CN103557929B - A kind of Fabry-perot optical fiber sound pressure sensor method for making based on graphene film and measuring method, device - Google Patents
A kind of Fabry-perot optical fiber sound pressure sensor method for making based on graphene film and measuring method, device Download PDFInfo
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Abstract
The invention discloses a kind of Fabry-perot optical fiber sound pressure sensor method for making based on graphene film and measuring method, device, this sensor is made based on graphene film and Fabry-perot optical fiber interferometric optical principle.First, cleaning treatment single-mode fiber and transfer graphene film, and graphene film is adsorbed to zirconia single mode lock pin; Then, the single-mode fiber after process is inserted zirconia lock pin from the other end.Like this, by being made up of two reflectings surface of method Fabry-Parot interferent single-mode fiber end face and graphene film, forming optical fiber-air-graphene film interference cavity, and build the long pick-up unit in interference cavity chamber, application Two-peak method demodulated interferential spectral signal, realizes the high-sensitivity detection of faint sound pressure signal.This sensor has the advantages such as making is simple, high sensitivity, volume are little, electromagnetism interference, solve the problem that in prior art, transducer sensitivity that is that cause is lower because diaphragm thickness minimizing is limited, improve the sensitivity of diaphragm type sound pressure sensor, can be expected to for fields such as the underwater sound, electroacoustic, medical science and biomedical engineerings.
Description
Technical field
The present invention relates to a kind of technical field of Fibre Optical Sensor, particularly relate to a kind of Fabry-perot optical fiber sound pressure sensor method for making based on graphene film and measuring method, device.
Background technology
Optical fiber Fabry-Perot sensor is a kind of Fibre Optical Sensor that current history is the longest, technology is the most ripe, application is the most general.Be applicable to the advantages such as remote, little space, rugged surroundings due to it, be widely used in fields such as Aero-Space, military project boats and ships, environment measuring, biomedicines.
Minitype optical fiber F-P chamber sound pressure sensor is generally capillary pipe structure and diaphragm structure, but the pressure transducer of capillary pipe structure is low to pressure perceptual sensitivity, is unfavorable for the measurement of little pressure range.For diaphragm type F-P structure, two factors of its key are interference cavity and diaphragm.At present, for the processing technology of interference cavity, the people such as ChenL.H. in 2009 form interference cavity (see Chen at fiber end face directly etching, L.H., etal. " ChitosanDiaphragm-BasedFiberOpticPressureSensor. " ConferenceonLasersandElectro-Optics/PacificRim.OpticalSo cietyofAmerica, 2009.), but this method complex operation utilizing chemical mode to corrode, and poor controllability; The same year, the people such as Yu Qingxu select to adopt and cut kapillary, utilize heat sealing machine to be fused to fiber end face and form interference cavity (see Yu Qingxu, Jia Chunyan. diaphragm type miniature FP chamber fibre optic compression sensor [J]. optical precision engineering, 2009,17 (12): 2887-2892.), but the method to kapillary cutting technique require higher, cutting technique directly affects the chamber forming Fa-Po cavity and grows up little, and the multiple changing type caused in fusion process is larger; The people such as XuF. in 2012 utilize the endoporus of lock pin directly as interference cavity, make miniature interference F-P sensor (see XuF, RenD, ShiX, etal.High-sensitivityFabry – Perotinterferometricpressuresensorbasedonananothicksilve rdiaphragm [J] .Opticsletters, 2012,37 (2): 133-135.), the determination of its chamber length, without the need to corrosion or cutting technique, utilizes the method dynamically inserted to determine the size that chamber is long.In addition, for the selection of diaphragm, the F-P Fibre Optical Sensor of current diaphragm type structure has quartz film, organic film, photonic crystal silicon fiml, silverskin etc. usually.Such as, 2006, Zhang Guiju etc. adopt quartz film to improve the design of low pressure F-P sensor probe (see Zhang Guiju, Yu Qingxu. based on low pressure sensor research [J] in extrinsic optical fiber FP chamber. instrumental technique and sensor, 2006,10:003.), adopt the method for cutting quartz fibre to make quartz thin film, the reduction of thickness depends on cutting technique; SaidMM in 2009 etc. to adopt organic film PDMS to make F-P cavity pressure transducer (see SaidMM, RadziSA, NohZM, etal.AnewdiaphragmmaterialforopticalfibreFabry-Perotpres suresensor [C] //MEMS, NANO, andSmartSystems (ICMENS), 2009FifthInternationalConferenceon.IEEE, 2009:154-158.), adopt adhering liquid PDMS, by being solidify to form film, but the homogeneity of thickness has very large uncontrollability; 2010, AkkayaOC etc. utilize 450nm photonic crystal silicon fiml to make F-P pressure transducer (see AkkayaOC, KilicO, DigonnetMJF, etal.High-sensitivitythermallystableacousticfibersensor [C] //Sensors, 2010IEEE.IEEE, 2010:1148-1151.); And XuF in 2012 etc. adopt 125nm silverskin to make F-P cavity pressure transducer (see XuF, RenD, ShiX, etal.High-sensitivityFabry – Perotinterferometricpressuresensorbasedonananothicksilve rdiaphragm [J] .Opticsletters, 2012,37 (2): 133-135.).Although used chaff improves the sensitivity of sensor to a certain extent in said method, due to the impact by film thickness, its pressure sensibility is also restricted to a certain extent.For reducing the thickness of film further, researcher proposes a series of improving one's methods, such as employing corrodes containing hydrofluorite the film made, first polishing corrodes film again, and laser treatment diaphragm (see: Liu Yu, Wang Meng, Wang Bo, etc. the diaphragm type method-Fabry-Parot interferent type fibre optic compression sensor [J] of Laser Processing silicon chip. sensor and micro-system, 2013,32 (1): 112-114.) method such as.But this process is numerous and diverse, and significantly increase the probability of breakage of thin film applied in operation, then progress is also little.And the discovery of new material-Graphene, significantly can reduce the thickness of sensitive thin film.
The thickness in monolayer of Graphene only has 0.335nm(see NovoselovKS, GeimAK, MorozovSV, etal.Electricfieldeffectinatomicallythincarbonfilms [J] .Science, 2004, 306 (5696): 666-669.), its fracture strength is 42N/m(see LeeC, WeiX, KysarJW, etal.Measurementoftheelasticpropertiesandintrinsicstreng thofmonolayergraphene [J] .science, 2008, 321 (5887): 385-388.), it is stainless 100 times, Young modulus is close to 1TPa, Elastic extensibility can reach 20%, and the static pressure reaching 2.5MPa can be born.Therefore, the present invention is based on the ultrathin of Graphene and good Mechanics of Machinery characteristic, graphene film is used for make diaphragm type F-P sound pressure sensor, propose a kind of highly sensitive grapheme film type Miniature optical nanofarads amber (F-P) sound pressure sensor, there is the advantages such as making is simple, volume is little, electromagnetism interference.
Summary of the invention
Content of the present invention proposes a kind of high sensitivity, method for making simply based on Fabry-perot optical fiber (F-P) sound pressure sensor of graphene film, and its Fibre Optical Sensor made has the size consistent with zirconia lock pin external diameter.This sensor is combined by a single-mode fiber, zirconia lock pin and graphene film, can solve the problem that transducer sensitivity that F-P cavity pressure transducer in prior art causes by the impact of the long manufacture craft in interference cavity chamber and used chaff thickness is not high.
An object of the present invention proposes a kind of optical fibre sound pressure sensor based on graphene film and preparation method thereof; Two of object of the present invention is the long detection methods of interference cavity based on the optical fibre sound pressure sensor of graphene film; Three of object of the present invention is the sound pressure measurement devices providing a kind of optical fibre sound pressure sensor based on graphene film.
An object of the present invention is achieved through the following technical solutions:
The method for making of a kind of Fabry-perot optical fiber sound pressure sensor based on graphene film provided by the invention, comprises the following steps:
Step 1. sound pressure sensor assembly type selecting: select individual layer or multilayer copper-base graphite alkene film, zirconia single mode lock pin and single-mode fiber, described graphene film is the single or multiple lift copper-base graphite alkene film that chemical vapour deposition technique (CVD) generates;
Step 2. is to described zirconia single mode lock pin PC(PhysicContact) end face carries out acetone ultrasonic cleaning and washed with de-ionized water, and adopt optical fiber cutter to cut flat to the tail end of single-mode fiber, and fused fiber splice machine testing zirconia single mode lock pin PC end face and single-mode fiber tail end is utilized to cut the flatness of flat rear end face;
Step 3. shifts described graphene film, it is transferred to the polishing PC end face of zirconia lock pin from substrate, it is characterized in that: utilize copper sulphate: hydrochloric acid: the solution corrosion copper substrate of water=10g:50ml:50ml; The Graphene corroding copper base is transferred in deionized water and cleans; Then in ionized water, overturn graphene film gently, make graphene film upward, utilize zirconia lock pin PC polished end faces to adsorb graphene film; Acetone is finally utilized to remove PMMA;
Single-mode fiber processed for end face inserts from the zirconia single mode lock pin other end adsorbing graphene film by step 4., makes two reflectings surface of single-mode fiber end face and graphene film forming method Fabry-Parot interferent, forms optical fiber-air-graphene film interference cavity;
Step 5. builds the long pick-up unit in chamber, method Fabry-Parot interferent chamber, it is characterized by: form by based on the optical fibre sound pressure sensor of graphene film, wideband light source, circulator, spectrometer and optical fiber jiggle platform, according to Two-peak method demodulated interferential spectral signal, determine that the initial cavity forming interference cavity is long;
Step 6. utilizes epoxy glue to bond zirconia single mode lock pin and single-mode fiber, completes the making of the Fabry-perot optical fiber sound pressure sensor based on graphene film;
The Fabry-perot optical fiber sound pressure sensor based on graphene film that step 7. is made, according to the long rule of conversion of diaphragm vibration and chamber, realizes sound pressure signal and measures.
Two of object of the present invention is achieved through the following technical solutions:
The measuring method that a kind of interference cavity chamber is long, by based on the optical fibre sound pressure sensor of graphene film, wideband light source, circulator, spectrometer and optical fiber jiggle platform building and the long pick-up unit in chamber, established law Fabry-Parot interferent chamber, the long pick-up unit in chamber, method Fabry-Parot interferent chamber is utilized to detect interference cavity progress row between single-mode fiber end face and graphene film end face, and utilize Two-peak method in light signal phase demodulating to the demodulation of interference spectrum signal, then chamber length can be expressed as:
In formula, λ
1, λ
2be the peak-to-peak value or minimum value that two of interference spectrum are adjacent, be approximately the twin-beam interference of light by the multiple beam interference of light, calculate chamber by peak value corresponding wavelength long.Getting interference contrast K is:
In formula, I
max, I
minbe respectively largest light intensity and the minimum light intensity values of the long position of corresponding cavity.What K value characterized is the bright contrast degree secretly of interference fringe in interference field, by calculating K value close to the degree of 1, analyzes interference fringe performance, determines that best interference cavity chamber is long.Afterwards, utilize epoxy glue to bond zirconia single mode lock pin and single-mode fiber, realize the making of sensor probe.
Three of object of the present invention is achieved through the following technical solutions:
A kind of sound pressure signal measurement mechanism described in the present invention is made up of the Fabry-perot optical fiber sound pressure sensor, laser instrument, circulator, photoelectric detector, lock-in amplifier, tunable signal generator, sound source, soundproof box etc. based on graphene film, by the excitation frequency and the intensity that regulate tunable sound source can change sound source, to cause F-P cavity change of cavity length in the measurement sound field inner sensor diaphragm forced vibration of soundproof box, the reflection interference spectrum spectral line utilizing lock-in amplifier to obtain caused by change of cavity length changes.According to the Large Deflection Deformation theoretical model of Graphene diaphragm, in conjunction with F-P cavity cavity length demodulating method, thus realize the measurement of measured position place sound pressure signal.
The invention has the advantages that: the present invention adopts the ultra-thin graphene film based on single or multiple lift to make mini optical fibre sound pressure sensor.Selected new material---graphene film, relative to current quartz film, silicon fiml, organic film, silverskin etc., makes film thickness obviously thinning, improves the measurement range of diaphragm-type optical-fiber sound pressure sensor, can further improve acoustic pressure receiving sensitivity; And utilize method Fabry-Parot interferent optical principle, in zirconia lock pin, single-mode fiber end face-air-graphene film interface forms optical fibre sound pressure sensor probe F-P cavity structure, improve the controllability that chamber is long, thus there is the advantages such as making is simple, reliability is high, volume is little, electromagnetism interference, can be applicable to the fields such as Aero-Space, military project boats and ships, environment measuring, biomedicine.
Accompanying drawing explanation
Fig. 1 is the optical fibre sound pressure sensor structural representation based on graphene film of the present invention;
Fig. 2 is the optical fibre sound pressure sensor Making programme figure based on graphene film of the present invention;
Fig. 3 is the long principle schematic detected in chamber of the optical fibre sound pressure sensor based on graphene film of the present invention;
Fig. 4 is a kind of sound pressure measurement principle schematic applying the optical fibre sound pressure sensor based on graphene film of the present invention;
Fig. 5 is the center deflection displacement simulation curve figure of different film thickness under uniform pressure.
Embodiment
Describe the present invention in detail below in conjunction with accompanying drawing, it is as the part of this instructions, and by implementing principle of the present invention is described, other aspects of the present invention, feature and advantage thereof will become very clear by this detailed description.
Fig. 1 is the optical fibre sound pressure sensor structural representation based on graphene film of the present invention.This sensor probe part 14 is formed primarily of single-mode fiber 11, zirconia single mode lock pin 12 and graphene film 13.Described single-mode fiber 11 is the fibre-optical splice of band single-mode tail fiber, and this single-mode tail fiber is single mode bare fibre, and external diameter is 125 ± 0.7 μm, and fibre core is 10.4 ± 0.5 μm.Described zirconia single mode lock pin 12 is the single mode ceramic insertion core of external diameter 2.5mm, internal diameter 126 ± 1 μm, length 10.5 ± 0.1 μm, and its one end is PC polished end faces; Described graphene film 13 is for being the pretreated single or multiple lift graphene film of PMMA spin coating through CVD copper-base graphite alkene film.
Flow process according to Fig. 2, carries out end face flatness and cleanliness process to the end face of described zirconia single mode lock pin, single-mode fiber.The process of described zirconia single mode lock pin 12 end face is: utilize acetone soln to carry out ultrasonic cleaning process to zirconia single mode lock pin PC end face 121, the time is about 10min; Then, deionized water carries out secondary cleaning.The process of described single-mode fiber 11 end face is: utilize optical fiber cutter to cut flat by a section single-mould fiber tail end 111, and the reserved naked fibre being about 1cm, makes its end face vertical to transmission direction with fiber axis.Described single-mode fiber 11 end face flatness is detected as: start heat sealing machine, optical fiber 11 good for end face processing is placed in V-type groove, and build the storm shutter of heat sealing machine, then utilize the dust of optical fiber splicer ionic cleaning optical fiber 11 end face, the display screen of optical fiber splicer can obtain ends cutting state.If the airborne detection of welding sends warning, then need again to cut end face; And if when the inclination angle between plane and optical fiber 11 xsect is less than 1 °, optical fiber splicer acquiescence end face is all right.
Next, described graphene film is shifted, it is transferred to the polishing PC end face 121 of zirconia lock pin 12 from substrate.Described transfer method is: first, utilizes copper sulphate: hydrochloric acid: the proportioning of water is the solution corrosion copper substrate of 10g:50ml:50ml, and the time is about 20min; Then, the Graphene corroding copper base is transferred in deionized water and cleans, about 3 ~ 5 times; Afterwards, overturn graphene film in deionized water, one is faced up, utilize zirconia insertion core end face to adsorb graphene film; Finally, transferred in acetone by the zirconia lock pin having adsorbed graphene film and remove PMMA, successful for absorption graphene film lock pin is put into baking oven drying about 10 minutes, control temperature does not exceed 50 DEG C.
Composition graphs 1 again, the single-mode fiber 11 handled well is inserted (as Fig. 5) from the zirconia lock pin other end 122, make the end face 111 of single-mode fiber and two reflectings surface of graphene film 13 forming method Fabry-Parot interferent, thus form the interference cavity cavity of optical fiber 111-air-graphene film 13.
Fig. 3 shows the long principle schematic detected in chamber based on the optical fibre sound pressure sensor of graphene film.The long measurement mechanism in this chamber by the mini optical fibre sound pressure sensor 14(formed based on graphene film see Fig. 1), wideband light source 34(model: DL-CS2079), circulator 35(model: 6015-3-FC), spectrometer 36(model: AQ6370C-10) and micromotion platform 31 etc. form.Described circulator 35 is 3 port circulators, described wideband light source 34 is connected with the port 351 of circulator 35, the described mini optical fibre Fabry-Perot sensor 14 based on graphene film is connected with the port 352 of circulator 35 by flange 37, form reflection interference spectral line, and be connected to spectrometer 36 through the port 353 of circulator 35, to realize the detection of interference spectrum signal.Before measurement, utilize high precision micromotion platform 31 that the central axis of single-mode fiber 11 and zirconia lock pin 12 is placed in sustained height, described micromotion platform 31 is three-dimensional micromotion platform, and the kinematic accuracy in X, Y, Z tri-directions is 1 μm; Utilizing micromotion platform controller 32, intense adjustment stepping rate, make optical fiber 11 slowly insert zirconia lock pin 12, can ensure that the collimation of optical fiber inserts on the one hand, meanwhile, by controlling the insertion depth of optical fiber, realizing the adjustment that F-P cavity chamber is long.On this basis, utilize Two-peak method in light signal phase demodulating to the demodulation of interference spectrum signal, then chamber length can be expressed as:
In formula, λ
1, λ
2be the peak-to-peak value or minimum value that two of interference spectrum are adjacent, be approximately the twin-beam interference of light by the multiple beam interference of light, calculate chamber by peak value corresponding wavelength long.Getting interference contrast K is:
In formula, I
max, I
minbe respectively largest light intensity and the minimum light intensity values of the long position of corresponding cavity.By calculating K value close to the degree of 1, analyze interference fringe performance, determine that best interference cavity chamber is long.Once best interference cavity chamber is long determine after, epoxy glue can be utilized to bond zirconia single mode lock pin and single-mode fiber, and the sizing realizing sensor probe makes.
Fig. 4 gives the typical apply of the optical fibre sound pressure sensor sound detecting signal of a kind of utilization based on graphene film.This measurement mechanism is primarily of the formation such as optical fibre sound pressure sensor 14, laser instrument 41, circulator 35, photoelectric detector 44, lock-in amplifier 45, tunable signal generator 46, sound source 47, soundproof box 48 based on graphene film.By regulating tunable signal generator 46(model: NTiMR-PRO immersive simulation audio signal generator), drive sound source 47(model: measure microphone M2215) produce the voice signal setting excitation frequency and intensity, at soundproof box 48(model: HZH-006) the diaphragm forced vibration of measurement sound field inner sensor 14, cause F-P cavity change of cavity length.This change of cavity length causes optical fiber internal reflection interference spectrum spectral line to change.This interference spectrum and laser instrument 41(model: AP3350A) optical signalling that exports is through circulator 35(model: 6015-3-FC), send into photoelectric detector 44(model: DET01CFC) carry out photoelectric signal transformation, and utilize lock-in amplifier 45(model: HF2LI) phase sensitive detection is carried out to modulation fiber-optic signal, obtain the output intensity of Fibre Optical Sensor and the relation of F-P cavity length.By the Large Deflection Deformation theoretical model of Graphene diaphragm, the center deflection displacement curve of different film thickness under uniform pressure as shown in Figure 5, combined high precision acoustic pickup (as, the Related product of B & K company of Denmark) carry out demarcation test, the measurement of measured position place sound pressure signal can be realized.This measuring method has the advantages such as installation is simple, reliability is high, volume is little, electromagnetism interference, can be applicable to the fields such as Aero-Space, military project boats and ships, environment measuring, biomedicine.
Claims (6)
1., based on a method for making for the Fabry-perot optical fiber sound pressure sensor of graphene film, it is characterized in that: comprise the following steps:
Step 1. sound pressure sensor assembly type selecting: select individual layer or multilayer copper-base graphite alkene film, zirconia single mode lock pin and single-mode fiber, described graphene film is the single or multiple lift copper-base graphite alkene film that chemical vapour deposition technique (CVD) generates;
Step 2. carries out acetone ultrasonic cleaning and washed with de-ionized water to described zirconia single mode lock pin PC (PhysicContact) end face, and adopt optical fiber cutter to cut flat to the tail end of single-mode fiber, and fused fiber splice machine testing zirconia single mode lock pin PC end face and single-mode fiber tail end is utilized to cut the flatness of flat rear end face;
Step 3. shifts described graphene film, it is transferred to the polishing PC end face of zirconia single mode lock pin from substrate, is specially: utilize copper sulphate: hydrochloric acid: the solution corrosion copper substrate of water=10g:50ml:50ml; The Graphene corroding copper base is transferred in deionized water and cleans; Then in ionized water, overturn graphene film gently, make graphene film upward, utilize zirconia single mode lock pin PC polished end faces to adsorb graphene film; Acetone is finally utilized to remove PMMA;
Single-mode fiber processed for end face inserts from the zirconia single mode lock pin other end adsorbing graphene film by step 4., makes two reflectings surface of single-mode fiber end face and graphene film forming method Fabry-Parot interferent, forms optical fiber-air-graphene film interference cavity;
Step 5. builds the long pick-up unit in chamber, method Fabry-Parot interferent chamber, this pick-up unit forms by based on the Fabry-perot optical fiber sound pressure sensor of graphene film, wideband light source, circulator, spectrometer and three-dimensional fiber micromotion platform, according to Two-peak method demodulated interferential spectral signal, determine that the initial cavity in forming method Fabry-Parot interferent chamber is long;
Step 6. utilizes epoxy glue to bond zirconia single mode lock pin and single-mode fiber, completes the making of the Fabry-perot optical fiber sound pressure sensor based on graphene film;
The Fabry-perot optical fiber sound pressure sensor based on graphene film that step 7. is made, according to the long rule of conversion of diaphragm vibration and chamber, realizes sound pressure signal and measures.
2. the method for making of the Fabry-perot optical fiber sound pressure sensor based on graphene film according to claim 1, it is characterized in that: described graphene film is the pretreated individual layer of PMMA or multilayer copper-base graphite alkene film, the end face of described zirconia single mode lock pin is PC polished end faces, and described single-mode fiber is the fibre-optical splice of band single-mode tail fiber.
3. the method for making of the Fabry-perot optical fiber sound pressure sensor based on graphene film according to claim 1, it is characterized in that: environment needed for the jump operation of described graphene film is toilet, outfit is antimagnetic type tweezer, needs to put into drying box and carry out air drying after having operated.
4. the method for making of the Fabry-perot optical fiber sound pressure sensor based on graphene film according to claim 1, is characterized in that: the operation that described single-mode fiber inserts zirconia lock pin need be carried out at three-dimensional fiber micromotion platform.
5. the measuring method that an interference cavity chamber is long, it is characterized in that: utilize the long pick-up unit in chamber, method Fabry-Parot interferent chamber to detect, the optical fibre sound pressure sensor based on graphene film that the described long pick-up unit in chamber, method Fabry-Parot interferent chamber is made by method for making according to claim 1, wideband light source, circulator, spectrometer and three-dimensional fiber micromotion platform build, pick-up unit described in utilization detects interference cavity progress row between single-mode fiber end face and graphene film end face, and utilize Two-peak method in light signal phase demodulating to the demodulation of interference spectrum signal, then chamber length can be expressed as:
In formula, λ
1, λ
2be the peak-to-peak value or minimum value that two of interference spectrum are adjacent, be approximately the twin-beam interference of light by the multiple beam interference of light, calculate chamber long by peak value corresponding wavelength, getting interference contrast K is:
In formula, I
max, I
minbe respectively largest light intensity and the minimum light intensity values of the long position of corresponding cavity, what K value characterized is the bright contrast degree secretly of interference fringe in interference field, by calculating K value close to 1 degree, analyze interference fringe performance, determine that best interference cavity chamber is long, afterwards, utilize epoxy glue to bond zirconia single mode lock pin and single-mode fiber, realize the making of sensor probe.
6. a sound pressure signal measurement mechanism, it is characterized in that: this measurement mechanism comprises the Fabry-perot optical fiber sound pressure sensor based on graphene film that method for making according to claim 1 makes, laser instrument, circulator, photoelectric detector, lock-in amplifier, tunable signal generator, sound source and soundproof box, by the excitation frequency and the intensity that regulate tunable sound source can change sound source, F-P cavity change of cavity length will be caused in the measurement sound field inner sensor diaphragm forced vibration of soundproof box, the reflection interference spectrum spectral line utilizing lock-in amplifier to obtain caused by change of cavity length changes, according to the Large Deflection Deformation theoretical model of Graphene diaphragm, in conjunction with F-P cavity cavity length demodulating method, thus realize the measurement of measured position place sound pressure signal.
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