CN1712333B - 基板翻转装置及方法、基板运送装置及方法、基板处理装置及方法 - Google Patents
基板翻转装置及方法、基板运送装置及方法、基板处理装置及方法 Download PDFInfo
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- CN1712333B CN1712333B CN2005100779064A CN200510077906A CN1712333B CN 1712333 B CN1712333 B CN 1712333B CN 2005100779064 A CN2005100779064 A CN 2005100779064A CN 200510077906 A CN200510077906 A CN 200510077906A CN 1712333 B CN1712333 B CN 1712333B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Registering Or Overturning Sheets (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-183399 | 2004-06-22 | ||
JP2004183399A JP4467367B2 (ja) | 2004-06-22 | 2004-06-22 | 基板反転装置、基板搬送装置、基板処理装置、基板反転方法、基板搬送方法および基板処理方法 |
JP2004183399 | 2004-06-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1712333A CN1712333A (zh) | 2005-12-28 |
CN1712333B true CN1712333B (zh) | 2011-05-11 |
Family
ID=35718158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005100779064A Active CN1712333B (zh) | 2004-06-22 | 2005-06-13 | 基板翻转装置及方法、基板运送装置及方法、基板处理装置及方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7322787B2 (zh) |
JP (1) | JP4467367B2 (zh) |
CN (1) | CN1712333B (zh) |
TW (1) | TWI256686B (zh) |
Families Citing this family (63)
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FR2883277B1 (fr) * | 2005-03-18 | 2007-05-11 | Silmach Soc Par Actions Simpli | Procede et dispositif pour deplacer un element a entrainer utilisant un element actionneur forme par gravure dans un materiau semi-conducteur |
WO2007099786A1 (ja) * | 2006-02-23 | 2007-09-07 | Hitachi Kokusai Electric Inc. | 基板処理装置及び半導体装置の製造方法 |
JP4744426B2 (ja) | 2006-12-27 | 2011-08-10 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP4744425B2 (ja) * | 2006-12-27 | 2011-08-10 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4726776B2 (ja) * | 2006-12-27 | 2011-07-20 | 大日本スクリーン製造株式会社 | 反転装置およびそれを備えた基板処理装置 |
US7694688B2 (en) * | 2007-01-05 | 2010-04-13 | Applied Materials, Inc. | Wet clean system design |
JP2008172160A (ja) * | 2007-01-15 | 2008-07-24 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
US7967996B2 (en) * | 2007-01-30 | 2011-06-28 | Applied Materials, Inc. | Process for wafer backside polymer removal and wafer front side photoresist removal |
US20080179287A1 (en) * | 2007-01-30 | 2008-07-31 | Collins Kenneth S | Process for wafer backside polymer removal with wafer front side gas purge |
US20080179288A1 (en) * | 2007-01-30 | 2008-07-31 | Collins Kenneth S | Process for wafer backside polymer removal and wafer front side scavenger plasma |
US20080179289A1 (en) * | 2007-01-30 | 2008-07-31 | Collins Kenneth S | Process for wafer backside polymer removal with a plasma stream |
JP5149513B2 (ja) | 2007-02-15 | 2013-02-20 | 株式会社Sokudo | 基板処理装置 |
JP5004612B2 (ja) | 2007-02-15 | 2012-08-22 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4949064B2 (ja) * | 2007-02-15 | 2012-06-06 | 株式会社Sokudo | 基板処理装置 |
JP5004611B2 (ja) | 2007-02-15 | 2012-08-22 | 株式会社Sokudo | 基板処理装置 |
US9050634B2 (en) | 2007-02-15 | 2015-06-09 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus |
JP2008198879A (ja) * | 2007-02-15 | 2008-08-28 | Sokudo:Kk | 基板処理装置 |
US7641406B2 (en) * | 2007-07-26 | 2010-01-05 | Sokudo Co., Ltd. | Bevel inspection apparatus for substrate processing |
JP5107122B2 (ja) * | 2008-04-03 | 2012-12-26 | 大日本スクリーン製造株式会社 | 基板処理装置 |
DE102008027861A1 (de) * | 2008-06-11 | 2009-12-17 | Vistec Semiconductor Systems Jena Gmbh | Vorrichtung zum Halten von scheibenförmigen Objekten |
CN101488469B (zh) * | 2009-02-13 | 2010-06-02 | 友达光电股份有限公司 | 翻转装置与翻转基板的方法 |
CN101814586B (zh) * | 2009-12-01 | 2011-09-28 | 东莞宏威数码机械有限公司 | 夹持式基板翻转装置 |
CN102125921B (zh) * | 2010-01-20 | 2012-09-05 | 常州瑞择微电子科技有限公司 | 一种光掩模在清洗过程中的传输方法 |
US9153462B2 (en) | 2010-12-09 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Spin chuck for thin wafer cleaning |
KR101394458B1 (ko) * | 2011-05-31 | 2014-05-14 | 세메스 주식회사 | 버퍼 유닛, 기판 처리 설비 그리고 기판 처리 방법 |
CN102935942B (zh) * | 2011-08-16 | 2015-03-04 | 中芯国际集成电路制造(北京)有限公司 | 电控操作器 |
JP5877016B2 (ja) * | 2011-08-26 | 2016-03-02 | 株式会社Screenホールディングス | 基板反転装置および基板処理装置 |
JP6091060B2 (ja) * | 2011-12-02 | 2017-03-08 | 芝浦メカトロニクス株式会社 | スピン処理装置 |
US9431282B2 (en) * | 2011-12-27 | 2016-08-30 | Rudolph Technologies, Inc. | Wafer inversion mechanism |
TWI513646B (zh) | 2012-02-17 | 2015-12-21 | Shibaura Mechatronics Corp | A reversing device for a substrate, a reversing method, and a processing device for a substrate |
JP6045869B2 (ja) * | 2012-10-01 | 2016-12-14 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
CN103909072A (zh) * | 2013-01-07 | 2014-07-09 | 台湾暹劲股份有限公司 | 电子元件清洗装置及其应用的作业设备 |
CN103008301B (zh) * | 2013-01-11 | 2016-01-20 | 常州市科沛达超声工程设备有限公司 | 晶圆片双面刷洗机 |
US9099510B2 (en) * | 2013-03-15 | 2015-08-04 | Genmark Automation, Inc. | Workpiece flipping mechanism for space-constrained environment |
JP6300463B2 (ja) * | 2013-08-07 | 2018-03-28 | 三星ダイヤモンド工業株式会社 | 反転装置 |
CN203602097U (zh) * | 2013-10-28 | 2014-05-21 | 富鼎电子科技(嘉善)有限公司 | 翻面机 |
JP6420609B2 (ja) * | 2013-11-21 | 2018-11-07 | 株式会社Screenホールディングス | 基板搬送方法および基板処理装置 |
JP6215031B2 (ja) * | 2013-12-16 | 2017-10-18 | 株式会社東京精密 | ウェーハ受け渡し装置 |
CN104360507B (zh) * | 2014-11-17 | 2018-01-30 | 合肥京东方光电科技有限公司 | 翻转装置、基板对盒***及基板对盒方法 |
JP6674674B2 (ja) * | 2015-03-27 | 2020-04-01 | 株式会社Screenホールディングス | 基板保持方法および基板処理装置 |
JP6560572B2 (ja) * | 2015-09-14 | 2019-08-14 | 株式会社荏原製作所 | 反転機および基板研磨装置 |
JP6557625B2 (ja) * | 2016-03-23 | 2019-08-07 | 東芝メモリ株式会社 | 基板の生産方法、および基板の生産システム |
CN106098593A (zh) * | 2016-06-22 | 2016-11-09 | 贵州雅光电子科技股份有限公司 | 一种二极管自动清洗控制***及控制方法 |
JP6309047B2 (ja) * | 2016-07-01 | 2018-04-11 | キヤノントッキ株式会社 | 基板挟持装置、成膜装置及び成膜方法 |
JP2018085354A (ja) * | 2016-11-21 | 2018-05-31 | 株式会社荏原製作所 | 反転機、反転ユニット、反転方法および基板処理方法 |
CN106882596B (zh) * | 2017-03-23 | 2019-07-16 | 京东方科技集团股份有限公司 | 基板上下料***、基板上料方法及基板下料方法 |
CN108666232B (zh) * | 2017-03-28 | 2021-11-12 | 雷仲礼 | 基板处理***、基板翻转装置和方法 |
CN107331641B (zh) * | 2017-06-27 | 2020-06-30 | 北京中电科电子装备有限公司 | 一种翻转装置 |
CN107946220A (zh) * | 2017-12-22 | 2018-04-20 | 君泰创新(北京)科技有限公司 | 电池片翻片装置 |
JP7054174B2 (ja) * | 2017-12-27 | 2022-04-13 | 三星ダイヤモンド工業株式会社 | 基板反転装置 |
CN108321310A (zh) * | 2018-01-30 | 2018-07-24 | 上海瀚莅电子科技有限公司 | 有机发光二极管器件的制作*** |
JP7085743B2 (ja) * | 2018-01-31 | 2022-06-17 | 三星ダイヤモンド工業株式会社 | 基板反転装置 |
CN207967026U (zh) * | 2018-03-14 | 2018-10-12 | 君泰创新(北京)科技有限公司 | 电池片载板翻转机构及电池片镀膜工艺生产线 |
CN108573904B (zh) * | 2018-04-14 | 2021-08-20 | 芜湖扬展新材料科技服务有限公司 | 一种硅板机械清洗装置 |
CN109037135B (zh) * | 2018-06-07 | 2021-11-12 | 无锡思锐电子设备科技有限公司 | 一种硅片翻转机构 |
CN111029273B (zh) * | 2018-10-10 | 2022-04-05 | 沈阳芯源微电子设备股份有限公司 | 一种低接触晶圆翻转*** |
EP3948939B1 (en) * | 2019-03-27 | 2024-02-21 | Yaskawa Europe Technology Ltd. | Semiconductor flipper |
CN110426920B (zh) * | 2019-06-17 | 2021-06-18 | 福建省福联集成电路有限公司 | 一种可旋转调整的曝光载台 |
CN110640324B (zh) * | 2019-09-02 | 2022-06-10 | 中芯集成电路(宁波)有限公司 | 一种晶圆双面制作*** |
CN111725118A (zh) * | 2020-06-19 | 2020-09-29 | 北京七星华创集成电路装备有限公司 | 翻转装置 |
US11511950B2 (en) * | 2020-07-29 | 2022-11-29 | Applied Materials, Inc. | Substrate flipping device |
CN115193789B (zh) * | 2022-09-16 | 2023-03-24 | 核欣(苏州)医药科技有限公司 | 一种酶标板清洁方法及其具有清洁结构的酶标仪设备 |
CN115948720B (zh) * | 2023-03-14 | 2023-06-02 | 上海陛通半导体能源科技股份有限公司 | 薄膜沉积设备 |
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US5474641A (en) * | 1992-10-23 | 1995-12-12 | Tokyo Electron Kabushiki Kaisha | Processing method and apparatus thereof |
US5775000A (en) * | 1996-05-13 | 1998-07-07 | Ebara Corporation | Substrate gripper device for spin drying |
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2004
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-
2005
- 2005-05-13 US US11/129,012 patent/US7322787B2/en active Active
- 2005-05-30 TW TW094117642A patent/TWI256686B/zh active
- 2005-06-13 CN CN2005100779064A patent/CN1712333B/zh active Active
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US5851041A (en) * | 1996-06-26 | 1998-12-22 | Ontrak Systems, Inc. | Wafer holder with spindle assembly and wafer holder actuator |
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Also Published As
Publication number | Publication date |
---|---|
JP4467367B2 (ja) | 2010-05-26 |
JP2006012880A (ja) | 2006-01-12 |
TWI256686B (en) | 2006-06-11 |
US7322787B2 (en) | 2008-01-29 |
CN1712333A (zh) | 2005-12-28 |
US20060045722A1 (en) | 2006-03-02 |
TW200605214A (en) | 2006-02-01 |
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Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. |
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Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |