AU2002216052A1 - Inertial rotation device - Google Patents

Inertial rotation device

Info

Publication number
AU2002216052A1
AU2002216052A1 AU2002216052A AU1605202A AU2002216052A1 AU 2002216052 A1 AU2002216052 A1 AU 2002216052A1 AU 2002216052 A AU2002216052 A AU 2002216052A AU 1605202 A AU1605202 A AU 1605202A AU 2002216052 A1 AU2002216052 A1 AU 2002216052A1
Authority
AU
Australia
Prior art keywords
rotation member
top plate
piezoelectric actuators
slip
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002216052A
Inventor
Miles Haines
Khaled Karrai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2002216052A1 publication Critical patent/AU2002216052A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Nanotechnology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
  • Power Steering Mechanism (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Control Of Position Or Direction (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Gyroscopes (AREA)

Abstract

An inertial positioning device comprising: a base plate ( 10 ); a top plate ( 20 ) for mounting an element to be rotated; a rotation member ( 16 ) having a column ( 18 ) on which the top plate is mounted in frictional engagement for slip-stick rotational motion; and a pair of piezoelectric actuators ( 12 ) each secured to the base plate at one end and to lateral extensions ( 17 ) of the rotation member at their other ends. Simultaneous actuation of the piezoelectric actuators rotates the column of the rotation member about its axis. When a suitable asymmetric drive signal is supplied to the piezoelectric actuators, the top plate is rotated by slip-stick motion. The device is compact, has a good load capacity for an inertial motor and is operable in extreme environments such as liquid helium temperatures, high vacuum and high magnetic fields.
AU2002216052A 2000-11-23 2001-11-22 Inertial rotation device Abandoned AU2002216052A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0028511 2000-11-23
GB0028511A GB2369489B (en) 2000-11-23 2000-11-23 Inertial rotation device
PCT/EP2001/013632 WO2002043162A1 (en) 2000-11-23 2001-11-22 Inertial rotation device

Publications (1)

Publication Number Publication Date
AU2002216052A1 true AU2002216052A1 (en) 2002-06-03

Family

ID=9903688

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002216052A Abandoned AU2002216052A1 (en) 2000-11-23 2001-11-22 Inertial rotation device

Country Status (8)

Country Link
US (1) US6940210B2 (en)
EP (1) EP1336205B8 (en)
JP (1) JP3763059B2 (en)
AT (1) ATE293285T1 (en)
AU (1) AU2002216052A1 (en)
DE (1) DE60110107T2 (en)
GB (1) GB2369489B (en)
WO (1) WO2002043162A1 (en)

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US7459834B2 (en) * 2005-06-22 2008-12-02 Qortek, Inc. Solid state gimbal system
ATE551733T1 (en) 2005-08-24 2012-04-15 Smaract Gmbh ROTATORY INERTIAL DRIVE DEVICE
JP2007158276A (en) * 2005-12-08 2007-06-21 Ngk Insulators Ltd Piezo/electrostriction device, and method for driving same
DE102006027406A1 (en) * 2006-06-13 2007-12-27 Siemens Ag Solid-state drive device
DE102006052175B4 (en) * 2006-11-02 2013-03-07 SmarAct Holding GmbH Inertial mover
US7884326B2 (en) * 2007-01-22 2011-02-08 Fei Company Manipulator for rotating and translating a sample holder
FR2913829B1 (en) 2007-03-14 2014-09-05 Cedrat Technologies INERTIAL MOTOR FINAL POSITIONING SYSTEM BASED ON MECHANICAL AMPLIFIER
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
US7884920B2 (en) * 2007-06-15 2011-02-08 Asml Netherlands B.V. Lithographic apparatus and pivotable structure assembly
JP2009097453A (en) * 2007-10-18 2009-05-07 Denso Corp Control device of internal combustion engine
EP2051280A1 (en) 2007-10-18 2009-04-22 The Regents of the University of California Motorized manipulator for positioning a TEM specimen
US8674586B2 (en) * 2008-12-26 2014-03-18 Nikon Corporation Motor device, apparatus and driving method for rotor
US20100308690A1 (en) * 2009-06-08 2010-12-09 Luke Currano Mems piezoelectric actuators
US8593033B2 (en) * 2009-06-11 2013-11-26 Micronix Usa Multi-element, stick-slip piezo motor
KR20120112354A (en) * 2009-06-22 2012-10-11 피에조모터 웁살라 에이비 Electromechanical motor
DE102009057746A1 (en) * 2009-12-10 2011-06-16 Forschungszentrum Jülich GmbH nanopositioners
JP5269009B2 (en) * 2010-07-30 2013-08-21 株式会社東芝 Drive device
CN102005964B (en) * 2010-12-29 2012-10-24 南昌工程学院 Magnetostriction type inertial impact micro linear motor
DE102011109590A1 (en) * 2011-08-05 2013-02-07 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelectric rotary drive for one shaft
US8754571B2 (en) * 2011-11-02 2014-06-17 Sergiy Pryadkin Two-axis inertial positioner
CN103391023A (en) * 2013-07-25 2013-11-13 苏州大学 Stick-slip driving cross-scale precise motion platform
CN103487556B (en) * 2013-10-07 2015-10-28 复旦大学 A kind of superconducting phase microscopic system
CN103618473B (en) * 2013-11-27 2016-08-17 苏州大学 A kind of prefastening stick-slip up and down drives across yardstick precision movement platform
DE102014014997B4 (en) * 2014-10-09 2018-05-17 Attocube Systems Ag Stick-slip drive, in particular piezo-actuated inertial drive
DE102015208591B4 (en) * 2015-05-08 2016-12-08 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelectric rotary drive with a trained as a leaf spring clamping means
CN105084309B (en) * 2015-07-30 2017-03-01 苏州大学张家港工业技术研究院 Locating platform is driven based on the adjustable prefastening stick-slip of flexible hinge
CN105490581B (en) * 2015-11-24 2017-08-25 西安交通大学 High-precision high pulling torque piezoelectricity rotation apparatus and method containing H type structures
CN105553329B (en) * 2016-02-03 2018-06-22 浙江师范大学 A kind of inertial piezoelectric rotating driver with biasing piezoelectric vibrator
JP2017184297A (en) * 2016-03-28 2017-10-05 セイコーエプソン株式会社 Piezoelectric actuator, piezoelectric motor, robot, hand and pump
DE102018217709A1 (en) * 2018-10-16 2020-04-16 Physik Instrumente (Pi) Gmbh & Co. Kg linear actuator
DE102021113751A1 (en) 2021-05-27 2022-12-01 Physik Instrumente (PI) GmbH & Co KG Drive device, drive motor and method for driving a spindle
DE102022112809A1 (en) 2022-05-20 2023-11-23 Physik Instrumente (PI) GmbH & Co KG Drive device, drive system, actuating system and drive motor

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Also Published As

Publication number Publication date
GB0028511D0 (en) 2001-01-10
GB2369489B (en) 2004-03-10
WO2002043162A1 (en) 2002-05-30
GB2369489A (en) 2002-05-29
DE60110107T2 (en) 2006-01-19
JP3763059B2 (en) 2006-04-05
EP1336205B1 (en) 2005-04-13
DE60110107D1 (en) 2005-05-19
US20040074300A1 (en) 2004-04-22
EP1336205B8 (en) 2005-06-08
JP2004523192A (en) 2004-07-29
US6940210B2 (en) 2005-09-06
EP1336205A1 (en) 2003-08-20
ATE293285T1 (en) 2005-04-15

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