JP4379413B2 - 電子部品、電子部品の製造方法、回路基板及び電子機器 - Google Patents
電子部品、電子部品の製造方法、回路基板及び電子機器 Download PDFInfo
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- JP4379413B2 JP4379413B2 JP2005351631A JP2005351631A JP4379413B2 JP 4379413 B2 JP4379413 B2 JP 4379413B2 JP 2005351631 A JP2005351631 A JP 2005351631A JP 2005351631 A JP2005351631 A JP 2005351631A JP 4379413 B2 JP4379413 B2 JP 4379413B2
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- electronic component
- connection terminal
- semiconductor device
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- electrode
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Description
そこで、従来よりCSP(Chip Scale / Size Package)が適用された半導体装置が開発されている。また、特に近年では、ウエハレベルでCSPを形成する、いわゆるウエハレベルCSP(W−CSP)が注目されている(例えば、特許文献1、特許文献2参照)。ウエハレベルCSPでは、再配線が施された複数の半導体素子(集積回路)をウエハ単位で形成し、その後、各半導体素子(集積回路)毎に切断し個片化して、半導体装置を得るようにしている。
そこで、十分な接合強度を確保する方法として、金層の表層部を薄く除去して水酸化ニッケル成分等を取り除く方法が考えられる。
金層をメッキ形成した後に、エッチング洗浄工程等を別途設ける必要があり、半導体基板の製造効率低下を招いてしまう。
本発明の電子部品は、半導体装置と電子部品構造体とを具備し、前記半導体装置は、 半導体基板と、 前記半導体基板の能動面側に設けられた第1の電極と、前記第1の電極に電気的に接続して前記能動面側に設けられた外部接続端子と、前記半導体基板の能動面側に設けられた接続用端子とを備え、前記外部接続端子と前記接続用端子との少なくとも一方には、銅膜上に金メッキ膜、銀メッキ膜、パラジウムメッキ膜のいずれかが成膜され、
前記電子部品構造体は、水晶発振器、圧電振動子、圧電音叉、弾性表面波素子MEMS構造体、前記半導体装置とは別の半導体装置のいずれかであり、前記半導体装置における前記半導体基板の能動面側と反対の側に配設され、前記接続用端子とワイヤボンディングによって接続されることを特徴とする。
従って、本発明の電子部品では、ニッケル層等を用いた場合のように外部接続端子及び接続用端子を形成する金属が拡散することを抑制できるので、表層部を薄く除去する工程を別途設ける必要がなくなり、製造効率の低下を防止することができる。また、本発明では、外部接続端子とは別に接続用端子が設けられているので、この接続用端子を用いて例えば他の機能構造体との機械的接続や電気的接続を行うことにより、この半導体装置と機能構造体とを一体化して電子部品を形成し、その小型化を図ることが可能になる。
これにより、本発明では、電解メッキ用配線が不要になり、高密度の配線を実現することが可能になる。
このようにすれば、外部接続端子の位置やその配列を自由(任意)に設計することができる。
このようにすれば、接続用端子を用いて半導体装置の電気的な処理が可能になる。また、接続用端子を用いて他の機能構造体との電気的接続を行うことにより、例えばこの半導体装置を前記機能構造体の駆動用素子として機能させることも可能になる。
このようにすれば、例えば電気的検査やトリミングなどによる半導体装置の機能の保証や調整を、前記接続用端子を用いて行うことが可能になる。
このようにすれば、配線を介して第1電極と外部接続端子とが電気的に接続されることにより、この半導体装置に再配置配線が形成され、したがって外部接続端子の大きさや形状、配置等の自由度が大となる。また、応力緩和層が設けられているので、外部接続端子を介しての半導体装置と外部機器等との接続信頼性が高められる。
接続用端子を電気的な検査や調整に用いた後、これを封止樹脂で封止するようにすれば、その後この接続用端子を用いた調整等が不可能となることにより、検査や調整後の半導体装置の信頼性を高めることができる。また、接続用端子を他の部品との間の電気的接続に用いた後、封止樹脂で封止するようにすれば、この接続用端子での不測の短絡を防止することができ、さらにはこの接続用端子での接続強度を高めることもできる。
このようにすれば、柱状の接続用端子が例えば下層の導電部と上層の導電部とを導通させる上下導通部材として機能することにより、半導体装置全体での再配置配線についての自由度が高まる。
この電子部品によれば、半導体装置と機能構造体とを、接続用端子を利用して電気的接続手段で接続しているので、半導体装置と機能構造体とが一体化されて電子部品となり、したがって小型化が図られたものとなる。
このようにすれば、半導体装置と機能構造体との立体接続構造を簡便に得ることができる。
従って、本発明によれば、小型化が図られた電子部品が実装されているので、その分高密度実装が可能となり、したがって高機能化が図られた回路基板及び電子機器を得ることができる。
従って、本発明では、ニッケル層等を用いた場合のように外部接続端子及び接続用端子を形成する金属が拡散することを抑制できるので、表層部を薄く除去する工程を別途設ける必要がなくなり、製造効率の低下を防止することができる。
これにより、本発明では、電解メッキ用配線が不要になり、高密度の配線を実現することが可能になる。
また、本発明では、前記接続用端子を、封止樹脂によって封止する工程を有することが好ましい。
[半導体装置]
図1、図2は本発明の半導体装置の一実施形態を示す図であり、これらの図において符号1は、ウエハレベルCSP(W−CSP)構造の半導体装置である。なお、図1の側断面図は、図2の模式平面図における、A−A線矢視断面図とする。
外部接続端子12は、例えばはんだボールによってバンプ形状に形成されたもので、図1中二点鎖線で示す、外部機器としてのプリント配線板(回路基板)Pに電気的に接続されるものである。このような構成のもとに、シリコン基板10に形成された集積回路(半導体素子)は、第1の電極11、再配置配線である配線16、外部接続端子12を介してプリント配線板Pに電気的に接続されるようになっているのである。
なお、これら配線16、再配置配線19としては、前記材料による単層構造としてもよく、複数種を組み合わせた積層構造としてもよい。また、これら配線16及び再配置配線19については、通常は同一工程で形成するため、互いに同じ材料となる。
なお、第1絶縁層17については、酸化珪素(SiO2)、窒化珪素(Si3N4)等の無機絶縁材料によって形成することもできる。
次に、前記構成の半導体装置1の製造方法について図3を参照して説明する。なお、本実施形態においては、図4に示すように同一のシリコンウエハ(基板)100上に半導体装置1を複数一括して形成しておき、その後ダイシング(切断)して個片化することにより、半導体装置1を得るようにしているが、図3では説明を簡単にするため、単純化して1つの半導体装置1の形成のみを示している。
次に、第1の電極11及び第2の電極18を覆ってシリコン基板10上に第1絶縁層14を形成し、さらに、この第1絶縁層14を覆って樹脂層(図示せず)を形成する。
さらに、周知のフォトリソグラフィ法及びエッチング法によって第1の電極11及び第2の電極18を覆う位置の絶縁材料を除去し、開口部14aを形成する。これにより、これら開口部14a内に第1の電極11及び第2の電極18を露出させる。
また、特に再配置配線19の先端側、すなわち図2に示したように第2の電極18と反対の側は、パッド形状にパターニングしておくことにより、これを接続用端子部とする。
このように、銅膜の表面に銀メッキ膜21を成膜することにより、電気的接触性を高め、あるいはワイヤボンディングの際の接合性を高めることができる。
そして、図4に示すように、ダイシング装置110によってシリコンウエハ(基板)100を半導体装置1毎にダイシング(切断)し、個片化することにより、半導体装置1を得る。
なお、前記接続用端子13が、集積回路の機能検査や機能調整のみに用いられる場合には、これら機能検査や機能調整を終了した後、前述したようにこれら接続用端子13を封止樹脂20によって封止する。
すなわち、外部接続端子12はユーザー実装用として用いられるため、一般的にその端子ピッチを大きくする必要がある。したがって、設計的な制約により、集積回路(IC)の電極から全端子を外部接続端子として引き出せなくなることがある。しかし、本実施形態では、外部接続端子12とは別に、ユーザー実装用として用いない接続用端子13を設け、これを利用して集積回路の機能検査や機能調整を行っているので、外部接続端子12に関する設計的な制約を少なくし、設計自由度を高めることができる。
前述のようにして得られた接続用端子13は、その全てが集積回路の機能検査や機能調整用として用いられてもよいが、一部のみが集積回路の機能検査や機能調整用として用いられ、残りは、前記プリント配線板Pとは別の、他の機能構造体との接続をなす際に利用されるものであってもよい。さらには、全ての接続用端子13が、他の機能構造体との接続をなす際に利用されるようにしてもよい。
図5は、本発明の電子部品の一実施形態を示す図であり、図5中符号30は電子部品である。この電子部品30は、前記の半導体装置1と機能構造体31とを具備して構成されたものである。
電子部品30は、プリント配線板Pに実装される際、これら外部接続端子12を用いて実装がなされることから、金ワイヤ32はプリント配線板P側に向くことになる。そこで、本実施形態では、特に実装時において金ワイヤ32がプリント配線板Pに当接しないよう、この金ワイヤ32のワイヤボンディング高さ、すなわちこの金ワイヤ32の頂点高さを、外部接続端子12の高さより十分に低くしている。
なお、半導体装置1の接続用端子13と機能構造体31側の接続端子とをワイヤボンディングした後には、図5中二点鎖線で示すように、接続用端子13を封止樹脂33で封止するのが好ましい。このようにすれば、接続用端子13に対する金ワイヤ32の接続強度を高めることができる。さらに、接続用端子13、金ワイヤ32が樹脂で被覆されるので、特に後の工程による接続部構造へのダメージも低減でき、接続信頼性をも著しく向上させることができる。
さらに、本実施形態では、メッキ膜21を無電解メッキで成膜しているので、電解メッキを採用した場合に用いる電解メッキ用配線が不要になり、高密度の配線を実現することが可能になる。
また、シリコン基板10と外部接続端子12との間に応力緩和層15を設けているので、例えば外部接続端子12を介して半導体装置1とプリント配線板Pなどの外部機器とを接続した際、接続時に圧力や熱に起因する応力が外部接続端子12に生じても、応力緩和層15でこれを緩和し吸収することにより、断線などの不都合が生じるのを防止することができる。したがって、外部接続端子12と外部機器との接続信頼性を高めることができる。
本願では、接続端子との電気的な接続手段にワイヤボンディングを用いる例について説明してきたが、これに限ることはなく、TAB(Tape Automated Bonding)や、COF(Chip On Flexible)などのリードを伴う実装方式での接続としても良い。以下、どの実施の形態でも同様である。
また、図5に示した実施形態では、接続用端子13を電気的接続としてのワイヤボンディングに利用したが、これ以外にも、接続用端子13を単に機械的接続のために用いてもよい。すなわち、接続用端子13を、そのシリコン基板10に形成した集積回路とは関係なく、電気的に独立したランドとして金属などで形成しておき、機能構造体31との間で機械的な接続のみを目的としたワイヤボンディングに用いてもよい。具体的には、機能構造体31に対して半導体装置1を宙づり構造にしたい場合や、接着剤の使用が困難な場合、さらには接着剤だけでは十分な接合強度が得られない場合などに、接続用端子13を利用したワイヤボンディングによる機械的接続を採用することができる。
なお、この半導体装置40では、外部接続端子12と配線16との間にも、前記接続用端子41と同一工程で形成されたポスト(接続部)42が形成されている。これによって外部接続端子12は、第2絶縁層17の上面側にて、メッキ膜21及びポスト42を介して配線16と電気的に接続したものとなっている。
本発明の回路基板は、前記の電子部品30が、例えば図1中二点鎖線で示したプリント配線板Pに実装されることで形成される。すなわち、電子部品30における半導体装置1(40)の外部接続端子12が、プリント配線板Pの導電部に電気的に接続されることにより、本発明の一実施形態となる回路基板が形成されるのである。
この回路基板によれば、小型化が図られた電子部品30が実装されているので、その分高密度実装が可能となり、したがって高機能化を図ることができる。
この電子機器にあっても、小型化が図られた電子部品が実装されているので、その分高密度実装が可能となり、したがって高機能化を図ることができるとともに、製造効率の向上に伴う低価格化にも寄与できる。
Claims (13)
- 半導体装置と電子部品構造体とを具備し、
前記半導体装置は、
半導体基板と、
前記半導体基板の能動面側に設けられた第1の電極と、
前記第1の電極に電気的に接続して前記能動面側に設けられた外部接続端子と、
前記半導体基板の能動面側に設けられた接続用端子とを備え、
前記外部接続端子と前記接続用端子との少なくとも一方には、銅膜上に金メッキ膜、銀メッキ膜、パラジウムメッキ膜のいずれかが成膜され、
前記電子部品構造体は、水晶発振器、圧電振動子、圧電音叉、弾性表面波素子MEMS構造体、前記半導体装置とは別の半導体装置のいずれかであり、前記半導体装置における前記半導体基板の能動面側と反対の側に配設され、前記接続用端子とワイヤボンディングによって接続されることを特徴とする電子部品。 - 請求項1記載の電子部品において、
前記金メッキ膜、銀メッキ膜、パラジウムメッキ膜のいずれかが無電解メッキで形成されることを特徴とする電子部品。 - 請求項1または2記載の電子部品において、
前記第1の電極と前記外部接続端子との電気的接続が、前記能動面側に設けられた再配置配線によってなされていることを特徴とする電子部品。 - 請求項1から3のいずれかに記載の電子部品において、
前記接続用端子が、前記半導体基板の能動面側に設けられた第2の電極に電気的に接続されていることを特徴とする電子部品。 - 請求項1から4のいずれかに記載の電子部品において、
前記接続用端子が、電気的な検査や調整を行うための端子であることを特徴とする電子部品。 - 請求項1から5のいずれかに記載の電子部品において、
前記外部接続端子が前記第1の電極に配線を介して接続され、
前記半導体基板と前記外部接続端子との間に、応力緩和層が設けられていることを特徴とする電子部品。 - 請求項1から6のいずれかに記載の電子部品において、
前記接続用端子が、封止樹脂によって封止されてなることを特徴とする電子部品。 - 請求項1から7のいずれかに記載の電子部品において、
前記接続用端子が、柱状に形成されていることを特徴とする電子部品。 - 請求項1から8のいずれか一項に記載の電子部品が実装されていることを特徴とする回路基板。
- 請求項1から8のいずれか一項に記載の電子部品が実装されていることを特徴とする電子機器。
- 半導体基板の能動面側に第1の電極を設ける工程と、
前記第1の電極に電気的に接続する外部接続端子を前記半導体基板の能動面側に設ける工程と、
前記半導体基板の能動面側に接続用端子を設ける工程と、
前記外部接続端子と前記接続用端子との少なくとも一方に、銅膜上に金メッキ膜、銀メッキ膜、パラジウムメッキ膜のいずれかを成膜する工程と、
前記半導体基板の能動面側と反対の側に配設した水晶発振器、圧電振動子、圧電音叉、弾性表面波素子MEMS構造体、前記半導体装置とは別の半導体装置のいずれかの電子部品構造体と、前記接続用端子とをワイヤボンディングによって接続する工程とを備えたことを特徴とする電子部品の製造方法。
- 請求項11記載の電子部品の製造方法において、
前記金メッキ膜、銀メッキ膜、パラジウムメッキ膜のいずれかを無電解メッキで成膜することを特徴とする電子部品の製造方法。 - 請求項11または12記載の電子部品の製造方法において、
前記接続用端子を、封止樹脂によって封止する工程を有することを特徴とする電子部品の製造方法。
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JP2005351631A JP4379413B2 (ja) | 2005-12-06 | 2005-12-06 | 電子部品、電子部品の製造方法、回路基板及び電子機器 |
TW095142833A TWI328847B (en) | 2005-12-06 | 2006-11-20 | Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit board, and electronic device |
US11/633,106 US20070126109A1 (en) | 2005-12-06 | 2006-12-01 | Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit board, and electronic device |
KR1020060120342A KR100786741B1 (ko) | 2005-12-06 | 2006-12-01 | 반도체 장치, 반도체 장치의 제조 방법, 전자 부품, 회로기판, 및 전자 기기 |
CN2006101637192A CN1979833B (zh) | 2005-12-06 | 2006-12-04 | 半导体装置及其制造方法、电子部件、电路基板及电子机器 |
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WO2006054606A1 (ja) | 2004-11-16 | 2006-05-26 | Rohm Co., Ltd. | 半導体装置および半導体装置の製造方法 |
JP2009224212A (ja) * | 2008-03-17 | 2009-10-01 | Hosiden Corp | スライド操作式スイッチ |
JP5324121B2 (ja) * | 2008-04-07 | 2013-10-23 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
KR101627574B1 (ko) * | 2008-09-22 | 2016-06-21 | 쿄세라 코포레이션 | 배선 기판 및 그 제조 방법 |
US8637983B2 (en) | 2008-12-19 | 2014-01-28 | Ati Technologies Ulc | Face-to-face (F2F) hybrid structure for an integrated circuit |
US9607936B2 (en) * | 2009-10-29 | 2017-03-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Copper bump joint structures with improved crack resistance |
TW201233280A (en) * | 2011-01-25 | 2012-08-01 | Taiwan Uyemura Co Ltd | Chemical palladium-gold plating film method |
JP6355541B2 (ja) | 2014-12-04 | 2018-07-11 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US10566267B2 (en) * | 2017-10-05 | 2020-02-18 | Texas Instruments Incorporated | Die attach surface copper layer with protective layer for microelectronic devices |
JP2020145316A (ja) * | 2019-03-06 | 2020-09-10 | 豊田合成株式会社 | 半導体装置 |
CN111755400B (zh) * | 2019-03-29 | 2023-08-08 | 比亚迪股份有限公司 | 散热元件及其制备方法和igbt模组 |
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US6522018B1 (en) * | 2000-05-16 | 2003-02-18 | Micron Technology, Inc. | Ball grid array chip packages having improved testing and stacking characteristics |
JP2002050647A (ja) * | 2000-08-01 | 2002-02-15 | Sharp Corp | 半導体装置及びその製造方法 |
TW577152B (en) * | 2000-12-18 | 2004-02-21 | Hitachi Ltd | Semiconductor integrated circuit device |
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JP4007798B2 (ja) * | 2001-11-15 | 2007-11-14 | 三洋電機株式会社 | 板状体の製造方法およびそれを用いた回路装置の製造方法 |
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US6812552B2 (en) * | 2002-04-29 | 2004-11-02 | Advanced Interconnect Technologies Limited | Partially patterned lead frames and methods of making and using the same in semiconductor packaging |
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US7910471B2 (en) * | 2004-02-02 | 2011-03-22 | Texas Instruments Incorporated | Bumpless wafer scale device and board assembly |
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