JP3558074B2 - 測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置 - Google Patents

測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置 Download PDF

Info

Publication number: JP3558074B2
Authority: JP; Japan
Prior art keywords: measurement; measured; measurement device; data acquisition; correction data
Prior art date: 2001-12-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP2002277393A

Other languages

English (en)

Japanese (ja)

Other versions

JP2003240827A (ja

Inventor

岳神谷

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Murata Manufacturing Co Ltd

Original Assignee

Murata Manufacturing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-12-10

Filing date

2002-09-24

Publication date

2004-08-25

2002-09-24 Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd

2002-09-24 Priority to JP2002277393A priority Critical patent/JP3558074B2/ja

2002-11-27 Priority to US10/306,760 priority patent/US6697749B2/en

2002-12-09 Priority to CNB021518424A priority patent/CN1258095C/zh

2002-12-09 Priority to DE10257434.0A priority patent/DE10257434B4/de

2002-12-10 Priority to KR10-2002-0078209A priority patent/KR100496060B1/ko

2003-06-23 Priority to US10/601,718 priority patent/US6876935B2/en

2003-08-27 Publication of JP2003240827A publication Critical patent/JP2003240827A/ja

2004-08-25 Application granted granted Critical

2004-08-25 Publication of JP3558074B2 publication Critical patent/JP3558074B2/ja

2022-09-24 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Measurement Of Resistance Or Impedance (AREA)
Tests Of Electronic Circuits (AREA)
Analysing Materials By The Use Of Radiation (AREA)

JP2002277393A 2001-12-10 2002-09-24 測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置 Expired - Lifetime JP3558074B2 (ja)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
JP2002277393A JP3558074B2 (ja)	2001-12-10	2002-09-24	測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置
US10/306,760 US6697749B2 (en)	2001-12-10	2002-11-27	Correction method of measurement errors, quality checking method for electronic components, and characteristic measuring system of electronic components
CNB021518424A CN1258095C (zh)	2001-12-10	2002-12-09	校正方法、电子元件的质量检查方法及特性测量***
DE10257434.0A DE10257434B4 (de)	2001-12-10	2002-12-09	Meßfehler-Korrekturverfahren, Qualitätsprüfverfahren für elektronische Komponenten und Charakteristik-Meßsystem elektronischer Komponenten
KR10-2002-0078209A KR100496060B1 (ko)	2001-12-10	2002-12-10	측정 오차의 보정 방법, 전자 부품의 품질 검사 방법 및전자 부품 특성 측정 시스템
US10/601,718 US6876935B2 (en)	2002-09-24	2003-06-23	Method for correcting measurement error, method of determining quality of electronic component, and device for measuring characteristic of electronic component

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2001-375324		2001-12-10
JP2001375324		2001-12-10
JP2002277393A JP3558074B2 (ja)	2001-12-10	2002-09-24	測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置

Publications (2)

Publication Number	Publication Date
JP2003240827A JP2003240827A (ja)	2003-08-27
JP3558074B2 true JP3558074B2 (ja)	2004-08-25

Family

ID=26624958

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2002277393A Expired - Lifetime JP3558074B2 (ja)	2001-12-10	2002-09-24	測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置

Country Status (5)

Country	Link
US (1)	US6697749B2 (de)
JP (1)	JP3558074B2 (de)
KR (1)	KR100496060B1 (de)
CN (1)	CN1258095C (de)
DE (1)	DE10257434B4 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2009098816A1 (ja)	2008-02-05	2009-08-13	Murata Manufacturing Co., Ltd.	測定誤差の補正方法及び電子部品特性測定装置
WO2012105127A1 (ja) *	2011-01-31	2012-08-09	株式会社村田製作所	測定誤差の補正方法及び電子部品特性測定装置

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6876935B2 (en) *	2002-09-24	2005-04-05	Murata Manufacturing Co., Ltd.	Method for correcting measurement error, method of determining quality of electronic component, and device for measuring characteristic of electronic component
US6838885B2 (en) *	2003-03-05	2005-01-04	Murata Manufacturing Co., Ltd.	Method of correcting measurement error and electronic component characteristic measurement apparatus
JP2007519892A (ja) *	2003-06-11	2007-07-19	アジレント・テクノロジーズ・インク	複数のテストフィクスチャを使用するときのテストシステム校正の補正および装置測定値の変換
DE102004021421A1 (de) *	2004-04-30	2005-11-24	Austriamicrosystems Ag	Verfahren zur Bereitstellung eines Hochfrequenz-Ersatzschaltbilds für elektronische Bauteile
DE112005001211B4 (de) *	2004-05-25	2017-07-13	Murata Mfg. Co., Ltd.	Messfehlerkorrekturverfahren und zwei Elektronikkomponentencharakteristik-Messvorrichtungen
US6982561B2 (en) *	2004-05-27	2006-01-03	Agilent Technologies, Inc.	Scattering parameter travelling-wave magnitude calibration system and method
JP4650487B2 (ja) *	2005-02-22	2011-03-16	株式会社村田製作所	伝送路材料の誘電率測定方法およびこの誘電率測定方法を用いた電子部品の電気特性測定方法
JP2006242799A (ja) *	2005-03-04	2006-09-14	Murata Mfg Co Ltd	測定誤差の補正方法及び電子部品特性測定装置
JP4816173B2 (ja) *	2005-03-22	2011-11-16	株式会社村田製作所	測定誤差補正方法及び電子部品特性測定装置
WO2007037116A1 (ja) *	2005-09-29	2007-04-05	Murata Manufacturing Co., Ltd.	電子部品の電気特性測定方法
US7869888B2 (en) *	2006-05-31	2011-01-11	Tokyo Electron Limited	Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium
WO2008065791A1 (fr)	2006-11-30	2008-06-05	Murata Manufacturing Co., Ltd.	Procédé de correction d'erreur de caractéristiques hautes fréquences d'un composant électronique
WO2008066137A1 (fr) *	2006-11-30	2008-06-05	Murata Manufacturing Co., Ltd.	Procédé et dispositif de correction d'erreur de caractéristique haute fréquence de composant électronique
US8011950B2 (en) *	2009-02-18	2011-09-06	Cinch Connectors, Inc.	Electrical connector
US8436626B2 (en) *	2009-12-17	2013-05-07	Taiwan Semiconductor Manfacturing Company, Ltd.	Cascaded-based de-embedding methodology
JP5573868B2 (ja) *	2012-03-07	2014-08-20	株式会社村田製作所	等価回路作成方法、等価回路作成プログラム及び等価回路作成装置
KR101616037B1 (ko) *	2013-05-14	2016-04-27	가부시키가이샤 무라타 세이사쿠쇼	콘덴서의 시뮬레이션 방법 및 콘덴서의 비선형 등가 회로 모델
CN103675647B (zh) *	2013-12-10	2016-06-29	中国船舶重工集团公司第七0九研究所	一种基于集成电路标准样片的校准装置及方法
CN104316785B (zh) *	2014-10-08	2017-03-01	中国电子科技集团公司第四十一研究所	一种天馈线测试仪及延伸器件误差修正方法
CN105259527B (zh) *	2015-10-09	2018-08-17	国网新疆电力公司检修公司	一种对不同紫外成像仪检测结果进行校准的测试方法
EP3537374B1 (de) *	2016-11-01	2024-06-12	Fuji Corporation	System zur erzeugung von formdaten einer bildverarbeitungskomponente und verfahren zur erzeugung von formdaten einer bildverarbeitungskomponente
CN107706121B (zh) *	2017-08-31	2020-05-26	华润赛美科微电子(深圳)有限公司	多台测试设备批量测试的精度一致性修正方法和***
CN109901090B (zh) *	2019-03-26	2020-08-04	国网北京市电力公司	变电站的测控设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4013089A1 (de) *	1990-04-25	1991-10-31	Bosch Gmbh Robert	Verfahren zur fehlerkorrigierten messung einer elektrischen groesse
JPH0815348A (ja)	1994-06-28	1996-01-19	Fujitsu Ltd	電磁気障害対策部品のｓパラメータ測定方法及びｓパラメータ測定装置並びに電磁気障害対策部品のｓパラメータ測定に使用される測定治具
DE4435559A1 (de) *	1994-10-05	1996-04-11	Holger Heuermann	Verfahren zur Durchführung elektrischer Präzisionsmessungen mit Selbstkontrolle
DE19736897C2 (de) *	1996-09-30	2003-04-17	Rohde & Schwarz	Verfahren zur Kalibrierung eines vektoriellen Netzwerkanalysators
DE19757675C2 (de) *	1997-12-23	2003-04-30	Rohde & Schwarz	Verfahren zur Kalibrierung eines vektoriellen Netzwerkkanalysators

2002
- 2002-09-24 JP JP2002277393A patent/JP3558074B2/ja not_active Expired - Lifetime
- 2002-11-27 US US10/306,760 patent/US6697749B2/en not_active Expired - Lifetime
- 2002-12-09 DE DE10257434.0A patent/DE10257434B4/de not_active Expired - Lifetime
- 2002-12-09 CN CNB021518424A patent/CN1258095C/zh not_active Expired - Lifetime
- 2002-12-10 KR KR10-2002-0078209A patent/KR100496060B1/ko active IP Right Grant

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2009098816A1 (ja)	2008-02-05	2009-08-13	Murata Manufacturing Co., Ltd.	測定誤差の補正方法及び電子部品特性測定装置
US8688395B2 (en)	2008-02-05	2014-04-01	Murata Manufacturing Co., Ltd.	Method for correcting measurement errors and electronic component characteristics measuring device
WO2012105127A1 (ja) *	2011-01-31	2012-08-09	株式会社村田製作所	測定誤差の補正方法及び電子部品特性測定装置
JPWO2012105127A1 (ja) *	2011-01-31	2014-07-03	株式会社村田製作所	測定誤差の補正方法及び電子部品特性測定装置

Also Published As

Publication number	Publication date
KR100496060B1 (ko)	2005-06-17
US20030120449A1 (en)	2003-06-26
CN1258095C (zh)	2006-05-31
DE10257434A1 (de)	2003-06-26
DE10257434B4 (de)	2017-07-13
CN1490629A (zh)	2004-04-21
US6697749B2 (en)	2004-02-24
JP2003240827A (ja)	2003-08-27
KR20030047846A (ko)	2003-06-18

Legal Events

Date	Code	Title	Description
2003-12-12	A621	Written request for application examination	Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20031211
2004-01-29	A871	Explanation of circumstances concerning accelerated examination	Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20031218
2004-03-10	A975	Report on accelerated examination	Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20040309
2004-04-22	TRDD	Decision of grant or rejection written
2004-04-28	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040427
2004-05-27	A61	First payment of annual fees (during grant procedure)	Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040510
2004-05-28	R150	Certificate of patent or registration of utility model	Ref document number: 3558074 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150
2008-04-08	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20090528 Year of fee payment: 5
2009-04-02	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20090528 Year of fee payment: 5
2009-04-07	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20100528 Year of fee payment: 6
2010-04-08	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20100528 Year of fee payment: 6
2010-04-20	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20110528 Year of fee payment: 7
2011-04-12	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20120528 Year of fee payment: 8
2012-04-05	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20120528 Year of fee payment: 8
2012-04-17	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20130528 Year of fee payment: 9
2013-04-04	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20130528 Year of fee payment: 9
2013-04-23	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20140528 Year of fee payment: 10
2022-09-24	EXPY	Cancellation because of completion of term

Publication	Publication Date	Title
JP3558074B2 (ja)	2004-08-25	測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置
US7107170B2 (en)	2006-09-12	Multiport network analyzer calibration employing reciprocity of a device
US5442296A (en)	1995-08-15	Method for calibrating a network analyzer
US5434511A (en)	1995-07-18	Electronic microwave calibration device
JP4650487B2 (ja)	2011-03-16	伝送路材料の誘電率測定方法およびこの誘電率測定方法を用いた電子部品の電気特性測定方法
US20040160228A1 (en)	2004-08-19	Network analyzer calibration employing reciprocity of a device
US7405576B2 (en)	2008-07-29	Method and apparatus for measuring high-frequency electrical characteristics of electronic device, and method for calibrating apparatus for measuring high-frequency electrical characteristics
JP5483133B2 (ja)	2014-05-07	電子部品の高周波特性誤差補正方法
WO2005111635A1 (ja)	2005-11-24	電気回路パラメータの測定方法および装置
GB2421803A (en)	2006-07-05	Multi-port vector neywork analyzer calibration using the "unknown thru" method
US7768271B2 (en)	2010-08-03	Method for calibration of a vectorial network analyzer having more than two ports
JPWO2007029495A1 (ja)	2009-03-19	被検体の散乱係数の測定方法および測定装置
US7375534B2 (en)	2008-05-20	Method and apparatus for measuring high-frequency electrical characteristics of electronic device, and method for calibrating apparatus for measuring high-frequency electrical characteristics
KR20130117841A (ko)	2013-10-28	측정 오차의 보정방법 및 전자부품 특성 측정장치
JP2006078479A (ja)	2006-03-23	自動ポート延長校正を含むネットワークアナライザ及び動作方法
JP3558080B2 (ja)	2004-08-25	測定誤差の補正方法、電子部品の良否判定方法および電子部品特性測定装置
US6803776B2 (en)	2004-10-12	Current-comparator-based four-terminal resistance bridge for power frequencies
US6876935B2 (en)	2005-04-05	Method for correcting measurement error, method of determining quality of electronic component, and device for measuring characteristic of electronic component
US7834641B1 (en)	2010-11-16	Phase-gain calibration of impedance/admittance meter
JP2008014781A (ja)	2008-01-24	ネットワーク・アナライザの校正方法、および、ネットワーク・アナライザ
JP3912427B2 (ja)	2007-05-09	電子部品の高周波電気特性測定方法および装置、高周波電気特性測定装置の校正方法
WO2008011035A2 (en)	2008-01-24	Line-reflect-reflect match calibration
JP4743208B2 (ja)	2011-08-10	電子部品の電気特性測定方法
JP4670549B2 (ja)	2011-04-13	測定誤差の補正方法
Abramowicz et al.	2022	A Modified Technique for Characterization of Baluns Based on One-Port S-Parameter Measurements