CN109782022B - Graphene resonant optical fiber accelerometer based on pressure sensitivity - Google Patents
Graphene resonant optical fiber accelerometer based on pressure sensitivity Download PDFInfo
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Abstract
The invention discloses a pressure-sensitive-based graphene resonant fiber accelerometer which comprises an optical fiber (1), an insertion core (2), an elastic sheet (3), a sealing plug (4), a gas sealing cavity (5) and a graphene membrane (6). The invention adopts a mode that the graphene film directly senses the pressure in the cavity to realize acceleration measurement: the insert core arranged on the elastic sheet is used as a main additional mass to directly sense the acceleration to be measured, the elastic sheet is driven to generate longitudinal displacement, the gas pressure in the sealing cavity is caused to change, the pressure acts on the graphene film to change the stress in the graphene film, the resonant frequency of the graphene film is caused to change, and the acceleration can be measured by detecting and demodulating the resonant frequency through interference light. The invention fully utilizes the mechanical, optical and resonance characteristics of the graphene, so that the accelerometer has the outstanding characteristics of high sensitivity, large measurement range, strong anti-interference capability and easiness in manufacturing and mounting.
Description
Technical Field
The invention relates to the technical field of photoelectric detection and micro/nano electromechanical systems, in particular to a graphene resonant fiber accelerometer based on pressure sensitivity.
Background
The resonant sensor is realized by the inherent resonance characteristic of a resonant element along with the change rule of the measured signal, is output as a periodic signal, and can be converted into a digital signal which is easy to be received by a microprocessor only by a simple digital circuit; meanwhile, the repeatability, the resolution, the stability and the like of the resonance sensitive unit are very good, so that the resonance type measurement principle is widely applied to the field of inertia measurement. The resonance type micro mechanical accelerometer (MEMS) is based on a traditional acceleration measurement mechanism, and the acceleration is converted into inertia force through the sensitive mass, so that the resonance characteristic of the resonance sensitive element is changed, and the measured acceleration is reversely calculated. Compared with the traditional accelerometer, the accelerometer has the characteristics of small volume, light weight, low cost and low energy consumption. At present, quartz or monocrystalline silicon is mainly used as a resonance sensitive element of a resonance type micromechanical accelerometer, and the resonance type micromechanical accelerometer is widely applied to aspects of aerospace, automotive electronics, weaponry, geodetic gravity measurement, earth resource exploration, industrial detection and the like. However, they still have the disadvantages of large volume, low sensitivity, low resonant frequency, narrow acceleration measurement range, and the like, so that it is very urgent to adopt a novel material with smaller size and better performance as a sensitive element of the resonant micro-mechanical accelerometer to improve the performance of the accelerometer.
Graphene is a two-dimensional material with a single layer theoretical thickness of only 0.335nm, and is currently the thinnest material known in nature. Since single-layer graphene was first discovered in 2004, graphene has received much attention due to its excellent mechanical, electrical, optical, and thermal properties. The Young modulus of the material reaches 1.1TPa, and the fracture strength reaches 130GPa, so the material is gradually used for researching a resonant micro-mechanical accelerometer. At present, researches on a graphene resonant accelerometer mainly focus on theoretical analysis and simulation, researches on characteristic aspects of the graphene resonant accelerometer are only reported through experiments, and researches on an accelerometer prototype or an integral structure made of graphene are blank, for example, in 2013, Byun and the like attach gold particles to a graphene film to serve as additional mass and research a sensitive mechanism through simulation; in 2015, Hurst et al proposed a method of attaching SU-8 glue to a peripheral clamped graphene circular membrane to sense acceleration, but it only provided the basic acceleration sensing mechanism and did not relate to the level of the overall structure or prototype of the accelerometer. The reason for this is mainly that, under the existing actual process conditions, if the additional mass is directly attached to the graphene, the graphene film is damaged and has defects, so that the acceleration-sensitive process cannot be realized in a direct-sensitive manner. Therefore, the invention provides a method for measuring acceleration by using graphene film deflection deformation to sense acceleration.
For the resonant sensor, different excitation and detection modes are selected, so that the realization difficulty of the structural design and the manufacturing process of the resonant sensor is limited to a certain extent. In recent years, most of researches on graphene resonators at home and abroad adopt an electrical excitation/optical vibration pickup mode, compared with the electrical excitation mode, the optical excitation is a non-contact type excitation mode which can be realized on a micrometer or nanometer scale, and the graphene resonator has the advantages of simple structure, low process complexity and no need of complex material integration. Furthermore, for resonant micro-mechanical accelerometers, optical excitation/detection can largely combine the advantages of flexible optical fiber and micro-structural resonant sensing. Meanwhile, due to the excellent optical characteristics of graphene, an optical excitation/detection mode is an ideal choice for exploring a graphene resonant accelerometer. Therefore, the invention provides a graphene resonant accelerometer based on optical fiber type optical excitation/detection.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the graphene resonant accelerometer overcomes the defects in the prior art, fully combines the technical advantages of optical excitation detection and resonant sensors, and is high in sensitivity, large in measurement range, strong in anti-interference capability and easy to manufacture and install.
The technical scheme adopted by the invention for solving the technical problems is as follows: a graphene resonant fiber accelerometer based on pressure sensitivity comprises an optical fiber, an insertion core, an elastic sheet, a sealing plug, a gas sealing cavity and a graphene film, wherein the optical fiber is inserted to a position with a certain distance from the lower end face of the insertion core, and the front end of the optical fiber and the graphene film adsorbed on the lower end face of the insertion core form a Fabry-Perot interference cavity; the inserting core is fixedly and hermetically connected with the elastic sheet and the gas sealing cavity, so that the upper end of the cavity is sealed; and after filling gas enters the sealing cavity through the gas inlet on the lower side of the gas sealing cavity, the filling gas is plugged into the sealing plug to seal the whole cavity.
The optical fiber can be a single-mode optical fiber or a multi-mode optical fiber, and the optical fiber positioned in the ferrule can be used independently or welded with a capillary optical device to form a Fabry-Perot interference cavity.
The ferrule is used as a device for fixing the optical fiber, can be made into different shapes or formed by assembling and connecting various optical devices, and the internal and external structures of the ferrule can be adjusted according to the adopted optical fiber and the optical devices.
The core insert is used as an additional mass of the sensitive acceleration, and can be made of different materials to form additional mass blocks with different shapes and different sizes, and the additional mass can be added to the additional mass blocks to increase the sensitive mass.
The plug core and the elastic sheet, the elastic sheet and the gas sealing cavity, and the sealing plug and the gas sealing cavity can be fixedly connected in a bolt connection, welding, riveting, nailing, splicing and gluing mode to complete the sealing of the whole cavity.
The material and the thickness of the elastic sheet can be selected according to the magnitude of the additional mass, the magnitude of the measured acceleration and the installation and matching relation with the inserting core.
The size and the shape of the gas sealing cavity can be correspondingly changed according to the acceleration measuring range, the gas type and the optical system factors.
The graphene film is attached to the end face of the ferrule, the thickness of the graphene film is single-layer or multi-layer graphene, and the shape and the size of the graphene film can be changed according to the attached ferrule structure and the Fabry-Perot interference cavity structure.
The gas filled in the gas sealing cavity can be selected according to actual needs, such as nitrogen or other inert gases.
The elastic sheet can be replaced by a rigid component, and an air inlet at the lower end of the air sealing cavity is replaced by a pressure guide pipe, so that resonant detection of the external pressure to be detected is realized.
The principle and the working process of the invention are as follows: the measured acceleration acts on the inserting core with the optical fiber, the inserting core and the probe are jointly used as additional mass to convert the acceleration into concentrated force, so that the elastic sheet fixedly connected with the inserting core generates displacement in the direction consistent with the acceleration, the displacement enables the volume of the sealing cavity to change, and the gas filled in the sealing cavity is compressed to cause the pressure change in the cavity. The graphene film adsorbed on the end face of the ferrule is in a resonant state with a certain vibration amplitude value under the action of excitation light introduced by the optical fiber through photo-thermal excitation, and forms a Fabry-Perot interference cavity with a specific cavity length with the end face of the optical fiber. When the graphene film is under the action of pressure in the cavity, the in-plane stress of the graphene film changes, so that the resonant frequency and the vibration amplitude of the graphene film change, the length of the interference cavity changes, and finally the intensity of the interference light changes. The acceleration to be measured can be determined by detecting the change of the light intensity of the interference light, so that the measurement of the acceleration to be measured is realized.
Compared with the prior art, the invention has the advantages that:
(1) under the condition of the prior art, the resonant accelerometer with a complete structure and capable of being directly used for acceleration measurement is designed by fully combining the resonance characteristic and the optical characteristic of graphene and adopting an optical excitation detection mode, so that the steps of designing an external circuit and an external sensitive structure of the accelerometer and the like are avoided, and the design, the manufacture and the installation of the accelerometer are facilitated.
(2) According to the invention, the mode of changing the sensitive acceleration by the flexibility of the graphene film is adopted, and the additional mass serving as the sensitive acceleration is not directly attached to the film, so that the damage or defect of the graphene film caused by the additional mass is avoided, the integrity of an interference cavity is ensured, and the accuracy and reliability of the acceleration detection are ensured.
(3) According to the invention, graphene is used as a resonance sensitive element of the resonance type accelerometer, and the excellent mechanical properties of the graphene enable the resonance frequency and the quality factor of the graphene resonance type accelerometer to be obviously superior to those of the traditional quartz and silicon micro-accelerometer.
(4) The invention adopts an optical excitation/detection method of Fabry-Perot interference to realize the measurement of the resonance characteristic of the graphene, so that the resonant accelerometer has the characteristics of simple structure, wide frequency band, high sensitivity, low loss and strong electromagnetic anti-interference capability.
(5) According to the invention, the graphene film is used as the reflecting surface of the Fabry-Perot interference cavity, the excellent mechanical property of the graphene greatly improves the sensitivity and precision of Fabry-Perot optical displacement detection, and the capability of the accelerometer for resisting interference of electromagnetism, humidity and the like can be greatly improved.
(6) The materials, the sizes and the shapes of the core insert, the elastic sheet, the gas seal cavity and the like designed by the invention can be adjusted according to the factors such as the adopted Fabry-Perot interference cavity, the measurement range and the like, so that the parameters such as the measurement range, the measurement resolution and the like of the accelerometer have adjustability and meet different test requirements.
(7) The structure designed by the invention can change the function of the accelerometer in the sensor by adjusting the materials and the sizes of parts in the structure, thereby being capable of using the accelerometer for measuring the external pressure.
Drawings
Fig. 1 is a schematic diagram of a graphene resonant accelerometer based on fabry-perot interference according to the present invention.
Fig. 2 is a cross-sectional view of an internal structure of a graphene resonant accelerometer based on fabry-perot interference according to the present invention.
The reference numbers in the figures mean: 1 is an optical fiber; 2 is a core insert; 3 is an elastic sheet; 4 is a sealing plug; 5 is a gas sealing cavity; 6 is a graphene film; 7 is an interference cavity; 8 is a gas.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
As shown in fig. 1 and fig. 2, the pressure-sensitive graphene-based resonant fiber accelerometer of this embodiment mainly includes an optical fiber 1, a ferrule 2, an elastic sheet 3, a sealing plug 4, a gas sealing cavity 5, and a graphene film 6, where the optical fiber 1 is inserted to a position away from a lower end face of the ferrule 2 by a certain distance, and a fabry-perot interference cavity is formed by the front end of the optical fiber and the graphene film 6 adsorbed on the lower end face of the ferrule; the inserting core 2 and the elastic sheet 3, and the elastic sheet 3 and the gas sealing cavity 5 are fixedly and hermetically connected, so that the upper end of the cavity is sealed; and after filling gas enters the sealed cavity through the gas inlet on the lower side of the gas sealed cavity 5, the filling gas is plugged into the sealing plug 4 to seal the whole cavity. When the measured acceleration acts on the inserting core 2 with the optical fiber 1, the inserting core and the optical fiber probe together serve as additional mass to convert the acceleration into concentrated force, so that the elastic sheet 3 fixedly connected with the inserting core generates displacement in the direction consistent with the acceleration, and the displacement changes the volume of the sealing cavity, so that the gas filled in the sealing cavity is compressed to cause the pressure change in the cavity. The graphene film 6 adsorbed on the end face of the ferrule is in a resonant state at a certain vibration amplitude by photo-thermal excitation under the action of the excitation light introduced by the optical fiber 1, and forms a Fabry-Perot interference cavity with a specific cavity length with the end face of the optical fiber. When the graphene film 6 is subjected to the pressure in the cavity, the in-plane stress of the graphene film changes, so that the resonant frequency and the vibration amplitude of the graphene film change, and the length of the interference cavity changes. The acceleration to be measured can be determined by detecting the change of the light intensity of the interference light, so that the measurement of the acceleration to be measured is realized.
This embodiment gives a set of sensor structure dimensions:
the optical fiber 1 was a single-film optical fiber having a cladding diameter of 125 μm and a core diameter of 10 μm.
The ferrule 2 is designed in the shape as shown in fig. 1 and 2 and is made of a ceramic material. The central cylinder protruding from the front end of the ferrule 2 is used for placing and fixing an optical fiber, the outer diameter of the central cylinder is 2.5mm, the inner diameter of the central cylinder is 125 mu m, and the length of the central cylinder is 7mm of the total length of the ferrule; the outer cylinder with the larger rear end is fixedly connected with the elastic sheet 3 and used as a main additional mass for sensitive acceleration change, and the outer diameter of the outer cylinder is 5mm, and the length of the outer cylinder is 3 mm. The inserting core 2 and the elastic sheet 3 are fixedly connected through sealant.
The elastic sheet 3 is made of elastic stainless steel, has an outer diameter of 15mm, an inner aperture of 2.5mm and a thickness of 0.25mm, and is fixedly connected with the gas sealing cavity 5 through a threaded bolt with a nominal diameter of 1 mm.
The gas-tight chamber 5 is made of stainless steel and has an outer diameter of 15mm and a height of 8 mm. The diameter of the inner cavity of the gas sealing cavity 5 is 10mm, and the height of the inner cavity is 6 mm; the wall thickness of the cavity is 2.5 mm; the wall thickness of the bottom is 2 mm; the external diameter of bottom boss is 4mm, and highly is 1mm, and the embedded inlet port that has a diameter of 1mm to link up the seal chamber bottom.
The sealing plug 4 is made of rubber material. The diameter of the plug head of the sealing plug 4 is 4mm, and the length is 1 mm; the diameter of the plug rod is 1mm, and the length of the plug rod is 3 mm.
The graphene film 6 has a diameter of 125 μm and a thickness of 10 layers (about 3.35nm) of graphene thin film. The effective diameter of the graphene film 6 is consistent with the inner diameter of the ferrule 2, and the graphene film is used as a reflecting surface to form a Fabry-Perot interference cavity together with the end face of the optical fiber, and the length of the initial interference cavity is 200 mu m.
The dimensions of the invention may be greater or less than those given in the examples.
Those skilled in the art will appreciate that the invention may be practiced without these specific details.
Claims (9)
1. The utility model provides a graphite alkene resonant mode fiber optic accelerometer based on pressure sensitivity, includes optic fibre (1), lock pin (2), elastic sheet (3), sealing plug (4), gas seal chamber (5), graphite alkene membrane (6), its characterized in that: the optical fiber (1) is inserted to a position which is a certain distance away from the lower end face of the inserting core (2), and the front end of the optical fiber and the graphene film (6) adsorbed on the lower end face of the inserting core form a Fabry-Perot interference cavity; the inserting core (2) and the elastic sheet (3) as well as the elastic sheet (3) and the gas sealing cavity (5) are fixedly and hermetically connected, so that the upper end of the cavity is sealed; after filling gas enters the sealing cavity through the gas inlet at the lower side of the gas sealing cavity (5), the whole cavity is sealed by the sealing plug (4); the plug core (2) is fixedly connected with the elastic sheet (3), the elastic sheet (3) is fixedly connected with the gas sealing cavity (5) and the sealing plug (4) is fixedly connected with the gas sealing cavity (5) in a bolt connection, welding, riveting, nailing, splicing or gluing mode so as to seal the whole cavity.
2. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the optical fiber (1) can be a single-mode optical fiber or a multi-mode optical fiber, and the optical fiber positioned in the ferrule (2) can be used independently or be welded with a capillary optical device to form a Fabry-Perot interference cavity.
3. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the ferrule (2) is used as a device for fixing the optical fiber, can be designed into different shapes or formed by assembling and connecting various optical devices, and the internal and external structures of the ferrule can be adjusted according to the adopted optical fiber and the optical devices.
4. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the inserting core (2) is used as a main additional mass of the sensitive acceleration, can be made into additional mass blocks with different shapes and different sizes by adopting different materials, and can be additionally provided with the additional mass to increase the sensitive mass.
5. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the material and the thickness of the elastic sheet (3) can be selected according to the magnitude of the additional mass, the magnitude of the measured acceleration and the installation and matching relationship with the inserting core.
6. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the size and the shape of the gas sealing cavity (5) can be correspondingly changed according to the acceleration measuring range, the gas type and the optical system factor.
7. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the graphene film (6) is attached to the end face of the ferrule, the thickness of the graphene film is single-layer or multi-layer graphene, and the shape and the size of the graphene film can be changed according to the attached ferrule structure and the Fabry-Perot interference cavity structure.
8. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the gas filled in the gas sealing cavity (5) is nitrogen or other inert gases.
9. The pressure-sensitive-graphene-based resonant fiber optic accelerometer according to claim 1, wherein: the elastic sheet (3) can be replaced by a rigid component, and an air inlet at the lower end of the air sealing cavity (5) is replaced by a pressure guide pipe, so that resonant detection of the external pressure to be detected is realized.
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| CN112880887B (en) * | 2021-01-12 | 2021-10-26 | 北京航空航天大学 | Vacuum-packaged graphene resonant optical fiber pressure sensor and manufacturing method thereof |
| CN115166297B (en) * | 2022-02-21 | 2024-02-23 | 东南大学 | Graphene-based MOEMS accelerometer and processing method thereof |
| CN115015578B (en) * | 2022-06-15 | 2023-06-27 | 华中科技大学 | Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure |
| CN116047180A (en) * | 2022-11-24 | 2023-05-02 | 南方电网数字电网研究院有限公司 | Graphene electric field sensor |
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