CN102374874A - Quartz capillary tube embedded all-silica fiber Fabry-Perot interferometric sensor and manufacturing method thereof - Google Patents
Quartz capillary tube embedded all-silica fiber Fabry-Perot interferometric sensor and manufacturing method thereof Download PDFInfo
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- CN102374874A CN102374874A CN2011102797912A CN201110279791A CN102374874A CN 102374874 A CN102374874 A CN 102374874A CN 2011102797912 A CN2011102797912 A CN 2011102797912A CN 201110279791 A CN201110279791 A CN 201110279791A CN 102374874 A CN102374874 A CN 102374874A
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Abstract
The invention discloses a quartz capillary tube embedded all-silica fiber Fabry-Perot interferometric sensor which comprises a single-mode optical fiber, a quartz capillary tube, a reflective optical fiber and a protective film, wherein the reflective optical fiber is a single-mode optical fiber or a multimode optical fiber, the two ends of the quartz capillary tube are respectively connected with one end of the single-mode optical fiber and one end of the reflective optical fiber by way of welding, and the hollow part of the quartz capillary tube is taken as the interferometric cavity of the interferometric sensor. In the interferometric sensor disclosed by the invention, a quartz capillary tube is adopted without plating a film, therefore, the cost for manufacturing the Fabry-Perot interferometric sensor is reduced, and the high contrast of the fiber Fabry-Perot interferometric sensor can be realized. The invention also discloses a method for manufacturing the sensor. The quartz capillary tube embedded all-silica fiber Fabry-Perot interferometric sensor disclosed by the invention has the characteristics of low cost, simple processing method, high miniaturization degree and good mechanical stability, and is convenient for production on large scale; and the practicability of the interferometric sensor is easy to realize, and the interferometric sensor has a potential practical value and a broad market in the field of interferometric sensors.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, be specifically related to a kind of optical fiber Fabry-Perot (Fabry-Perot) interference sensor and preparation method thereof.
Background technology
In recent years; Optical fiber Fabry-Perot (Fabry-Perot) interference sensor (optical fiber enamel-Fabry-Parot interferent sensor) is applied to pressure, strain, displacement, speed, acceleration, ultrasonic isoparametric sensing with advantages such as its microminiaturization, simple in structure, highly sensitive, high temperature resistant, high pressure resistant, anti-electromagnetic interference (EMI) in fields such as biology, medical science, industry, Aero-Space, military affairs, has received the extensive concern of Chinese scholars and enterprise.Optical fiber Fabry-Perot interference sensor comprises Intrinsical optical fiber Fabry-Perot interference sensor and extrinsic type optical fiber Fabry-Perot interference sensor, and advantages such as extrinsic type optical fiber Fabry-Perot interference sensor is simple, practical with its job operation, sensitivity height are used more in production, life and scientific research.
Traditional extrinsic type optical fiber Fabry-Perot interference sensor is that two sections end faces are cut flat optical fiber inserts has one section air in the middle of the formation in the quartz capillary Fabry-Perot interference cavity; Contact portion at quartz capillary and optical fiber adopts epoxy adhesive or welding mode to fix, but there are shortcomings such as mechanical stability is poor, intensity is low, size is bigger than normal in this type of Fabry-Perot interference sensor.In addition; Extrinsic type optical fiber Fabry-Perot interference sensor (the US 5528367A that processes between two section single-mould fibers through hollow-core fiber is fused to is arranged; 1996.6.18); Because the difficult buying of hollow-core fiber, the long representative value in chamber, F-P chamber of the type sensor has limitation on length in 200 μ m simultaneously; Also have through hollow-core photonic crystal fiber being fused to extrinsic type optical fiber Fabry-Perot interference sensor (the CN 100516782C that processes between two section single-mould fibers; 2009.7.22); Because hollow-core photonic crystal fiber costs an arm and a leg; Need plated film to improve its interference fringe contrast simultaneously, make the type sensor cost involve great expense.
So, how to produce low cost, microminiaturization, mechanically stable good, be prone to practicability, a difficult problem that the optical fiber Fabry-Perot interference sensor being convenient to produce in enormous quantities has become enterprise and colleges and universities and faced.
Summary of the invention
The object of the present invention is to provide and a kind ofly have low cost, microminiaturization, good mechanical stability, be prone to practicability, be convenient to the all-silica fiber Fabry-Perot interference sensor and preparation method thereof of the embedded quartz capillary of advantages such as producing in enormous quantities.
In order to achieve the above object, the invention provides a kind of all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary, this sensor comprises single-mode fiber, quartz capillary and mirror based fiber optica.
The two ends of said quartz capillary are connected through fusing mode with an end of said single-mode fiber and an end of said mirror based fiber optica respectively; The hollow space of quartz capillary is as the interference cavity of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary, and diaphragm is coated on said single-mode fiber, quartz capillary and mirror based fiber optica outside.The present invention adopts quartz capillary, need not plated film, has reduced the cost of making optical fiber Fabry-Perot interference sensor, can realize the high-contrast of optical fiber Fabry-Perot interference sensor reflection strip simultaneously.In addition, the inner diameter d of said quartz capillary
cIf≤100 μ m are inner diameter d
cExcessive, then can cause the thickness of quartz capillary wall too thin, the physical strength of sensor will reduce like this.
The D outer diameter of said quartz capillary
cThe D outer diameter of≤said single-mode fiber
f, be unlikely to make that the volume of sensor is excessive, when carrying out quartz capillary and single-mode fiber or mirror based fiber optica welding, make the welding operation be more prone to simultaneously.
Said mirror based fiber optica adopts single-mode fiber or multimode optical fiber.
A kind of method for making of all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary, it comprises following steps:
1) use the fiber cut cutter respectively that an end-grain cutting of single-mode fiber, quartz capillary and mirror based fiber optica is flat;
2) using optical fiber splicer that said single-mode fiber end face is cut a flat end is fused to said quartz capillary 2 end faces and cuts a flat end;
3) make the length of optical fiber Fabry-Perot interference cavity as required, with unnecessary said quartz capillary excision;
The said quartz capillary that 4) will have a said single-mode fiber is cut the flat other end and is fused to said mirror based fiber optica and cuts a flat end;
Further, 5) apply layer protecting film in said single-mode fiber, said quartz capillary and said mirror based fiber optica outside.
Further; Be worked into the 4th at sensor) when going on foot; Cut in the process that a flat end moves to quartz capillary at mirror based fiber optica, utilize spectrometer can real-time monitored to the variation of optical fiber Fabry-Perot interference cavity reflectance spectrum, the quality of the sensor performance made is had directive significance.When the contrast of the optical fiber Fabry-Perot interference cavity reflectance spectrum that observes during less than 2 dB, then stop follow-up welding operation, again the cutting optical fibre end face and/or aim at optical fiber again after welding.
Useful technique effect of the present invention is: low, the microminiaturized degree of the all-silica fiber Fabry-Perot interference sensor cost of embedded quartz capillary disclosed by the invention is high, contrast is high, structural stability good, processing technology is simple; Be convenient to produce in enormous quantities; Be prone to practicability, have potential practical value and vast market at sensory field of optic fibre.
Description of drawings
Fig. 1 is the D outer diameter of quartz capillary
cEqual the D outer diameter of the bare fibre of single-mode fiber
fThe time the structural representation of all-silica fiber Fabry-Perot interference sensor (outer unprotect film) of embedded quartz capillary;
Fig. 2 is the D outer diameter of quartz capillary
cEqual the D outer diameter of the bare fibre of single-mode fiber
fThe time the structural representation of all-silica fiber Fabry-Perot interference sensor (skin has diaphragm) of embedded quartz capillary;
Fig. 3 is the D outer diameter of quartz capillary
cD outer diameter less than the bare fibre of single-mode fiber
fThe time the structural representation of all-silica fiber Fabry-Perot interference sensor (outer unprotect film) of embedded quartz capillary;
Fig. 4 is the D outer diameter of quartz capillary
cD outer diameter less than the bare fibre of single-mode fiber
fThe time the structural representation of all-silica fiber Fabry-Perot interference sensor (skin has diaphragm) of embedded quartz capillary;
Fig. 5 is the reflectance spectrum of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary;
Fig. 6 is wavelength shift and the graph of a relation of temperature of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary.
Among the figure, the 1st, single-mode fiber, the 2nd, quartz capillary; The 3rd, mirror based fiber optica, the 4th, interference cavity, the 5th, the face of weld of single-mode fiber 1 and quartz capillary 2; The 6th, the interface of single-mode fiber 1 and interference cavity 4, the 7th, the interface of interference cavity 4 and mirror based fiber optica 3, the 8th, the face of weld of quartz capillary 2 and mirror based fiber optica 3; The 9th, I/O end, the 10th, diaphragm.
Embodiment
Embodiment describes in further detail the present invention below in conjunction with accompanying drawing.
As shown in Figure 1, the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary of the present invention comprises single-mode fiber 1, quartz capillary 2 and mirror based fiber optica 3.The bare fibre external diameter of single-mode fiber 1 is D
fThe external diameter of quartz capillary 2 is D
c, with the bare fibre D outer diameter of single-mode fiber 1
fEquate that diameter of bore is d
cMirror based fiber optica 3 adopts single-mode fiber or multimode optical fiber.The two ends of quartz capillary 2 are connected through fusing mode with an end of said single-mode fiber 1 and an end of mirror based fiber optica 3 respectively, and the hollow space of quartz capillary 2 is as the interference cavity 4 of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary.
The method for making of this sensor is following:
1) use the fiber cut cutter respectively that an end-grain cutting of single-mode fiber 1, quartz capillary 2 and mirror based fiber optica 3 is flat; The flatness of planar end surface is cut in requirement can not be too low, and it is axial perpendicular to separately respectively to cut flat end face.If the end face flatness is crossed low or end face and axial separately angle depart from 90 ° too big, will reduce the contrast of catoptrical intensity and interference fringe.
2) using optical fiber splicer that said single-mode fiber 1 end face is cut a flat end is fused to said quartz capillary 2 end faces and cuts a flat end.Welding mainly comprises the setting of arc power (Arc power), arc duration (Arc duration) and three parameters of advance distance (Push distance); It is an important step in the sensor processing; Influence the intensity at face of weld 5 and face of weld 8 places, also influence the reflectivity size of interface 6 and interface 7 simultaneously.
3) make the length of optical fiber Fabry-Perot interference cavity as required, with 2 excisions of unnecessary said quartz capillary.
The said quartz capillary 2 that 4) will have a said single-mode fiber 1 is cut the flat other end and is fused to said mirror based fiber optica 3 and cuts a flat end.The importance of this step welding is with step 2.
In the sensor production process; Utilize the variation of spectrometer real-time monitored optical fiber Fabry-Perot interference cavity reflectance spectrum; When mirror based fiber optica to quartz capillary cut a flat end reach set apart from the time; If this moment optical fiber Fabry-Perot interference cavity reflectance spectrum low excessively (for example less than 2 dB), then need cut again and/or to single-mode fiber and welding again after quartz capillary is aimed at again mirror based fiber optica.
As shown in Figure 2, this figure is the D outer diameter of quartz capillary
cEqual the D outer diameter of the bare fibre of single-mode fiber
fThe structural representation of all-silica fiber Fabry-Perot interference sensor (skin has diaphragm) of embedded quartz capillary.The method for making of sensor adds a step again after the 4th step in Fig. 1: 5) at single-mode fiber 1, quartz capillary 2 and the mirror based fiber optica 3 outer layer protecting films 10 that apply, to improve the sensor physical strength.
As shown in Figure 3, this figure is the D outer diameter of quartz capillary 2
cD outer diameter less than the bare fibre of single-mode fiber 1
fThe structural representation of all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary.
As shown in Figure 4, this figure is the D outer diameter of quartz capillary
cD outer diameter less than the bare fibre of single-mode fiber
fThe all-silica fiber Fabry-Perot interference sensor skin of the embedded quartz capillary structural representation when having diaphragm.
As shown in Figure 5; This figure is the reflectance spectrum of testing the all-silica fiber Fabry-Perot interference sensor (interference cavity length is 412.23 μ m) of an embedded quartz capillary that records; The contrast of visible its interference fringe can reach 15.7 dB from figure, has higher contrast ratio.
As shown in Figure 6; This figure is wavelength shift and the graph of a relation of temperature of the all-silica fiber Fabry-Perot interference sensor (interference cavity length is 519.263 μ m) of the embedded quartz capillary that records of experiment; In the range of temperature of 25 ° of C ~ 215 ° C; The total drift value of wavelength is 161 pm; Sensitivity to temperature is 0.8577 pm/° C, and fitting coefficient is 0.9976, but the all-silica fiber Fabry-Perot interference sensor of the embedded quartz capillary of knowledge capital invention is extremely insensitive to temperature.When other physical quantitys are carried out sensing except that temperature, the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary of the present invention has resisting temperature interference characteristic preferably.
Principle of work of the present invention: light arrives interface 6 from I/O end 9 through single-mode fiber 1 and forms a part of reflected light; Another part transmitted light arrives interface 7 through interference cavity 4 and forms the sensing reflected light that a part comprises quartz capillary 2 length; This sensing reflected light continues to arrive said single-mode fiber 1 through said interference cavity 4, said interface 6; And produce with a part of reflected light that forms from said interface 6 and to interfere, at last from said I/O end 9 outputs.When the physical parameter in the external world is modulated the length of said quartz capillary 2, realize the sensing of extraneous parameter through the interference light signal of said I/O end 9 outputs of demodulation.
Applicant of the present invention combines Figure of description that embodiments of the invention have been done detailed explanation and description; But those skilled in the art should understand that; Above embodiment is merely the preferred embodiments of the invention, and detailed explanation is just in order to help the reader to understand spirit of the present invention better, and is not the restriction to protection domain of the present invention; On the contrary, anyly invent any improvement of being done of spirit or modify and all should drop within protection scope of the present invention based on the application.
Claims (7)
1. the all-silica fiber Fabry-Perot interference sensor of an embedded quartz capillary is characterized in that this sensor comprises: single-mode fiber (1), quartz capillary (2) and mirror based fiber optica (3);
The two ends of said quartz capillary (2) are connected through fusing mode with an end of said single-mode fiber (1) and an end of said mirror based fiber optica (3) respectively, and the hollow space of quartz capillary (2) is as the interference cavity (4) of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary;
The inner diameter d of said quartz capillary (2)
c≤100 μ m.
2. the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary according to claim 1 is characterized in that: the D outer diameter of said quartz capillary (2)
cThe D outer diameter of≤said single-mode fiber (1)
f
3. the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary according to claim 1 and 2, it is characterized in that: said mirror based fiber optica (3) is single-mode fiber or multimode optical fiber.
4. the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary according to claim 1 and 2 is characterized in that: be coated with diaphragm (10) outside said single-mode fiber (1), quartz capillary (2) and the mirror based fiber optica (3).
5. the method for making of the all-silica fiber Fabry-Perot interference sensor of an embedded quartz capillary is characterized in that, comprises following steps:
1) respectively that an end-grain cutting of single-mode fiber (1), quartz capillary (2) and mirror based fiber optica (3) is flat;
2) said single-mode fiber (1) end face being cut a flat end is fused to said quartz capillary (2) end face and cuts a flat end;
3) make the length of Fabry-Perot interference cavity as required, with unnecessary said quartz capillary (2) excision;
The said quartz capillary (2) that 4) will have a said single-mode fiber (1) is cut the flat other end and is fused to said mirror based fiber optica (3) and cuts a flat end.
6. the method for making of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary according to claim 5; It is characterized in that: in manufacturing process, adopt the variation of spectrometer real-time monitored optical fiber Fabry-Perot interference cavity reflectance spectrum; When the contrast of the optical fiber Fabry-Perot interference cavity reflectance spectrum that observes during less than 2 dB; Then stop follow-up welding operation, again the cutting optical fibre end face and/or aim at optical fiber again after welding.
7. the method for making of the all-silica fiber Fabry-Perot interference sensor of embedded quartz capillary according to claim 5 is characterized in that: apply layer protecting film (10) in said single-mode fiber (1), said quartz capillary (2) and said mirror based fiber optica (3) outside.
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