JP4288229B2 - 半導体チップの製造方法 - Google Patents
半導体チップの製造方法 Download PDFInfo
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- JP4288229B2 JP4288229B2 JP2004373022A JP2004373022A JP4288229B2 JP 4288229 B2 JP4288229 B2 JP 4288229B2 JP 2004373022 A JP2004373022 A JP 2004373022A JP 2004373022 A JP2004373022 A JP 2004373022A JP 4288229 B2 JP4288229 B2 JP 4288229B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
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Description
上記半導体ウェハの上記第1の面において、上記TEGと接触するように保護シートを貼り付ける保護シート貼付工程と、
上記第1の面とは反対側の面である第2の面に、上記分割領域を画定するためのマスクを配置するマスク配置工程と、
上記保護シートが貼り付けられかつ上記マスクが配置された上記半導体ウェハにおける上記第2の面よりプラズマエッチングを施して、上記分割領域に該当する部分を除去することにより、上記各々の素子形成領域を上記個々の半導体チップとして分割するプラズマエッチング工程と、
上記プラズマエッチング工程にて分割された上記それぞれの半導体チップから、上記保護シートを剥がすことで、上記分割領域内に残存しかつ上記保護シートに貼り付けられた状態の上記TEGの残部を、当該保護シートとともに除去するTEG除去工程と、を含むことを特徴とする半導体チップの製造方法を提供する。
また、上記それぞれの半導体素子とTEGとは互いに直接的に連結されることなく、切り離された状態にて形成される。
上記プラズマエッチング工程において、当該プラズマエッチングを施すことにより、上記分割領域に相当する上記シリコン基板を除去して、隣接する上記それぞれの半導体素子を互いに分離させるとともに、上記TEGを上記シリコン基板から分離させる第1態様から第3態様のいずれか1つに記載の半導体チップの製造方法を提供する。
上記半導体ウェハの上記第1の面において、上記TEGと接触するように保護シートを貼り付ける保護シート貼付工程と、
上記第1の面とは反対側の面である第2の面において、上記分割領域に相当する部分に当該分割領域に沿って、当該半導体ウェハの厚み寸法よりも浅い深さの溝部を形成する溝部形成工程と、
当該溝部が形成された上記半導体ウェハの上記第2の面に対してプラズマエッチングを施して、上記溝部の底部の除去を行うことにより、上記各々の素子形成領域を上記個々の半導体チップとして分割するプラズマエッチング工程と、
上記プラズマエッチング工程にて分割された上記それぞれの半導体チップから、上記保護シートを剥がすことで、上記分割領域内に残存しかつ上記保護シートに貼り付けられた状態の上記TEGの残部を、当該保護シートとともに除去するTEG除去工程と、を含むことを特徴とする半導体チップの製造方法を提供する。
上記プラズマエッチング工程において、当該プラズマエッチングを施すことにより、上記分割領域に相当する上記シリコン基板を除去して、隣接する上記それぞれの半導体素子を互いに分離させるとともに、上記TEGを上記シリコン基板から分離させる第6態様又は第7態様に記載の半導体チップの製造方法を提供する。
1a 回路形成面
1b 被処理面
2 半導体素子
3 TEG
4 保護シート
5 マスク層
5a 分割線用マスク除去部
5b マスク
5c マスクパターン
6 粘着シート
10 半導体チップ
11 真空容器
12 処理室
13 下部電極
14 上部電極
15 多孔質プレート
17 プラズマ発生用ガス供給部
19 排気ポンプ
20 高周波電源部
30 半導体チップ
30a R部
51 シリコン基板
52 シリコン酸化膜
53 デバイス層
54 シリコン酸化膜
61 分割用溝部
101 プラズマ処理装置
R1 素子形成領域
R2 分割領域
Claims (9)
- 分割領域により画定される複数の素子形成領域内に配置された半導体素子と、上記分割領域内に配置されたTEG(テスト・エレメント・グループ)とが、その第1の面において形成された半導体ウェハに対して、上記分割領域において上記各々の素子形成領域を個別に分割して、個片化された上記半導体素子を含む半導体チップを製造する方法であって、
上記半導体ウェハの上記第1の面において、上記TEGと接触するように保護シートを貼り付ける保護シート貼付工程と、
上記第1の面とは反対側の面である第2の面に、上記分割領域を画定するためのマスクを配置するマスク配置工程と、
上記保護シートが貼り付けられかつ上記マスクが配置された上記半導体ウェハにおける上記第2の面よりプラズマエッチングを施して、上記分割領域に該当する部分を除去することにより、上記各々の素子形成領域を上記個々の半導体チップとして分割するプラズマエッチング工程と、
上記プラズマエッチング工程にて分割された上記それぞれの半導体チップから、上記保護シートを剥がすことで、上記分割領域内に残存しかつ上記保護シートに貼り付けられた状態の上記TEGの残部を、当該保護シートとともに除去するTEG除去工程と、を含むことを特徴とする半導体チップの製造方法。 - 上記プラズマエッチング工程実施の後、上記TEG除去工程実施の前に、上記それぞれの半導体チップにおける上記第2の面から、上記マスクを除去するマスク除去工程を行う請求項1に記載の半導体チップの製造方法。
- 上記プラズマエッチング工程において、上記ぞれぞれの半導体チップが個片に分割されるとともに、当該それぞれの半導体チップから上記TEGが個片に分離される請求項1又は2に記載の半導体チップの製造方法。
- 上記半導体ウェハは、シリコン基板と、当該シリコン基板の上記第1の面に形成された上記それぞれの半導体素子と上記TEGとを有し、
上記プラズマエッチング工程において、当該プラズマエッチングを施すことにより、上記分割領域に相当する上記シリコン基板を除去して、隣接する上記それぞれの半導体素子を互いに分離させるとともに、上記TEGを上記シリコン基板から分離させる請求項1から3のいずれか1つに記載の半導体チップの製造方法。 - 上記マスク配置工程において、上記シリコン基板の上記第1の面における上記TEGの固着部分が上記プラズマエッチング工程にて除去可能に、上記マスクが配置される請求項4に記載の半導体チップの製造方法。
- 分割領域により画定される複数の素子形成領域内に配置された半導体素子と、上記分割領域内に配置されたTEGとが、その第1の面において形成された半導体ウェハに対して、上記分割領域において上記各々の素子形成領域を個別に分割して、個片化された上記半導体素子を含む半導体チップを製造する方法であって、
上記半導体ウェハの上記第1の面において、上記TEGと接触するように保護シートを貼り付ける保護シート貼付工程と、
上記第1の面とは反対側の面である第2の面において、上記分割領域に相当する部分に当該分割領域に沿って、当該半導体ウェハの厚み寸法よりも浅い深さの溝部を形成する溝部形成工程と、
当該溝部が形成された上記半導体ウェハの上記第2の面に対してプラズマエッチングを施して、上記溝部の底部の除去を行うことにより、上記各々の素子形成領域を上記個々の半導体チップとして分割するプラズマエッチング工程と、
上記プラズマエッチング工程にて分割された上記それぞれの半導体チップから、上記保護シートを剥がすことで、上記分割領域内に残存しかつ上記保護シートに貼り付けられた状態の上記TEGの残部を、当該保護シートとともに除去するTEG除去工程と、を含むことを特徴とする半導体チップの製造方法。 - 上記プラズマエッチング工程において、上記ぞれぞれの半導体チップが個片に分割されるとともに、当該それぞれの半導体チップから上記TEGが個片に分離される請求項6に記載の半導体チップの製造方法。
- 上記半導体ウェハは、シリコン基板と、当該シリコン基板の上記第1の面に形成された上記それぞれの半導体素子と上記TEGとを有し、
上記プラズマエッチング工程において、当該プラズマエッチングを施すことにより、上記分割領域に相当する上記シリコン基板を除去して、隣接する上記それぞれの半導体素子を互いに分離させるとともに、上記TEGを上記シリコン基板から分離させる請求項6又は7に記載の半導体チップの製造方法。 - 上記溝部形成工程において、上記シリコン基板の上記第1の面における上記TEGの固着部分が上記プラズマエッチング工程にて除去可能に、当該固着部分の幅寸法以上の幅寸法を有する上記溝部が形成される請求項8に記載の半導体チップの製造方法。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
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JP2004373022A JP4288229B2 (ja) | 2004-12-24 | 2004-12-24 | 半導体チップの製造方法 |
TW094145619A TW200633050A (en) | 2004-12-24 | 2005-12-21 | Manufacturing method for semiconductor chips |
DE602005009026T DE602005009026D1 (de) | 2004-12-24 | 2005-12-21 | Herstellungsverfahren für halbleiterchips |
AT05822800T ATE432532T1 (de) | 2004-12-24 | 2005-12-21 | Herstellungsverfahren für halbleiterchips |
US11/660,996 US7678670B2 (en) | 2004-12-24 | 2005-12-21 | TEG removing method in manufacturing method for semiconductor chips |
EP05822800A EP1831924B1 (en) | 2004-12-24 | 2005-12-21 | Manufacturing method for semiconductor chips |
CNB2005800347815A CN100499073C (zh) | 2004-12-24 | 2005-12-21 | 半导体芯片制造方法 |
KR1020077008200A KR101153637B1 (ko) | 2004-12-24 | 2005-12-21 | 반도체 칩의 제조 방법 |
PCT/JP2005/023991 WO2006068284A1 (en) | 2004-12-24 | 2005-12-21 | Manufacturing method for semiconductor chips |
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JP2004373022A JP4288229B2 (ja) | 2004-12-24 | 2004-12-24 | 半導体チップの製造方法 |
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JP2006179768A JP2006179768A (ja) | 2006-07-06 |
JP4288229B2 true JP4288229B2 (ja) | 2009-07-01 |
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US (1) | US7678670B2 (ja) |
EP (1) | EP1831924B1 (ja) |
JP (1) | JP4288229B2 (ja) |
KR (1) | KR101153637B1 (ja) |
CN (1) | CN100499073C (ja) |
AT (1) | ATE432532T1 (ja) |
DE (1) | DE602005009026D1 (ja) |
TW (1) | TW200633050A (ja) |
WO (1) | WO2006068284A1 (ja) |
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ATE432532T1 (de) | 2009-06-15 |
KR20070089122A (ko) | 2007-08-30 |
WO2006068284A1 (en) | 2006-06-29 |
TW200633050A (en) | 2006-09-16 |
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US7678670B2 (en) | 2010-03-16 |
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