CN110186548A - Fiber F-P sonic transducer and preparation method thereof based on fibre-optical microstructure diaphragm - Google Patents
Fiber F-P sonic transducer and preparation method thereof based on fibre-optical microstructure diaphragm Download PDFInfo
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- CN110186548A CN110186548A CN201910394309.6A CN201910394309A CN110186548A CN 110186548 A CN110186548 A CN 110186548A CN 201910394309 A CN201910394309 A CN 201910394309A CN 110186548 A CN110186548 A CN 110186548A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Abstract
The invention discloses a kind of fiber F-P sonic transducer and preparation method thereof based on fibre-optical microstructure diaphragm, which includes fibre-optical microstructure diaphragm (1), hollow micro-pipe (2), ultraviolet glue (3) and thin footpath single mode optical fiber (4)；Fibre-optical microstructure diaphragm (1) is attached with hollow micro-pipe (2) by welding, thin footpath single mode optical fiber (4) is inserted into hollow micro-pipe (2), and hollow micro-pipe (2) is connect with thin footpath single mode optical fiber (4)；Two reflectings surface of the surface of fibre-optical microstructure diaphragm (1) and the end face of thin footpath single mode optical fiber (4) as F-P cavity.And construct a kind of sensor-based system of F-P sonic transducer based on fibre-optical microstructure diaphragm, the system includes Wavelength-swept laser (10), optical fiber circulator (11), the fiber F-P sonic transducer (12) of fibre-optical microstructure diaphragm, photodetector (13) and data acquisition and processing system (14).The high fidelity measurement of voice signal is realized in influence present invention decreases air-pressure damping to measurement.
Description
Technical field
The present invention relates to fibre-optical microstructure processing and optical fiber sound sensory field, in particular to a kind of voice signal that can be used for
The fiber F-P sonic transducer and preparation method thereof of high-precision detection.
Background technique
With the fields such as aerospace, ocean detection flourish, the perception of sound picking up system based on optical fiber by
The extensive concern of various aspects.Compared with traditional electroacoustic transducer, fibre-optical acoustic sensor has anti-electromagnetic interference capability strong, is applicable in
The advantages that environment such as Yu Jihan, high temperature, with high salt, moist, voice response frequency range is wide, can transmit at a distance, therefore increasingly
It is valued by people.
Fiber F-P interference sensor detects measured, tool using multiple-beam interference principle due to guide-lighting using simple optical fiber
Have the advantages that structure is simple, small in size, reproducible, therefore in Practical Projects such as temperature detection, refractive index sensing, pressure measurements
It is used widely in field.Fiber F-P sonic transducer experiences sound pressure information using diaphragm, the optical fiber based on closed F-P cavity structure
F-P interference sensor always has residual gas pressure intracavitary, therefore when measuring the Dynamic Signal of upper frequency, residual gas pressure
Pressure damping effect will seriously affect measurement result.Therefore traditional fiber F-P sonic transducer usually requires the branch at diaphragm rear
Tapping reason is carried out on support structure, accurately to restore the shape information of voice signal.But when size sensor reduces to very little
When, open-celled structure will be difficult to make.And an important trend of current sensor development is micro-nano.
Summary of the invention
The present invention is directed to propose a kind of fiber F-P sonic transducer and preparation method thereof based on fibre-optical microstructure film, light
The porous microstructure of photonic crystal fiber is connected to the inside and outside of cavity of F-P cavity, eliminates or reduce air-pressure damping to measurement accuracy
Influence, realize voice signal high fidelity measurement, furthermore the two-dimensional crystal lattice array of photonic crystal fiber reduces diaphragm
Equivalent stiffness increases the elastic deformation ability of microstructure film, and then enhances the sensitivity of sound sensor.
A kind of F-P sonic transducer based on fibre-optical microstructure diaphragm of the invention, which includes fibre-optical microstructure film
Piece 1, hollow micro-pipe 2 and thin footpath single mode optical fiber 4；Fibre-optical microstructure diaphragm 1 is attached with hollow micro-pipe 2 by welding, carefully
Diameter single mode optical fiber 4 is inserted into hollow micro-pipe 2, and hollow micro-pipe 2 is connect with thin footpath single mode optical fiber 4；The surface of fibre-optical microstructure diaphragm 1
Two reflectings surface with the end face of thin footpath single mode optical fiber 4 as F-P cavity, the i.e. end face of thin footpath single mode optical fiber 4 are anti-as first
Face, fibre-optical microstructure diaphragm 1 are penetrated as second reflecting surface.
The sensor-based system of a kind of F-P sonic transducer based on fibre-optical microstructure diaphragm of the invention, which is characterized in that this is
System includes Wavelength-swept laser 10, and optical fiber circulator 11, the fiber F-P sonic transducer 12 of fibre-optical microstructure diaphragm, photoelectricity are visited
Survey device 13 and data acquisition and processing system 14 totally 5 parts, in which:
The light that Wavelength-swept laser (10) issues is transmitted to the first of the F-P cavity sensor by fiber optical circulator (11)
A reflecting surface (end face of thin footpath single mode optical fiber (4)) occurs part and reflects, and is formed reflected reference light (5), and another part light continues
Second reflecting surface (surface of fibre-optical microstructure diaphragm (1)) for being transmitted to the F-P cavity sensor occurs part and reflects, and is formed anti-
It penetrates sense light (6), reflected reference light (5) is interfered at fiber optical circulator (11) with reflection sense light (6), is transmitted to photoelectricity
Detector (13), photodetector (13) convert optical signal into electric signal, export electric signal through data acquisition and processing system
(14) final to obtain required acoustic information after.
A kind of production method of F-P sonic transducer based on fibre-optical microstructure diaphragm of the invention, the production method include
Following steps:
Step 1, using outer diameter for 125 microns of photonic crystal fiber and outer diameter is 125 microns, internal diameter is 100 microns
Hollow micro-pipe cuts flat with end face through optical fiber cutter, and photonic crystal fiber reservation is 50~200 microns long, passes through with hollow micro-pipe
Heat sealing machine carries out manual weld, forms closely heterogeneous optical fiber-micro-pipe fusion point；It using small discharge capacity and short is put in welding
The electric time, 150~170 milliamperes of discharge capacity, 30~50 milliseconds of discharge time, arc discharge center deviation photonic crystal fiber 15~
25 microns；
Step 2 is placed in the structure after photonic crystal fiber and hollow micro-pipe welding on optic fiber polishing machine, by photonic crystal
One end of optical fiber is ground, be ground to photonic crystal fiber with a thickness of 3~10 microns, that is, be fabricated to fibre-optical microstructure film
Piece；
The thin footpath single mode optical fiber that cladding diameter is 100 microns is stripped coat, is incited somebody to action using optical fiber cutter by step 3
After end face cuts flat with processing, it is inserted into hollow micro-pipe；
Step 3 adjusts the length that thin footpath single mode optical fiber enters hollow micro-pipe, makes thin footpath single mode optical fiber end face and the micro- knot of optical fiber
Structure diaphragm distance is 50~100 microns long, forms apparent F-P interference；
Step 4 is bonded thin footpath single mode optical fiber and hollow micro-pipe using ultraviolet glue, to make thin footpath single mode optical fiber, hollow
Micro-pipe and fibre-optical microstructure diaphragm form an overall structure, i.e. the fiber F-P sound of fibre-optical microstructure film in the present invention passes
Sensor.
The high fidelity measurement of voice signal, this infrared optical fiber are realized in influence present invention decreases air-pressure damping to measurement
The porous microstructure of micro-structural also reduces the equivalent stiffness of diaphragm, increases the elastic energy of deformation of fibre-optical microstructure diaphragm
Power, and then enhance the sensitivity of sound sensor.
Detailed description of the invention
Fig. 1 is the fiber F-P sonic transducer structural schematic diagram based on fibre-optical microstructure diaphragm；
Fig. 2 is the end view drawing of fibre-optical microstructure diaphragm；
Fig. 3 is the sensor-based system schematic diagram that the fiber F-P sonic transducer based on fibre-optical microstructure diaphragm is constituted.
Appended drawing reference: 1, fibre-optical microstructure diaphragm, 2, hollow micro-pipe, 3, ultraviolet glue, 4, thin footpath single mode optical fiber, 5, reflection ginseng
Examine light, 6, reflection sense light, 7, the covering of photonic crystal fiber, 8, the microcellular structure of fibre-optical microstructure diaphragm, 9, the micro- knot of optical fiber
The solid section of structure diaphragm, 10, Wavelength-swept laser, 11, fiber optical circulator, 12, the fiber F-P sound of fibre-optical microstructure diaphragm
Sensor, 13, photodetector, 14, data acquisition and processing system.
Specific embodiment
Technical solution of the present invention is described in detail with reference to the accompanying drawings and examples.
As shown in Figure 1, being the fiber F-P sonic transducer schematic diagram based on fibre-optical microstructure diaphragm.The sensor includes light
Fine micro-structural 1, hollow micro-pipe 2, ultraviolet glue 3 and thin footpath single mode optical fiber 4.Fibre-optical microstructure diaphragm 1 passes through with hollow micro-pipe 2
Welding is attached, and thin footpath single mode optical fiber 4 is inserted into hollow micro-pipe 2, and hollow micro-pipe 2 and thin footpath single mode optical fiber 4 pass through ultraviolet glue 3
It is attached.Two reflectings surface of the surface of fibre-optical microstructure diaphragm 1 and the end face of thin footpath single mode optical fiber 4 as F-P cavity.
As shown in Fig. 2, being the end view drawing of fibre-optical microstructure diaphragm.Fibre-optical microstructure film is made using photonic crystal fiber
Piece, the structure of fibre-optical microstructure diaphragm are followed successively by the micropore of the covering 7 of photonic crystal fiber, fibre-optical microstructure diaphragm from outside to inside
The solid section 9 of structure 8 and fibre-optical microstructure diaphragm, the porous microstructure of fibre-optical microstructure diaphragm make the intracavitary and chamber of F-P cavity
Outer connection.
As shown in figure 3, the sensor-based system schematic diagram that the fiber F-P sonic transducer based on fibre-optical microstructure diaphragm is constituted.It is whole
A sensor-based system includes 5 parts, i.e. Wavelength-swept laser 10, the fiber F-P of optical fiber circulator 11, fibre-optical microstructure diaphragm
Sonic transducer 12, photodetector 13 and data acquisition and processing system 14.The light that Wavelength-swept laser 10 issues passes through light
It is anti-that part occurs for first reflecting surface (i.e. the end face of thin footpath single mode optical fiber 4) that fine circulator 11 is transmitted to the F-P cavity sensor
It penetrates, forms reflected reference light 5, another part light continues second reflecting surface (the i.e. micro- knot of optical fiber for being transmitted to the F-P cavity sensor
The surface of structure diaphragm 1) part reflection occurs, reflection sense light 6 is formed, reflected reference light 5 and reflection sense light 6 are in optical fiber ring
Interfered at device 11, be transmitted to photodetector 13, photodetector 13 converts optical signal into electric signal, exports electric signal
It is final to obtain required acoustic information after data acquisition and processing system 14.
Wherein, there are two types of operating modes for Wavelength-swept laser 10, are that wavelength continuous scanning mode and wavelength are fixed respectively
Output mode, wavelength continuous scanning mode are used to determine the optimum length of the fiber F-P sonic transducer of fibre-optical microstructure film；Wave
Long output mode of fixing is for realizing the measurement of the voice signal of the fiber F-P sonic transducer based on fibre-optical microstructure film.
The band of photodetector 13 and data acquisition and processing system 14 is wider than the frequency of voice signal to be measured, to protect
Demonstrate,prove quality when voice signal restores.
The production method of the F-P sonic transducer of fibre-optical microstructure diaphragm of the invention, including following 4 steps:
Step 1, using outer diameter for 125 microns of photonic crystal fiber and outer diameter is 125 microns, internal diameter is 100 microns
Hollow micro-pipe 2 cuts flat with end face through optical fiber cutter, and photonic crystal fiber retains 50~200 microns long, the reservation of hollow micro-pipe 2
Manual weld is carried out by heat sealing machine, forms closely heterogeneous optical fiber-micro-pipe fusion point.In view of the micropore of photonic crystal fiber
The characteristic that structure is easily collapsed, in welding using small discharge capacity and short discharge time, 150~170 milliamperes of discharge capacity, when electric discharge
Between 30~50 milliseconds, arc discharge center deviation photonic crystal fiber certain distance, 15~25 microns of deviation distance；
Step 2 is placed in the structure after photonic crystal fiber and hollow micro-pipe (2) welding on optic fiber polishing machine, by photon
One end of crystal optical fibre is ground, be ground to photonic crystal fiber with a thickness of 3~10 microns, that is, be fabricated to fibre-optical microstructure
Diaphragm 1；
The thin footpath single mode optical fiber 4 that cladding diameter is 100 microns is stripped coat, is incited somebody to action using optical fiber cutter by step 3
After end face cuts flat with processing, it is inserted into hollow micro-pipe 2；
Step 3 adjusts the length that thin footpath single mode optical fiber 4 enters hollow micro-pipe 2, makes 4 end face of thin footpath single mode optical fiber and optical fiber
Micro-structural (1) is 50~100 microns of distance long, forms apparent F-P interference；
Step 4 is bonded thin footpath single mode optical fiber 4 and hollow micro-pipe 2 using ultraviolet glue 3, thus make thin footpath single mode optical fiber 4,
Hollow micro-pipe 2 and fibre-optical microstructure diaphragm 1 form an overall structure, i.e. the optical fiber F- of fibre-optical microstructure film in the present invention
P sonic transducer 12.
Claims (4)
1. a kind of F-P sonic transducer based on fibre-optical microstructure diaphragm, which is characterized in that the sensor includes fibre-optical microstructure film
Piece (1), hollow micro-pipe (2) and thin footpath single mode optical fiber (4)；Fibre-optical microstructure diaphragm (1) and hollow micro-pipe (2) by welding into
Row connection, thin footpath single mode optical fiber (4) are inserted into hollow micro-pipe (2), and hollow micro-pipe (2) is connect with thin footpath single mode optical fiber (4)；Optical fiber
Two reflectings surface of the surface of micro-structural (1) and the end face of thin footpath single mode optical fiber (4) as F-P cavity, i.e. thin footpath single-mode optics
The end face of fine (4) is as first reflecting surface, fibre-optical microstructure diaphragm (1) as second reflecting surface.
2. a kind of F-P sonic transducer of fibre-optical microstructure diaphragm as described in claim 1, which is characterized in that the optical fiber is micro-
Structural diaphragm is made of photonic crystal fiber, and the structure of fibre-optical microstructure diaphragm is followed successively by the packet of photonic crystal fiber from outside to inside
Layer (7), the microcellular structure (8) of fibre-optical microstructure diaphragm and the solid section (9) of fibre-optical microstructure diaphragm, fibre-optical microstructure diaphragm
Porous microstructure (8) be connected to the inside and outside of cavity of F-P cavity.
3. a kind of sensor-based system of the F-P sonic transducer based on fibre-optical microstructure diaphragm, which is characterized in that the system includes wavelength
Scan laser (10), fiber F-P sonic transducer (12), the photodetector of optical fiber circulator (11), fibre-optical microstructure diaphragm
(13) and data acquisition and processing system (14) totally 5 parts, in which:
The light that Wavelength-swept laser (10) issues by fiber optical circulator (11) be transmitted to first of the F-P cavity sensor it is anti-
It penetrates face (end face of thin footpath single mode optical fiber (4)) and part reflection occurs, formed reflected reference light (5), another part light continues to transmit
Part reflection occurs for second reflecting surface (surface of fibre-optical microstructure diaphragm (1)) to the F-P cavity sensor, forms reflection and passes
Photosensitive (6), reflected reference light (5) are interfered at fiber optical circulator (11) with reflection sense light (6), are transmitted to photodetection
Device (13), photodetector (13) convert optical signal into electric signal, export electric signal through data acquisition and processing system (14)
Afterwards, final to obtain required acoustic information.
4. a kind of production method of the F-P sonic transducer based on fibre-optical microstructure diaphragm, which is characterized in that the production method includes
Following steps:
Step 1, to use outer diameter for 125 microns of photonic crystal fiber and outer diameter be 125 microns, the hollow that internal diameter is 100 microns
Micro-pipe cuts flat with end face through optical fiber cutter, and photonic crystal fiber reservation is 50~200 microns long, passes through welding with hollow micro-pipe
Machine carries out manual weld, forms closely heterogeneous optical fiber-micro-pipe fusion point；When in welding using small discharge capacity and short electric discharge
Between, 150~170 milliamperes of discharge capacity, 30~50 milliseconds of discharge time, arc discharge center deviation photonic crystal fiber 15~25 is micro-
Rice；
Step 2 is placed in the structure after photonic crystal fiber and hollow micro-pipe welding on optic fiber polishing machine, by photonic crystal fiber
One end ground, be ground to photonic crystal fiber with a thickness of 3~10 microns, that is, be fabricated to fibre-optical microstructure diaphragm；
Step 3, by cladding diameter be 100 microns of thin footpath single mode optical fiber be stripped coat, using optical fiber cutter by end face
After cutting flat with processing, it is inserted into hollow micro-pipe；
Step 3 adjusts the length that thin footpath single mode optical fiber enters hollow micro-pipe, makes thin footpath single mode optical fiber end face and fibre-optical microstructure film
It is 50~100 microns of piece distance long, form apparent F-P interference；
Step 4 is bonded thin footpath single mode optical fiber and hollow micro-pipe using ultraviolet glue, to make thin footpath single mode optical fiber, hollow micro-pipe
An overall structure, i.e. the fiber F-P sonic transducer of fibre-optical microstructure film in the present invention are formed with fibre-optical microstructure diaphragm.
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| CN201910394309.6A CN110186548A (en) | 2019-05-13 | 2019-05-13 | Fiber F-P sonic transducer and preparation method thereof based on fibre-optical microstructure diaphragm |
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Cited By (8)
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| CN110726374A (en) * | 2019-09-17 | 2020-01-24 | 天津大学 | Optical fiber Fabry-Perot strain sensor based on single-mode optical fiber, manufacturing method and measuring method |
| CN110793710A (en) * | 2019-11-15 | 2020-02-14 | 山东大学 | Double-resolution optical fiber air pressure measuring sensor and method |
| CN110823359A (en) * | 2019-11-14 | 2020-02-21 | 北京遥测技术研究所 | Low-temperature optical fiber sound sensing system |
| CN110987229A (en) * | 2019-12-20 | 2020-04-10 | 西安工业大学 | Optical fiber end face type Fabry-Perot cavity temperature sensor |
| CN111024211A (en) * | 2019-12-30 | 2020-04-17 | 西安石油大学 | High-sensitivity differential optical fiber F-P micro-vibration sensor and demodulation method thereof |
| CN112945860A (en) * | 2021-01-27 | 2021-06-11 | 广东海洋大学 | Diaphragm type open cavity FP interference optical fiber acoustic wave sensor and manufacturing method thereof |
| WO2022048588A1 (en) * | 2020-09-04 | 2022-03-10 | 华为技术有限公司 | Laser microphone and terminal |
| WO2024001688A1 (en) * | 2022-06-28 | 2024-01-04 | 华为技术有限公司 | Passive communication terminal, passive communication system, and passive communication method |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110726374A (en) * | 2019-09-17 | 2020-01-24 | 天津大学 | Optical fiber Fabry-Perot strain sensor based on single-mode optical fiber, manufacturing method and measuring method |
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| CN110987229A (en) * | 2019-12-20 | 2020-04-10 | 西安工业大学 | Optical fiber end face type Fabry-Perot cavity temperature sensor |
| CN111024211A (en) * | 2019-12-30 | 2020-04-17 | 西安石油大学 | High-sensitivity differential optical fiber F-P micro-vibration sensor and demodulation method thereof |
| WO2022048588A1 (en) * | 2020-09-04 | 2022-03-10 | 华为技术有限公司 | Laser microphone and terminal |
| EP4199540A4 (en) * | 2020-09-04 | 2024-02-14 | Huawei Tech Co Ltd | Laser microphone and terminal |
| CN112945860A (en) * | 2021-01-27 | 2021-06-11 | 广东海洋大学 | Diaphragm type open cavity FP interference optical fiber acoustic wave sensor and manufacturing method thereof |
| WO2024001688A1 (en) * | 2022-06-28 | 2024-01-04 | 华为技术有限公司 | Passive communication terminal, passive communication system, and passive communication method |
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Application publication date: 20190830 |