CN105789296A - 一种铝镓氮化合物/氮化镓高电子迁移率晶体管 - Google Patents

一种铝镓氮化合物/氮化镓高电子迁移率晶体管 Download PDF

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CN105789296A
CN105789296A CN201511016882.1A CN201511016882A CN105789296A CN 105789296 A CN105789296 A CN 105789296A CN 201511016882 A CN201511016882 A CN 201511016882A CN 105789296 A CN105789296 A CN 105789296A
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layer
gan
mobility transistor
source electrode
drain electrode
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CN201511016882.1A
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CN105789296B (zh
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任春江
陈堂胜
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CETC 55 Research Institute
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CETC 55 Research Institute
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Priority to CN201511016882.1A priority Critical patent/CN105789296B/zh
Publication of CN105789296A publication Critical patent/CN105789296A/zh
Priority to JP2017563253A priority patent/JP2018533837A/ja
Priority to RU2017143211A priority patent/RU2017143211A/ru
Priority to EP16881085.1A priority patent/EP3316314A4/en
Priority to PCT/CN2016/111609 priority patent/WO2017114296A1/zh
Priority to US15/580,436 priority patent/US20180182879A1/en
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Abstract

本发明揭示了一种具有铝镓氮化合物***层应变平衡的氮化物高迁移率晶体管。按照包括：衬底和位于衬底上的GaN缓冲层；AlyGa1‑yN***层位于GaN缓冲层上；与GaN缓冲层相对的位于AlyGa1‑yN***层上的AlxGa1‑xN势垒层；位于AlxGa1‑xN势垒层上的GaN帽层；GaN帽层和部分厚度的AlxGa1‑xN势垒层被去除形成凹槽，凹槽中提供“Г”型源电极和漏电极；栅电极位于源电极和漏电极之间。按照本发明的另一个实施例，在AlxGa1‑xN势垒层和GaN帽层之间还包含了一AlzGa1‑zN***层。本发明的优点：采用高Al组分AlGaN***层实现AlN***层的性能，使工艺可控性更强；引入“Г”型源电极和漏电极便于形成欧姆接触，同时结合GaN帽层可更好的对外延层整体应力进行控制，保证器件可靠性同时使性能最优化。

Description

一种 铝镓氮化合物 / 氮化镓高电子迁移率晶体管
技术领域
本发明涉及的是一种具有铝镓氮化合物***层应变平衡的氮化物高迁移率晶体管。
背景技术
铝镓氮化合物(AlGaN)/氮化镓(GaN)高电子迁移率晶体管(HEMT)作为第三代宽禁带化合物半导体器件具有输出功率大、工作频率高、耐高温等特点，特别是其兼有的高频、大功率特性是现有Si和GaAs等半导体技术所不具备的，这使得其在微波应用领军具有独特的优势，从而成为了半导体微波功率器件研究的热点。通过AlN***层的引入（L. Shen et al., IEEE Electron Device Lett., vol. 22, pp. 457–459, Oct. 2001.）结合外延材料晶体质量的提升、SiN表面钝化技术的引入（B. M. Green, et al., IEEE Electron Device Lett., Vol. 21 no. 6, pp.268-270, 2000.）结合场板结构的采用（Ando et al. IEEE Electron Device Lett.，Vol.24，No.5，pp.289-291，2003.），研究人员在AlGaN/GaN HEMT的微波性能方面已取得了很好的突破。特别是输出功率能力方面，目前公开的小尺寸AlGaN/GaN HEMT的输出功率密度在X波段可达30W/mm以上（Wu et al. IEEE Electron Device Lett.，Vol.25，No.3，pp.117-119，2004.）、Ka波段其输出功率甚至也达到了10W/mm以上（T. Palacios et al., IEEE ELECTRON DEVICE LETTERS, VOL. 26, NO. 11, pp.781-783，2005.）。
图1所示为常规的具有AlN***层的AlGaN/GaN HEMT器件示意图，其中AlN***层的作用一方面是降低GaN沟道层中二维电子气（2DEG）中电子受到AlGaN势垒层合金无序散射的作用，实现2DEG迁移率的提升；另外AlN***层具有更宽的禁带和更强的压电极化和自发计划效应，可以有效提高沟道中2DEG的面密度，通过对GaN沟道中2DEG迁移率和面密度的提升，最终实现对器件性能的提升。AlN***层虽然可以带来器件性能的提升，但是自身由于与上方的AlGaN势垒层和下方的GaN沟道层具有较大的晶格失配，使得其厚度不能超过1nm，超过1nm厚度后的AlN***层晶体质量将大大恶化，缺陷密度显著增加，不利于提升器件的性能。由于现有AlGaN/GaN HEMT器件所用的外延层普遍采用有机气相化学淀积（MOCVD）的方法获取，对于外延层厚度的控制远没有分子束外延（MBE）技术来的精确，因此不超过1nm的AlN***层生长难度较大。
图1所示常规AlGaN/GaN HEMT器件中GaN帽层的作用是平衡AlN***层和AlGaN势垒层所引入的应变力，GaN帽层的厚度一般在1-5nm之间。GaN帽层的引入的另一个用途是遏制AlGaN/GaN HEMT的电流崩塌（R. Coffie et al., IEEE Electron Device Lett., Vol. 23，No. 10, pp.588-590, 2002.），但是其不利的一面是将引起沟道中2DEG浓度的降低，另外常规AlGaN/GaN HEMT器件源电极和漏电极直接淀积在GaN帽层上，并需要通过高温合金过程与其下的外延层形成欧姆接触，高温过程中源电极和漏电极金属需要穿透GaN帽层、AlGaN势垒层以及AlN***层与沟道中的2DEG形成欧姆接触，一般来说具有GaN帽层和AlN***层时，要想获得更好的欧姆接触，需要采用更高的合金温度，这将使得源电极和漏电极金属在合金过程中的热胀冷缩更加严重，甚至导致外延层应力的再分布，对器件性能的一致性和可靠性都带来不利影响。
发明内容
发明目的：本发明的目的在于提供一种性能可靠，生长过程可控的晶体管。
技术方案：本发明提供了一种具有铝镓氮化合物/氮化镓高电子迁移率晶体管，包括：由碳化硅、硅或者蓝宝石构成的衬底，衬底最优的选材为碳化硅；位于衬底上的GaN缓冲层，GaN缓冲层厚度优选的为1500-2000nm；AlyGa1-yN***层位于GaN缓冲层上，其中0.35≤y≤0.5，AlyGa1-yN***层最优的厚度为1-3nm；与GaN缓冲层相对的位于AlyGa1-yN***层上的AlxGa1-xN势垒层，其中0.2≤x≤0.25，AlxGa1-xN势垒层最优的厚度为10-20nm；位于AlxGa1-xN势垒层上的AlzGa1-zN***层，其中0.30≤z≤0.4，AlzGa1-zN***层最优的厚度为1-3nm；位于AlzGa1-zN***层上的GaN帽层，GaN帽层最优的厚度为1-3nm；源电极和漏电极下的GaN帽层、AlzGa1-zN***层和部分厚度的AlxGa1-xN势垒层被去除形成凹槽，凹槽中提供源电极和漏电极，源电极和漏电极部分位于GaN帽层上形成“Г”型的源电极和漏电极；栅电极位于源电极和漏电极之间。
有益效果：本发明用具有高Al组分的AlGaN***层替代AlN***层，AlGaN***层与GaN沟道层的失配相比AlN***层来的小，可以生长得更厚，使得外延材料生长过程更加可控，有利于提升器件的一致性，同时通过优化Al组分，同样可以实现对2DEG浓度和迁移率的提升。另外通过刻蚀去除AlGaN/GaN HEMT器件源电极和漏电极下的GaN帽层和部分AlGaN势垒层，使得源电极和漏电极更加靠近沟道中的2DEG，使得源电极和漏电极通过较低的合金温度便可与沟道中的2DEG形成欧姆接触，避免高温过程中源电极和漏电极金属的热胀冷缩引起外延层应力的再分布，从而提升器件性能的一致性和可靠性。
附图说明
图1是AlGaN/GaN HEMT的一般结构示意图。
图2是本发明一个实施例的AlGaN/GaN HEMT结构示意图。
图3是本发明另一个实施例的AlGaN/GaN HEMT结构示意图。
具体实施方式
下面结合说明书附图对本发明进行进一步详述：
图2所示为按照本发明的AlGaN/GaN HEMT的一个实施例，按照本发明的AlGaN/GaN HEMT具有衬底21，衬底21为蓝宝石、Si及SiC中的任意一种，优选地采用半绝缘的4H-SiC和半绝缘的6H-SiC作为衬底，采用半绝缘的4H-SiC（0001）和半绝缘的6H-SiC（0001）作为衬底，它们具有热导率高、与GaN晶格失配小等特点，不仅易于生长高质量的GaN外延材料，同时也有利于器件的散热，目前美国的Cree公司和II-VI公司都有4H和6H两种形态的SiC衬底出售。
GaN缓冲层22位于衬底21至上，GaN缓冲层厚度优选的为1500-2000nm，GaN缓冲层22一般都具有较高的背景载流子浓度，不利于器件击穿的提高，因此可以考虑对其进行Fe掺杂，关于Fe掺杂技术可以参考相关文献，但是必须要控制Fe掺杂的浓度和厚度，Fe掺杂的浓度一般要控制在4×1018cm-3以内，且掺杂厚度由衬底向上不超过500-1000nm，也就是GaN缓冲层的顶部1000nm左右的厚度要保持非掺杂。为了获得良好质量的GaN缓冲层，一般的位于GaN缓冲层22和衬底21之间还存在一成核层，成核层的主要用来作为过渡作用，以减小由于GaN缓冲层22和衬底21晶格失配所引入的应力，成核层的选取与衬底材料有关，这在本领域是众所周知的，不再进一步描述。
AlyGa1-yN***层23位于GaN缓冲层上，其中0.35≤y≤0.5，AlyGa1-yN***层23最优的厚度为1-3nm，AlyGa1-yN***层23与GaN缓冲层22界面处的带隙大于GaN缓冲层，这样将在GaN缓冲层22和AlyGa1-yN***层23界面靠近GaN缓冲层处形成一三角形势阱，加上III族氮化物自身较强的自发极化和压电极化效应，使得在GaN缓冲层22和AlyGa1-yN***层23界面附近形成具有高面密度的二维电子气。
AlxGa1-xN势垒层24位于GaN缓冲层22相对的位于AlyGa1-yN***层23上，其中0.2≤x≤0.28，AlxGa1-xN势垒层24最优的厚度为10-20nm，利用AlxGa1-xN势垒层24的自发极化和压电极化效应，可以使得GaN缓冲层22和AlyGa1-yN***层23界面靠近GaN缓冲层处形成的三角形势阱更深，从而获得更高面密度的2DEG，有助于器件性能的提升。
GaN帽层25位于AlxGa1-xN势垒层24上，GaN帽层最优的厚度为1-3nm，GaN帽层25的作用是平衡AlyGa1-yN***层23和AlxGa1-xN势垒层24所引入的应变力，同时可对AlGaN/GaN HEMT普遍存在的电流崩塌效应启动抑制作用，提升器件的微波性能。
GaN缓冲层22（连同GaN缓冲层22和衬底21之间的成核层）、AlyGa1-yN***层23、AlxGa1-xN势垒层24、GaN帽层25可以采用如MOCVD、RF-MBE等任何合适的生长方法在衬底21上依次外延生长得到，优选的采用MOCVD的方法。
源电极26和漏电极27下的GaN帽层25和部分厚度的AlxGa1-xN势垒层24被去除形成凹槽，凹槽的形成需要通过干法刻蚀的方法获取，对于干法刻蚀去除GaN和AlGaN两种化合物在本领域是众所周知的，可参考相关文献，凹槽中提供源电极和漏电极，源电极和漏电极部分位于GaN帽层上形成“Г”型的源电极和漏电极，源漏电极26和漏电极27采用相同的金属层，包括但不仅限于Ti/Al/Ni/Au、Ti/Al/Mo/Au等多层金属体系，并且要通过高温合金与2DEG形成欧姆接触，优选的合金温度为680-780℃。
源电极26和漏电极27之间提供栅电极28，栅电极28的作用一个方面是与GaN帽层25形成肖特基接触，从而在器件工作的时候，栅电极28上的电压变化能够调制沟道中二维电子气；另外一个作用是降低器件的栅阻，提升器件的频率特性，栅电极28可采用的金属包括但不限于Ni/Au/Ti或者Ni/Pt/Au/Pt/Ti或则Ni/Pt/Au/Ni等多层金属体系。
图3所示为按照本发明的AlGaN/GaN HEMT的另一个个实施例，其在第一个实施例的基础上增加了AlzGa1-zN***层35，所述AlzGa1-zN***层35位于AlxGa1-xN势垒层34上，其中0.3≤z≤0.4，AlzGa1-zN***层35的厚度为1-3nm，利用AlzGa1-zN***层35的自发极化和压电极化效应，进一步提升GaN缓冲层32和AlyGa1-yN***层33界面靠近GaN缓冲层处形成的2DEG面密度，进一步提升器件性能。
需要说明的是本发明两个实施例中位于GaN缓冲层上的高Al组分AlGaN***层的目的是提升沟道中2DEG的面密度和迁移率，以达到图1中AlN***层的效果，同时由于高Al组分AlGaN***与GaN缓冲层的晶格失配相较AlN***层来的小，因此可以设计的更厚，有利于工艺过程中更加精确的控制。另外GaN帽层的作用主要是用来平衡其下的AlGaN***层和AlGaN势垒层等用于与GaN缓冲层晶格失配带来的应力，由于GaN帽层的引入会引起沟道中2DEG面密度的降低，因此其厚度势必不能太厚。GaN帽层由于与AlGaN***层和AlGaN势垒层晶格失配大，承受了较大的压应力，使得其对沟道中2DEG浓度的降低作用进一步增强，通过引入“Г”型的源电极和漏电极后可以释放GaN帽层受到的部分应力，缓解GaN帽层引入对沟道中2DEG浓度的降低作用，起到对器件性能和可靠性的折中。“Г”型的源电极和漏电极引入后，更利于沟道中电子通过遂穿效应进入源电极或者漏电极，反之亦然，从而起到降低器件欧姆接触电阻的作用，这有助于进一步改善器件性能。

Claims (6)

1.一种铝镓氮化合物/氮化镓高电子迁移率晶体管，其特征在于：包括自下而上依次设置的衬底（21）， GaN缓冲层（22）， AlyGa1-yN***层（23）， 0.35≤y≤0.5，AlxGa1-xN势垒层（24）， 0.2≤x≤0.28， GaN帽层（25），在GaN帽层的两端设置源电极（26）和漏电极（27），源电极（26）和漏电极（27）所处位置的GaN帽层和部分厚度的AlxGa1-xN势垒层被去除形成凹槽，所述源电极（26）和漏电极（27）设置在凹槽内，在源电极（26）和漏电极（27）之间设置栅电极（28）。
2.根据权利要求1所述的一种铝镓氮化合物/氮化镓高电子迁移率晶体管，其特征在于：还包括位于AlxGa1-xN势垒层（24）上的AlzGa1-zN***层（35），其中0.30≤z≤0.4，AlzGa1-zN***层（35）厚度为1-3nm。
3.根据权利要求1所述的一种铝镓氮化合物/氮化镓高电子迁移率晶体管，其特征在于：所述GaN缓冲层（22）进行了Fe掺杂，Fe掺杂的浓度不大于4×1018cm-3，且掺杂厚度由衬底向上介于500-1000nm。
4.根据权利要求1所述的一种铝镓氮化合物/氮化镓高电子迁移率晶体管，其特征在于：衬底（21）为碳化硅、硅或者蓝宝石中的一种。
5.根据权利要求1所述的一种铝镓氮化合物/氮化镓高电子迁移率晶体管，其特征在于：GaN缓冲层（22）厚度为1500-2000nm。
6.根据权利要求1所述的一种铝镓氮化合物/氮化镓高电子迁移率晶体管，其特征在于：源电极（26）和漏电极（27）部分位于GaN帽层（25）上形成“Г”型。
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WO2017114296A1 (zh) * 2015-12-29 2017-07-06 中国电子科技集团公司第五十五研究所 一种铝镓氮化合物/氮化镓高电子迁移率晶体管
CN107731903A (zh) * 2017-09-14 2018-02-23 西安电子科技大学 基于SOI结构金刚石复合衬底的GaN高电子迁移率器件及制备方法
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