CN110239832B - 基板收纳容器的锁止解除机构 - Google Patents

基板收纳容器的锁止解除机构 Download PDF

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Publication number
CN110239832B
CN110239832B CN201810788930.6A CN201810788930A CN110239832B CN 110239832 B CN110239832 B CN 110239832B CN 201810788930 A CN201810788930 A CN 201810788930A CN 110239832 B CN110239832 B CN 110239832B
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China
Prior art keywords
lock release
locking
sliding
storage container
substrate storage
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CN201810788930.6A
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English (en)
Chinese (zh)
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CN110239832A (zh
Inventor
森田泰史
滨田浩三
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JEL Corp
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JEL Corp
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Publication of CN110239832A publication Critical patent/CN110239832A/zh
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Publication of CN110239832B publication Critical patent/CN110239832B/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D55/00—Accessories for container closures not otherwise provided for
    • B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
CN201810788930.6A 2018-03-09 2018-07-18 基板收纳容器的锁止解除机构 Active CN110239832B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-042615 2018-03-09
JP2018042615A JP6952627B2 (ja) 2018-03-09 2018-03-09 基板収納容器のロック解除機構

Publications (2)

Publication Number Publication Date
CN110239832A CN110239832A (zh) 2019-09-17
CN110239832B true CN110239832B (zh) 2021-04-20

Family

ID=67764173

Family Applications (1)

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CN201810788930.6A Active CN110239832B (zh) 2018-03-09 2018-07-18 基板收纳容器的锁止解除机构

Country Status (4)

Country Link
JP (1) JP6952627B2 (ja)
KR (1) KR102148565B1 (ja)
CN (1) CN110239832B (ja)
TW (1) TWI662642B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI772886B (zh) * 2020-09-11 2022-08-01 樂華科技股份有限公司 智慧堆疊機構之解鎖裝置及其方法
CN116666275B (zh) * 2023-07-25 2023-10-27 宁波润华全芯微电子设备有限公司 一种盘盖组件

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
US4582219A (en) * 1985-02-20 1986-04-15 Empak, Inc. Storage box having resilient fastening means
JP3089590B2 (ja) * 1991-07-12 2000-09-18 キヤノン株式会社 板状物収納容器およびその蓋開口装置
DE19535178C2 (de) * 1995-09-22 2001-07-19 Jenoptik Jena Gmbh Einrichtung zum Ver- und Entriegeln einer Tür eines Behälters
JP3796782B2 (ja) * 1995-11-13 2006-07-12 アシスト シンコー株式会社 機械的インターフェイス装置
JP3954287B2 (ja) * 1999-06-28 2007-08-08 東京エレクトロン株式会社 ウェハキャリア用蓋体の着脱装置
KR100403663B1 (ko) * 1999-07-14 2003-10-30 동경 엘렉트론 주식회사 피처리체 수용 박스의 개폐 덮개의 개폐 장치 및피처리체의 처리 시스템
JP3941359B2 (ja) * 2000-08-23 2007-07-04 東京エレクトロン株式会社 被処理体の処理システム
JP3766615B2 (ja) * 2001-07-27 2006-04-12 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP3933921B2 (ja) * 2001-12-04 2007-06-20 Ｔｄｋ株式会社 半導体ウェーハ保管用クリーンボックスパージ装置
JP4189178B2 (ja) * 2002-07-15 2008-12-03 アキレス株式会社 半導体ウェハー収納容器
JP2004115872A (ja) * 2002-09-26 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
US7578392B2 (en) * 2003-06-06 2009-08-25 Convey Incorporated Integrated circuit wafer packaging system and method
JP2006339619A (ja) * 2005-05-31 2006-12-14 Dan-Takuma Technologies Inc 手動式ｓｍｉｆオプナー
JP4851445B2 (ja) * 2005-05-31 2012-01-11 三甲株式会社 薄板搬送容器の開閉構造
JP5365160B2 (ja) * 2008-11-25 2013-12-11 住友化学株式会社 有害生物防除用組成物及び有害生物の防除方法
JP4748816B2 (ja) * 2008-11-28 2011-08-17 Ｔｄｋ株式会社 密閉容器の蓋開閉システム
US8813964B2 (en) * 2009-08-26 2014-08-26 Texchem Advanced Products Incorporated Sdn. Bhd. Wafer container with recessed latch
JP2014012032A (ja) * 2012-07-03 2014-01-23 Senju Sprinkler Kk 予作動式流水検知装置
JP6084019B2 (ja) * 2012-11-28 2017-02-22 信越ポリマー株式会社 基板収納容器用の蓋体及び基板収納容器
CN107112269A (zh) * 2014-12-08 2017-08-29 恩特格里斯公司 用于衬底容置的具有整体拐角弹簧的水平衬底容器
CN205609490U (zh) * 2016-05-09 2016-09-28 中勤实业股份有限公司 闩锁机构及具有该闩锁机构的晶圆盒

Also Published As

Publication number Publication date
CN110239832A (zh) 2019-09-17
TW201939645A (zh) 2019-10-01
JP2019160894A (ja) 2019-09-19
KR20190106627A (ko) 2019-09-18
JP6952627B2 (ja) 2021-10-20
TWI662642B (zh) 2019-06-11
KR102148565B1 (ko) 2020-08-26

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