IT1254290B - Procedimento per il caricamento successivo in continuo con silicio liquido nel tiraggio da crogiolo secondo czochralski. - Google Patents

Procedimento per il caricamento successivo in continuo con silicio liquido nel tiraggio da crogiolo secondo czochralski.

Info

Publication number
IT1254290B
IT1254290B ITRM920065A ITRM920065A IT1254290B IT 1254290 B IT1254290 B IT 1254290B IT RM920065 A ITRM920065 A IT RM920065A IT RM920065 A ITRM920065 A IT RM920065A IT 1254290 B IT1254290 B IT 1254290B
Authority
IT
Italy
Prior art keywords
crucible
czochralski
draft
loading procedure
liquid silicon
Prior art date
Application number
ITRM920065A
Other languages
English (en)
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of ITRM920065A0 publication Critical patent/ITRM920065A0/it
Publication of ITRM920065A1 publication Critical patent/ITRM920065A1/it
Application granted granted Critical
Publication of IT1254290B publication Critical patent/IT1254290B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C30B15/04—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C30B15/12—Double crucible methods
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1056—Seed pulling including details of precursor replenishment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

Nel tiraggio da crogiolo di lingotti di cristalli secondo Czochralski, in modo particolare di quelli da silicio e con diametri dei cristalli particolarmente grandi, il grado di riempimento del crogiolo viene tenuto durante il processo del tiraggio approssimativamente costante mediante aggiunta in continuo di materiale di caricamento successivo solido oppure liquido. Gli svantaggi noti di inconvenienti termici e della introduzione di impurezze e particelle vengono superati secondo l'invenzione mediante un sistema di caricamento successivo chiuso a tenuta di gas, costituito da crogiolo (11) di addizione, con tenitore di scorta per materiale (19) dei semiconduttori e materiale (16) drogante con le corrispondenti tubazioni di trasporto e con una tubazione per il gas di scarico. Il procedimento consente inoltre un caricamento successivo regolabile e separato di materiale drogante attraverso il crogiolo di addizione.
ITRM920065A 1991-03-01 1992-01-30 Procedimento per il caricamento successivo in continuo con silicio liquido nel tiraggio da crogiolo secondo czochralski. IT1254290B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4106589A DE4106589C2 (de) 1991-03-01 1991-03-01 Kontinuierliches Nachchargierverfahren mit flüssigem Silicium beim Tiegelziehen nach Czochralski

Publications (3)

Publication Number Publication Date
ITRM920065A0 ITRM920065A0 (it) 1992-01-30
ITRM920065A1 ITRM920065A1 (it) 1993-07-30
IT1254290B true IT1254290B (it) 1995-09-14

Family

ID=6426266

Family Applications (1)

Application Number Title Priority Date Filing Date
ITRM920065A IT1254290B (it) 1991-03-01 1992-01-30 Procedimento per il caricamento successivo in continuo con silicio liquido nel tiraggio da crogiolo secondo czochralski.

Country Status (5)

Country Link
US (2) US5242531A (it)
JP (1) JPH0676273B2 (it)
KR (1) KR950003431B1 (it)
DE (1) DE4106589C2 (it)
IT (1) IT1254290B (it)

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DE4106589A1 (de) 1992-09-03
KR950003431B1 (ko) 1995-04-12
ITRM920065A0 (it) 1992-01-30
ITRM920065A1 (it) 1993-07-30
JPH05105576A (ja) 1993-04-27
US5242531A (en) 1993-09-07
JPH0676273B2 (ja) 1994-09-28
DE4106589C2 (de) 1997-04-24
US5324488A (en) 1994-06-28

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