CN101858809A - Optical fiber Fabry-Perot pressure sensor and fabrication method thereof - Google Patents
Optical fiber Fabry-Perot pressure sensor and fabrication method thereof Download PDFInfo
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Abstract
The invention relates to a novel optical fiber Fabry-Perot pressure sensor and a fabrication method thereof. The optical fiber Fabry-Perot pressure sensor is used for detecting the relative pressure and absolute pressure of liquid and gas as well as sound wave signals, ultrasonic wave signals and the like. The structure of the optical fiber Fabry-Perot pressure sensor mainly comprises an optical fiber, an elastic diaphragm, a sensor body and a miniature spring. Two methods and an alternative method can be adopted to form a Fabry-Perot cavity and fabricate the sensor. The elastic diaphragm and the sensing optical fiber are tightly contacted in a plane-sphere point contact manner; when the outside pressure is changed to cause the deformation of the elastic diaphragm, the diaphragm can drive the optical fiber to axially move in the sensor body, so that the length of the Fabry-Perot cavity of the optical fiber is changed; after a broadband light source is connected, by scanning the spectrum of the light passing through the optical fiber Fabry-Perot pressure sensor or extracting low-coherence interference fringes, the change of the cavity length can be extracted, and thereby pressure information can be obtained. The structure can avoid the defect that the diaphragm of the conventional optical fiber Fabry-Perot pressure sensor cannot be over-deformed, and can obtain higher measurement precision.
Description
[technical field]:
The present invention relates to the fibre optic compression sensor field, this sensor can be used for the relative pressure and the absolute pressure of tracer liquid, gas, also can be used for sound wave, the detection of ultrasonic signal etc.
[background technology]:
The optical fibre Fabry-perot pressure transducer is a kind of in the fibre optic compression sensor, it is usually by fiber end face and diaphragm end face mechanics Fabry-Perot-type micro-resonant cavity, to make diaphragm deformation when pressure acts on the diaphragm, and make changing of Fa-Po cavity long hair, thereby realize sensing.Some design proposals have been proposed in recent years, as (DonC.Abeysinghe such as calendar year 2001 Don C.Abeysinghe, Samhita Dasgupta, Joseph T.Boyd, Howard E.Jackson, A Novel MEMSpressure sensor fabricated on an optical fiber, IEEE Photonics Technology Letters, 2001,13 (9): 993-995) be respectively 200 microns and 400 microns in cladding diameter, core diameter is that the multimode optical fiber end face of 190 microns and 360 microns etches microcavity, constitutes sensor at this straight end-face key silicon chip that closes then; (Juncheng Xu such as Juncheng Xu in 2005, Xingwei Wang, Kristie L.Cooper, Anbo Wang, Miniature all-silicafiber optic pressure and acoustic sensors, Optics Letters, 2005,30 (24): 3269-3271) utilize the silica fibre of the big core diameter of hydrofluoric acid etch to obtain quartz diaphragm, quartz diaphragm is fused to the kapillary end, and the single-mode fiber end face of cutting extend in this kapillary and just constituted the optical fibre Fabry-perot pressure transducer with quartz diaphragm; (Xiaodong Wang such as Xiaodong Wang in 2006, Baoqing Li, Onofrio L.Russo, et.al., Diaphragm design guidelines and an optical pressure sensor based on MEMStechnique, Journal of microelectronics, 2006,37:50-56) at the little microcavity body that processes of the Pyrex of 500 micron thickness glass, wafer bonding is on glass at Pyrex then, and has constituted the optical fibre Fabry-perot chamber with the fiber end face that stretches into cavity; (Wang Ming, Chen Xuxing, Ge Yixian etc. such as Wang Ming in 2006, Fabry-Perot type optical fiber pressure transducer and preparation method thereof, number of patent application: 200610096596.5) utilize monocrystalline silicon piece, glass round tube, optical fiber ring flange and Optical fiber plug have made up the optical fibre Fabry-perot chamber.But be out of shape when excessive as the silicon chip of pressure-sensitive diaphragm, silicon chip can not keep the plane, and cause bigger optical energy loss, have influence on the performance of Fabry-Perot-type cavity; Because the material of making pressure transducer is limit, environment temperature is very big to the sensor stability influence simultaneously.Therefore when reality was used, Fabry-Perot-type cavity was limited in more among a small circle, and the silicon chip distortion does not often allow excessive, for example can not be greater than 25% of thickness.In order to improve the measuring accuracy of measuring full scale, to improve the sensor application restriction, we need be under same pressure limit, and the diaphragm deformation scope is bigger, and this just makes diaphragm on-plane surface problem on deformation to consider and to overcome; And, be subjected to the applied environment Temperature Influence for reduce it as far as possible, then should adopt other modes to connect each parts of sensor.
[summary of the invention]:
The present invention seeks to overcome the above-mentioned a series of problems that exist in the prior art, optical fibre Fabry-perot pressure transducer of a kind of new structure and preparation method thereof is provided.The present invention proposes on the basis to traditional optical fibre Fabry-perot sensor existing Problems Analysis and research, this sensor construction can be avoided the defective that traditional fiber Fabry-Perot sensor diaphragm distortion can not be excessive, can obtain higher measuring accuracy.
Optical fibre Fabry-perot pressure transducer among the present invention comprises:
Sensor body: the optical fibre Fabry-perot pressure sensor body is the supporting construction of sensor and the optical fiber guide structure when sliding, and it is shaped as cylindrical or cuboid, and the centre of sensor body has a through hole, and an end of through hole has a pit; Manufacturing materials can be Pyrex glass or fused silica material;
Flexible sheet: be used for experiencing the variation of pressure, be positioned in the pit of sensor body and fixing; The material of diaphragm can be a monocrystalline silicon piece, quartzy thin slice, polymer flake or metallic membrane.
Sensor fibre: an end of sensor fibre is the required reflecting surface of Fabry-Perot-type cavity, and the other end is spherical, and this sensor fibre is positioned in the middle through hole of sensor body, and a spherical end closely contacts with flexible sheet;
Transmission Fibers: this optical fiber is positioned over the other end in the sensor body intermediate throughholes, is used to provide another required reflecting surface of Fabry-Perot-type cavity, does not contact with the mechanics Fabry-Perot-type cavity with the fiber end face of sensor fibre;
Sensor fibre and Transmission Fibers can be single-mode fibers, also can be multimode optical fibers.Fiber end face can be that directly use the cutting back, also can plate reflectance coating.
Microsprings: be positioned between sensor fibre and the Transmission Fibers, be used to provide elastic-restoring force and make sensor fibre and flexible sheet remain tight the contact, material can be polymkeric substance or metal, and shape can be spirality or tubulose.
For the microsprings of size big slightly (the coil spring external diameter is greater than through hole), sensor body of the present invention can be made of two parts fixed with each other, is used to place microsprings in the hole of two parts joining place, and the aperture at this place is greater than the aperture of through hole.
The method for making of optical fibre Fabry-perot pressure transducer provided by the invention, method comprises:
1st, flexible sheet is made: utilize cut to go out the silicon diaphragm of required size, and make small striped with laser on the silicon diaphragm two sides, to destroy the reflection of this face, diaphragm thickness is 10 μ m～300 μ m;
2nd, the making of sensor fibre: the fiber end face that utilizes fiber cut cutter cutting optical fibre to obtain, then with the pen type cutter microscopically cut optical fiber to Len req (about 1～3mm), to the non-reflection end heat fused of sensor fibre and utilize surface tension to form sphere;
3rd, the making of microsprings:
1) making of tubulose microsprings: a droplet polymkeric substance is injected in the interior glass tube through being 126 μ m, by the high speed centrifugation spinning solution, forming thickness in glass tube is the homogeneous film of 5～10 μ m, solidify the back and take off in the glass tube and promptly be made into elastic hose, its length is 20～400 μ m;
2) making of spirality microsprings: with diameter is the metal spring silk of 25～35 μ m, makes the about 126 μ m of spring external diameter, and length is the spirality metal microsprings of 400 μ m;
4th, the making of sensor body: utilize Pyrex glass or fused silica material to make sensor body, at first sensor body being made external diameter is 1mm～5mm, length is the cylinder bodily form or the cuboid of 5～15mm, get out the through hole that diameter is 127 μ m at the sensor body middle part, further end face is processed smooth subsequently, process the degree of depth one of sensor body and be about 500 μ m, diameter is the pit of 0.6～4.5mm, as the stressed support of pressure-sensitive diaphragm;
5th, the sensor fibre that will have a spherical tail end inserts the through hole from of the sensor body that has pit, spherical tail end outwardly, the flexible sheet that the 1st step was made adopts the mode of anode linkage to be fixed on the pit of sensor body afterwards; Put into microsprings in the other end of sensor body then, insert another root Transmission Fibers again, the fiber end face of two sections optical fiber does not contact with the mechanics Fabry-Perot-type cavity, utilize spectrometer or low coherence interferometer to control the insertion depth of this Transmission Fibers in real time, when arriving design attitude, promptly this Transmission Fibers compresses microsprings, microsprings all can make the spherical tail end of sensor fibre closely contact with flexible sheet in the scope of flexible sheet distortion, utilize epoxide-resin glue that Transmission Fibers is fixed, in electrocaloric effect, solidified one hour under 60 ℃ the temperature, or solidified 24 hours under the normal temperature, sensor promptly completes.
The present invention provides a kind of size method for making of the optical fibre Fabry-perot pressure transducer of the microsprings of big (the coil spring external diameter is greater than through hole) slightly that is applicable to simultaneously, specifically comprises:
1st, flexible sheet is made: utilize cut to go out the silicon diaphragm of required size, and make small striped with laser on the silicon diaphragm two sides, to destroy the reflection of this face, diaphragm thickness is 10 μ m～300 μ m;
2nd, the making of sensor fibre: the fiber end face that utilizes fiber cut cutter cutting optical fibre to obtain cuts optical fiber to Len req with the pen type cutter at microscopically, then to the non-reflection end heat fused of sensor fibre and utilize surface tension to form sphere;
3rd, the making of large scale spirality microsprings: with diameter is the metal spring silk of 35～40 μ m, makes the about 150 μ m of spring external diameter, and length is the large scale spirality metal microsprings of 500 μ m;
4th, the making of sensor body: utilize Pyrex glass or fused silica material to make sensor body, this moment, the sensor body separated into two parts was made, length 3～the 9mm of first, earlier get out the through hole that diameter is 127 μ m at the sensor body middle part, and end face is processed smooth, processing the degree of depth one of sensor body is 500 μ m, diameter is the pit of 0.6～4.5mm, as the stressed support of flexible sheet, it is 480 μ m that the other end processes the degree of depth, and diameter is the counterbore of 155 μ m; Second portion length 2～6mm also gets out the through hole that diameter is 127 μ m at the sensor body middle part;
5th, the assembling of sensor: it is that of sensor body of the pit of 0.6～4.5mm inserts the through hole of sensor body that the sensor fibre that will have a spherical tail end has diameter from sensor body first, spherical tail end outwardly, afterwards flexible sheet is adopted the mode of anode linkage to be fixed on the pit of sensor body, the microsprings that the 3rd step was made is inserted in the counterbore of other end again, and first and the second portion sensor body that installs is welded together; Then another root Transmission Fibers is inserted in the through hole of sensor body second portion, the fiber end face of two sections optical fiber does not contact with the mechanics Fabry-Perot-type cavity, when arriving design attitude is that Transmission Fibers is when closely contacting with microsprings, utilize epoxide-resin glue that Transmission Fibers is fixed, in electrocaloric effect, solidified one hour under 60 ℃ the temperature, or solidified 24 hours under the normal temperature, sensor promptly completes.
The course of work of optical fibre Fabry-perot pressure transducer is as follows:
When pressure is done the time spent, flexible sheet (as silicon chip) deforms, and flexible sheet will drive top sensor fibre thereon and slide in the sensor body through hole, thereby has changed the distance with fixing Transmission Fibers end face, and promptly the chamber of Fabry-Perot-type cavity is long.Behind the access band light source,, can extract the long variation in chamber, thereby obtain pressure information by to by the spectral scan of optical fibre Fabry-perot pressure transducer or the extraction of low coherence interference striped.
Advantage of the present invention and good effect:
1. the optical fibre Fabry-perot sensor that proposes allows flexible sheet to have bigger distortion and does not influence the performance of Fabry-Perot-type cavity.For traditional Fabry-Perot-type cavity, the pressure of experiencing when flexible sheet changes inhomogeneous or distortion greatly the time, and the distortion of diaphragm will destroy the planar process Fabry-Perot-type cavity, thereby influences sensing accuracy.Flexible sheet does not play the reflecting surface effect among the present invention, reflecting surface is provided by the short section of optical fiber that is connected together mutually with it, therefore in whole diaphragm elastic deformation process, two reflectings surface in optical fibre Fabry-perot chamber remain parallel, have reduced greatly because the measuring error that the Fabry-Perot-type cavity performance descends and causes.
2. flexible sheet and segment optical fiber adopt the some contact mode of plane-sphere, make to guarantee still when diaphragm deformation is irregular that diaphragm and segment optical fiber closely contact and optical fiber smoothly moves, cause the danger of both adhesions place fractures when having avoided that also segment optical fiber is pasted on diaphragm because of diaphragm deformation is irregular.
3. structure of the present invention is small and exquisite flexibly, sensor outer dia size can be as small as 1mm, and since two reflectings surface in optical fibre Fabry-perot chamber remain parallel, under the situation of not plating reflectance coating, the Fabry-Perot-type cavity that allows also is 550 μ m, and this just makes that sensor production is easy.
[description of drawings]:
Fig. 1 is first kind of optical fibre Fabry-perot pressure transducer synoptic diagram among the present invention;
Fig. 2 is second kind of optical fibre Fabry-perot pressure transducer synoptic diagram among the present invention;
Fig. 3 is the another kind of implementation method synoptic diagram of second kind of optical fibre Fabry-perot pressure transducer among the present invention;
Fig. 4 is the spectrum demodulating system signal of optical fibre Fabry-perot pressure transducer;
Fig. 5 is the sensor reflection spectrogram that obtains.
[embodiment]:
The embodiment of 1: the first kind of optical fibre Fabry-perot pressure transducer of embodiment
As shown in Figure 1, this optical fibre Fabry-perot pressure transducer is by flexible sheet 1, sensor body 6, and the sensor fibre 2 of magnetic tape trailer end 10, Transmission Fibers 7 and tubulose microsprings (elastic hose) 4 are formed.Flexible sheet 1 adopts monocrystalline silicon piece to be formed by Laser Processing, and sensor fibre 2 adopts the single-mode fiber cutting to form, and tail end 11 is spherical.Sensor body 6 adopts the Pyrex glass processings, get out through hole 8 thereon after, sensor body 6 left sides process pit 9 in the drawings, as the support of flexible sheet 1.The sensor fibre 2 that will have spherical tail end 10 inserts from through hole 8, and the mode with flexible sheet 1 usefulness anode linkage is fixed on the sensor body 6 then.Elastic hose 4 is inserted by the through hole 8 of sensor body 6, inserts Transmission Fibers 7 afterwards again and utilizes epoxide-resin glue to fix behind design attitude, the end face 3 of sensor fibre 2 and the end face 5 mechanics Fabry-Perot-type cavities of Transmission Fibers 7.Transmission Fibers 7 is used for the input and output of flashlight.When pressure effect flexible sheet 1, flexible sheet 1 deforms, drive has the sensor fibre 2 of tail end 10 to slide in the through hole 8 of sensor body 6, thus the distance between the end face 5 of the end face 3 of change sensor fibre 2 and Transmission Fibers 7, and promptly the Fabry-Perot-type cavity chamber is long.Thereby pressure information is converted into chamber long pass sense information.
In the optical fibre Fabry-perot pressure transducer of the present invention
1. flexible sheet also can adopt quartzy thin slice, polymer flake, or metallic membrane;
2. sensor body also can adopt fused silica material;
3. optical fiber also can adopt standard multimode fiber, or other large core fiber.
The embodiment of 2: the second kinds of optical fibre Fabry-perot pressure transducers of embodiment
As shown in Figure 2, sensor is by flexible sheet 1, sensor body 6, and the sensor fibre 2 of magnetic tape trailer end 10, Transmission Fibers 7 and microsprings 11 are formed.Flexible sheet 1 adopts monocrystalline silicon piece to be formed by Laser Processing, and sensor fibre 2 adopts the single-mode fiber cutting to form, and tail end 10 is spherical.Sensor body 6 adopts the Pyrex glass processings, get out through hole 8 thereon after, sensor body 6 left sides process pit 9 in the drawings, as the support of flexible sheet 1.Sensor fibre 2 is inserted in the through hole 8 by the left side of sensor body 6, and the mode with flexible sheet 1 usefulness anode linkage is fixed on the sensor body 6 then.Put into micro metal spring 11 from sensor through hole 8 other ends, put into Transmission Fibers 7 again, the end face 3 of sensor fibre 2 and the end face 5 mechanics Fabry-Perot-type cavities of Transmission Fibers 7, Transmission Fibers 7 is used for the input and output of flashlight.When pressure effect flexible sheet 1, flexible sheet 1 deforms, and drive sensor fibre 2 and in the through hole 8 of sensor body 6, slide, thus the distance between the end face 5 of the end face 3 of change sensor fibre 2 and Transmission Fibers 7, promptly the Fabry-Perot-type cavity chamber is long.Thereby pressure information is converted into chamber long pass sense information.
In the optical fibre Fabry-perot pressure transducer of the present invention
1. flexible sheet also can adopt quartzy thin slice, polymer flake, or metallic membrane;
2. sensor body also can adopt fused silica material;
3. optical fiber also can adopt standard multimode fiber, or other large core fiber;
4. microsprings also can adopt polymeric material.
Embodiment 3: at the alternate embodiments of a kind of optical fibre Fabry-perot pressure transducer of example 2
As shown in Figure 3, sensor is by flexible sheet 1, sensor body first 18, and sensor body second portion 12, the sensor fibre 2 of magnetic tape trailer end 10, Transmission Fibers 7 and microsprings 15 are formed.Flexible sheet 1 adopts monocrystalline silicon piece to be formed by Laser Processing, and sensor fibre 2 adopts the single-mode fiber cutting to form, and tail end 10 is spherical.Sensor body first 18 and second portion 12 adopt the Pyrex glass processing, get out through hole 17 at glass column first 18 middle parts, one processes pit 9, stressed support as pressure-sensitive diaphragm, the other end processes counterbore 16, get out through hole 13 at sensor body second portion 12 glass columns middle part, during the assembling sensor, the sensor fibre 2 that will have spherical tail end 10 inserts from through hole 17, spherical tail end 10 outwardly, adopt the mode of anode linkage to be fixed on the pit 10 of first 18 flexible sheet 1 afterwards, again the metal microsprings of selecting for use 15 is inserted in the counterbore 16,14 places are welded together on the plane with the first 18 that installs and second portion 12 then, form the complete sensors body.Put into Transmission Fibers 7 from through hole 13, the end face 3 of sensor fibre 2 and the end face 5 mechanics Fabry-Perot-type cavities of Transmission Fibers 7, Transmission Fibers 7 is used for the input and output of flashlight.When pressure effect flexible sheet 1, flexible sheet 1 deforms, drive sensor fibre 2 and in the through hole 17 of sensor body first 18, slide, thus the distance between the end face 5 of the end face 3 of change sensor fibre 2 and Transmission Fibers 7, and promptly the Fabry-Perot-type cavity chamber is long.Thereby pressure information is converted into chamber long pass sense information.
In the optical fibre Fabry-perot pressure transducer of the present invention
1. flexible sheet also can adopt quartzy thin slice, polymer flake, or metallic membrane;
2. sensor body also can adopt fused silica material;
3. optical fiber also can adopt standard multimode fiber, or other large core fiber;
4. microsprings also can adopt polymeric material.
Embodiment 4: the cavity length demodulating of optical fibre Fabry-perot pressure transducer
The sensor-based system of optical fibre Fabry-perot pressure transducer as shown in Figure 4, the light that cavity length demodulating wideband light source 19 sends enters sensor 21 by circulator 22, through after the Fabry-Perot-type cavity of sensor, enters spectrometer 20 through circulator 22 again.Obtain the spectrum that sensor returns by spectrometer scanning,, can obtain the chamber long letter breath of optical fibre Fabry-perot pressure transducer, and then can be converted into pressure information by asking for the peak of spectrum.Fig. 5 is that adopting thick is the spectrum that the optical fibre Fabry-perot pressure transducer of 30 μ m silicon diaphragms and single-mode fiber measures through spectrometer.
Claims (7)
1. optical fibre Fabry-perot pressure transducer is characterized in that this sensor comprises:
Sensor body: the optical fibre Fabry-perot pressure sensor body is the supporting construction of sensor and the optical fiber guide structure when sliding, and it is shaped as cylindrical or cuboid, and the centre of sensor body has a through hole, and an end of through hole has a pit;
Flexible sheet: be used for experiencing the variation of pressure, be positioned in the pit of sensor body and fixing;
Sensor fibre: an end of sensor fibre is the required reflecting surface of Fabry-Perot-type cavity, and the other end is spherical, and this sensor fibre is positioned in the middle through hole of sensor body, and a spherical end closely contacts with flexible sheet;
Transmission Fibers: this optical fiber is positioned over the other end in the sensor body intermediate throughholes, is used to provide another required reflecting surface of Fabry-Perot-type cavity, does not contact with the mechanics Fabry-Perot-type cavity with the fiber end face of sensor fibre;
Microsprings: be positioned between sensor fibre and the Transmission Fibers, be used to provide elastic-restoring force and make sensor fibre and flexible sheet remain tight the contact.
2. optical fibre Fabry-perot pressure transducer according to claim 1 is characterized in that sensor body is one whole or be made of two parts fixed with each other; Be used to place the microsprings of diameter less than through hole in the all-in-one-piece sensor body, the aperture of two parts joining place of bipartite sensor body is applicable to and places the microsprings of diameter greater than through hole greater than the aperture of through hole.
3. optical fibre Fabry-perot pressure transducer according to claim 1 and 2, the manufacturing materials that it is characterized in that sensor body is Pyrex glass or fused silica material; The material of flexible sheet is monocrystalline silicon piece, quartzy thin slice, polymer flake or metallic membrane.
4. optical fibre Fabry-perot pressure transducer according to claim 1 and 2 is characterized in that described sensor fibre and Transmission Fibers are single-mode fiber or multimode optical fiber; Fiber end face as reflecting surface can be that directly use the cutting back, also can plate reflectance coating.
5. optical fibre Fabry-perot pressure transducer according to claim 1 and 2 is characterized in that the material of described microsprings is polymkeric substance or metal, is shaped as spirality or tubulose.
6. the method for making of the described optical fibre Fabry-perot pressure transducer of claim 1 is characterized in that this method comprises:
1st, flexible sheet is made: utilize cut to go out the silicon diaphragm of required size, and make small striped with laser on the silicon diaphragm two sides, to destroy the reflection of this face, diaphragm thickness is 10 μ m～300 μ m;
2nd, the making of sensor fibre: the fiber end face that utilizes fiber cut cutter cutting optical fibre to obtain cuts optical fiber to Len req with the pen type cutter at microscopically, then to the non-reflection end heat fused of sensor fibre and utilize surface tension to form sphere;
3rd, the making of Transmission Fibers: behind the optical fiber of intercepting 1m～1.5m length, utilize fiber end face that fiber cut cutter cutting optical fibre one end obtains reflecting surface as Transmission Fibers;
4th, the making of microsprings:
1) making of tubulose microsprings: a droplet polymkeric substance is injected in the interior glass tube through being 126 μ m, by the high speed centrifugation spinning solution, forming thickness in glass tube is the homogeneous film of 5～10 μ m, solidify the back and take off in the glass tube and promptly be made into elastic hose, its length is 20～400 μ m;
2) making of spirality microsprings: with diameter is the metal spring silk of 25～35 μ m, and making the spring external diameter is 126 μ m, and length is the spirality metal microsprings of 400 μ m;
5th, the making of sensor body: utilize Pyrex glass or fused silica material to make sensor body, at first sensor body being made external diameter is 1mm～5mm, length is the cylinder bodily form or the cuboid of 5～15mm, get out the through hole that diameter is 127 μ m at the sensor body middle part, further end face is processed smooth subsequently, process the degree of depth one of sensor body and be about 500 μ m, diameter is the pit of 0.6～4.5mm, as the stressed support of pressure-sensitive diaphragm;
6th, the sensor fibre that will have a spherical tail end inserts the through hole from of the sensor body that has pit, spherical tail end outwardly, the flexible sheet that the 1st step was made adopts the mode of anode linkage to be fixed on the pit of sensor body afterwards; Put into microsprings in the other end of sensor body then, insert Transmission Fibers again, the fiber end face of two sections optical fiber does not contact with the mechanics Fabry-Perot-type cavity, utilize the insertion depth of the real-time control transmission optical fiber of spectrometer or low coherence interferometer, when arriving design attitude, promptly this Transmission Fibers compresses microsprings, microsprings all can make the spherical tail end of sensor fibre closely contact with flexible sheet in the scope of flexible sheet distortion, utilize epoxide-resin glue that Transmission Fibers is fixed, in electrocaloric effect, solidified one hour under 60 ℃ the temperature, or solidified 24 hours under the normal temperature, sensor promptly completes.
7. the method for making of the optical fibre Fabry-perot pressure transducer of the described bipartite sensor body of claim 2 is characterized in that this method comprises:
1st, flexible sheet is made: utilize cut to go out the silicon diaphragm of required size, and make small striped with laser on the silicon diaphragm two sides, to destroy the reflection of this face, diaphragm thickness is 10 μ m～300 μ m;
2nd, the making of sensor fibre: the fiber end face that utilizes fiber cut cutter cutting optical fibre to obtain cuts optical fiber to Len req with the pen type cutter at microscopically, then to the non-reflection end heat fused of sensor fibre and utilize surface tension to form sphere;
3rd, the making of Transmission Fibers: after intercepted length is the optical fiber of 1m～1.5m, utilize fiber end face that fiber cut cutter cutting optical fibre one end obtains reflecting surface as Transmission Fibers;
4th, the making of large scale spirality microsprings: with diameter is the metal spring silk of 35～40 μ m, makes the about 150 μ m of spring external diameter, and length is the large scale spirality metal microsprings of 500 μ m;
5th, the making of sensor body: utilize Pyrex glass or fused silica material to make sensor body, this moment, the sensor body separated into two parts was made, length 3～the 9mm of first, earlier get out the through hole that diameter is 127 μ m at the sensor body middle part, and end face is processed smooth, processing the degree of depth one of sensor body is 500 μ m, diameter is the pit of 0.6～4.5mm, as the stressed support of flexible sheet, it is 480 μ m that the other end processes the degree of depth, and diameter is the counterbore of 155 μ m; Second portion length 2～6mm also gets out the through hole that diameter is 127 μ m at the sensor body middle part;
6th, the assembling of sensor: it is that of sensor body of the pit of 0.6～4.5mm inserts the through hole of sensor body that the sensor fibre that will have a spherical tail end has diameter from sensor body first, spherical tail end outwardly, afterwards flexible sheet is adopted the mode of anode linkage to be fixed on the pit of sensor body, the microsprings that the 3rd step was made is inserted in the counterbore of other end again, and first and the second portion sensor body that installs is welded together; Then Transmission Fibers is inserted in the through hole of sensor body second portion, the fiber end face of two sections optical fiber does not contact with the mechanics Fabry-Perot-type cavity, when arriving design attitude is that Transmission Fibers is when closely contacting with microsprings, utilize epoxide-resin glue that Transmission Fibers is fixed, in electrocaloric effect, solidified one hour under 60 ℃ the temperature, or solidified 24 hours under the normal temperature, sensor promptly completes.
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