FR2615036B1 - Machine pour la fabrication de silicium poreux - Google Patents
Machine pour la fabrication de silicium poreuxInfo
- Publication number
- FR2615036B1 FR2615036B1 FR8706683A FR8706683A FR2615036B1 FR 2615036 B1 FR2615036 B1 FR 2615036B1 FR 8706683 A FR8706683 A FR 8706683A FR 8706683 A FR8706683 A FR 8706683A FR 2615036 B1 FR2615036 B1 FR 2615036B1
- Authority
- FR
- France
- Prior art keywords
- manufacture
- machine
- porous silicon
- porous
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021426 porous silicon Inorganic materials 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/32—Anodisation of semiconducting materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/0203—Making porous regions on the surface
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8706683A FR2615036B1 (fr) | 1987-05-05 | 1987-05-05 | Machine pour la fabrication de silicium poreux |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8706683A FR2615036B1 (fr) | 1987-05-05 | 1987-05-05 | Machine pour la fabrication de silicium poreux |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2615036A1 FR2615036A1 (fr) | 1988-11-10 |
FR2615036B1 true FR2615036B1 (fr) | 1989-08-18 |
Family
ID=9351032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8706683A Expired FR2615036B1 (fr) | 1987-05-05 | 1987-05-05 | Machine pour la fabrication de silicium poreux |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2615036B1 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2609614A (en) * | 1946-04-13 | 1952-09-09 | Johnson Co Gage | Aligned thread gauge |
DE3917702A1 (de) * | 1989-05-31 | 1990-12-06 | Siemens Ag | Verfahren zur ortsaufgeloesten bestimmung der diffusionslaenge von minoritaetsladungstraegern in einem halbleiterkristallkoerper mit hilfe einer elektrolytischen zelle |
JP3376258B2 (ja) | 1996-11-28 | 2003-02-10 | キヤノン株式会社 | 陽極化成装置及びそれに関連する装置及び方法 |
JP3985065B2 (ja) * | 1997-05-14 | 2007-10-03 | 忠弘 大見 | 多孔質シリコン基板の形成方法及び多孔質シリコン基板の形成装置 |
JP3413090B2 (ja) * | 1997-12-26 | 2003-06-03 | キヤノン株式会社 | 陽極化成装置及び陽極化成処理方法 |
JPH11243076A (ja) * | 1998-02-26 | 1999-09-07 | Canon Inc | 陽極化成方法及び陽極化成装置並びに半導体基板の製造方法 |
EP0987556A3 (fr) * | 1998-08-10 | 2001-05-09 | Siemens Aktiengesellschaft | Dispositif de mesure de la longueur de diffusion dans des corps semi-conducteurs |
GB2626126A (en) * | 2022-12-12 | 2024-07-17 | Iqe Plc | Systems and methods for porous tool |
-
1987
- 1987-05-05 FR FR8706683A patent/FR2615036B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2615036A1 (fr) | 1988-11-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property |