AU2002216052A1 - Inertial rotation device - Google Patents

Inertial rotation device

Info

Publication number
AU2002216052A1
AU2002216052A1 AU2002216052A AU1605202A AU2002216052A1 AU 2002216052 A1 AU2002216052 A1 AU 2002216052A1 AU 2002216052 A AU2002216052 A AU 2002216052A AU 1605202 A AU1605202 A AU 1605202A AU 2002216052 A1 AU2002216052 A1 AU 2002216052A1
Authority
AU
Australia
Prior art keywords
rotation member
top plate
piezoelectric actuators
slip
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002216052A
Other languages
English (en)
Inventor
Miles Haines
Khaled Karrai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2002216052A1 publication Critical patent/AU2002216052A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Nanotechnology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
  • Power Steering Mechanism (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Control Of Position Or Direction (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Gyroscopes (AREA)
AU2002216052A 2000-11-23 2001-11-22 Inertial rotation device Abandoned AU2002216052A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0028511 2000-11-23
GB0028511A GB2369489B (en) 2000-11-23 2000-11-23 Inertial rotation device
PCT/EP2001/013632 WO2002043162A1 (en) 2000-11-23 2001-11-22 Inertial rotation device

Publications (1)

Publication Number Publication Date
AU2002216052A1 true AU2002216052A1 (en) 2002-06-03

Family

ID=9903688

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002216052A Abandoned AU2002216052A1 (en) 2000-11-23 2001-11-22 Inertial rotation device

Country Status (8)

Country Link
US (1) US6940210B2 (de)
EP (1) EP1336205B8 (de)
JP (1) JP3763059B2 (de)
AT (1) ATE293285T1 (de)
AU (1) AU2002216052A1 (de)
DE (1) DE60110107T2 (de)
GB (1) GB2369489B (de)
WO (1) WO2002043162A1 (de)

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EP1311007A1 (de) * 2001-11-07 2003-05-14 ASML Netherlands B.V. Piezoelektrischer Aktor, lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
US6849989B2 (en) * 2002-10-31 2005-02-01 Andreas Schmid Translation and rotation positioning motor
FR2877090B1 (fr) * 2004-10-22 2007-05-11 Commissariat Energie Atomique Cryostat pour l'etude d'echantillons sous vide
DE102005026708B4 (de) * 2005-06-09 2007-05-03 Attocube Systems Ag Positionierer mit Festkörpergelenk
US7459834B2 (en) * 2005-06-22 2008-12-02 Qortek, Inc. Solid state gimbal system
ATE551733T1 (de) 2005-08-24 2012-04-15 Smaract Gmbh Rotatorische trägheitsantriebsvorrichtung
JP2007158276A (ja) * 2005-12-08 2007-06-21 Ngk Insulators Ltd 圧電／電歪デバイス及び圧電／電歪デバイスの駆動方法
DE102006027406A1 (de) * 2006-06-13 2007-12-27 Siemens Ag Festkörperaktor-Antriebsvorrichtung
DE102006052175B4 (de) * 2006-11-02 2013-03-07 SmarAct Holding GmbH Trägheitsantriebsvorrichtung
US7884326B2 (en) * 2007-01-22 2011-02-08 Fei Company Manipulator for rotating and translating a sample holder
FR2913829B1 (fr) 2007-03-14 2014-09-05 Cedrat Technologies Systeme de positionnement fin par moteur inertiel a base d'amplificateur mecanique
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
US7884920B2 (en) * 2007-06-15 2011-02-08 Asml Netherlands B.V. Lithographic apparatus and pivotable structure assembly
JP2009097453A (ja) * 2007-10-18 2009-05-07 Denso Corp 内燃機関の制御装置
EP2051280A1 (de) 2007-10-18 2009-04-22 The Regents of the University of California Motorisierter Manipulator zur Positionierung einer TEM-Probe
US8674586B2 (en) * 2008-12-26 2014-03-18 Nikon Corporation Motor device, apparatus and driving method for rotor
US20100308690A1 (en) * 2009-06-08 2010-12-09 Luke Currano Mems piezoelectric actuators
US8593033B2 (en) * 2009-06-11 2013-11-26 Micronix Usa Multi-element, stick-slip piezo motor
KR20120112354A (ko) * 2009-06-22 2012-10-11 피에조모터 웁살라 에이비 전기기계적 모터
DE102009057746A1 (de) * 2009-12-10 2011-06-16 Forschungszentrum Jülich GmbH Nanopositionierer
JP5269009B2 (ja) * 2010-07-30 2013-08-21 株式会社東芝 駆動装置
CN102005964B (zh) * 2010-12-29 2012-10-24 南昌工程学院 一种磁致伸缩式惯性冲击微型直线电机
DE102011109590A1 (de) * 2011-08-05 2013-02-07 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer Drehantrieb für eine Welle
US8754571B2 (en) * 2011-11-02 2014-06-17 Sergiy Pryadkin Two-axis inertial positioner
CN103391023A (zh) * 2013-07-25 2013-11-13 苏州大学 一种粘滑驱动跨尺度精密运动平台
CN103487556B (zh) * 2013-10-07 2015-10-28 复旦大学 一种超导相显微***
CN103618473B (zh) * 2013-11-27 2016-08-17 苏州大学 一种上下预紧式粘滑驱动跨尺度精密运动平台
DE102014014997B4 (de) * 2014-10-09 2018-05-17 Attocube Systems Ag Haft-Gleit-Antrieb, insbesondere piezo-aktuierter Trägheitsantrieb
DE102015208591B4 (de) * 2015-05-08 2016-12-08 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer Drehantrieb mit einem als Blattfeder ausgebildeten Spannmittel
CN105084309B (zh) * 2015-07-30 2017-03-01 苏州大学张家港工业技术研究院 基于柔性铰链的可调预紧式粘滑驱动定位平台
CN105490581B (zh) * 2015-11-24 2017-08-25 西安交通大学 含有h型结构的高精度大扭矩压电旋转作动装置及方法
CN105553329B (zh) * 2016-02-03 2018-06-22 浙江师范大学 一种具有偏置压电振子的惯性压电旋转驱动器
JP2017184297A (ja) * 2016-03-28 2017-10-05 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ
DE102018217709A1 (de) * 2018-10-16 2020-04-16 Physik Instrumente (Pi) Gmbh & Co. Kg Linearantrieb
DE102021113751A1 (de) 2021-05-27 2022-12-01 Physik Instrumente (PI) GmbH & Co KG Antriebsvorrichtung, Antriebsmotor und Verfahren zum Antreiben einer Spindel
DE102022112809A1 (de) 2022-05-20 2023-11-23 Physik Instrumente (PI) GmbH & Co KG Antriebsvorrichtung, Antriebssystem, Stellsystem und Antriebsmotor

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US4195243A (en) * 1978-11-06 1980-03-25 Sperry Corporation Piezoelectric wafer mover
US4455501A (en) * 1982-02-09 1984-06-19 Tokyo Shibaura Denki Kabushiki Kaisha Precision rotation mechanism
JPS60118072A (ja) * 1983-11-30 1985-06-25 Toshiba Corp 回転微動機構
JPH0614789B2 (ja) * 1984-06-25 1994-02-23 株式会社東芝 テーブル微動方法およびこの方法を用いた微動装置
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
US5079471A (en) * 1990-06-04 1992-01-07 Martin Marietta Corporation High torque harmonic traction motor
US5225941A (en) 1990-07-03 1993-07-06 Canon Kabushiki Kaisha Driving device
DE4023311A1 (de) * 1990-07-21 1992-01-23 Omicron Vakuumphysik Verstellvorrichtung fuer mikrobewegungen
JPH06261559A (ja) * 1993-03-09 1994-09-16 Minolta Camera Co Ltd ロ−タリ−アクチユエ−タ
US5410206A (en) * 1993-04-06 1995-04-25 New Focus, Inc. Piezoelectric actuator for optical alignment screws
US5589723A (en) 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
US5932110A (en) * 1995-02-13 1999-08-03 Aksys, Ltd. Dialysate conductivity adjustment in a batch dialysate preparation system
US6359370B1 (en) * 1995-02-28 2002-03-19 New Jersey Institute Of Technology Piezoelectric multiple degree of freedom actuator
US5786654A (en) 1995-06-08 1998-07-28 Minolta Co., Ltd. Movable stage utilizing electromechanical transducer
US5705878A (en) * 1995-11-29 1998-01-06 Lewis; Aaron Flat scanning stage for scanned probe microscopy
GB2316222B (en) 1996-08-05 1998-07-01 Karrai Haines Gbr Inertial positioner
DE19644550C1 (de) 1996-10-26 1998-06-10 Artur Dr Zrenner Piezoelektrischer oder elektrostriktiver Trägheitsantrieb zum Verschieben oder Positionieren von insbesondere schweren Objekten
DE19909913B4 (de) * 1999-03-06 2004-01-15 NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen Elektromechanische Antriebsvorrichtung

Also Published As

Publication number Publication date
GB0028511D0 (en) 2001-01-10
GB2369489B (en) 2004-03-10
WO2002043162A1 (en) 2002-05-30
GB2369489A (en) 2002-05-29
DE60110107T2 (de) 2006-01-19
JP3763059B2 (ja) 2006-04-05
EP1336205B1 (de) 2005-04-13
DE60110107D1 (de) 2005-05-19
US20040074300A1 (en) 2004-04-22
EP1336205B8 (de) 2005-06-08
JP2004523192A (ja) 2004-07-29
US6940210B2 (en) 2005-09-06
EP1336205A1 (de) 2003-08-20
ATE293285T1 (de) 2005-04-15

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