217209B1 (ko) | 2010-10-07 | 2012-12-31 | 서울대학교산학협력단 | 발광소자 및 그 제조방법 |
KR101142545B1 (ko) | 2010-10-25 | 2012-05-08 | 서울대학교산학협력단 | 태양전지 및 그 제조 방법 |
JP6069209B2 (ja) | 2010-11-12 | 2017-02-01 | ジェンティウム ソシエタ ア レスポンサビリタ リミタータ | 移植片対宿主病(gvhd)の予防および/または治療に使用するためのデフィブロタイド |
US20120141799A1 (en) | 2010-12-03 | 2012-06-07 | Francis Kub | Film on Graphene on a Substrate and Method and Devices Therefor |
GB201021112D0 (en) | 2010-12-13 | 2011-01-26 | Ntnu Technology Transfer As | Nanowires |
KR20120065792A (ko) | 2010-12-13 | 2012-06-21 | 삼성전자주식회사 | 나노 센서 및 그의 제조 방법 |
KR20120083084A (ko) | 2011-01-17 | 2012-07-25 | 삼성엘이디 주식회사 | 나노 로드 발광 소자 및 그 제조 방법 |
KR101227600B1 (ko) | 2011-02-11 | 2013-01-29 | 서울대학교산학협력단 | 그래핀-나노와이어 하이브리드 구조체에 기반한 광센서 및 이의 제조방법 |
US8591990B2 (en) | 2011-03-25 | 2013-11-26 | GM Global Technology Operations LLC | Microfiber supported metal silicide nanowires |
JP2012230969A (ja) | 2011-04-25 | 2012-11-22 | Sumitomo Electric Ind Ltd | GaN系半導体デバイスの製造方法 |
US9713650B2 (en) | 2011-05-06 | 2017-07-25 | The Research Foundation For The State University Of New York | Magnetic graphene-like nanoparticles or graphitic nano- or microparticles and method of production and uses thereof |
US9564579B2 (en) | 2011-05-27 | 2017-02-07 | University Of North Texas | Graphene magnetic tunnel junction spin filters and methods of making |
WO2012167282A1 (en) | 2011-06-02 | 2012-12-06 | Brown University | High-efficiency silicon-compatible photodetectors based on ge quantumdots and ge/si hetero-nanowires |
KR101305705B1 (ko) | 2011-07-12 | 2013-09-09 | 엘지이노텍 주식회사 | 터치 패널 및 전극 제조 방법 |
US20130020623A1 (en) | 2011-07-18 | 2013-01-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for single gate non-volatile memory device |
CN102254969B (zh) | 2011-08-17 | 2012-11-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | 基于纳米柱阵列的光电器件及其制作方法 |
KR101217216B1 (ko) | 2011-08-31 | 2012-12-31 | 서울대학교산학협력단 | 전자 소자 및 그 제조 방법 |
WO2013052541A2 (en) | 2011-10-04 | 2013-04-11 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | Quantum dots, rods, wires, sheets, and ribbons, and uses thereof |
US8440350B1 (en) | 2011-11-10 | 2013-05-14 | GM Global Technology Operations LLC | Lithium-ion battery electrodes with shape-memory-alloy current collecting substrates |
US20130158322A1 (en) | 2011-11-29 | 2013-06-20 | Siluria Technologies, Inc. | Polymer templated nanowire catalysts |
KR20130069035A (ko) | 2011-12-16 | 2013-06-26 | 삼성전자주식회사 | 그래핀상의 하이브리드 나노구조체 형성 방법 |
GB201200355D0 (en) * | 2012-01-10 | 2012-02-22 | Norwegian Univ Sci & Tech Ntnu | Nanowires |
EP2815423B1 (en) | 2012-02-14 | 2017-05-24 | Hexagem AB | Gallium nitride nanowire based electronics |
TW201344749A (zh) | 2012-04-23 | 2013-11-01 | Nanocrystal Asia Inc | 以塡膠燒結方式製造選擇性成長遮罩之方法 |
US20130311363A1 (en) | 2012-05-15 | 2013-11-21 | Jonathan E. Ramaci | Dynamically re-programmable transaction card |
GB201211038D0 (en) | 2012-06-21 | 2012-08-01 | Norwegian Univ Sci & Tech Ntnu | Solar cells |
FR2997558B1 (fr) | 2012-10-26 | 2015-12-18 | Aledia | Dispositif opto-electrique et son procede de fabrication |
EP2922891A1 (en) | 2012-11-26 | 2015-09-30 | Massachusetts Institute of Technology | Nanowire-modified graphene and methods of making and using same |
JP5876408B2 (ja) | 2012-12-14 | 2016-03-02 | 日本電信電話株式会社 | ナノワイヤの作製方法 |
CN103050498B (zh) | 2012-12-28 | 2015-08-26 | 中山大学 | 一种微纳米线阵列结构紫外雪崩光电探测器及其制备方法 |
GB201311101D0 (en) | 2013-06-21 | 2013-08-07 | Norwegian Univ Sci & Tech Ntnu | Semiconducting Films |
GB2517186A (en) | 2013-08-14 | 2015-02-18 | Norwegian University Of Science And Technology | Radial P-N junction nanowire solar cells |
KR101517551B1 (ko) | 2013-11-14 | 2015-05-06 | 포항공과대학교 산학협력단 | 발광소자의 제조방법 및 그에 의해 제조된 발광소자 |
BR112018000603A2 (pt) | 2015-07-13 | 2018-09-11 | Crayonano As | fotodetetores e diodos emitindo luz com forma de nanofios/nanopirâmides |
-
2010
- 2010-12-13 GB GBGB1021112.6A patent/GB201021112D0/en not_active Ceased
-
2011
- 2011-12-13 US US13/993,740 patent/US9966257B2/en active Active
- 2011-12-13 ES ES11808613T patent/ES2777951T3/es active Active
- 2011-12-13 CN CN201180065703.7A patent/CN103477418B/zh active Active
- 2011-12-13 AU AU2011344238A patent/AU2011344238B2/en active Active
- 2011-12-13 EA EA201390802A patent/EA026823B1/ru not_active IP Right Cessation
- 2011-12-13 MY MYPI2013002169A patent/MY164032A/en unknown
- 2011-12-13 SG SG2013045364A patent/SG191131A1/en unknown
- 2011-12-13 BR BR112013014613A patent/BR112013014613A2/pt not_active Application Discontinuation
- 2011-12-13 JP JP2013543715A patent/JP6006729B2/ja active Active
- 2011-12-13 WO PCT/EP2011/072612 patent/WO2012080252A1/en active Application Filing
- 2011-12-13 DK DK11808613.1T patent/DK2652771T3/da active
- 2011-12-13 KR KR1020137018127A patent/KR101931394B1/ko active IP Right Grant
- 2011-12-13 EP EP11808613.1A patent/EP2652771B1/en active Active
- 2011-12-13 CA CA2820904A patent/CA2820904C/en active Active
-
2015
- 2015-08-13 AU AU2015213350A patent/AU2015213350B2/en active Active
-
2018
- 2018-05-04 US US15/971,278 patent/US10861696B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015528202A (ja) * | 2012-06-21 | 2015-09-24 | ノルウェージャン ユニバーシティ オブ サイエンス アンド テクノロジー(エヌティーエヌユー) | 太陽電池 |
Also Published As
Publication number | Publication date |
---|---|
AU2015213350A1 (en) | 2015-09-03 |
EA026823B1 (ru) | 2017-05-31 |
CA2820904A1 (en) | 2012-06-21 |
ES2777951T3 (es) | 2020-08-06 |
WO2012080252A1 (en) | 2012-06-21 |
AU2011344238B2 (en) | 2015-05-14 |
EP2652771A1 (en) | 2013-10-23 |
JP2014506222A (ja) | 2014-03-13 |
EA201390802A1 (ru) | 2013-12-30 |
KR20140014105A (ko) | 2014-02-05 |
CN103477418B (zh) | 2017-09-01 |
US20130334497A1 (en) | 2013-12-19 |
US9966257B2 (en) | 2018-05-08 |
DK2652771T3 (da) | 2020-03-23 |
BR112013014613A2 (pt) | 2018-04-03 |
US10861696B2 (en) | 2020-12-08 |
AU2011344238A1 (en) | 2013-07-11 |
CA2820904C (en) | 2020-03-10 |
US20180254184A1 (en) | 2018-09-06 |
CN103477418A (zh) | 2013-12-25 |
KR101931394B1 (ko) | 2018-12-21 |
MY164032A (en) | 2017-11-15 |
AU2015213350B2 (en) | 2017-07-27 |
SG191131A1 (en) | 2013-07-31 |
GB201021112D0 (en) | 2011-01-26 |
EP2652771B1 (en) | 2020-02-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6006729B2 (ja) | グラファイト基板上のナノワイヤエピタキシー | |
US11450528B2 (en) | Process for growing nanowires or nanopyramids on graphitic substrates | |
JP6147277B2 (ja) | グラフェンのトップ及びボトム電極を備えたナノワイヤーデバイス及びそのようなデバイスの製造方法 | |
JP6343608B2 (ja) | 太陽電池 | |
JP6463743B2 (ja) | グラファイト基板上のiii−v族またはii−vi族化合物半導体膜 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140623 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150223 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150226 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20150520 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20150622 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150826 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20151027 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20160127 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20160226 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20160324 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160427 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160825 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160909 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6006729 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |