JP2006269862A - 半導体装置形成用ウエハ、その製造方法、および電界効果型トランジスタ - Google Patents
半導体装置形成用ウエハ、その製造方法、および電界効果型トランジスタ Download PDFInfo
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- 230000005669 field effect Effects 0.000 title claims abstract description 12
- 239000004065 semiconductor Substances 0.000 title claims description 41
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 229910002704 AlGaN Inorganic materials 0.000 claims abstract description 11
- 229910002601 GaN Inorganic materials 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 22
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- -1 gallium nitride compound Chemical class 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 212
- 230000015556 catabolic process Effects 0.000 description 30
- 239000013078 crystal Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 10
- 238000002955 isolation Methods 0.000 description 8
- 210000003127 knee Anatomy 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 125000005842 heteroatom Chemical group 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000005355 Hall effect Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
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- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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Abstract
【解決手段】基板12と、基板の主面12a側に形成されたGaNからなる電子走行層16と、電子走行層上に形成されたAlGaNからなる電子供給層18とを備え、電子走行層の厚みが、0.2〜0.9μmであることを特徴とする。
【選択図】図1
Description
石川 博康他,「MOCVD法による4インチSi基板上GaN及びAlGaN/GaNへテロ構造の結晶成長」,信学技報,Vol.103,No.342,pp.9−13
(実施の形態1)
図1〜図8を参照して、実施の形態1のHEMTの構造および動作につき説明する。図1は、HEMTの断面構造を概略的に示す断面図である。図2は、ドレイン電圧とドレイン電流との関係(以下、I−V特性と称する)を示す図である。図3は、HEMTの基本的動作の説明に供する断面切り口を示す図である。図4は、HEMTの具体的動作の説明に供するI−V特性を示す図である。図5は、HEMTのオフ耐圧の説明に供する図である。図6は、HEMTの膜厚とオフ耐圧との関係を示す図である。図7は、HEMTの製造工程を説明するための主要工程段階での断面切り口を示す図である。図8は、HEMTの製造工程を説明するための主要工程段階での断面切り口を示す図である。
(実施の形態2)
図9を参照して、実施の形態2の半導体装置形成用ウエハの構造および動作につき説明する。図9は、実施の形態2の半導体装置形成用ウエハの断面構造を概略的に示す断面図である。
12 基板
12a主面
14 緩衝層
16,46 電子走行層
18 電子供給層
20 キャップ層
22 素子分離層
24 ソース電極
26 ドレイン電極
28 ゲート電極
30 2次元電子層
31 空乏層
32,40 半導体装置形成用ウエハ
42 第2緩衝層
44 超格子
Claims (5)
- 基板と、該基板の主面側に形成されたGaNからなる電子走行層と、該電子走行層上に形成されたAlGaNからなる電子供給層とを備え、
前記電子走行層の厚みが、0.2〜0.9μmであることを特徴とする半導体装置形成用ウエハ。 - 前記基板が、SiC、サファイアまたはSiであることを特徴とする請求項1に記載の半導体装置形成用ウエハ。
- 前記基板と前記電子走行層との間に、緩衝層として、AlN層、または前記電子走行層よりも低い温度で成長されたGaNからなる層が形成されていることを特徴とする請求項2に記載の半導体装置形成用ウエハ。
- 請求項3に記載の半導体装置形成用ウエハの製造方法であって、前記基板の主面に前記緩衝層を成長させる工程と、
該緩衝層上に0.2〜0.9μmの厚みで前記電子走行層を成長させる工程と、
該電子走行層上に前記電子供給層を成長させる工程と
を含むことを特徴とする半導体装置形成用ウエハの製造方法。 - 請求項1〜3のいずれか一項に記載の半導体装置形成用ウエハに形成された、窒化ガリウム系化合物半導体からなることを特徴とする電界効果型トランジスタ。
Priority Applications (3)
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JP2005087650A JP2006269862A (ja) | 2005-03-25 | 2005-03-25 | 半導体装置形成用ウエハ、その製造方法、および電界効果型トランジスタ |
CNA2006100041929A CN1838432A (zh) | 2005-03-25 | 2006-02-20 | 半导体装置形成用晶片及其制造方法、以及场效应晶体管 |
US11/378,324 US20060214187A1 (en) | 2005-03-25 | 2006-03-20 | Wafer for semiconductor device fabrication, method of manufacture of same, and field effect transistor |
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JP2005087650A JP2006269862A (ja) | 2005-03-25 | 2005-03-25 | 半導体装置形成用ウエハ、その製造方法、および電界効果型トランジスタ |
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US (1) | US20060214187A1 (ja) |
JP (1) | JP2006269862A (ja) |
CN (1) | CN1838432A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008117874A (ja) * | 2006-11-02 | 2008-05-22 | Furukawa Electric Co Ltd:The | Iii−v族化合物半導体系電子デバイス |
JP2008205146A (ja) * | 2007-02-20 | 2008-09-04 | Fujitsu Ltd | 化合物半導体装置及びその製造方法 |
WO2009147774A1 (ja) * | 2008-06-05 | 2009-12-10 | パナソニック株式会社 | 半導体装置 |
JP2013123023A (ja) * | 2011-12-12 | 2013-06-20 | Samsung Electro-Mechanics Co Ltd | 窒化物半導体素子及びその製造方法 |
US9029873B2 (en) | 2013-03-07 | 2015-05-12 | Sumitomo Electric Industries, Ltd. | Semiconductor device including an aluminum nitride layer having a calculated area-averaged circularity and a method of manufacturing the device |
JP2015167220A (ja) * | 2014-02-12 | 2015-09-24 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
JP2016524332A (ja) * | 2013-06-18 | 2016-08-12 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh | 半導体パワースイッチ及び半導体パワースイッチの製造方法 |
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JP2008306130A (ja) * | 2007-06-11 | 2008-12-18 | Sanken Electric Co Ltd | 電界効果型半導体装置及びその製造方法 |
US7800132B2 (en) * | 2007-10-25 | 2010-09-21 | Northrop Grumman Systems Corporation | High electron mobility transistor semiconductor device having field mitigating plate and fabrication method thereof |
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JP7016311B2 (ja) * | 2018-11-06 | 2022-02-04 | 株式会社東芝 | 半導体装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11261053A (ja) * | 1998-03-09 | 1999-09-24 | Furukawa Electric Co Ltd:The | 高移動度トランジスタ |
JP2001196575A (ja) * | 2000-01-13 | 2001-07-19 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2004165387A (ja) * | 2002-11-12 | 2004-06-10 | Furukawa Electric Co Ltd:The | GaN系電界効果トランジスタ |
WO2004066393A1 (ja) * | 2003-01-17 | 2004-08-05 | Sanken Electric Co., Ltd. | 半導体装置及びその製造方法 |
WO2005015642A1 (ja) * | 2003-08-08 | 2005-02-17 | Sanken Electric Co., Ltd. | 半導体装置及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6548333B2 (en) * | 2000-12-01 | 2003-04-15 | Cree, Inc. | Aluminum gallium nitride/gallium nitride high electron mobility transistors having a gate contact on a gallium nitride based cap segment |
US7112860B2 (en) * | 2003-03-03 | 2006-09-26 | Cree, Inc. | Integrated nitride-based acoustic wave devices and methods of fabricating integrated nitride-based acoustic wave devices |
JP4525894B2 (ja) * | 2003-11-21 | 2010-08-18 | サンケン電気株式会社 | 半導体素子形成用板状基体及びこの製造方法及びこれを使用した半導体素子 |
US20050145851A1 (en) * | 2003-12-17 | 2005-07-07 | Nitronex Corporation | Gallium nitride material structures including isolation regions and methods |
-
2005
- 2005-03-25 JP JP2005087650A patent/JP2006269862A/ja active Pending
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- 2006-02-20 CN CNA2006100041929A patent/CN1838432A/zh active Pending
- 2006-03-20 US US11/378,324 patent/US20060214187A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11261053A (ja) * | 1998-03-09 | 1999-09-24 | Furukawa Electric Co Ltd:The | 高移動度トランジスタ |
JP2001196575A (ja) * | 2000-01-13 | 2001-07-19 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2004165387A (ja) * | 2002-11-12 | 2004-06-10 | Furukawa Electric Co Ltd:The | GaN系電界効果トランジスタ |
WO2004066393A1 (ja) * | 2003-01-17 | 2004-08-05 | Sanken Electric Co., Ltd. | 半導体装置及びその製造方法 |
WO2005015642A1 (ja) * | 2003-08-08 | 2005-02-17 | Sanken Electric Co., Ltd. | 半導体装置及びその製造方法 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008117874A (ja) * | 2006-11-02 | 2008-05-22 | Furukawa Electric Co Ltd:The | Iii−v族化合物半導体系電子デバイス |
JP2008205146A (ja) * | 2007-02-20 | 2008-09-04 | Fujitsu Ltd | 化合物半導体装置及びその製造方法 |
JP4531071B2 (ja) * | 2007-02-20 | 2010-08-25 | 富士通株式会社 | 化合物半導体装置 |
US8426892B2 (en) | 2007-02-20 | 2013-04-23 | Fujitsu Limited | Compound semiconductor device and method of manufacturing the same |
US8896022B2 (en) | 2007-02-20 | 2014-11-25 | Fujitsu Limited | Method of manufacturing compound semiconductor device |
WO2009147774A1 (ja) * | 2008-06-05 | 2009-12-10 | パナソニック株式会社 | 半導体装置 |
JP2013123023A (ja) * | 2011-12-12 | 2013-06-20 | Samsung Electro-Mechanics Co Ltd | 窒化物半導体素子及びその製造方法 |
US9029873B2 (en) | 2013-03-07 | 2015-05-12 | Sumitomo Electric Industries, Ltd. | Semiconductor device including an aluminum nitride layer having a calculated area-averaged circularity and a method of manufacturing the device |
JP2016524332A (ja) * | 2013-06-18 | 2016-08-12 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh | 半導体パワースイッチ及び半導体パワースイッチの製造方法 |
JP2015167220A (ja) * | 2014-02-12 | 2015-09-24 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
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