CN104596559A - Optical fiber F-P multifunctional sensor based on microporous optical reflection diaphragm - Google Patents
Optical fiber F-P multifunctional sensor based on microporous optical reflection diaphragm Download PDFInfo
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Abstract
The invention provides an optical fiber F-P multifunctional sensor based on a microporous optical reflection diaphragm. The optical fiber F-P multifunctional sensor based on the microporous optical reflection diaphragm is characterized in that the design of an F-P cavity structure formed by sequentially connecting a single-die optical fiber, an optical capillary tube and the microporous optical reflection diaphragm and a special microporous optical reflection diaphragm structure is adopted to develop a built-in optical fiber F-P multifunctional sensor which can highly sensitively detecting liquid refractive index, air humidity and ultrasound under common air pressure and external high pressure conditions. The sensor has a micro size, is simple in structure, integrated, high in sensitivity, fast to respond, high in resistance to electromagnetic interference, applicable to the fields of environmental monitoring, and biochemical detection and ultrasonic detection, has a good market prospect, and is high in market value.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, particularly a kind of optical fibre Fabry-perot F-P sensor.
Background technology
Along with developing rapidly of science and technology, people start miniaturization, the lightweight of pursuing sensor, and the adaptability to rugged surroundings.Therefore Fibre Optical Sensor with its electromagnetism interference, corrosion-resistant, easily multiplexing, highly sensitive, measurement range is large, the advantages such as compact structure become the focus that scholars in recent years study.Conventional Fibre Optical Sensor mainly comprises: based on the sensor of Mach-increasing Dare interferometer, the sensor of Fabry-Perot interferometer, the sensor of Sagnac interferometer and the sensor based on fiber grating.Sensor wherein based on Fabry-Perot (F-P) interferometer is that current applicating history is the longest, one of Fibre Optical Sensor that technology is the most skillful, be most widely used, has successfully been applied to the measurement of temperature, pressure, displacement, strain, ultrasonic, the physics and chemistry parameter such as refractive index, humidity, gas concentration.The method for making of existing fibre-optical F-P sensor has a lot, comprising: end face coating method (one section of optical fiber being welded on the middle formation F-P cavity that two are coated with highly reflecting films optical fiber), grating become cell method (etch two identical Bragg gratings and form F-P cavity on one section of optical fiber), femtosecond etching method (utilize femtosecond pulse laser to etch on light surface or inside and form F-P cavity), hollow optic fibre method (hollow optic fibre and conventional fiber are thought that welding forms F-P cavity).But the fibre-optical F-P sensor made according to said method, the quality of F-P cavity be easy to the impact of the technology that is subject to processing and also cost higher, often can only detect specific single parameter.
The diversity pursuing function studies a large important goal of F-P sensor at present.And the function of fibre-optical F-P sensor determines primarily of its lumen type.The concrete method for making of the fibre-optical F-P sensor of foundation and cavity structure, fibre-optical F-P sensor mainly can be divided into the formula of beginning to speak and close cavate.For the F-P sensor of the formula of beginning to speak, measured matter can enter the cavity of F-P sensor, realizes the detection to some chemical quantities and physical quantity, the concentration etc. of the refractive index of such as liquid, the relative humidity of air, gas by the relative index of refraction changed in chamber.Relative to formula F-P sensor of beginning to speak, close cavate F-P sensor causes reflecting diaphragm deformation by the change of tested parameter, cause the change that chamber is long further, eventually through the detection realized the demodulation of change of cavity length the physical parameter such as vibration, strain, sound wave/ultrasound wave, pressure, displacement.Disclosed in 14 days March in 2012, Chinese patent CN102384809 A disclosed in 21, on March of Chinese patent CN102374874 A and 2012, have employed the F-P sensor design of closing cavate, can realize the detection to strain or pressure, pressure.But because it closes cavity configuration, the detection to chemical parameters usually cannot be completed, such as liquid refractivity, air humidity, gas concentration etc.Visible acquisition is a kind of can be detected chemical quantity and the fibre-optical F-P sensor of detection Physics amount can seem very necessary again.
Except multifunctionality, induction sensitivity is also performance index very important in fibre-optical F-P sensor.Based on the F-P sensor of reflecting diaphragm formula, its induction sensitivity is proportional to r
4/ h
3(Guo F, Fink T, Han M, et al.High-sensitivity, high-frequency extrinsic Fabry – Perot interferometric fiber-tip sensor based on a thin silver diaphragm.Optics Letters, 2012,37 (9): 1505-1507), here r is the radius of barrier film, and h is the thickness of reflecting diaphragm.That is, more heavy thickness is less for the radius of reflecting diaphragm, and the sensitivity of sensor is higher.For fibre-optical F-P sensor, in order to meet the needs of miniaturization, the diameter of usual reflecting diaphragm generally depends on the diameter of optical fiber used.Therefore the sensitivity of F-P sensor determines primarily of the thickness of reflecting diaphragm.By conservative control thickness, the measurement of the physical quantitys such as stress, strain, acceleration can be realized.Chinese patent CN101368979 A disclosed in 18 days October in 2009, achieves a kind of F-P acceleration transducer based on single-mode fiber-optical fiber capillaries-solid light photonic crystal fiber.In the invention, have employed the fusion of solid light photonic crystal fiber and fiber F-P cavity, the length of melted photonic crystal fiber is reduced by grinding, and produce reflecting diaphragm by the method for Laser Micro-Machining at the core of solid light photonic crystal fiber, the thickness of this reflecting diaphragm is 3-20 micron.But its weak point is, by the method for Laser Micro-Machining, method of operating is complicated, and cost is higher.Important this preparation method, is difficult to the control of reflecting diaphragm below micron number magnitude.When some feeble signals (as sound wave, ultrasound wave) act on vibrating diaphragm, be difficult to the deformation causing vibrating diaphragm.Relative to the reflecting diaphragm of nanometer scale, the detection sensitivity of the sensor and still relatively low to the resolution of signal, cannot realize the highly sensitive detection to ultrasonic/acoustic signals.It is increase the radius of reflectance coating that another kind puies forward highly sensitive method, but adopts this way will to increase the volume of sensor for cost.Chinese patent CN103528665A disclosed in 22 days January in 2014, a kind of Fabry-Perot MEMS sonic sensor proposed, adopt the sonic sensor of collimating apparatus, SOI wafer harmony sensitive thin film design, the detection to sound wave can be realized by the radius raising sensitivity increasing reflective film.But the diameter of its sensor is larger than general single mode fiber nearly 16 times.Compared with Fibre Optical Sensor, its volume is excessive, is unfavorable for the demand of miniaturized sensors.The thickness of its acoustic sensing film is 2-4 micron in addition, and relative to the reflecting diaphragm of nanometer scale, the detection sensitivity of this sensor still has larger room for promotion.
For the problems referred to above, need that a kind of volume is little, low cost urgently, make simple, highly sensitive, multi-functional, the multiduty fibre-optical F-P sensor to chemical quantity and physical quantity detection can be realized simultaneously.
Summary of the invention
The present invention is directed to fibre-optical F-P sensor volume subminiaturization, high detection sensitivity, the diversified needs of detecting function, and consider the deficiencies in the prior art, provide a kind of optical fiber built-in type F-P Multifunction Sensor based on micropore optical reflection barrier film.
The present invention is achieved through the following technical solutions.
Based on a fiber F-P Multifunction Sensor for micropore optical reflection barrier film, comprising: single-mode fiber, optical fiber capillaries, micropore optical reflection barrier film; One end of described optical fiber capillaries is connected by the mode of welding with one end of described single-mode fiber, and the other end of described optical fiber capillaries is connected by bonding mode with described micropore optical reflection barrier film; Described micropore optical reflection barrier film has micropore, and the hollow space of described optical fiber capillaries is as the F-P interference cavity of described fiber F-P Multifunction Sensor.
Further, the thickness of described micropore optical reflection barrier film is 100-300 nanometer.
Further, described micropore optical reflection barrier film is prepared by using micropore mask plate and metal vapor deposition or metal magnetron sputtering method.
Single-mode fiber-optical fiber capillaries-ultra-thin micropore optical reflection barrier film is combined by certain connected mode by the present invention, forms F-P interference sensor.Light beam is formed from the end of single-mode fiber and optical reflection barrier film two end face reflections interferes, and its interference spectum is the function of refractive index in long and chamber, chamber.When extraneous measuring object causes the change of refractive index in F-P cavity length or chamber, the interference spectrum of corresponding reflection will change.By the change of interference spectum, the change of external parameter can be recalled by last solution.Micropore optical reflection barrier film have employed ultra-thin microcellular structure design, and F-P cavity can be communicated with external environment, and the structural design of this formula of beginning to speak makes the present invention have following advantage:
(1) the sensitivity of reflective F-P sensor and the thickness of reflecting diaphragm used are inversely proportional to, and the thickness of the present invention's micropore optical reflection used barrier film is 100-300 nanometer, ensure that this sensor has high sensitivity.
Extraneous high dynamic signal disturbance as sound/ultrasonic signal, the deformation that optical reflection barrier film is small fast can be caused, and then cause the change of F-P cavity personal attendant signal, make the present invention can detect high dynamic signal as sound/ultrasonic.
(3) under the measurement environment of liquid state, by means of the micropore on micropore optical reflection barrier film, liquid can enter in chamber by the structural design of formula of beginning to speak, and changes the refractive index of the F-P cavity in chamber.Therefore sensor of the present invention can be used for measuring the refractive index of liquid.
(4) in hyperbaric environment, the structural design of formula of beginning to speak balances the pressure reduction inside and outside chamber, avoids tearing and damage of the optical reflection barrier film that the High Pressure Difference inside and outside because of F-P cavity causes, ensure that sensor of the present invention can do industry under elevated pressure conditions.
(5) due to the existence of micropore, the micropore that water vapor can be passed through optical reflection barrier film enters in F-P cavity, changes the refractive index in chamber.Thus sensor of the present invention can be used for measuring the relative humidity of air.
In addition the present invention also there is the common volume microminiaturization of fibre-optical F-P sensor, simplify the structure, the advantage such as the speed of response is fast, electromagnetism interference.
Accompanying drawing explanation
Fig. 1 is the probe schematic three-dimensional figure of optical fiber built-in F-P Multifunction Sensor of the present invention;
Fig. 2 is the schematic cross-section of optical fiber built-in F-P Multifunction Sensor of the present invention;
Fig. 3 is micropore optical reflection barrier film of the present invention phase mask plate structural drawing used;
Fig. 4 utilizes sensor of the present invention to the detection schematic diagram of liquid refractivity;
Fig. 5 utilizes sensor of the present invention to the detection schematic diagram of air humidity;
Fig. 6 utilizes sensor of the present invention to ultrasonic detection schematic diagram.
Embodiment
Illustrate below in conjunction with accompanying drawing and embodiment the present invention is further described.
Fig. 1 illustrates the fiber F-P Multifunction Sensor based on micropore optical reflection barrier film of the present invention to be made up of single-mode fiber 1, optical fiber capillaries 2, micropore optical reflection barrier film 3 three part.The external diameter of optical fiber capillaries 2 is identical with the external diameter of single-mode fiber 1, is 125 microns, and its internal diameter is 75 microns.One end of optical fiber capillaries 2 is connected by the mode of welding with one end of single-mode fiber 1, and the other end of optical fiber capillaries 2 is connected by bonding mode with micropore optical reflection barrier film 1, and the hollow space of optical fiber capillaries 1 is as the F-P interference cavity of sensor.Optical reflection diaphragm micro-hole ensures that F-P cavity communicates with external environment, makes this sensor for the ability of self-poise F-P cavity inside and outside differential pressure, prevents reflecting diaphragm from tearing damage because inside and outside differential pressure is too high.
In the present embodiment, micropore optical reflection barrier film used is flabellum shape silverskin, it is to be noted that the material of the present invention's micropore optical reflection used barrier film is not only only limited to silver, can also be that other have the resilient material of reflectivity properties; The shape of the micropore 5 of the present invention's micropore used optical reflection barrier film is not only only limited to fan-shaped, can with under the condition of external environment UNICOM in guarantee F-P cavity, and the shape of micropore can set as required.
Specific works principle of the present invention is as follows: when optical signals single-mode fiber incides F-P sensor of the present invention, can at the single-mode fiber end generating portion reflection of F-P cavity 4 and fractional transmission.Wherein transmitted light is reflected back F-P cavity through F-P cavity by optical reflection barrier film, and finally again enters single-mode fiber, and interferes with the reflected light generation double light path of single-mode fiber end face.Its reflectance spectrum meets formula below,
Here λ in formula (1)
1, λ
2represent the wavelength that on reflectance spectrum interference pattern, any two adjacent interference peaks are corresponding respectively, n is the refractive index of material in chamber, L represents the length of F-P cavity, as can be seen from formula (1), when external environment to cause in chamber refractive index n or the long L in chamber changes, the change of interference spectrum can both be caused, thus the change of external parameter can be demodulated.In formula (2), Δ n represents the changing value of refractive index, and Δ λ originally represents the changing value of wavelength location, and it is initial relative index of refraction and centre wavelength respectively that λ, n send out, and formula (2) is mainly applicable to high-precision refractometry.In the present embodiment, the sensitivity of sensor determines primarily of the diameter of silverskin and thickness, is embodied in and is directly proportional to the biquadratic of silverskin radius, with cube being inversely proportional to of silver film thickness.
As shown in Figure 2, the external diameter reflecting silverskin is in the present embodiment identical with single-mode fiber used (SMF-28e), is all 125 microns, and the internal diameter of reflection silverskin depends on the internal diameter of optical fiber capillaries, is 75 microns.Silverskin have employed the structural design of sector, F-P cavity can be communicated with external environment, balance the pressure reduction inside and outside chamber, ensure that sensor of the present invention can do industry under elevated pressure conditions.
As shown in Figure 3, micropore optical reflection silverskin can by using mask plate and metal vapor deposition or magnetron sputtering method preparation, and the thickness of silverskin is by controlling the time of deposition or sputtering, and control is tens to hundreds of nanometer.Wherein, accompanying drawing 3 (a) is the schematic diagram of micropore optics barrier film mask plate, and accompanying drawing 3 (b) is its partial enlarged drawing.The ultra-thin thickness of optical reflection barrier film ensure that the present invention can realize carrying out highly sensitive detection to physical quantitys such as vibration, sound wave, ultrasound waves.
A kind of concrete methods of realizing of the fiber F-P Multifunction Sensor based on micropore optical reflection barrier film is as follows:
(1) by discharge time and the strength of discharge of conservative control optical fiber splicer, manually single-mode fiber and optical fiber capillaries are carried out welding, be placed on fiber optics displacement platform after welding, utilize high-precision optical fiber cutting knife, length long according to required F-P cavity under microscope is assisted, cut off by optical fiber capillaries, the chamber length of controls F-P is tens arrive hundreds of micron.
(2) by optics ultraviolet glue water droplet on microslide, be put on glue evenning table, by controlling the speed of rotation of glue evenning table, the film making ultraviolet glue form 3 microns is evenly distributed on microslide, then by controlling fiber optics displacement platform, glue is stained with the afterbody of optical fiber capillaries.
(3) by controlling fiber optics displacement platform, making the optical fiber capillaries speckling with ultraviolet glue contact the heart with silverskin under the microscope, under the irradiation of uviol lamp, carrying out ultraviolet glue water cure, completing the bonding of silverskin and kapillary, and form fibre-optical F-P sensor.
[specific embodiment 1]
As shown in Figure 4, sensor 6 of the present invention is connected with the b port of circulator 7, and wideband light source connects with a port of circulator 7, and spectroanalysis instrument connects with the c port of circulator 7.The transducing part of sensor is placed among liquid, by the situation of change of the reflectance spectrum on measure spectrum instrument, just can demodulates the change of corresponding liquid refractivity.
[specific embodiment 2]
As shown in Figure 5, sensor 6 of the present invention is connected with the b port of circulator 7, and wideband light source connects with a port of circulator 7, and spectroanalysis instrument connects with the c port of circulator 7.The transducing part of sensor is placed among humidity generator, by the situation of change of the reflectance spectrum on measure spectrum instrument, just can adjusts the change of corresponding air humidity.
[specific embodiment 3]
As shown in Figure 6, sensor 6 of the present invention is connected with the b port of circulator 7, and tunable laser source connects with a port of circulator 7, and photodetector 8 connects with the c port of circulator 7, and the electric signal amplified by signal amplifier 10 is detected by oscillograph.Sensor is placed in water, and ultrasonic signal drives ultrasonic transducer 9 (such as piezoelectric ceramics PZT) to produce by signal generator.Extraneous ul-trasonic irradiation can cause the deformation of optical emitting barrier film (depression or protruding) when this sensor, cause the change of the effective optical path of FP interference cavity further, finally show as the change of reflected light spectrogram interference pattern, thus demodulate detected ultrasound information, the ultrasonic signal that sensor finally records by oscillograph demodulation out, realizes ultrasonic detection.
Above content is in conjunction with concrete preferred implementation further description made for the present invention, can not assert that specific embodiment of the invention is confined to these explanations.For general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, some simple deduction or replace can also be made, all should be considered as belonging to protection scope of the present invention.
Claims (6)
1. based on a fiber F-P Multifunction Sensor for micropore optical reflection barrier film, it is characterized in that: described fiber F-P Multifunction Sensor comprises: single-mode fiber, optical fiber capillaries, micropore optical reflection barrier film; One end of described optical fiber capillaries is connected by the mode of welding with one end of described single-mode fiber, and the other end of described optical fiber capillaries is connected by bonding mode with described micropore optical reflection barrier film; Described micropore optical reflection barrier film has micropore, and the hollow space of described optical fiber capillaries is as the F-P interference cavity of described fiber F-P Multifunction Sensor.
2. fiber F-P Multifunction Sensor according to claim 1, is characterized in that: the thickness of described micropore optical reflection barrier film is 100-300 nanometer.
3. a kind of fiber F-P Multifunction Sensor based on micropore optical reflection barrier film according to claim 1, it is characterized in that: optical reflection diaphragm micro-hole ensures that F-P cavity communicates with external environment, make this sensor for the ability of self-poise F-P cavity inside and outside differential pressure, prevent reflecting diaphragm from tearing damage because inside and outside differential pressure is too high.
4. fiber F-P Multifunction Sensor according to claim 1, is characterized in that: described micropore optical reflection barrier film is prepared by using micropore mask plate and metal vapor deposition or metal magnetron sputtering method.
5. fiber F-P Multifunction Sensor according to claim 1, is characterized in that: by molten fine machine welding between described single-mode fiber and optical fiber capillaries; By ultraviolet glue adhering and solidifying under the irradiation of uviol lamp between described optical fiber capillaries and micropore optical reflection barrier film.
6. fiber F-P Multifunction Sensor according to claim 1, is characterized in that: described multi-functionally to comprise: the measurement to liquid refractivity, the detection to relative air humidity, to sound wave/hyperacoustic detection.
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