JP2015524613A - 高いダイ破断強度及び清浄な側壁のためのレーザスクライビング及びプラズマエッチング - Google Patents
高いダイ破断強度及び清浄な側壁のためのレーザスクライビング及びプラズマエッチング Download PDFInfo
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Abstract
Description
本発明の実施形態は、半導体処理の分野に関し、特に、各ウェハが複数の集積回路を上に有する半導体ウェハをダイシングする方法に関する。
半導体ウェハ処理では、集積回路は、シリコン又は他の半導体材料からなるウェハ(基板ともいう)上に形成されている。一般に、半導体、導電体又は絶縁体のいずれかである様々な材料の層が、集積回路を形成するために利用される。これらの材料は、様々な周知のプロセスを用いてドープされ、堆積(蒸着)され、エッチングされ、これによって集積回路を形成する。各ウェハは、ダイとして知られる集積回路を含む多数の個々の領域を形成するように処理される。
Claims (15)
- 複数の集積回路を含む半導体ウェハをダイシングする方法であって、
集積回路を覆い保護するマスクを半導体ウェハの上方に形成する工程と、
集積回路間の半導体ウェハの領域を露出させるギャップを有するパターニングされたマスクを提供するために、レーザスクライビングプロセスによってマスクをパターニングする工程と、
集積回路を個片化するために、半導体ウェハを完全に貫通してエッチングされたトレンチを進めるために、パターニングされたマスク内のギャップを貫通して半導体ウェハを異方性エッチングする工程と、
異方性エッチングされたトレンチを等方性エッチングする工程を含む方法。 - 等方性エッチングは、ダイの個片化の後に異方性エッチングされたダイの側壁から、異方性エッチングの副生成物、粗さ、又は側壁スカラップを除去する請求項1記載の方法。
- 等方性エッチングは、異方性エッチングされたトレンチから炭素及びフッ素を含むポリマーを除去する請求項1記載の方法。
- 半導体ウェハを異方性エッチングする工程は、裏面テープがエッチングされたトレンチの底部で露出されるまで、ポリマー堆積、指向性衝撃エッチング、及び等方性化学エッチングを含む循環プロセスの反復を実行する工程を含み、
異方性エッチングされたトレンチを等方性エッチングする工程は、非重合フッ素又は塩素系化学物質を利用した等方性プラズマエッチングを含む請求項1記載の方法。 - 非重合フッ素又は塩素系化学物質は、本質的にNF3又はSF6、Cl2又はSiF4からなる請求項4記載の方法。
- 非重合フッ素又は塩素系化学物質は、酸化剤を含む請求項4記載の方法。
- 異方性エッチングと等方性エッチングの両方に対して、同じプラズマチャンバが使用される請求項3記載の方法。
- 等方性エッチングは、90秒間未満実行される請求項3記載の方法。
- 半導体ウェハを異方性エッチングする工程は、裏面テープがエッチングされたトレンチの底部で露出されるまで、ポリマー堆積、指向性衝撃エッチング、及び等方性化学エッチングを含む循環プロセスの反復を実行する工程を含み、
異方性エッチングされたトレンチを等方性エッチングする工程は、湿式化学エッチングを含む請求項1記載の方法。 - マスクをパターニングする工程は、540ナノメートル以下の波長と400フェムト秒以下のレーザパルス幅を有するフェムト秒レーザでパターンを直接描画する工程を含む請求項1記載の方法。
- マスクを形成する工程は、半導体ウェハ上に水溶性マスク層を堆積する工程を含む請求項1記載の方法。
- マスクを形成する工程は、ベースコートとしての水溶性マスク層と、ベースコート上のオーバーコートとしての非水溶性マスク層とを含む多層マスクを堆積する工程を含む請求項11記載の方法。
- 複数の集積回路(IC)を含む基板をダイシングするためのシステムであって、
IC間の基板の領域を露出させるトレンチを形成するために多層マスクをパターニングするためのレーザスクライブモジュールと、
レーザスクライビング後に残っている基板の厚みを貫通して異方性エッチングするための、レーザスクライブモジュールに物理的に結合された異方性プラズマエッチングモジュールと、
異方性エッチングされたトレンチを等方性エッチングするための、レーザスクライブモジュールに物理的に結合された等方性プラズマエッチングモジュールと、
レーザスクライブモジュールから異方性プラズマエッチングモジュールまでレーザスクライブされた基板を搬送するためのロボット搬送チャンバを含むシステム。 - レーザスクライブモジュールは、540ナノメートル以下の波長と400フェムト秒以下のレーザパルス幅を有するフェムト秒レーザを含む請求項13記載のシステム。
- 等方性プラズマエッチングモジュールと異方性プラズマエッチングモジュールは、同じ単一のチャンバである請求項13記載のシステム。
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US13/938,570 US8993414B2 (en) | 2012-07-13 | 2013-07-10 | Laser scribing and plasma etch for high die break strength and clean sidewall |
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KR102365042B1 (ko) | 2022-02-17 |
KR20150032583A (ko) | 2015-03-26 |
WO2014011913A1 (en) | 2014-01-16 |
TW201405646A (zh) | 2014-02-01 |
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