CN106017756A - Submicron ultra-smooth metal film based highly sensitive FP pressure sensor - Google Patents
Submicron ultra-smooth metal film based highly sensitive FP pressure sensor Download PDFInfo
- Publication number
- CN106017756A CN106017756A CN201610538661.9A CN201610538661A CN106017756A CN 106017756 A CN106017756 A CN 106017756A CN 201610538661 A CN201610538661 A CN 201610538661A CN 106017756 A CN106017756 A CN 106017756A
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- Prior art keywords
- metallic film
- submicron
- film
- ultra
- mode fiber
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 25
- 239000002184 metal Substances 0.000 title claims abstract description 25
- 239000010408 film Substances 0.000 claims abstract description 41
- 239000000835 fiber Substances 0.000 claims abstract description 29
- 239000011521 glass Substances 0.000 claims abstract description 24
- 239000010409 thin film Substances 0.000 claims abstract description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 5
- 229910052709 silver Inorganic materials 0.000 claims abstract description 5
- 239000004332 silver Substances 0.000 claims abstract description 5
- 238000005516 engineering process Methods 0.000 claims description 6
- 238000004026 adhesive bonding Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 4
- 238000007711 solidification Methods 0.000 claims description 4
- 230000008023 solidification Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- -1 after solidification Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920005597 polymer membrane Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 206010061592 cardiac fibrillation Diseases 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000002600 fibrillogenic effect Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
Abstract
The invention provides a submicron ultra-smooth metal film based highly sensitive FP pressure sensor. As a capillary glass tube for an FP cavity, one annular end face of the pressure sensor is welded and connected to the cross section of a single-mode fiber; the outer diameter of the annular end face is equal to that of the single-mode optical fiber; the other annular end face of the capillary glass tube is fixedly connected with a circular metal thin film which covers the capillary glass tube; the metal thin film is a metal thin film with high surface flatness and submicron thickness; and the center of the cross-section of the single-mode fiber and the center of the metal thin film are on the axis of the capillary glass tube; the metal thin film is made of silver, aluminum or nickel. With an optical fiber structure, the sensor of the invention is simple in structure, small in size and high in reliability. With it, it is possible to realize high-precision measurement of pressure and to network on large scale conveniently.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, particularly to extrinsic diaphragm type Fabry-Perot
(Fabry-Perot, FP) pressure transducer.
Background technology
Fibre Optical Sensor can be used for numerous things such as pressure, strain, displacement, temperature, humidity, electric current, magnetic field
The measurement of reason amount, fibre optic compression sensor based on FP chamber has high reliability, high sensitivity, resistance to severe ring
The feature such as border, electromagnetism interference, at Aero-Space, bridge construction, high-temperature oil well, sonar contact and biology
The fields such as medical treatment are widely applied.Extrinsic diaphragm type FP fibre optic compression sensor is compared to traditional F P
Fibre optic compression sensor has higher sensitivity, higher capacity of resisting disturbance, component health monitoring, doctor
Learning ultrasound examination, biological internal detection etc. needs the aspect of high-acruracy survey to have great application potential.
Extrinsic diaphragm type FP Fibre Optical Sensor is the fiber end face obtained by cutting mostly and sensitive diaphragm is constituted
Two reflecting mirrors in FP chamber, thin film vibrates under external force, thus causes the interference situation in FP chamber
Change, interfere change can obtain the change of ambient pressure by detection.Therefore, the setting of sensitive diaphragm
Meter and processing, the particularly thickness of diaphragm, flatness, reflectance have weight to the overall performance index of sensor
Affect.
At present, quartz diaphragm, silicon diaphragm, polymer membrane are all used for extrinsic diaphragm type FP optical fiber pressure
The sensitive membrane of sensor.Quartz diaphragm, silicon diaphragm have and optical fiber, thermal expansion system that glass capillary is the same
Number, good temp characteristic, but present stage technology hardly results in the thin film of submicron thickness；Polymer membrane is usual
Thickness also in a few micrometers.The sensitivity of sensor is proportional to r4/h3, r is the radius of sensitive membrane, and h is sensitive
The thickness of film, as the microsensor of light fibrillation, the impact of thickness is the most crucial.In addition these materials are also
There is the feature that reflectance is relatively low, often need to prepare thereon metal level for strengthening reflection, to ensure FP chamber
Interference effect.
Summary of the invention
It is an object of the invention to provide prepared by a kind of submicron thickness sensitive diaphragm high by reflectance based on
The highly sensitive FP pressure transducer of the ultra-smooth metallic film of submicron.The present invention mainly uses submicron super flat
Sliding metallic film is as a chamber mirror of FP.
One, the present invention is made up of glass capillary, single-mode fiber and metallic film.Wherein, as FP
The cross section welding of the glass capillary of cavity, one annular end face and single-mode fiber, outside annular end face
Footpath and the equal diameters of single-mode fiber.Another annular end face of this glass capillary and the circle covered
Metallic film is connected.This metallic film be the high and thick degree of surface smoothness be the metallic film of submicron order.And
And the center of the cross-section center of single-mode fiber, metallic film is all on the axis of glass capillary.Then single
The fiber core cross section of mode fiber and metallic film are as two chamber mirrors in FP chamber, with axially becoming of glass capillary
90 °, form FP chamber interference structure.Described metallic film use mechanical performance and pliability good and possess high instead
The metal material that rate of penetrating is high, as prepared by silver, aluminum or nickel.
Two, the preparation method of described metallic film is as follows:
1, use the semiconductor technology such as magnetron sputtering or heat deposition that silver, aluminum or nickel are deposited on roughness extremely low
Flat board on, thickness is 100 to hundreds of nanometer.Formation is controlled straight with glass capillary preferably by mask plate
The circular metal film that footpath matches.
2, at metal film surfaces spin coating optic-solidified adhesive, after solidification, metal is more than with optic-solidified adhesive bonding force
Metal and gluing flats power, isolated is based on the ultra-smooth metal film of inorganic flat flatness.
The work process of the present invention approximately as: after when detection, light enters into FP chamber by single-mode fiber, due to
Single-mode fiber cross section and the metallic film multiple reflections to incident illumination, formed and interfere.When metallic film is forced to
During vibration, to interfering light to form tuning, the interference after tuning is optically coupled into single-mode fiber.To single-mode fiber
Interior light is demodulated, and can realize the detection to pressure.
The present invention compared with prior art has the advantage that
1, the ultra-smooth metal film of submicron order prepared by semiconductor technology is as reflectance coating, the thickness of submicron
Metal film can be made to have good pliability, it is achieved the sensitive measurement to pressure；
2, the mirror effect (high reflectance) that ultra-smooth metal film is intrinsic makes FP chamber have fabulous interference effect,
And then reduce the difficulty demodulated, facilitate the inspection of small-signal；
3, metallic film radius reduce the natural frequency beneficially improving sensor so that it is there is bigger frequency
Rate response range；
4, the structured optical fiber of the present invention, simple in construction, volume are fine, and reliability is high, it is possible to realize pressure
High-acruracy survey, simultaneously facilitate large-scale network-estabilishing.
Accompanying drawing explanation
Fig. 1 is perspective cross section simplified schematic diagram of the present invention.
Fig. 2 is the mask plate schematic top plan view that the present invention prepares metallic film.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in more detail.
Cut open in based on the ultra-smooth metallic film of submicron the highly sensitive FP pressure transducer solid shown in Fig. 1
In the simplified schematic diagram of face, it is made up of glass capillary 2, single-mode fiber 1 and aluminum thin film 3.Wherein, as
The glass capillary of FP cavity, external diameter 125 μm, internal diameter 75 μm, length 100 μm, one annular end
Face and the cross section welding of single-mode fiber, a diameter of 125 μm (removing coat) of single-mode fiber.Single-mode fiber
End face is by cutting smooth process, and reflectance is about 4%.Another annular end face of this glass capillary and general
Its circular aluminum thin film covered is connected, and uses the methods such as epoxy resin bonding or laser hot melt by itself and capillary glass
The annular end face of glass pipe combines, and solidifies 30 minutes in 60 DEG C, the most again with acetone organic solvent by after solidification
Organic select coating removal so that the cross-section center of single-mode fiber, metallic film center all at capillary glass
On the axis of pipe.Then the fiber core cross section of single-mode fiber and metallic film are as two chamber mirrors in FP chamber, with
Glass capillary the most in 90 °, forms FP chamber interference structure.
The preparation method of described metallic film is as follows: use vacuum heat deposition technology to be deposited with by mask plate by aluminum
On the silicon flat board that surface smoothness is below 0.4nm, controlled the thickness of film forming, deposition speed by crystal oscillator
Degree isPreparing thickness is 200nm.The figure of mask plate 4 is the array of circular hole, as in figure 2 it is shown,
Wherein the diameter of circular hole is identical with the external diameter of glass capillary 2, is 125 μm.After aluminum film preparation completes,
Spin coating optic-solidified adhesive thereon, the thickness of optic-solidified adhesive is about 300 μm.Solidification in 10 minutes is carried out under uviol lamp,
After overcuring, metal and optic-solidified adhesive bonding force are more than metal and inorganic flat bonding force, and manual separation obtains
To based on the ultra-smooth metal film of inorganic flat flatness, through the rough surface of atomic force microscope observation aluminum thin film
Degree is less than 0.3nm.
The sensitivity of sensitive thin film is proportional to r4/h3, wherein r is the radius of sensitive membrane, and h is the thickness of sensitive membrane
Degree.Through test, the deformation of this diaphragm has good linear response, linear sensor degree of association to pressure
It is 0.999；Sound pressure sensitivity is about 5.2nm/KPa, it is achieved that the highly sensitive detection to pressure.
Above-described instantiation, has carried out entering one to the purpose of the present invention, technical scheme and beneficial effect
The detailed description of step, be it should be understood that the specific embodiment that the foregoing is only the present invention, not
For limiting the present invention, all within the spirit and principles in the present invention, any amendment of being made, equivalent,
Improve, should be included within the scope of the present invention.
Claims (3)
1. a highly sensitive FP pressure transducer based on the ultra-smooth metallic film of submicron, its
It is made up of glass capillary, single-mode fiber and metallic film, it is characterised in that: as FP
The cross section welding of the glass capillary of cavity, one annular end face and single-mode fiber, annular
The external diameter of end face and the equal diameters of single-mode fiber, another annular end face of this glass capillary
Being connected with the circular metal thin film covered, this metallic film is the high and thick degree of surface smoothness
For in the metallic film of submicron order, and the cross-section center of single-mode fiber, metallic film
The heart is all on the axis of glass capillary, and described metallic film uses silver, aluminum or nickel to prepare.
2. based on the ultra-smooth metallic film of submicron the highly sensitive FP pressure of claim 1
Sensor, it is characterised in that: the preparation method of metallic film is as follows:
1) semiconductor technology such as magnetron sputtering or heat deposition is used silver, aluminum or nickel to be deposited on slightly
On the flat board that rugosity is extremely low, thickness is 100 to hundreds of nanometer；
2) at metal film surfaces spin coating optic-solidified adhesive, after solidification, metal and optic-solidified adhesive
Bonding force is more than metal and gluing flats power, and isolated is ultra-smooth based on inorganic flat flatness
Metal film.
The most according to claim 2 based on the ultra-smooth metallic film of submicron highly sensitive
FP pressure transducer, it is characterised in that: control formation by mask plate straight with glass capillary
The circular metal film that footpath matches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610538661.9A CN106017756A (en) | 2016-07-08 | 2016-07-08 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610538661.9A CN106017756A (en) | 2016-07-08 | 2016-07-08 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
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| CN106017756A true CN106017756A (en) | 2016-10-12 |
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| CN201610538661.9A Pending CN106017756A (en) | 2016-07-08 | 2016-07-08 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489597A (en) * | 2018-04-08 | 2018-09-04 | 盐城工学院 | A kind of acoustic detector and method based on hollow-core photonic crystal fiber |
| CN110057479A (en) * | 2019-04-17 | 2019-07-26 | 中国地质大学（武汉） | Plating laminar double-layer sensitive film and preparation method for FP chamber fibre optic compression sensor |
| CN110057438A (en) * | 2019-04-16 | 2019-07-26 | 中国地质大学（武汉） | Embedded double-layer sensitive film and preparation method for FP chamber optical fiber acoustic sensor |
| CN112254847A (en) * | 2020-10-12 | 2021-01-22 | 山东大学 | Optical fiber FP pressure sensor based on hydraulic principle |
| WO2021052123A1 (en) * | 2019-09-18 | 2021-03-25 | 大连理工大学 | Miniature diaphragm-type optical fiber end fp pressure sensor, manufacturing method therefor and application thereof |
| CN114495393A (en) * | 2022-02-28 | 2022-05-13 | 中国人民公安大学 | Underground abnormal vibration safety monitoring system based on Internet of things |
| CN114705229A (en) * | 2022-03-29 | 2022-07-05 | 深圳市联创杰科技有限公司 | Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material |
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| US20080159687A1 (en) * | 2005-03-02 | 2008-07-03 | Denis Donlagic | Fabry-Perot Optical Sensor and Method of Manufacturing the Same |
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| CN104614104A (en) * | 2015-01-19 | 2015-05-13 | 中北大学 | Optical fiber fabry-perot pressure sensor and manufacturing method thereof |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489597A (en) * | 2018-04-08 | 2018-09-04 | 盐城工学院 | A kind of acoustic detector and method based on hollow-core photonic crystal fiber |
| CN110057438A (en) * | 2019-04-16 | 2019-07-26 | 中国地质大学（武汉） | Embedded double-layer sensitive film and preparation method for FP chamber optical fiber acoustic sensor |
| CN110057438B (en) * | 2019-04-16 | 2023-08-29 | 中国地质大学（武汉） | Embedded double-layer sensitive film for FP cavity optical fiber acoustic sensor and preparation method |
| CN110057479A (en) * | 2019-04-17 | 2019-07-26 | 中国地质大学（武汉） | Plating laminar double-layer sensitive film and preparation method for FP chamber fibre optic compression sensor |
| CN110057479B (en) * | 2019-04-17 | 2023-09-22 | 中国地质大学（武汉） | Coating type double-layer sensitive film for FP cavity optical fiber pressure sensor and preparation method |
| WO2021052123A1 (en) * | 2019-09-18 | 2021-03-25 | 大连理工大学 | Miniature diaphragm-type optical fiber end fp pressure sensor, manufacturing method therefor and application thereof |
| CN112254847A (en) * | 2020-10-12 | 2021-01-22 | 山东大学 | Optical fiber FP pressure sensor based on hydraulic principle |
| CN114495393A (en) * | 2022-02-28 | 2022-05-13 | 中国人民公安大学 | Underground abnormal vibration safety monitoring system based on Internet of things |
| CN114705229A (en) * | 2022-03-29 | 2022-07-05 | 深圳市联创杰科技有限公司 | Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material |
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Application publication date: 20161012 |
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