JP4972749B2 - 基板支持装置及びこれを利用したlcdセルのシールパターン検査装置 - Google Patents
基板支持装置及びこれを利用したlcdセルのシールパターン検査装置 Download PDFInfo
- Publication number
- JP4972749B2 JP4972749B2 JP2009550595A JP2009550595A JP4972749B2 JP 4972749 B2 JP4972749 B2 JP 4972749B2 JP 2009550595 A JP2009550595 A JP 2009550595A JP 2009550595 A JP2009550595 A JP 2009550595A JP 4972749 B2 JP4972749 B2 JP 4972749B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- stage
- variable stage
- substrate support
- variable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
Claims (5)
- 工程が行われている間に基板を定着支持させる基板支持装置であって、
上面に基板の一領域を吸着させる吸着ノズルが設けられ、所定角度で回動可能な可変ステージと、
該可変ステージと離隔して設けられ、該可変ステージの上面に前記一領域が吸着された基板の他領域を支持し、前記可変ステージの回動により前記基板を整列する場合には、前記基板を上側に浮上させ、前記可変ステージの回動による前記基板の整列が完了した場合には、前記基板を吸着して固定する固定ステージと、
前記可変ステージの一側に結合して、該可変ステージを回動させる駆動手段と、
を備えることを特徴とする基板支持装置。 - 前記固定ステージには、前記基板が浮上するように上向きに空気を噴射するフローティングノズル、及び、前記基板が吸着するように下向きに空気を吸入する吸着ノズルが形成されていることを特徴とする請求項1に記載の基板支持装置。
- 前記駆動手段は、駆動モータと、該駆動モータと結合する移送軸と、該移送軸と結合して前記移送軸の長さ方向に移動する移動体と、該移動体に結合する摺動ローラとを備え、
前記可変ステージは、前記摺動ローラを受け入れる挿入溝が形成された突出片を備えることを特徴とする請求項1に記載の基板支持装置。 - 前記可変ステージは、底面に該可変ステージの回動を案内するガイドを備えることを特徴とする請求項1に記載の基板支持装置。
- 請求項1〜4のいずれか1項に記載の基板支持装置と、
前記基板支持装置の両側方に位置する支持台、前記基板支持装置の上側に位置しかつ前記両支持台を接続するブリッジ、並びに、該ブリッジに結合して基板のシールパターンを検査及び補修する補正装置で構成されたガントリー部と、
を備えることを特徴とするLCDセルのシールパターン検査装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070030438A KR100807090B1 (ko) | 2007-03-28 | 2007-03-28 | 기판 지지장치와 이를 이용한 엘씨디 셀의 씰패턴 검사장치 |
KR10-2007-0030438 | 2007-03-28 | ||
PCT/KR2008/001540 WO2008117953A1 (en) | 2007-03-28 | 2008-03-19 | A device for supporting substrate and examiner for seal pattern of lcd cell using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010519585A JP2010519585A (ja) | 2010-06-03 |
JP4972749B2 true JP4972749B2 (ja) | 2012-07-11 |
Family
ID=39383223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009550595A Expired - Fee Related JP4972749B2 (ja) | 2007-03-28 | 2008-03-19 | 基板支持装置及びこれを利用したlcdセルのシールパターン検査装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9046716B2 (ja) |
JP (1) | JP4972749B2 (ja) |
KR (1) | KR100807090B1 (ja) |
CN (1) | CN101617266B (ja) |
WO (1) | WO2008117953A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100942066B1 (ko) * | 2008-04-30 | 2010-02-11 | 주식회사 테라세미콘 | 홀더 스테이지 |
KR101337368B1 (ko) | 2010-10-27 | 2013-12-05 | 엘지디스플레이 주식회사 | 코팅장치 및 이를 이용한 코팅막 형성방법 |
EP2476514A1 (en) * | 2011-01-12 | 2012-07-18 | Sandvik Intellectual Property AB | A method and an apparatus for treating at least one work-piece |
KR102092925B1 (ko) * | 2013-07-03 | 2020-03-25 | 삼성디스플레이 주식회사 | 표시 패널용 지지 장치 및 이를 이용한 표시 장치의 제조 방법 |
KR101666801B1 (ko) * | 2014-04-14 | 2016-10-24 | 주식회사 에스에프에이 | 플렉시블 디스플레이용 필름 부착장치 |
KR101952508B1 (ko) * | 2017-06-14 | 2019-02-27 | 주식회사 프로텍 | 판상 자재 고정 장치 |
CN107654456A (zh) * | 2017-10-27 | 2018-02-02 | 惠州市美呈空间装饰设计工程有限公司 | 一种用于粘贴广告布的定位装置 |
CN114789123A (zh) * | 2022-04-29 | 2022-07-26 | 广东安达智能装备股份有限公司 | 一种微调校正的工作平台 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2045876A (en) * | 1933-10-02 | 1936-06-30 | Hazel Atlas Glass Co | Glass banding machine |
GB2160451B (en) * | 1984-05-25 | 1987-07-08 | Citizen Watch Co Ltd | A rotary table unit |
JPS61208841A (ja) * | 1985-03-14 | 1986-09-17 | Sony Corp | 半導体ウエハの位置合せ装置 |
KR960016175B1 (en) * | 1987-08-28 | 1996-12-04 | Tokyo Electron Ltd | Exposing method and apparatus thereof |
US5246331A (en) * | 1991-10-18 | 1993-09-21 | Billco Manufacturing Inc. | Air flotation assembly table |
US5537186A (en) * | 1993-08-03 | 1996-07-16 | Canon Kabushiki Kaisha | Movable stage mechanism and exposure apparatus using the same |
EP0668606B1 (en) * | 1994-02-07 | 1997-09-17 | Ushiodenki Kabushiki Kaisha | Carrier device |
JPH08316288A (ja) * | 1995-05-23 | 1996-11-29 | Nikon Corp | 自動搬送装置 |
AU3672600A (en) * | 1999-04-27 | 2000-11-10 | Nikon Corporation | Stage device and exposure device |
US6164633A (en) * | 1999-05-18 | 2000-12-26 | International Business Machines Corporation | Multiple size wafer vacuum chuck |
SE518640C2 (sv) * | 2000-07-11 | 2002-11-05 | Mydata Automation Ab | Förfarande, anordning för applicering av ett visköst medium på ett substrat, anordning för applicering av ytterligare visköst medium samt användningen av screentryckning |
US6781684B1 (en) * | 2000-11-07 | 2004-08-24 | Donald L. Ekhoff | Workpiece levitation using alternating positive and negative pressure flows |
JP4104382B2 (ja) | 2002-05-31 | 2008-06-18 | 日置電機株式会社 | 被検査基板の位置固定機構 |
JP2004063796A (ja) * | 2002-07-29 | 2004-02-26 | Tatsumo Kk | 平板状角型基板の裏面洗浄装置 |
JP4300003B2 (ja) * | 2002-08-07 | 2009-07-22 | 東京エレクトロン株式会社 | 載置台の駆動装置及びプローブ方法 |
KR100652212B1 (ko) * | 2002-12-30 | 2006-11-30 | 엘지.필립스 엘시디 주식회사 | 액정패널의 제조방법 및 이에 사용되는 씰패턴 형성장치 |
US7344901B2 (en) * | 2003-04-16 | 2008-03-18 | Corning Incorporated | Hermetically sealed package and method of fabricating of a hermetically sealed package |
KR100589234B1 (ko) * | 2003-09-05 | 2006-06-14 | 세메스 주식회사 | 평판표시소자 제조를 위한 기판 처리 장치 |
KR100635218B1 (ko) * | 2004-05-03 | 2006-10-17 | 주식회사 에이디피엔지니어링 | 기판 미세 정렬 장치 및 그 방법 |
US7753629B1 (en) * | 2004-09-03 | 2010-07-13 | Mcculloch Joseph W | Tilt table |
JP2006167991A (ja) * | 2004-12-13 | 2006-06-29 | Denso Corp | スクリーン印刷装置及びその印刷方法 |
JP2007011150A (ja) * | 2005-07-01 | 2007-01-18 | Ishikawajima Harima Heavy Ind Co Ltd | 基板貼合せ装置 |
-
2007
- 2007-03-28 KR KR1020070030438A patent/KR100807090B1/ko not_active IP Right Cessation
-
2008
- 2008-03-19 WO PCT/KR2008/001540 patent/WO2008117953A1/en active Application Filing
- 2008-03-19 CN CN2008800053995A patent/CN101617266B/zh not_active Expired - Fee Related
- 2008-03-19 JP JP2009550595A patent/JP4972749B2/ja not_active Expired - Fee Related
- 2008-03-19 US US12/523,972 patent/US9046716B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2010519585A (ja) | 2010-06-03 |
US20090318051A1 (en) | 2009-12-24 |
CN101617266B (zh) | 2011-11-09 |
WO2008117953A1 (en) | 2008-10-02 |
CN101617266A (zh) | 2009-12-30 |
KR100807090B1 (ko) | 2008-02-26 |
US9046716B2 (en) | 2015-06-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4972749B2 (ja) | 基板支持装置及びこれを利用したlcdセルのシールパターン検査装置 | |
KR101096733B1 (ko) | 기판의 절단장치 및 이를 이용한 기판의 절단방법 | |
US7450213B2 (en) | Methods of manufacturing liquid crystal display devices | |
JP4849451B2 (ja) | 液晶表示パネルの切断方法及びこれを用いた液晶表示パネルの製造方法 | |
JP5301790B2 (ja) | 液晶表示装置を製造するためのシステム及びこれを用いた液晶表示装置の製造方法 | |
JP4563351B2 (ja) | 液晶表示パネルの切断方法及びこれを用いた液晶表示パネルの製造方法 | |
KR100628276B1 (ko) | 스크라이브 장비 및 이를 구비한 기판의 절단장치 및이것을 이용한 기판의 절단방법 | |
JP2008123003A (ja) | 液晶表示素子及びその製造方法 | |
KR20120133823A (ko) | 액정표시장치용 자동 접착시스템 및 이를 이용하는 접착방법 | |
JP2003295219A (ja) | 液晶パネル、液晶パネルの検査装置及びこれを用いた液晶表示装置の製造方法 | |
KR20080070318A (ko) | 액정 표시 패널 절단 장치 및 이를 이용한 절단 방법 | |
JP4338717B2 (ja) | 液晶表示パネルの移送装置、液晶表示パネルの切断方法及びこれを用いた液晶表示パネルの製造方法 | |
KR100949503B1 (ko) | 씨일재 디스펜싱 장치, 그를 이용한 액정표시소자제조방법, 및 그 방법에 의해 제조된 액정표시소자 | |
JP2005196171A (ja) | 液晶表示装置の製造ラインおよび製造方法 | |
JP4244529B2 (ja) | 液晶基板の組立方法及びその組立装置 | |
KR20030075723A (ko) | 액정표시소자 및 그 제조방법 | |
KR102019347B1 (ko) | 액정표시장치와 그 제조 방법 | |
JP5902524B2 (ja) | 基板の貼り合わせ方法及び貼り合わせ装置 | |
KR20050095925A (ko) | 편광판 반송 장비 | |
KR101245018B1 (ko) | 액정표시패널의 제조방법 | |
KR20060004156A (ko) | 씰 패턴 검사 시스템을 구비한 씰 경화 장치 및 이를이용한 씰 패턴의 검사 방법 | |
JPH09211471A (ja) | 貼り合わせ装置および貼り合わせ方法 | |
JP4119070B2 (ja) | 液晶パネルの製造方法 | |
KR20040046641A (ko) | 액정패널 절단 시스템과 이를 이용한 절단방법 | |
KR100796494B1 (ko) | 액정 표시 장치의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110823 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111122 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120214 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20120314 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120315 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20120314 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150420 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |