WO2016098389A1 - Bonding position inspection device - Google Patents

Bonding position inspection device Download PDF

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Publication number
WO2016098389A1
WO2016098389A1 PCT/JP2015/073566 JP2015073566W WO2016098389A1 WO 2016098389 A1 WO2016098389 A1 WO 2016098389A1 JP 2015073566 W JP2015073566 W JP 2015073566W WO 2016098389 A1 WO2016098389 A1 WO 2016098389A1
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WO
WIPO (PCT)
Prior art keywords
inspection
substrate
bonded
optical measurement
hole
Prior art date
Application number
PCT/JP2015/073566
Other languages
French (fr)
Japanese (ja)
Inventor
智 小塩
隼 三島
渉史 川合
誠剛 臼井
Original Assignee
日東電工株式会社
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Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Publication of WO2016098389A1 publication Critical patent/WO2016098389A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Definitions

  • the present invention relates to a pasting position inspection apparatus.
  • Image display devices such as a liquid crystal display (LCD), a plasma display (PDP), and an electroluminescence display (ELD) are attracting attention for their excellent performance. For this reason, a display panel manufacturing technique, which is one of the essential components for an image display apparatus, has attracted more and more attention.
  • LCD liquid crystal display
  • PDP plasma display
  • ELD electroluminescence display
  • an optical film for example, a polarizing film
  • an optical element for example, a liquid crystal cell
  • Patent Document 1 proposes an apparatus that can realize such an inspection function.
  • the display panel inspection apparatus in Patent Document 1 includes a light transmission unit 14 on which the display panel 40 is placed and glass substrates 41 and 42 of the display panel 40 on which the display panel 40 is placed.
  • the positioning part 15 for positioning two sides and the distance from the peripheral edge of the glass substrates 41 and 42 brought into contact with the positioning part 15 to the peripheral edge of the polarizing plates 44 and 45 attached to the glass substrates 41 and 42 are measured.
  • An inspection table 11 having a distance measuring member 16 is provided. At the time of measurement, as shown in FIG.
  • Patent Document 1 since the display panel inspection apparatus described in Patent Document 1 measures the sticking position of the polarizing plate by mechanically pressing the measuring rod from the side, it can measure only three corners in contact with the side frame. The accuracy may deviate from the target accuracy.
  • the present invention has been made in view of such a situation, and the inspection accuracy of the pasting position on the substrate of the rectangular bonded material bonded so that the four sides are parallel to the four sides of the rectangular substrate, respectively.
  • An object of the present invention is to provide a sticking position inspection apparatus capable of improving the quality.
  • the present invention provides a bonding position on a substrate of a rectangular bonded material bonded so that the four sides are parallel to the four sides of the rectangular substrate.
  • a pasting position inspection apparatus for inspecting a substrate an inspection table on which a mounting area for mounting a substrate on which the bonded material is bonded is formed, and four corners of the substrate and the bonded material are attached to the inspection table.
  • Four optical measurement units that optically measure the distance between the edge of the bonded object and the edge of the substrate parallel to the edge of the bonded object at the four corners,
  • a sticking position inspection apparatus that is connected to four optical measurement units and includes a measurement result display unit that displays distances measured by the four optical measurement units as measurement results.
  • the four optical measurement units allow the edges of the bonded product (for example, a polarizing film) and the edges of the substrate (for example, a glass substrate) to be parallel to the edges of the bonded material at the four corners. Since the distance between each can be optically measured, the inspection accuracy of the pasting position on the substrate of the rectangular bonded product bonded so that the four sides are parallel to the four sides of the rectangular substrate can be improved. It is possible to provide a sticking position inspection device that can be improved.
  • the inspection table is attached to the front surface in the front-rear direction so as to be openable and closable, and further provided with a cover that opens the placement area when opened and shields the placement area when closed.
  • the mounting area on the inspection table four inspection holes penetrating in the front-rear direction are formed so that the four corners of the substrate and the bonded object are respectively located within the range of the four inspection holes, and four optical measurements are made.
  • Each of the units is attached to the rear surface in the front-rear direction of the inspection table, and is configured to face each of the four inspection holes.
  • the optical measurement unit By installing the optical measurement unit on the rear surface of the inspection table, it is possible to prevent interference with the optical measurement unit when the substrate to which the bonded object is attached is placed on or taken out of the inspection table. Then, by installing a cover that can be opened and closed on the front surface of the inspection table, the cover can be closed during the inspection process, and the measurement of the attachment position of the bonded object by the optical measurement unit can be made more accurate.
  • each of the four optical measurement units is disposed so as to face one of the four inspection holes, and the inspection hole of the substrate and the bonded object is interposed through the inspection hole.
  • a light source is provided so as to irradiate light on a portion within the range, and when the light source emits light, an imaging unit that images the substrate and the bonded object with light reflected by the substrate and the bonded object, and the imaging unit The distance between the edge of the bonded object and the edge of the substrate parallel to the edge is calculated from the image captured by the imaging means connected to the measurement result display unit, and the distance is displayed as the measurement result.
  • Image processing means for transmitting to the unit.
  • the image of the substrate and the bonded object can be imaged by the light from the light source using the imaging means, and the distance between the edge of the bonded object and the edge of the substrate is accurately measured. Will be able to.
  • the imaging means is installed on the side facing the inspection hole across the light source.
  • one of the four inspection holes is a circular hole
  • the other two inspection holes adjacent to the circular hole are perpendicular to each other in the longitudinal direction and the extension line is the circular hole.
  • the inspection hole located diagonally to the circular hole is formed obliquely with respect to the other two inspection holes, and the extension line is a long hole passing through the circular hole.
  • a rail mechanism is provided in the vicinity of each inspection hole that becomes a hole, and the optical measurement unit that faces the inspection hole that is a long hole slides in a corresponding rail mechanism so that it can move along the longitudinal direction of the corresponding inspection hole. Configure to be able to be attached.
  • the optical measurement unit can be moved to an appropriate position according to the size of the substrate and the bonded object, various substrates having different sizes can be measured by the same application position inspection apparatus. Become.
  • the inspection table includes a rail mechanism in the vicinity of the inspection hole that becomes a circular hole, and the optical measurement unit that faces the inspection hole that becomes the circular hole moves within the range of the circular hole. It is slidably attached to the rail mechanism so that it can.
  • the optical measurement unit in the vicinity of the circular hole can be moved to the optimum measurement position according to the attachment position of the bonded object on the substrate.
  • the inspection table further includes a drive unit that is installed corresponding to each rail mechanism and that drives the corresponding optical measurement unit so as to move along the rail mechanism.
  • a control unit that controls the drive unit to move to a position is further provided.
  • the optical measurement unit can be automatically moved to a position according to the substrate size by the drive unit, so that the inspection efficiency can be improved.
  • the cover is attached to the examination table via a hinge so as to be openable and closable.
  • one of the inspection table and the cover is provided with a slide rail, the other is provided with a slider, and the cover is attached so that the slider can slide relative to the slide rail. It is configured to be openable and closable with respect to the examination table.
  • an attachment frame is installed on the front surface of the inspection table so as to face the inspection table and to be spaced from the front surface of the inspection table by a predetermined distance. It can be attached to the inspection table via the mounting frame.
  • FIG. 1A is a front view showing a sticking position inspection apparatus according to an embodiment of the present invention, and shows a state where a cover is opened.
  • FIG. 1B is a front view showing the sticking position inspection apparatus in the embodiment of the present invention, and shows a state in which the cover is closed.
  • FIG. 2 is a front view showing the sticking position inspection apparatus in a state where the substrate is placed.
  • FIG. 3 is a side view showing the sticking position inspection apparatus in the embodiment of the present invention.
  • FIG. 4 is an explanatory view of the inspection table of the sticking position inspection device as viewed from the rear side.
  • FIG. 5 is an explanatory view showing the structure of the optical measurement unit of the sticking position inspection apparatus.
  • FIG. 1A is a front view showing a sticking position inspection apparatus according to an embodiment of the present invention, and shows a state where a cover is opened.
  • FIG. 1B is a front view showing the sticking position inspection apparatus in the embodiment of the present invention, and shows a state in which the cover is closed
  • FIG. 6 is an explanatory view showing an image of a substrate on which a bonded object imaged by annular illumination is attached.
  • FIG. 7A is a flowchart showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
  • FIG. 7B is a flowchart showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
  • FIG. 8A is an explanatory view showing a conventional display panel inspection apparatus.
  • FIG. 8B is an explanatory view showing a conventional display panel inspection apparatus.
  • the inspection target is a structure in which a rectangular bonded object F is bonded to the substrate C so that the four sides are parallel to the four sides of the rectangular substrate C.
  • FIG. 1A and 1B are front views showing a sticking position inspection apparatus according to an embodiment of the present invention.
  • FIG. 1A shows a state where the cover 7 is opened
  • FIG. 1B shows a state where the cover 7 is closed.
  • FIG. 2 is a front view showing the sticking position inspection apparatus in a state where the substrate C is placed.
  • FIG. 3 is a side view showing the sticking position inspection apparatus.
  • FIG. 4 is an explanatory view of the inspection table 6 viewed from the rear side.
  • the sticking position inspection apparatus is attached to the front surface of the inspection table 6 mainly through a support frame 5, an inspection table 6 supported by the support frame 5, and a hinge 9.
  • the support frame 5 is for supporting each other member, and extends downward from the base, the support leg in contact with the ground, and extends upward from the back surface of the base to a predetermined height. And a support plate.
  • the inspection table 6 includes a plate-shaped inspection table main body, a long positioning plate 60 installed on the front surface of the inspection table main body so that the longitudinal direction is in the horizontal direction, and the longitudinal direction is the longitudinal direction of the positioning plate 60.
  • a long positioning plate 61 installed on the front surface of the inspection table main body along the direction perpendicular to the direction, and four inspection holes 62, 63, 64 formed in the inspection table main body and penetrating in the front-rear direction.
  • 65 four sets of linear guides 66, 67, 68, 69 (69-1, 69-2) installed on the rear surface of the inspection table main body, and four sets of adjustment motors 66 installed on the rear surface of the inspection table main body.
  • the inspection table main body places both the positioning plates 60 and 61 together with the substrate C on which the bonded material F is pasted, and divides a placement area for positioning.
  • the plate-shaped inspection table main body is used to place the substrate C on which the bonded object F is attached, and as a whole between the front portion of the base of the support frame 5 and the upper portion of the rear support plate in a tilted posture.
  • Each of the long positioning plates 60 and 61 is in surface contact with two adjacent sides of the substrate C, and positions the substrate C on which the bonded material F is adhered to the inspection table main body. To do.
  • one inspection hole 62 (the inspection hole on the lower right in FIG. 1A) is a circular hole, and is an extension of both positioning plates 60, 61 of the inspection table body.
  • the other inspection holes 63 and 64 (inspection holes on the lower left and upper right in FIG. 1A) that are formed in a portion near the crossing position and are adjacent to the circular hole are perpendicular to each other in the longitudinal direction.
  • the extension line is a long hole that passes through the circular hole 62, and the inspection hole 65 (the upper left inspection hole in FIG. 1A) at a position diagonal to the circular hole is relative to the other inspection holes 63 and 64.
  • the elongated line is an elongated hole that is formed obliquely and passes through the circular hole.
  • four sets of linear guides 66, 67, 68, 69 are installed in the vicinity of the four inspection holes 62, 63, 64, 65 on the rear surface of the inspection table main body, respectively, and four optical measurements described later.
  • Each of the units 8 is attached to four sets of linear guides 66, 67, 68, 69 so as to be movable along the longitudinal direction of each of the inspection holes 62, 63, 64, 65.
  • ′, 67 ′, 68 ′, and 69 ′ are installed on the rear surface of the inspection table main body in correspondence with the four linear guides 66, 67, 68, and 69, respectively. , 63, 64, 65 to move along the longitudinal direction.
  • the slide rail of the linear guide 66 corresponding to the inspection hole 62 that is a circular hole is installed along the horizontal direction below the inspection hole 62, and one end of the slide rail serves as an output shaft of the adjustment motor 66 ′. It is connected. Further, the slider of the linear guide 66 is slidably provided on the slide rail, and one optical measurement unit 8 is attached to the slider of the linear guide 66.
  • the imaging range thereof faces the inspection hole 62, and the inspection hole. It is in the range of 62.
  • the slide rail of the linear guide 67 corresponding to the inspection hole 63 which is a long hole is installed horizontally below the inspection hole 63, and one end thereof is connected to the output shaft of the adjustment motor 67 '. Further, the slider of the linear guide 67 is slidably provided on the slide rail, and another optical measurement unit 8 is attached to the slider of the linear guide 67, and its imaging range is opposed to the inspection hole 63. It is within the formation range of the inspection hole 63.
  • the slide rail of the linear guide 68 corresponding to the inspection hole 64 which is a long hole is installed on one of the left and right sides of the inspection hole 64 so that the longitudinal direction thereof is parallel to the longitudinal direction of the inspection hole 64, and one end of the slide rail. It is connected to the output shaft of the adjustment motor 68 '. Further, the slider of the linear guide 68 is slidably provided on the slide rail, and another optical measurement unit 8 is attached to the slider of the linear guide 68, and the imaging range thereof faces the inspection hole 64. In the range where the inspection hole 64 is formed.
  • the linear guide 69 corresponding to the inspection hole 65 which is a long hole, includes a first linear guide portion 69-1 and a second linear guide portion 69-2.
  • the slide rail of the first linear guide portion 69-1 is installed horizontally above the inspection hole 65, and one end of the slide rail is connected to the output shaft of one of the adjustment motors 69-1 '. ing.
  • the slider of the first linear guide portion 69-1 is slidably provided on this slide rail.
  • one end of the slide rail of the second linear guide portion 69-2 is attached to the slider of the first linear guide portion 69-1, and the other end is the other adjustment motor 69-2 'of the adjustment motor 69'. Connected to the output shaft.
  • the slide rail of the second linear guide portion 69-2 is configured such that its longitudinal direction is perpendicular to the horizontal direction and parallel to the rear surface of the inspection table main body, and the second linear guide portion 69-2.
  • the slider is slidably provided on the slide rail of the second linear guide portion 69-2.
  • the optical measurement unit 8 is attached to the slider of the second linear guide portion 69-2, and its imaging range is opposite to the inspection hole 65 and is within the range of the inspection hole 65.
  • Adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2') are servo motors and are connected to a control unit (not shown).
  • the adjustment motors 66 ', 67', 68 'and 69' are controlled by the control unit based on the parameters input by the operator, thereby controlling the linear guides so that the optical measuring units 8 are moved to desired positions. Actuate to move to.
  • the cover 7 is attached to the front face through a hinge 9 so as to be openable and closable when viewed in the front-rear direction of the inspection table 6. As shown in FIG. 1A, when the cover 7 is opened, the placement area of the inspection table 6 is opened. And as shown to FIG. 1B, when the cover 7 is closed, the mounting area
  • the four optical measurement units 8 are respectively installed on the rear surface when viewed in the front-rear direction of the inspection table 6 and are configured to face the corresponding inspection holes as described above.
  • the four corners of the substrate C and the bonded material F are within the range of the four inspection holes 62, 63, 64, and 65, respectively.
  • the four optical measuring units 8 are respectively opposed to the four corners of the substrate C and the bonded product F, and at the four corners, the edge of the bonded product F and the bonded product F through inspection holes. The distance between the edge of the substrate C and the edge of the substrate C is measured optically (see FIG. 6).
  • FIG. 5 is an explanatory view showing the structure of the optical measurement unit 8 of the sticking position inspection apparatus.
  • each of the four optical measurement units 8 includes a mounting bracket 80, an annular light source 81, a CCD camera 82, and an image processing means 83.
  • the mounting bracket 80 is fixed to the slider of the corresponding linear guide (see reference numerals 66, 67, 68, and 69 (69-1 and 69-2)). Can move.
  • An annular light source 81 is attached to the mounting bracket 80, and its light emitting surface faces a corresponding inspection hole (see reference numerals 62, 63, 64, 65) in the inspection table main body, and the substrate C and Light is irradiated to a portion of the bonded product F in the range where the inspection hole is formed.
  • the CCD camera 82 is attached to the mounting bracket 80 via a holder, and is installed on the opposite side of the corresponding inspection hole with the annular light source 81 interposed therebetween.
  • the lens that is the imaging end of the camera 82 faces the substrate C and the bonded object F through the center hole of the annular light source 81 and the corresponding inspection hole.
  • the CCD camera 82 uses the light emitted from the annular light source 81 and reflected by the substrate C and the bonded product F in the direction of the lens to image the substrate C and the bonded product F. An image signal is generated, and the image signal is transmitted to the image processing means 83.
  • the image processing means 83 is connected to the CCD camera 82, the control unit, the display unit RD, and the like, and uses the image signal from the CCD camera 82 and the edge of the bonded material F and the bonded material F.
  • the distance between the edges of the substrate C parallel to the edges is calculated, and the calculated results are transmitted to the display unit RD.
  • the operation panel SD includes an operation button for the operator to turn on and off the sticking position inspection device, and a touch-type panel for the operator to input various parameters.
  • the display unit RD is connected to the image processing unit 83, the operation panel SD, and the like, and displays an image from the image processing unit 83, a measurement result, and parameters input by the operator from the operation panel SD.
  • the control unit includes adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2'), annular light source 81, CCD camera 82, image processing means 83, operation panel SD, display unit RD. 1) the operation of receiving and storing parameters input by the operator using the operation panel SD, and 2) the adjustment motors 66 ′ according to the input parameters of 1) above, 67 ', 68', 69 '(69-1', 69-2 '), 3) receiving and storing information from the image processing means 83, 4) pre-stored The operation of controlling the operation of the annular light source 81, the CCD camera 82 and the image processing means 83 based on the control program, and 5) the display unit RD so as to display the various parameters 1) and 3) and other information. To control work and To do.
  • FIG. 6 is an explanatory view showing an image of a substrate on which a bonded object is imaged by annular illumination.
  • 7A and 7B are flowcharts showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
  • step S10 After the operator turns on the sticking position inspection device with the operation panel SD in step S10, the process proceeds to step S11. In step S ⁇ b> 11, the operator sets the substrate C on which the bonded material F is attached to the placement area on the inspection table 6.
  • the CCD camera 82 is switched to the operating state by the control of the control unit, images the substrate C and the bonded material F set in the placement area, and displays the captured image on the display unit RD.
  • step S12 the operator inputs the target value to which the optical measurement unit 8 moves by operating the panel SD while viewing the image displayed on the display unit RD, and the substrate C and the bonded object.
  • the position of each optical measurement unit 8 is adjusted so that the edge of F falls within the imaging range.
  • step S13 the edge of the bonding thing F parallel to the edge of the board
  • substrate C Determine whether the distance between can be measured. If it is determined in step S13 that measurement cannot be performed, the process returns to step S12.
  • step S13 determines whether the measurement can be performed. If it is determined in step S13 that the measurement can be performed, the process proceeds to step S14, where the control unit generates a recipe D1 that matches the size of the substrate C, and this recipe D1 and each optical corresponding to the recipe D1.
  • the respective positions of the measuring unit 8 are stored correspondingly.
  • step S15 finish the recipe creation.
  • step S14 the process returns to step S11 to set a substrate C of another size on which the bonded material F is pasted in the placement area on the inspection table 6, and repeat steps S12 to S14. , Dn and the position of each optical measurement unit 8 corresponding to the recipe D2, D3,.
  • step S21 the operator positions the substrate C on which the bonded material F is attached to the placement area on the inspection table 6.
  • step S22 the operator determines whether or not a recipe Di matching the size of the substrate C to be measured is stored in the pasting position inspection apparatus.
  • step S22 If it is determined in step S22 that the recipe Di matched to the size of the substrate C measured is not stored in the sticking position inspection apparatus, the process proceeds to step S23 ′ and returns to the “recipe creation flow”. Recipe Di is created by performing the operation of step S15.
  • step S22 if it is determined in step S22 that the recipe Di matching the size of the substrate C measured in step S22 is stored in the pasting position inspection apparatus, in step S23, the operator displays the response displayed on the operation panel SD. This recipe is selected by touching the recipe Di to be performed, and the process proceeds to step S24.
  • step S24 the control unit reads the target position data of each optical measurement unit 8 in accordance with the recipe Di. And after the process of step S24 is completed, it progresses to step S25.
  • step S25 the control unit transmits a drive instruction to each adjustment motor 66 ', 67', 68 ', 69' based on the control program in accordance with the read target position data of each optical measurement unit 8, and each adjustment is performed.
  • Each optical measurement unit 8 is adjusted to the target position by rotating the motors 66 ', 67', 68 ', 69' by a predetermined amount.
  • step S26 the control unit issues an instruction to the annular light source 81 and the CCD camera 82 of each optical measurement unit 8 to cause the annular light source 81 to emit light and control the CCD camera 82 to perform an imaging operation.
  • step S27 the control unit transmits the image captured by the CCD camera 82 to the image processing unit 83, and the image processing unit 83 performs the CCD processing in the width direction and the vertical direction of the substrate C as shown in FIG. Control is performed so as to calculate a distance L1 and a distance L2 between the edge of the substrate C and the edge of the bonded object F parallel to the edge of the substrate C from the image data from the camera 82. And after the process of step S27 is completed, it progresses to step S28.
  • step S28 the control unit stores the calculation results (distances L1, L2) of the image processing means 83 and controls the calculation results of the image processing means 83 to be transmitted to the display unit RD.
  • step S28 the process proceeds to step S29, the sticking position inspection device is turned off, and the quality inspection is terminated.
  • the four optical measuring units 8 allow the substrate C (for example, a glass substrate) parallel to the edge of the bonded object F (for example, a polarizing film) and the edge of the bonded object F at four corners. Since the distance between each of the edges of the rectangular substrate F can be optically measured, the rectangular bonded object F bonded on the substrate C so that the four sides are parallel to the four sides of the rectangular substrate C, respectively.
  • a sticking position inspection apparatus capable of improving the inspection accuracy of the sticking position in the case is obtained.
  • the substrate interferes with the optical measurement unit when the substrate with the bonded material is placed on or taken out of the inspection table. Can be prevented.
  • the cover By installing a cover that can be opened and closed on the front surface of the inspection table, the cover can be closed during the inspection process, and the measurement of the attachment position of the bonded object by the optical measurement unit can be made more accurate.
  • each optical measurement unit 8 is slidably installed on the rear surface of the inspection table 6 via the linear guides 66, 67, 68, 69.
  • the present invention is not limited to this.
  • One or more of the optical measurement units 8 may be immediately attached to the rear surface of the inspection table 6.
  • the adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2') can be omitted.
  • the first linear guide portion 69-1 and the second linear guide portion 69- are used as means for moving the optical measurement unit 8 near the inspection hole 65 along the longitudinal direction of the inspection hole 65.
  • the present invention is not limited to this, and a linear guide whose longitudinal direction of the slide rail coincides with the longitudinal direction of the inspection hole 65 is installed in the vicinity of the inspection hole 65.
  • the optical measurement unit 8 near the inspection hole 65 may be attached to the slider of this linear guide.
  • an adjustment motor having an output shaft connected to the slide rail of the corresponding linear guide is provided, and the position of each optical measurement unit 8 is automatically adjusted by the adjustment motor.
  • the present invention is not limited to this, and the adjustment motor may be omitted and the position of each optical measurement unit 8 may be manually adjusted.
  • each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ are installed on the rear surface of the inspection table 6.
  • a mounting frame facing the inspection table 6 and spaced from the front surface of the inspection table 6 by a predetermined distance is installed on the front surface of the inspection table 6, and each linear guide 66, 67, 68, 69 and each adjustment motor 66 ', 67'. 68 ', 69' may be mounted on the mounting frame, and each optical measuring unit 8 may be installed on the corresponding linear guide slider. That is, each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ can be installed on the front surface of the inspection table 6.
  • the inspection holes 62, 63, 64, 65 formed in the inspection table 6 and the cover 7 attached to the inspection table 6 can be omitted.
  • each optical measurement unit 8 each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ are installed on the rear surface of the inspection table 6.
  • the installation of the linear guides 66, 67, 68, 69 and the adjustment motors 66 ', 67', 68 ', 69', etc. is omitted, the inspection table 6 faces the inspection table 6 on the front surface of the inspection table 6, and the inspection table 6
  • the inspection holes 62, 63, 64, 65 formed in the inspection table 6 and the cover 7 attached to the inspection table 6 can be omitted.
  • the cover 7 is attached to the inspection table 6 via a hinge, but is not limited to this.
  • One of the inspection table 6 and the cover 7 is provided with a slide rail, the other is provided with a slider, and the cover 7 is configured to be openable and closable with respect to the inspection table 6 by attaching the slider to the slide rail. You can also.

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Abstract

In the present invention, disclosed is a bonding position inspection device for inspecting bonding positions, on a rectangular substrate, of a rectangular bonded article that has been bonded so as to have four sides each parallel to the four sides of the substrate. This bonding position inspection device is provided with: an inspection table on which is formed a placement region for placing thereon a substrate to which a bonded article has been bonded; four optical measurement units that are mounted onto the inspection table, face four corners of the substrate and four corners of the bonded article, and optically measure distances between side edges of the bonded article and side edges of the substrate parallel to the side edges of the bonded article, at the four corners; and a measurement result display unit that is connected to the four optical measurement units and displays, as a measurement result, the distances respectively measured by the four optical measurement units. Due to this configuration, it is possible to improve the accuracy of inspection of bonding positions, on a rectangular substrate, of a rectangular bonded article that has been bonded so as to have four sides each parallel to the four sides of the substrate.

Description

貼付位置検査装置Sticking position inspection device
　本発明は、貼付位置検査装置に関する。 The present invention relates to a pasting position inspection apparatus.
　液晶ディスプレー（ＬＣＤ）、プラズマディスプレイ（ＰＤＰ）、エレクトロルミネッセンスディスプレー（ＥＬＤ）などの画像表示装置は、その優れている性能で注目されている。そのため、画像表示装置にとって肝心な構成部分の１つである表示パネルの製造技術も益々注目されている。 Image display devices such as a liquid crystal display (LCD), a plasma display (PDP), and an electroluminescence display (ELD) are attracting attention for their excellent performance. For this reason, a display panel manufacturing technique, which is one of the essential components for an image display apparatus, has attracted more and more attention.
　表示パネルの製造において、表示パネルの表示機能を実現するために、光学素子（例えば、液晶セル）に光学フィルム（例えば、偏光フィルム）を貼り付ける必要がある。ここで、光学フィルムの貼付精度は、製品となった表示パネルの表示品質に密に関連している。したがって、光学フィルムを光学素子に貼り付けた後、光学素子における光学フィルムの貼付位置を検査する必要がある。 In manufacturing a display panel, it is necessary to attach an optical film (for example, a polarizing film) to an optical element (for example, a liquid crystal cell) in order to realize the display function of the display panel. Here, the sticking accuracy of the optical film is closely related to the display quality of the display panel as a product. Therefore, after the optical film is attached to the optical element, it is necessary to inspect the attachment position of the optical film in the optical element.
　このために、特許文献１には、このような検査機能を実現できる装置が提案されている。図８Ａ及び図８Ｂに示すように、特許文献１における表示パネル検査装置は、表示パネル４０が載置される光透過部１４と、載置される表示パネル４０のガラス基板４１、４２の連続する二辺を位置決めする位置決め部１５と、該位置決め部１５に当接させたガラス基板４１、４２の周縁からガラス基板４１、４２に貼り付けられた偏光板４４、４５の周縁までの距離を測定する距離測定部材１６とを有する検査台１１を備えている。測定に際しては、図８Ｂに示すように、表示パネル４０のガラス基板４１、４２の周縁４１ａ、４２ａの連続する二辺をそれぞれ位置決め部１５の内面１５ａに当接させる。この時、位置決め部１５の内面１５ａから測定棒１６ｃの先端１６ｃ‐１までの距離Ｌが、ガラス基板４１、４２の周縁から偏光板４４、４５の周縁までの距離と一致する。 For this reason, Patent Document 1 proposes an apparatus that can realize such an inspection function. As shown in FIGS. 8A and 8B, the display panel inspection apparatus in Patent Document 1 includes a light transmission unit 14 on which the display panel 40 is placed and glass substrates 41 and 42 of the display panel 40 on which the display panel 40 is placed. The positioning part 15 for positioning two sides and the distance from the peripheral edge of the glass substrates 41 and 42 brought into contact with the positioning part 15 to the peripheral edge of the polarizing plates 44 and 45 attached to the glass substrates 41 and 42 are measured. An inspection table 11 having a distance measuring member 16 is provided. At the time of measurement, as shown in FIG. 8B, two continuous sides of the peripheral edges 41a and 42a of the glass substrates 41 and 42 of the display panel 40 are brought into contact with the inner surface 15a of the positioning portion 15, respectively. At this time, the distance L from the inner surface 15a of the positioning portion 15 to the tip 16c-1 of the measuring rod 16c coincides with the distance from the periphery of the glass substrates 41 and 42 to the periphery of the polarizing plates 44 and 45.
特開２００８－０１４６７４ＡJP2008-014673A
　しかしながら、特許文献１に記載された表示パネル検査装置は、側面から機械的に測定棒を押し当てて偏光板の貼付位置を測定しているため、側枠に接する３隅しか測定できず、測定精度が目標精度から外れるおそれがある。 However, since the display panel inspection apparatus described in Patent Document 1 measures the sticking position of the polarizing plate by mechanically pressing the measuring rod from the side, it can measure only three corners in contact with the side frame. The accuracy may deviate from the target accuracy.
　本発明はこのような実情に鑑みてなされたものであり、四辺がそれぞれ矩形状の基板の四辺と平行するように貼り合わせられた矩形状の貼り合せ物の当該基板上における貼付位置の検査精度を向上させることができる貼付位置検査装置を提供することを目的とする。 The present invention has been made in view of such a situation, and the inspection accuracy of the pasting position on the substrate of the rectangular bonded material bonded so that the four sides are parallel to the four sides of the rectangular substrate, respectively. An object of the present invention is to provide a sticking position inspection apparatus capable of improving the quality.
　上記課題を解決して上記目的を達成するために、本発明は、四辺がそれぞれ矩形状の基板の四辺と平行になるように貼り合わせられた矩形状の貼り合せ物の当該基板上における貼付位置を検査する貼付位置検査装置において、該貼り合せ物が貼り合せられた基板を載置する載置領域が形成される検査台と、該検査台に取り付けられ且つ該基板及び貼り合わせ物の４隅と対向して、それぞれ当該４隅において該貼り合わせ物の辺縁と該貼り合わせ物の当該辺縁に平行な基板の辺縁との間の距離を光学測定する４つの光学測定ユニットと、該４つの光学測定ユニットに接続されており、該４つの光学測定ユニットのそれぞれにより測定された距離を測定結果として表示する測定結果表示ユニットとを備えている貼付位置検査装置を提供する。 In order to solve the above-described problems and achieve the above object, the present invention provides a bonding position on a substrate of a rectangular bonded material bonded so that the four sides are parallel to the four sides of the rectangular substrate. In a pasting position inspection apparatus for inspecting a substrate, an inspection table on which a mounting area for mounting a substrate on which the bonded material is bonded is formed, and four corners of the substrate and the bonded material are attached to the inspection table. Four optical measurement units that optically measure the distance between the edge of the bonded object and the edge of the substrate parallel to the edge of the bonded object at the four corners, Provided is a sticking position inspection apparatus that is connected to four optical measurement units and includes a measurement result display unit that displays distances measured by the four optical measurement units as measurement results.
　本発明によれば、４つの光学測定ユニットによって、４隅において貼り合せ物（例えば、偏光フィルム）の辺縁と当該貼り合せ物の辺縁に平行な基板（例えば、ガラス基板）の辺縁との間の距離をそれぞれ光学測定することができるので、四辺がそれぞれ矩形状の基板の四辺と平行になるように貼り合わせられた矩形状の貼り合せ物の当該基板上における貼付位置の検査精度を向上させることができる貼付位置検査装置を提供することができる。 According to the present invention, the four optical measurement units allow the edges of the bonded product (for example, a polarizing film) and the edges of the substrate (for example, a glass substrate) to be parallel to the edges of the bonded material at the four corners. Since the distance between each can be optically measured, the inspection accuracy of the pasting position on the substrate of the rectangular bonded product bonded so that the four sides are parallel to the four sides of the rectangular substrate can be improved. It is possible to provide a sticking position inspection device that can be improved.
　また、好ましくは、検査台の前後方向での前面に開閉可能に取り付けられており、開けられている時に載置領域を開放し、且つ閉められている時に載置領域を遮蔽するカバーをさらに設け、検査台上における載置領域内には前後に貫通する４つの検査孔を形成し、基板及び貼り合わせ物の４隅がそれぞれ４つの検査孔の範囲内に位置するようにし、４つの光学測定ユニットは、それぞれ検査台の前後方向での後面に取り付け、且つそれぞれ４つの検査孔と対向するように構成する。 Preferably, the inspection table is attached to the front surface in the front-rear direction so as to be openable and closable, and further provided with a cover that opens the placement area when opened and shields the placement area when closed. In the mounting area on the inspection table, four inspection holes penetrating in the front-rear direction are formed so that the four corners of the substrate and the bonded object are respectively located within the range of the four inspection holes, and four optical measurements are made. Each of the units is attached to the rear surface in the front-rear direction of the inspection table, and is configured to face each of the four inspection holes.
　これにより、光学測定ユニットを検査台の後面に設置することで、貼り合せ物の貼り付けられた基板が検査台に対する載置又は取り出される時に光学測定ユニットとの干渉を防止できる。そして、検査台の前面に開閉可能なカバーを設置することで、検査過程においてこのカバーを閉めることができ、光学測定ユニットによる貼り合せ物の貼付位置の測定を、より正確にすることができる。 Thus, by installing the optical measurement unit on the rear surface of the inspection table, it is possible to prevent interference with the optical measurement unit when the substrate to which the bonded object is attached is placed on or taken out of the inspection table. Then, by installing a cover that can be opened and closed on the front surface of the inspection table, the cover can be closed during the inspection process, and the measurement of the attachment position of the bonded object by the optical measurement unit can be made more accurate.
　また、好ましくは、４つの光学測定ユニットのそれぞれは、４つの検査孔のうちの１つの検査孔と対向するように配置し、当該検査孔を介して、基板及び貼り合わせ物の当該検査孔の範囲内にある部分に光を照射するように光源を設け、該光源が発光したとき、基板及び貼り合わせ物によって反射された光により、基板及び貼り合わせ物を撮像する撮像手段と、該撮像手段及び測定結果表示ユニットに接続され、撮像手段によって撮像された画像から貼り合わせ物の辺縁と当該辺縁に平行な当該基板の辺縁との間の距離を演算し、当該距離を測定結果表示ユニットに送信する画像処理手段とを設ける。 Preferably, each of the four optical measurement units is disposed so as to face one of the four inspection holes, and the inspection hole of the substrate and the bonded object is interposed through the inspection hole. A light source is provided so as to irradiate light on a portion within the range, and when the light source emits light, an imaging unit that images the substrate and the bonded object with light reflected by the substrate and the bonded object, and the imaging unit The distance between the edge of the bonded object and the edge of the substrate parallel to the edge is calculated from the image captured by the imaging means connected to the measurement result display unit, and the distance is displayed as the measurement result. Image processing means for transmitting to the unit.
　これにより、撮像手段を用いて、光源からの光によって基板及び貼り合せ物の画像を撮像することができ、貼り合せ物の辺縁と基板の辺縁との間の距離を正確に測定することができるようになる。 Thereby, the image of the substrate and the bonded object can be imaged by the light from the light source using the imaging means, and the distance between the edge of the bonded object and the edge of the substrate is accurately measured. Will be able to.
　また、好ましくは、撮像手段は、光源を挟んで検査孔とは相対する側に設置される。 Also preferably, the imaging means is installed on the side facing the inspection hole across the light source.
　また、好ましくは、貼付位置検査装置において、４つの検査孔のうちの１つは円孔とし、当該円孔と隣り合うほかの２つの検査孔は長手方向が互いに垂直で延長線が当該円孔を通過する長孔とし、当該円孔と対角線位置にある検査孔はほかの２つの検査孔に対し斜めに形成され且つ延長線が当該円孔を通過する長孔であり、検査台は、長孔となる検査孔のそれぞれの付近にレール機構を備え、長孔となる検査孔と対向する光学測定ユニットは、それぞれ対応する検査孔の長手方向に沿って移動できるように相応するレール機構にスライド可能に取り付けられるように構成する。 Preferably, in the sticking position inspection device, one of the four inspection holes is a circular hole, and the other two inspection holes adjacent to the circular hole are perpendicular to each other in the longitudinal direction and the extension line is the circular hole. The inspection hole located diagonally to the circular hole is formed obliquely with respect to the other two inspection holes, and the extension line is a long hole passing through the circular hole. A rail mechanism is provided in the vicinity of each inspection hole that becomes a hole, and the optical measurement unit that faces the inspection hole that is a long hole slides in a corresponding rail mechanism so that it can move along the longitudinal direction of the corresponding inspection hole. Configure to be able to be attached.
　これにより、基板及び貼り合せ物のサイズに応じて、光学測定ユニットを適当な位置に移動させることができるため、同一の貼付位置検査装置でサイズが異なる種々の基板を測定することができるようになる。 Thereby, since the optical measurement unit can be moved to an appropriate position according to the size of the substrate and the bonded object, various substrates having different sizes can be measured by the same application position inspection apparatus. Become.
　また、好ましくは、貼付位置検査装置において、検査台は円孔となる検査孔の付近にレール機構を備え、円孔となる検査孔と対向する光学測定ユニットは、当該円孔の範囲内で移動できるように当該レール機構にスライド可能に取り付けられる。 Preferably, in the sticking position inspection apparatus, the inspection table includes a rail mechanism in the vicinity of the inspection hole that becomes a circular hole, and the optical measurement unit that faces the inspection hole that becomes the circular hole moves within the range of the circular hole. It is slidably attached to the rail mechanism so that it can.
　これにより、基板における貼り合せ物の貼付位置に応じて、円孔付近にある光学測定ユニットを最適な測定位置に移動させることができる。 Thereby, the optical measurement unit in the vicinity of the circular hole can be moved to the optimum measurement position according to the attachment position of the bonded object on the substrate.
　また、好ましくは、検査台は、各レール機構と対応して設置された、対応する光学測定ユニットをレール機構に沿って移動するように駆動する駆動ユニットをさらに備え、各光学測定ユニットを所望の位置まで移動させるように駆動ユニットを制御する制御ユニットをさらに備える構成とする。 Preferably, the inspection table further includes a drive unit that is installed corresponding to each rail mechanism and that drives the corresponding optical measurement unit so as to move along the rail mechanism. A control unit that controls the drive unit to move to a position is further provided.
　これにより、駆動ユニットによって光学測定ユニットを基板サイズに合わせた位置に自動的に移動することができるので、検査効率を向上させることができる。 Thereby, the optical measurement unit can be automatically moved to a position according to the substrate size by the drive unit, so that the inspection efficiency can be improved.
　また、好ましくは、カバーはヒンジを介して検査台に開閉可能に取り付けられる。 Also preferably, the cover is attached to the examination table via a hinge so as to be openable and closable.
　これにより、簡単な構造で、検査台における載置領域を開閉することができるようになる。 This makes it possible to open and close the placement area on the inspection table with a simple structure.
　また、好ましくは、貼付位置検査装置において、検査台及びカバーの一方にはスライドレールを備え、他方にはスライダを備え、カバーは、スライダをスライドレールに対し相対的にスライド可能に取り付けることで、検査台に対して開閉できるように構成される。 Preferably, in the pasting position inspection device, one of the inspection table and the cover is provided with a slide rail, the other is provided with a slider, and the cover is attached so that the slider can slide relative to the slide rail. It is configured to be openable and closable with respect to the examination table.
　これにより、簡単な構造で、検査台における載置領域を開閉することができる。 This makes it possible to open and close the placement area on the inspection table with a simple structure.
　また、好ましくは、貼付位置検査装置において、検査台の前面には、当該検査台と対向し且つ当該検査台の前面と所定の間隔を隔てる取付フレームが設置され、４つの光学測定ユニットは、それぞれ当該取付フレームを介して検査台に取り付けられるようにする。 Preferably, in the pasting position inspection device, an attachment frame is installed on the front surface of the inspection table so as to face the inspection table and to be spaced from the front surface of the inspection table by a predetermined distance. It can be attached to the inspection table via the mounting frame.
　これにより、検査台に検査孔を加工する工程を省略することができ、さらにはカバーを必要とすることなく検査することができるため、構造を簡単にすることができる。 This makes it possible to omit the process of processing the inspection hole in the inspection table, and furthermore, since the inspection can be performed without the need for a cover, the structure can be simplified.
図１Ａは本発明の実施形態における貼付位置検査装置を示す正面図であり、カバーを開ける状態を示す。FIG. 1A is a front view showing a sticking position inspection apparatus according to an embodiment of the present invention, and shows a state where a cover is opened. 図１Ｂは本発明の実施形態における貼付位置検査装置を示す正面図であり、カバーを閉める状態を示す。FIG. 1B is a front view showing the sticking position inspection apparatus in the embodiment of the present invention, and shows a state in which the cover is closed. 図２は基板が載置されている状態の貼付位置検査装置を示す正面図である。FIG. 2 is a front view showing the sticking position inspection apparatus in a state where the substrate is placed. 図３は本発明の実施形態における貼付位置検査装置を示す側面図である。FIG. 3 is a side view showing the sticking position inspection apparatus in the embodiment of the present invention. 図４は貼付位置検査装置の検査台を後側から見た説明図である。FIG. 4 is an explanatory view of the inspection table of the sticking position inspection device as viewed from the rear side. 図５は貼付位置検査装置の光学測定ユニットの構造を示す説明図である。FIG. 5 is an explanatory view showing the structure of the optical measurement unit of the sticking position inspection apparatus. 図６は環状照明により撮像した貼り合せ物が貼り付けられた基板の画像を示す説明図である。FIG. 6 is an explanatory view showing an image of a substrate on which a bonded object imaged by annular illumination is attached. 図７Ａは本発明の実施形態における貼付位置検査装置の作動を示すフロー図である。FIG. 7A is a flowchart showing the operation of the sticking position inspection apparatus in the embodiment of the present invention. 図７Ｂは本発明の実施形態における貼付位置検査装置の作動を示すフロー図である。FIG. 7B is a flowchart showing the operation of the sticking position inspection apparatus in the embodiment of the present invention. 図８Ａは従来技術の表示パネル検査装置を示す説明図である。FIG. 8A is an explanatory view showing a conventional display panel inspection apparatus. 図８Ｂは従来技術の表示パネル検査装置を示す説明図である。FIG. 8B is an explanatory view showing a conventional display panel inspection apparatus.
　以下、図面を参照しながら本発明の実施形態における貼付位置検査装置を説明する。 Hereinafter, a sticking position inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.
　なお、本実施形態において、検査対象は、矩形状の貼り合せ物Ｆを四辺がそれぞれ矩形状の基板Ｃの四辺と平行になるように当該基板Ｃに貼り付けた構成のものである。 In this embodiment, the inspection target is a structure in which a rectangular bonded object F is bonded to the substrate C so that the four sides are parallel to the four sides of the rectangular substrate C.
＜貼付位置検査装置の構造＞
　図１Ａ及び図１Ｂは本発明の実施形態における貼付位置検査装置を示す正面図であり、図１Ａはカバー７を開けた状態、図１Ｂはカバー７を閉めた状態を示す。図２は基板Ｃが載置されている状態の貼付位置検査装置を示す正面図である。図３は貼付位置検査装置を示す側面図である。図４は検査台６を後側から見た説明図である。 <Structure of sticking position inspection device>
1A and 1B are front views showing a sticking position inspection apparatus according to an embodiment of the present invention. FIG. 1A shows a state where the cover 7 is opened, and FIG. 1B shows a state where the cover 7 is closed. FIG. 2 is a front view showing the sticking position inspection apparatus in a state where the substrate C is placed. FIG. 3 is a side view showing the sticking position inspection apparatus. FIG. 4 is an explanatory view of the inspection table 6 viewed from the rear side.
　図１Ａ～図３に示すように、貼付位置検査装置は、主に、支持フレーム５と、該支持フレーム５に支持される検査台６と、ヒンジ９を介して検査台６の前面に取り付けられる観音開き状のカバー７と、検査台６の後面に取り付けられる４つの光学測定ユニット８と、検査台６に固定される操作パネルＳＤと、検査台６に固定される表示ユニットＲＤと、図示しない制御ユニットとを備えている。 As shown in FIGS. 1A to 3, the sticking position inspection apparatus is attached to the front surface of the inspection table 6 mainly through a support frame 5, an inspection table 6 supported by the support frame 5, and a hinge 9. A double-sided cover 7, four optical measurement units 8 attached to the rear surface of the inspection table 6, an operation panel SD fixed to the inspection table 6, a display unit RD fixed to the inspection table 6, and a control (not shown) Unit.
　支持フレーム５は、他の各部材を支持するためのものであり、ベースと、該ベースから下方に延出し、地面に接する支持脚と、ベースの背面から所定の高さまで上方に延出する後支持板とを有する。 The support frame 5 is for supporting each other member, and extends downward from the base, the support leg in contact with the ground, and extends upward from the back surface of the base to a predetermined height. And a support plate.
　検査台６は、板状の検査台本体と、長手方向が水平方向に沿うように該検査台本体の前面に設置された長尺状の位置決め板６０と、長手方向が該位置決め板６０の長手方向に垂直な方向に沿うように検査台本体の前面に設置された長尺状の位置決め板６１と、検査台本体に形成された、前後方向に貫通する４つの検査孔６２、６３、６４、６５と、検査台本体の後面に設置される４組のリニアガイド６６、６７、６８、６９（６９-１、６９-２）と、検査台本体の後面に設置される４組の調整モータ６６′、６７′、６８′、６９′（６９-１′、６９-２′）とを有する。 The inspection table 6 includes a plate-shaped inspection table main body, a long positioning plate 60 installed on the front surface of the inspection table main body so that the longitudinal direction is in the horizontal direction, and the longitudinal direction is the longitudinal direction of the positioning plate 60. A long positioning plate 61 installed on the front surface of the inspection table main body along the direction perpendicular to the direction, and four inspection holes 62, 63, 64 formed in the inspection table main body and penetrating in the front-rear direction. 65, four sets of linear guides 66, 67, 68, 69 (69-1, 69-2) installed on the rear surface of the inspection table main body, and four sets of adjustment motors 66 installed on the rear surface of the inspection table main body. ', 67', 68 ', 69' (69-1 ', 69-2').
　検査台本体は、両位置決め板６０、６１とともに、貼り合せ物Ｆが貼り付けられた基板Ｃを載置し、位置決めする載置領域を区画する。板状の検査台本体は、貼り合せ物Ｆが貼り付けられた基板Ｃを載置するものであり、全体として後傾姿勢で支持フレーム５のベースの前部と後支持板の上部との間に支持されており、長尺状の両位置決め板６０、６１のそれぞれは、基板Ｃの隣り合う二辺と面接触して、貼り合せ物Ｆが貼り付けられた基板Ｃを検査台本体に位置決めするものである。 The inspection table main body places both the positioning plates 60 and 61 together with the substrate C on which the bonded material F is pasted, and divides a placement area for positioning. The plate-shaped inspection table main body is used to place the substrate C on which the bonded object F is attached, and as a whole between the front portion of the base of the support frame 5 and the upper portion of the rear support plate in a tilted posture. Each of the long positioning plates 60 and 61 is in surface contact with two adjacent sides of the substrate C, and positions the substrate C on which the bonded material F is adhered to the inspection table main body. To do.
　４つの検査孔６２、６３、６４、６５のうち、１つの検査孔６２（図１Ａでは右下方の検査孔）は円孔であり、検査台本体の、両位置決め板６０、６１の延長線の交差位置付近にある部分に形成されており、当該円孔と隣り合うほかの両検査孔６３、６４（図１Ａでは左下方及び右上方の検査孔）は、長手方向が互いに垂直で、それぞれの延長線が当該円孔６２を通過する長孔であり、そして、当該円孔と対角線位置にある検査孔６５（図１Ａでは左上方の検査孔）は、他の両検査孔６３、６４に対して斜めに形成され且つ延長線が当該円孔を通過する長孔である。 Of the four inspection holes 62, 63, 64, 65, one inspection hole 62 (the inspection hole on the lower right in FIG. 1A) is a circular hole, and is an extension of both positioning plates 60, 61 of the inspection table body. The other inspection holes 63 and 64 (inspection holes on the lower left and upper right in FIG. 1A) that are formed in a portion near the crossing position and are adjacent to the circular hole are perpendicular to each other in the longitudinal direction. The extension line is a long hole that passes through the circular hole 62, and the inspection hole 65 (the upper left inspection hole in FIG. 1A) at a position diagonal to the circular hole is relative to the other inspection holes 63 and 64. The elongated line is an elongated hole that is formed obliquely and passes through the circular hole.
　図４に示すように、４組のリニアガイド６６、６７、６８、６９は、それぞれ検査台本体の後面において４つの検査孔６２、６３、６４、６５付近に設置され、後述する４つの光学測定ユニット８のそれぞれは、各検査孔６２、６３、６４、６５の長手方向に沿って移動できるように対応する４組のリニアガイド６６、６７、６８、６９に取り付けられ、４組の調整モータ６６′、６７′、６８′、６９′は、それぞれ検査台本体の後面において４つのリニアガイド６６、６７、６８、６９と対応して設置され、後述する４つの光学測定ユニット８を各検査孔６２、６３、６４、６５の長手方向に沿って移動させるように作動する。 As shown in FIG. 4, four sets of linear guides 66, 67, 68, 69 are installed in the vicinity of the four inspection holes 62, 63, 64, 65 on the rear surface of the inspection table main body, respectively, and four optical measurements described later. Each of the units 8 is attached to four sets of linear guides 66, 67, 68, 69 so as to be movable along the longitudinal direction of each of the inspection holes 62, 63, 64, 65. ′, 67 ′, 68 ′, and 69 ′ are installed on the rear surface of the inspection table main body in correspondence with the four linear guides 66, 67, 68, and 69, respectively. , 63, 64, 65 to move along the longitudinal direction.
　具体的には、円孔となる検査孔６２に対応するリニアガイド６６のスライドレールは、検査孔６２の下方に水平方向に沿って設置され、且つ、その一端が調整モータ６６′の出力軸に接続されている。また、該リニアガイド６６のスライダがこのスライドレールにスライド可能に設けられ、１つの光学測定ユニット８がこのリニアガイド６６のスライダに取り付けられ、その撮像範囲が検査孔６２と対向するとともに、検査孔６２の範囲内にある。 Specifically, the slide rail of the linear guide 66 corresponding to the inspection hole 62 that is a circular hole is installed along the horizontal direction below the inspection hole 62, and one end of the slide rail serves as an output shaft of the adjustment motor 66 ′. It is connected. Further, the slider of the linear guide 66 is slidably provided on the slide rail, and one optical measurement unit 8 is attached to the slider of the linear guide 66. The imaging range thereof faces the inspection hole 62, and the inspection hole. It is in the range of 62.
　長孔である検査孔６３に対応するリニアガイド６７のスライドレールは該検査孔６３の下方に水平方向に設置され、且つ、その一端が調整モータ６７′の出力軸に接続されている。また、該リニアガイド６７のスライダは、該スライドレールにスライド可能に設けられ、もう１つの光学測定ユニット８がこのリニアガイド６７のスライダに取り付けられ、その撮像範囲が検査孔６３と対向するとともに、検査孔６３の形成範囲内にある。 The slide rail of the linear guide 67 corresponding to the inspection hole 63 which is a long hole is installed horizontally below the inspection hole 63, and one end thereof is connected to the output shaft of the adjustment motor 67 '. Further, the slider of the linear guide 67 is slidably provided on the slide rail, and another optical measurement unit 8 is attached to the slider of the linear guide 67, and its imaging range is opposed to the inspection hole 63. It is within the formation range of the inspection hole 63.
　長孔である検査孔６４に対応するリニアガイド６８のスライドレールは、長手方向が検査孔６４の長手方向と平行になるように、該検査孔６４の左右両側の一方に設置され、その一端が調整モータ６８′の出力軸に接続されている。また、リニアガイド６８のスライダは、このスライドレールにスライド可能に設けられ、さらにもう１つの光学測定ユニット８が、このリニアガイド６８のスライダに取り付けられ、その撮像範囲が検査孔６４と対向するとともに、検査孔６４の形成範囲内にある。 The slide rail of the linear guide 68 corresponding to the inspection hole 64 which is a long hole is installed on one of the left and right sides of the inspection hole 64 so that the longitudinal direction thereof is parallel to the longitudinal direction of the inspection hole 64, and one end of the slide rail. It is connected to the output shaft of the adjustment motor 68 '. Further, the slider of the linear guide 68 is slidably provided on the slide rail, and another optical measurement unit 8 is attached to the slider of the linear guide 68, and the imaging range thereof faces the inspection hole 64. In the range where the inspection hole 64 is formed.
　長孔である検査孔６５に対応するリニアガイド６９は、第１リニアガイド部６９-１と第２リニアガイド部６９-２とからなる。第１リニアガイド部６９-１のスライドレールは検査孔６５の上方に水平方向に設置され、且つ、その一端が調整モータ６９′のうちの１つの調整モータ６９-１′の出力軸に接続されている。第１リニアガイド部６９-１のスライダは、このスライドレールにスライド可能に設けられている。また、第２リニアガイド部６９-２のスライドレールの一端は第１リニアガイド部６９-１のスライダに取り付けられ、他端は調整モータ６９′のうちのもう１つの調整モータ６９-２′の出力軸に接続されている。そして、第２リニアガイド部６９-２のスライドレールは、その長手方向が水平方向に対して垂直であり且つ検査台本体の後面に平行になるように構成され、第２リニアガイド部６９-２のスライダは、第２リニアガイド部６９-２のスライドレールにスライド可能に設けられている。また、光学測定ユニット８は、第２リニアガイド部６９-２のスライダに取り付けられ、その撮像範囲が検査孔６５と対向するとともに、検査孔６５の範囲内にある。 The linear guide 69 corresponding to the inspection hole 65, which is a long hole, includes a first linear guide portion 69-1 and a second linear guide portion 69-2. The slide rail of the first linear guide portion 69-1 is installed horizontally above the inspection hole 65, and one end of the slide rail is connected to the output shaft of one of the adjustment motors 69-1 '. ing. The slider of the first linear guide portion 69-1 is slidably provided on this slide rail. Also, one end of the slide rail of the second linear guide portion 69-2 is attached to the slider of the first linear guide portion 69-1, and the other end is the other adjustment motor 69-2 'of the adjustment motor 69'. Connected to the output shaft. The slide rail of the second linear guide portion 69-2 is configured such that its longitudinal direction is perpendicular to the horizontal direction and parallel to the rear surface of the inspection table main body, and the second linear guide portion 69-2. The slider is slidably provided on the slide rail of the second linear guide portion 69-2. The optical measurement unit 8 is attached to the slider of the second linear guide portion 69-2, and its imaging range is opposite to the inspection hole 65 and is within the range of the inspection hole 65.
　調整モータ６６′、６７′、６８′、６９′（６９-１′、６９-２′）はサーボモータであり、図示しない制御ユニットと接続されている。調整モータ６６′、６７′、６８′、６９′は、制御ユニットによって操作者が入力したパラメータに基づいて制御されることで、各リニアガイドを制御して、各光学測定ユニット８を所望の位置に移動させるように作動する。 Adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2') are servo motors and are connected to a control unit (not shown). The adjustment motors 66 ', 67', 68 'and 69' are controlled by the control unit based on the parameters input by the operator, thereby controlling the linear guides so that the optical measuring units 8 are moved to desired positions. Actuate to move to.
　カバー７は、ヒンジ９を介して、検査台６の前後方向にみて前面に開閉可能に取り付けられている。図１Ａに示すように、カバー７は開けられている時に検査台６の載置領域を開放する。そして、図１Ｂに示すように、カバー７は閉められている時に検査台６の載置領域を遮蔽する。 The cover 7 is attached to the front face through a hinge 9 so as to be openable and closable when viewed in the front-rear direction of the inspection table 6. As shown in FIG. 1A, when the cover 7 is opened, the placement area of the inspection table 6 is opened. And as shown to FIG. 1B, when the cover 7 is closed, the mounting area | region of the test stand 6 is shielded.
　４つの光学測定ユニット８は、それぞれ検査台６の前後方向にみて後面に設置され、前述のように、対応する検査孔と対向するように構成されている。貼り合せ物Ｆが貼り付けられた基板Ｃを検査台６に載置する場合には、基板Ｃ及び貼り合せ物Ｆの４隅はそれぞれ４つの検査孔６２、６３、６４、６５の範囲内に位置し、４つの光学測定ユニット８は、それぞれ基板Ｃ及び貼り合せ物Ｆの４隅と対向して、当該４隅において、検査孔を介して貼り合せ物Ｆの辺縁と当該貼り合せ物Ｆの当該辺縁に平行な基板Ｃの辺縁との間の距離を光学的に測定する（図６参照）。 The four optical measurement units 8 are respectively installed on the rear surface when viewed in the front-rear direction of the inspection table 6 and are configured to face the corresponding inspection holes as described above. When the substrate C to which the bonded material F is attached is placed on the inspection table 6, the four corners of the substrate C and the bonded material F are within the range of the four inspection holes 62, 63, 64, and 65, respectively. The four optical measuring units 8 are respectively opposed to the four corners of the substrate C and the bonded product F, and at the four corners, the edge of the bonded product F and the bonded product F through inspection holes. The distance between the edge of the substrate C and the edge of the substrate C is measured optically (see FIG. 6).
　図５は、貼付位置検査装置の光学測定ユニット８の構造を示す説明図である。 FIG. 5 is an explanatory view showing the structure of the optical measurement unit 8 of the sticking position inspection apparatus.
　図５に示すように、４つの光学測定ユニット８のそれぞれは、取付ブラケット８０と、環状光源８１と、ＣＣＤカメラ８２と、画像処理手段８３とを有する。 As shown in FIG. 5, each of the four optical measurement units 8 includes a mounting bracket 80, an annular light source 81, a CCD camera 82, and an image processing means 83.
　取付ブラケット８０は、前述のように、対応するリニアガイド（符号６６、６７、６８、６９（６９-１、６９-２）を参照）のスライダに固定されており、このスライダとともにスライドレールに沿って移動することができる。 As described above, the mounting bracket 80 is fixed to the slider of the corresponding linear guide (see reference numerals 66, 67, 68, and 69 (69-1 and 69-2)). Can move.
　環状光源８１が取付ブラケット８０に取り付けられ且つその発光面が検査台本体における対応する検査孔（符号６２、６３、６４、６５を参照）と対向して、当該検査孔を介して、基板Ｃ及び貼り合せ物Ｆの、当該検査孔の形成範囲にある部分に光を照射する。 An annular light source 81 is attached to the mounting bracket 80, and its light emitting surface faces a corresponding inspection hole (see reference numerals 62, 63, 64, 65) in the inspection table main body, and the substrate C and Light is irradiated to a portion of the bonded product F in the range where the inspection hole is formed.
　ＣＣＤカメラ８２が、ホルダを介して取付ブラケット８０に取り付けられ、且つ、環状光源８１を挟んで対応する検査孔とは反対側に設置されている。そして、カメラ８２の撮像端であるレンズは、環状光源８１の中心孔及び対応する検査孔を介して、基板Ｃ及び貼り合せ物Ｆに対面する。ＣＣＤカメラ８２は、環状光源８１から射出され基板Ｃ及び貼り合せ物Ｆによってレンズの方向に反射された光を利用して基板Ｃ及び貼り合せ物Ｆを撮像し、基板Ｃ及び貼り合せ物Ｆの画像信号を生成して、該画像信号を画像処理手段８３に送信する。 The CCD camera 82 is attached to the mounting bracket 80 via a holder, and is installed on the opposite side of the corresponding inspection hole with the annular light source 81 interposed therebetween. The lens that is the imaging end of the camera 82 faces the substrate C and the bonded object F through the center hole of the annular light source 81 and the corresponding inspection hole. The CCD camera 82 uses the light emitted from the annular light source 81 and reflected by the substrate C and the bonded product F in the direction of the lens to image the substrate C and the bonded product F. An image signal is generated, and the image signal is transmitted to the image processing means 83.
　画像処理手段８３は、ＣＣＤカメラ８２、制御ユニット、及び表示ユニットＲＤ等と接続されており、ＣＣＤカメラ８２からの画像信号を利用して貼り合せ物Ｆの辺縁と当該貼り合せ物Ｆの当該辺縁に平行な基板Ｃの辺縁との間の距離（図６の符号Ｌ１、Ｌ２を参照）を演算するとともに、演算した結果を表示ユニットＲＤに送信する。 The image processing means 83 is connected to the CCD camera 82, the control unit, the display unit RD, and the like, and uses the image signal from the CCD camera 82 and the edge of the bonded material F and the bonded material F. The distance between the edges of the substrate C parallel to the edges (see symbols L1 and L2 in FIG. 6) is calculated, and the calculated results are transmitted to the display unit RD.
　操作パネルＳＤは、操作者が貼付位置検査装置をオン・オフにする操作ボタンと、該操作者が各種のパラメータを入力するタッチ式のパネルとを有する。 The operation panel SD includes an operation button for the operator to turn on and off the sticking position inspection device, and a touch-type panel for the operator to input various parameters.
　表示ユニットＲＤは、画像処理手段８３及び操作パネルＳＤ等と接続されており、画像処理手段８３からの画像と測定結果、操作者が操作パネルＳＤから入力したパラメータを表示する。 The display unit RD is connected to the image processing unit 83, the operation panel SD, and the like, and displays an image from the image processing unit 83, a measurement result, and parameters input by the operator from the operation panel SD.
　制御ユニットは、各調整モータ６６′、６７′、６８′、６９′（６９-１′、６９-２′）、環状光源８１、ＣＣＤカメラ８２、画像処理手段８３、操作パネルＳＤ、表示ユニットＲＤ等に接続されており、主に、１）操作者が操作パネルＳＤを用いて入力したパラメータを受信して記憶する作業と、２）上記１）の入力パラメータに応じて各調整モータ６６′、６７′、６８′、６９′（６９-１′、６９-２′）の作動を制御する作業と、３）画像処理手段８３からの情報を受信して記憶する作業と、４）予め格納した制御プログラムに基づいて環状光源８１、ＣＣＤカメラ８２及び画像処理手段８３の作動を制御する作業と、５）表示ユニットＲＤを、上記１）、３）の種々のパラメータ、その他の情報を表示するように制御する作業とを行なう。 The control unit includes adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2'), annular light source 81, CCD camera 82, image processing means 83, operation panel SD, display unit RD. 1) the operation of receiving and storing parameters input by the operator using the operation panel SD, and 2) the adjustment motors 66 ′ according to the input parameters of 1) above, 67 ', 68', 69 '(69-1', 69-2 '), 3) receiving and storing information from the image processing means 83, 4) pre-stored The operation of controlling the operation of the annular light source 81, the CCD camera 82 and the image processing means 83 based on the control program, and 5) the display unit RD so as to display the various parameters 1) and 3) and other information. To control work and To do.
＜貼付位置検査装置の作動＞
　図６は、環状照明により撮像した、貼り合せ物が貼り付けられた基板の画像を示す説明図である。図７Ａ及び図７Ｂは本発明の実施形態における貼付位置検査装置の作動を示すフロー図である。 <Operation of sticking position inspection device>
FIG. 6 is an explanatory view showing an image of a substrate on which a bonded object is imaged by annular illumination. 7A and 7B are flowcharts showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
　以下、図面を参照しながら本発明の実施形態における貼付位置検査装置の作動を説明する。 Hereinafter, the operation of the sticking position inspection apparatus according to the embodiment of the present invention will be described with reference to the drawings.
［レシピ作成フロー］
　まず、図７Ａに示すように、操作者がステップＳ１０において操作パネルＳＤによって貼付位置検査装置をオンにした後、ステップＳ１１へ進む。ステップＳ１１において、操作者は、貼り合せ物Ｆが貼り付けられた基板Ｃを検査台６における載置領域にセットする。 [Recipe creation flow]
First, as shown in FIG. 7A, after the operator turns on the sticking position inspection device with the operation panel SD in step S10, the process proceeds to step S11. In step S <b> 11, the operator sets the substrate C on which the bonded material F is attached to the placement area on the inspection table 6.
　このとき、ＣＣＤカメラ８２は制御ユニットの制御により作動状態に切り替えられ、載置領域にセットした基板Ｃ及び貼り合せ物Ｆを撮像して、撮像した画像を表示ユニットＲＤに表示する。 At this time, the CCD camera 82 is switched to the operating state by the control of the control unit, images the substrate C and the bonded material F set in the placement area, and displays the captured image on the display unit RD.
　続いて、ステップＳ１２において、操作者は、表示ユニットＲＤに表示された画像を見ながら、パネルＳＤを操作することで光学測定ユニット８が移動する目標値を入力して、基板Ｃ及び貼り合せ物Ｆの辺縁が撮像範囲に入るように各光学測定ユニット８の位置を調整する。 Subsequently, in step S12, the operator inputs the target value to which the optical measurement unit 8 moves by operating the panel SD while viewing the image displayed on the display unit RD, and the substrate C and the bonded object. The position of each optical measurement unit 8 is adjusted so that the edge of F falls within the imaging range.
　そして、基板Ｃ及び貼り合せ物Ｆの辺縁が撮像範囲に入った後、ステップＳ１３へ進んで、基板Ｃの辺縁と当該基板Ｃの当該辺縁に平行な貼り合せ物Ｆの辺縁との間の距離を測定できるかどうかを判断する。ステップＳ１３において測定ができないと判断した場合には、ステップＳ１２に戻る。 And after the edge of the board | substrate C and the bonding thing F entered into the imaging range, it progresses to step S13, and the edge of the bonding thing F parallel to the edge of the board | substrate C and the said edge of the said board | substrate C Determine whether the distance between can be measured. If it is determined in step S13 that measurement cannot be performed, the process returns to step S12.
　一方、ステップＳ１３において測定できると判断した場合には、ステップＳ１４へ進んで、制御ユニットによって上記の基板Ｃのサイズに合わせたレシピＤ１を生成するとともに、このレシピＤ１と、それが対応する各光学測定ユニット８のそれぞれの位置とを、対応して記憶する。 On the other hand, if it is determined in step S13 that the measurement can be performed, the process proceeds to step S14, where the control unit generates a recipe D1 that matches the size of the substrate C, and this recipe D1 and each optical corresponding to the recipe D1. The respective positions of the measuring unit 8 are stored correspondingly.
　最後にステップＳ１５へ進み、レシピの作成を終了する。また、ステップＳ１４が完了した後にステップＳ１１に戻って、貼り合せ物Ｆが貼り付けられた他のサイズの基板Ｃを検査台６における載置領域にセットしてステップＳ１２～ステップＳ１４を繰り返し、他のサイズに合わせたレシピＤ２、Ｄ３、……、Ｄｎ及びそれが対応する各光学測定ユニット８の位置を決定して記憶する。 Finally, the process proceeds to step S15 to finish the recipe creation. In addition, after step S14 is completed, the process returns to step S11 to set a substrate C of another size on which the bonded material F is pasted in the placement area on the inspection table 6, and repeat steps S12 to S14. , Dn and the position of each optical measurement unit 8 corresponding to the recipe D2, D3,.
［品質検査フロー］
　まず、図７Ｂに示すように、操作者がステップＳ２０において操作パネルＳＤによって貼付位置検査装置をオンにした後、ステップＳ２１へ進む。ステップＳ２１において、操作者は、貼り合せ物Ｆが貼り付けられた基板Ｃを、検査台６における載置領域に位置決めする。 [Quality inspection flow]
First, as shown in FIG. 7B, after the operator turns on the sticking position inspection apparatus by the operation panel SD in step S20, the process proceeds to step S21. In step S <b> 21, the operator positions the substrate C on which the bonded material F is attached to the placement area on the inspection table 6.
　続いて、ステップＳ２２において、操作者は、測定される基板Ｃのサイズに合わせたレシピＤｉが貼付位置検査装置に格納されているかどうかを判断する。 Subsequently, in step S22, the operator determines whether or not a recipe Di matching the size of the substrate C to be measured is stored in the pasting position inspection apparatus.
　ステップＳ２２において測定される基板Ｃのサイズに合わせたレシピＤｉが貼付位置検査装置に格納されていないと判断した場合には、ステップＳ２３′へ進んで「レシピ作成フロー」へ戻って、ステップＳ１２～ステップＳ１５の操作を行うことでレシピＤｉを作成する。 If it is determined in step S22 that the recipe Di matched to the size of the substrate C measured is not stored in the sticking position inspection apparatus, the process proceeds to step S23 ′ and returns to the “recipe creation flow”. Recipe Di is created by performing the operation of step S15.
　一方、ステップＳ２２において測定される基板Ｃのサイズに合わせたレシピＤｉが貼付位置検査装置に格納されていると判断した場合には、ステップＳ２３において、操作者は、操作パネルＳＤに表示された対応するレシピＤｉをタッチすることでこのレシピを選択して、ステップＳ２４へ進む。 On the other hand, if it is determined in step S22 that the recipe Di matching the size of the substrate C measured in step S22 is stored in the pasting position inspection apparatus, in step S23, the operator displays the response displayed on the operation panel SD. This recipe is selected by touching the recipe Di to be performed, and the process proceeds to step S24.
　ステップＳ２４において、制御ユニットは、レシピＤｉに合わせた各光学測定ユニット８の目標位置データを読み取る。そして、ステップＳ２４の処理が完了した後、ステップＳ２５へ進む。 In step S24, the control unit reads the target position data of each optical measurement unit 8 in accordance with the recipe Di. And after the process of step S24 is completed, it progresses to step S25.
　ステップＳ２５において、制御ユニットは、読み取った各光学測定ユニット８の目標位置データに応じて、制御プログラムに基づき各調整モータ６６′、６７′、６８′、６９′へ駆動指示を送信し、各調整モータ６６′、６７′、６８′、６９′を所定量だけ回転させることで各光学測定ユニット８を目標位置まで調整する。ステップＳ２５の処理が完了した後、ステップＳ２６へ進む。 In step S25, the control unit transmits a drive instruction to each adjustment motor 66 ', 67', 68 ', 69' based on the control program in accordance with the read target position data of each optical measurement unit 8, and each adjustment is performed. Each optical measurement unit 8 is adjusted to the target position by rotating the motors 66 ', 67', 68 ', 69' by a predetermined amount. After the process of step S25 is completed, the process proceeds to step S26.
　ステップＳ２６において、制御ユニットは、各光学測定ユニット８の環状光源８１、ＣＣＤカメラ８２へ指示を出して、環状光源８１を発光させ、ＣＣＤカメラ８２が撮像動作を行うように制御する。 In step S26, the control unit issues an instruction to the annular light source 81 and the CCD camera 82 of each optical measurement unit 8 to cause the annular light source 81 to emit light and control the CCD camera 82 to perform an imaging operation.
　続いて、ステップＳ２７において、制御ユニットは、ＣＣＤカメラ８２が撮像した画像を画像処理手段８３に送信し、基板Ｃの幅方向及び縦方向について、図６に示すように、画像処理手段８３がＣＣＤカメラ８２からの画像データから基板Ｃの辺縁と当該基板Ｃの当該辺縁に平行な貼り合せ物Ｆの辺縁との間の距離Ｌ１、距離Ｌ２を演算するように制御する。そして、ステップＳ２７の処理が完了した後、ステップＳ２８へ進む。 Subsequently, in step S27, the control unit transmits the image captured by the CCD camera 82 to the image processing unit 83, and the image processing unit 83 performs the CCD processing in the width direction and the vertical direction of the substrate C as shown in FIG. Control is performed so as to calculate a distance L1 and a distance L2 between the edge of the substrate C and the edge of the bonded object F parallel to the edge of the substrate C from the image data from the camera 82. And after the process of step S27 is completed, it progresses to step S28.
　ステップＳ２８において、制御ユニットは、画像処理手段８３の演算結果（距離Ｌ１、Ｌ２）を記憶するとともに、画像処理手段８３の演算結果を表示ユニットＲＤに送信するように制御する。 In step S28, the control unit stores the calculation results (distances L1, L2) of the image processing means 83 and controls the calculation results of the image processing means 83 to be transmitted to the display unit RD.
　最後に、ステップＳ２８の処理が完了した後、ステップＳ２９へ進んで貼付位置検査装置をオフにして、品質検査を終了する。 Finally, after the process of step S28 is completed, the process proceeds to step S29, the sticking position inspection device is turned off, and the quality inspection is terminated.
＜貼付位置検査装置の効果＞
　本発明によれば、４つの光学測定ユニット８によって、４隅において貼り合せ物Ｆ（例えば、偏光フィルム）の辺縁と当該貼り合せ物Ｆの辺縁に平行な基板Ｃ（例えば、ガラス基板）の辺縁との間の距離をそれぞれ光学測定することができるので、四辺がそれぞれ矩形状の基板Ｃの四辺と平行になるように貼り合わせられた矩形状の貼り合せ物Ｆの当該基板Ｃ上における貼付位置の検査精度を向上させることができる貼付位置検査装置が得られる。 <Effect of application position inspection device>
According to the present invention, the four optical measuring units 8 allow the substrate C (for example, a glass substrate) parallel to the edge of the bonded object F (for example, a polarizing film) and the edge of the bonded object F at four corners. Since the distance between each of the edges of the rectangular substrate F can be optically measured, the rectangular bonded object F bonded on the substrate C so that the four sides are parallel to the four sides of the rectangular substrate C, respectively. A sticking position inspection apparatus capable of improving the inspection accuracy of the sticking position in the case is obtained.
　また、光学測定ユニット８を検査台６の後面に設置することで、貼り合せ物の貼り付けられた基板が検査台に対して載置又は取り出される時に、該基板が光学測定ユニットと干渉することを防止できる。そして、検査台の前面に開閉可能なカバーを設置することで、検査過程においてこのカバーを閉めることができ、光学測定ユニットによる貼り合せ物の貼付位置の測定をより正確にすることができる。 Moreover, when the optical measurement unit 8 is installed on the rear surface of the inspection table 6, the substrate interferes with the optical measurement unit when the substrate with the bonded material is placed on or taken out of the inspection table. Can be prevented. By installing a cover that can be opened and closed on the front surface of the inspection table, the cover can be closed during the inspection process, and the measurement of the attachment position of the bonded object by the optical measurement unit can be made more accurate.
＜変形例＞
　以上、本発明を実施するための形態を例示的に説明したが、本発明は以上のような実施形態に限られるものではない。本発明の思想を逸脱することない範囲内において種々の変更が可能であり、これらの変更も本発明の範囲に含まれる。 <Modification>
As mentioned above, although the form for implementing this invention was demonstrated illustratively, this invention is not limited to the above embodiments. Various modifications can be made without departing from the spirit of the present invention, and these modifications are also included in the scope of the present invention.
　例えば、上記の実施形態において、各光学測定ユニット８は、リニアガイド６６、６７、６８、６９を介して検査台６の後面にスライド可能に設置されているが、これに限られるものではなく、各光学測定ユニット８のうちの１つ又は複数を直ちに検査台６の後面に取り付けても良い。 For example, in the above embodiment, each optical measurement unit 8 is slidably installed on the rear surface of the inspection table 6 via the linear guides 66, 67, 68, 69. However, the present invention is not limited to this. One or more of the optical measurement units 8 may be immediately attached to the rear surface of the inspection table 6.
　この場合には、調整モータ６６′、６７′、６８′、６９′（６９－１′、６９－２′）を省略することが可能である。 In this case, the adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2') can be omitted.
　また、上記の実施形態において、検査孔６５付近の光学測定ユニット８をこの検査孔６５の長手方向に沿って移動させる手段としては、第１リニアガイド部６９－１と第２リニアガイド部６９-２とからなるリニアガイド６９を使用しているが、これに限られるものではなく、スライドレールの長手方向が検査孔６５の長手方向と一致するリニアガイドを、この検査孔６５付近に設置し、検査孔６５付近の光学測定ユニット８をこのリニアガイドのスライダに取り付けても良い。 Further, in the above embodiment, as means for moving the optical measurement unit 8 near the inspection hole 65 along the longitudinal direction of the inspection hole 65, the first linear guide portion 69-1 and the second linear guide portion 69- are used. However, the present invention is not limited to this, and a linear guide whose longitudinal direction of the slide rail coincides with the longitudinal direction of the inspection hole 65 is installed in the vicinity of the inspection hole 65. The optical measurement unit 8 near the inspection hole 65 may be attached to the slider of this linear guide.
　また、上記の実施形態において、対応するリニアガイドのスライドレールに出力軸が接続されている調整モータを設けて、該調整モータによって、各光学測定ユニット８の位置を自動的に調整するように構成しているが、これに限られるものではなく、調整モータを省略し、各光学測定ユニット８の位置を手動的に調整するようにしても良い。 In the above embodiment, an adjustment motor having an output shaft connected to the slide rail of the corresponding linear guide is provided, and the position of each optical measurement unit 8 is automatically adjusted by the adjustment motor. However, the present invention is not limited to this, and the adjustment motor may be omitted and the position of each optical measurement unit 8 may be manually adjusted.
　また、上記の実施形態において、各光学測定ユニット８、各リニアガイド６６、６７、６８、６９及び各調整モータ６６′、６７′、６８′、６９′は、検査台６の後面に設置されているが、これに限られるものではない。検査台６と対向し且つ検査台６の前面と所定の間隔を隔てる取付フレームを当該検査台６の前面に設置し、各リニアガイド６６、６７、６８、６９及び各調整モータ６６′、６７′、６８′、６９′を当該取付フレームに取り付け、各光学測定ユニット８を対応するリニアガイドのスライダに設置しても良い。即ち、各光学測定ユニット８、各リニアガイド６６、６７、６８、６９及び各調整モータ６６′、６７′、６８′、６９′を、検査台６の前面に設置することも可能である。 In the above embodiment, each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ are installed on the rear surface of the inspection table 6. However, it is not limited to this. A mounting frame facing the inspection table 6 and spaced from the front surface of the inspection table 6 by a predetermined distance is installed on the front surface of the inspection table 6, and each linear guide 66, 67, 68, 69 and each adjustment motor 66 ', 67'. 68 ', 69' may be mounted on the mounting frame, and each optical measuring unit 8 may be installed on the corresponding linear guide slider. That is, each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ can be installed on the front surface of the inspection table 6.
　この場合には、検査台６に形成される検査孔６２、６３、６４、６５及び検査台６に取り付けられるカバー７を省略することが可能である。 In this case, the inspection holes 62, 63, 64, 65 formed in the inspection table 6 and the cover 7 attached to the inspection table 6 can be omitted.
　また、上記の実施形態において、各光学測定ユニット８、各リニアガイド６６、６７、６８、６９及び各調整モータ６６′、６７′、６８′、６９′は、検査台６の後面に設置されているが、これに限られるものではない。各リニアガイド６６、６７、６８、６９及び各調整モータ６６′、６７′、６８′、６９′等の設置を省略し、検査台６の前面に当該検査台６と対向し且つ当該検査台６の前面と所定の間隔を隔てる取付フレームを設置し、各光学測定ユニット８を取付フレームを介して検査台６に取り付けても良い。即ち、各光学測定ユニット８を検査台６の前面に設置することができる。 In the above embodiment, each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ are installed on the rear surface of the inspection table 6. However, it is not limited to this. The installation of the linear guides 66, 67, 68, 69 and the adjustment motors 66 ', 67', 68 ', 69', etc. is omitted, the inspection table 6 faces the inspection table 6 on the front surface of the inspection table 6, and the inspection table 6 It is also possible to install a mounting frame that is spaced apart from the front surface of the optical measuring unit 8 and attach each optical measurement unit 8 to the inspection table 6 via the mounting frame. That is, each optical measurement unit 8 can be installed on the front surface of the inspection table 6.
　この場合には、検査台６に形成される検査孔６２、６３、６４、６５及び検査台６に取り付けられるカバー７を省略することが可能である。 In this case, the inspection holes 62, 63, 64, 65 formed in the inspection table 6 and the cover 7 attached to the inspection table 6 can be omitted.
　また、上記の実施形態において、カバー７は、ヒンジを介して検査台６に取り付けられているが、これに限られるものではない。検査台６及びカバー７の一方にスライドレールを設け、他方にスライダを設け、カバー７は、スライダをスライドレールに対しスライド可能に取り付けることで、検査台６に対して開閉できるように構成することもできる。 In the above embodiment, the cover 7 is attached to the inspection table 6 via a hinge, but is not limited to this. One of the inspection table 6 and the cover 7 is provided with a slide rail, the other is provided with a slider, and the cover 7 is configured to be openable and closable with respect to the inspection table 6 by attaching the slider to the slide rail. You can also.
　５  支持フレーム；
　６  検査台；
　７  カバー；
　８  光学測定ユニット；
　９  ヒンジ；
　６０、６１  位置決め板；
　６２、６３、６４、６５  検査孔；
　６６、６７、６８、６９  リニアガイド（レール機構）；
　６６′、６７′、６８′、６９′  調整モータ（駆動ユニット）；
　８０  取付ブラケット；
　８１  環状光源（光源）；
　８２  ＣＣＤカメラ（撮像手段）；
　８３  画像処理手段；
　Ｃ  基板；
　Ｆ  貼り合せ物；
　Ｌ１、Ｌ２  基板の辺縁と当該基板の当該辺縁に平行な貼り合せ物の辺縁との間の距離；
　ＳＤ  操作パネル；
　ＲＤ  表示ユニット（測定結果表示ユニット） 5 support frame;
6 Inspection table;
7 cover;
8 Optical measurement unit;
9 Hinge;
60, 61 positioning plate;
62, 63, 64, 65 inspection holes;
66, 67, 68, 69 linear guide (rail mechanism);
66 ', 67', 68 ', 69' adjustment motor (drive unit);
80 mounting brackets;
81 annular light source (light source);
82 CCD camera (imaging means);
83 image processing means;
C substrate;
F Paste;
L1, L2 Distance between the edge of the substrate and the edge of the laminate parallel to the edge of the substrate;
SD operation panel;
RD display unit (measurement result display unit)

Claims (10)

  1. 　四辺がそれぞれ矩形状の基板の四辺と平行になるように貼り合わせられた矩形状の貼り合せ物の当該基板上における貼付位置を検査する貼付位置検査装置において、
    　前記貼り合せ物が貼り合せられた前記基板を載置する載置領域が形成される検査台と、
    　前記検査台に取り付けられ且つ前記基板及び貼り合わせ物の４隅と対向して、それぞれ当該４隅において前記貼り合わせ物の辺縁と前記貼り合わせ物の当該辺縁に平行な前記基板の辺縁との間の距離を光学的に測定する４つの光学測定ユニットと、
    　４つの前記光学測定ユニットに接続されており、４つの前記光学測定ユニットのそれぞれにより測定された前記距離を測定結果として表示する測定結果表示ユニットと
    を備えることを特徴とする貼付位置検査装置。     In the pasting position inspection device for inspecting the pasting position on the substrate of the rectangular bonded product bonded so that the four sides are parallel to the four sides of the rectangular substrate,
    An inspection table on which a mounting region for mounting the substrate on which the bonded material is bonded is formed;
    The substrate is attached to the inspection table and faces the four corners of the substrate and the bonded object, and the edge of the substrate parallel to the edge of the bonded object and the edge of the bonded object at the four corners, respectively. Four optical measurement units that optically measure the distance between
    A pasting position inspection apparatus comprising: a measurement result display unit connected to the four optical measurement units and displaying the distance measured by each of the four optical measurement units as a measurement result.
  2. 　前記検査台の前後方向の前面に開閉可能に取り付けられており、開けられている時に前記載置領域を開放し、且つ閉められている時に前記載置領域を遮蔽するカバーをさらに備え、
    　前記検査台上における前記載置領域内には前後貫通する４つの検査孔が形成され、前記基板及び貼り合わせ物の４隅はそれぞれ４つの前記検査孔の範囲内に位置し、
    　４つの前記光学測定ユニットは、それぞれ前記検査台の前後方向での後面に取り付けられ、且つそれぞれ４つの前記検査孔と対向している
    　ことを特徴とする請求項１に記載の貼付位置検査装置。     It is attached to the front surface in the front-rear direction of the inspection table so as to be openable and closable, further comprising a cover that opens the placement area when opened and shields the placement area when closed.
    Four inspection holes penetrating in the front-rear direction are formed in the placement area on the inspection table, and the four corners of the substrate and the bonded object are respectively located within the range of the four inspection holes,
    The sticking position inspection apparatus according to claim 1, wherein each of the four optical measurement units is attached to a rear surface in the front-rear direction of the inspection table and faces each of the four inspection holes.
  3. 　４つの前記光学測定ユニットのそれぞれは、
    　４つの前記検査孔のうちの１つの検査孔と対向し、当該検査孔を介して、前記基板及び前記貼り合わせ物の当該検査孔の範囲内にある部分に光を照射する光源と、
    　前記光源が発光したとき前記基板及び貼り合わせ物によって反射された光により、前記基板及び貼り合わせ物を撮像する撮像手段と、
    　前記撮像手段及び前記測定結果表示ユニットに接続されており、前記撮像手段によって撮像された画像から前記貼り合わせ物の辺縁と当該辺縁に平行な当該基板の辺縁との間の距離を演算し、当該距離を前記測定結果表示ユニットに送信する画像処理手段とを有する
    　ことを特徴とする請求項２に記載の貼付位置検査装置。     Each of the four optical measurement units is
    A light source that faces one inspection hole of the four inspection holes and irradiates light to a portion within the inspection hole of the substrate and the bonded material through the inspection hole;
    An imaging means for imaging the substrate and the bonded object by light reflected by the substrate and the bonded object when the light source emits light;
    Connected to the imaging means and the measurement result display unit, and calculates the distance between the edge of the bonded object and the edge of the substrate parallel to the edge from the image captured by the imaging means And the image processing means which transmits the said distance to the said measurement result display unit. The sticking position inspection apparatus of Claim 2 characterized by the above-mentioned.
  4. 　前記撮像手段は、前記光源を挟んで前記検査孔とは反対側に設置されていることを特徴とする請求項３に記載の貼付位置検査装置。 4. The sticking position inspection apparatus according to claim 3, wherein the imaging means is installed on the side opposite to the inspection hole with the light source interposed therebetween.
  5. 　４つの前記検査孔のうちの１つは円孔で、当該円孔と隣り合うほかの２つの検査孔は長手方向が互いに垂直の関係にあり延長線が当該円孔を通過する長孔で、当該円孔と対角線位置にある検査孔は前記ほかの２つの検査孔に対し斜めに形成され且つ延長線が当該円孔を通過する長孔であり、
    　前記検査台は、長孔である前記検査孔のそれぞれの付近にレール機構を備え、長孔である前記検査孔と対向する前記光学測定ユニットは、それぞれ対応する前記検査孔の長手方向に沿って移動できるように、対応する前記レール機構にスライド可能に取り付けられている
    　ことを特徴とする請求項２～４のいずれか１項に記載の貼付位置検査装置。     One of the four inspection holes is a circular hole, and the other two inspection holes adjacent to the circular hole are long holes whose longitudinal directions are perpendicular to each other and an extension line passes through the circular hole. The inspection hole located diagonally to the circular hole is a long hole formed obliquely with respect to the other two inspection holes and the extension line passes through the circular hole.
    The inspection table includes a rail mechanism in the vicinity of each of the inspection holes that are long holes, and the optical measurement units that face the inspection holes that are long holes are respectively along the longitudinal direction of the corresponding inspection holes. The sticking position inspection device according to any one of claims 2 to 4, wherein the sticking position inspection device is slidably attached to the corresponding rail mechanism so as to be movable.
  6. 　前記検査台は円孔である前記検査孔の付近にレール機構を備え、円孔である前記検査孔と対向する前記光学測定ユニットは、当該円孔の形成範囲内で移動できるように当該レール機構にスライド可能に取り付けられている
    ことを特徴とする請求項５に記載の貼付位置検査装置。     The inspection table includes a rail mechanism in the vicinity of the inspection hole that is a circular hole, and the optical measurement unit that faces the inspection hole that is a circular hole can move within the formation range of the circular hole. The sticking position inspection apparatus according to claim 5, wherein the sticking position inspection apparatus is slidably attached to the head.
  7. 　前記検査台は、各前記レール機構と対応して設置された、対応する光学測定ユニットを前記レール機構に沿って移動するように駆動する駆動ユニットをさらに備え、
    　各前記光学測定ユニットを所望の位置まで移動させるように前記駆動ユニットを制御する制御ユニットをさらに備えている
    　ことを特徴とする請求項６に記載の貼付位置検査装置。     The inspection table further includes a drive unit that is installed corresponding to each rail mechanism and that drives a corresponding optical measurement unit to move along the rail mechanism,
    The sticking position inspection apparatus according to claim 6, further comprising a control unit that controls the drive unit to move each of the optical measurement units to a desired position.
  8. 　前記カバーは、ヒンジを介して前記検査台に開閉可能に取り付けられていることを特徴とする請求項１に記載の貼付位置検査装置。 The sticking position inspection apparatus according to claim 1, wherein the cover is attached to the inspection table through a hinge so as to be openable and closable.
  9. 　前記検査台及び前記カバーの一方にスライドレールを備え、他方にスライダを備え、
    　前記カバーは、前記スライダを前記スライドレールに対しスライド可能に取り付けることで、前記検査台に対して開閉できるように構成された
    　ことを特徴とする請求項１に記載の貼付位置検査装置。     One of the inspection table and the cover is provided with a slide rail, the other is provided with a slider,
    The pasting position inspection device according to claim 1, wherein the cover is configured to be openable and closable with respect to the inspection table by attaching the slider so as to be slidable with respect to the slide rail.
  10. 　前記検査台の前面には、当該検査台と対向し且つ当該検査台の前面と所定の間隔を隔てる取付フレームが設置されており、４つの前記光学測定ユニットはそれぞれ当該取付フレームを介して前記検査台に取り付けられている
    ことを特徴とする請求項１に記載の貼付位置検査装置。     A mounting frame is installed on the front surface of the inspection table so as to face the inspection table and be spaced apart from the front surface of the inspection table by a predetermined distance, and each of the four optical measurement units is connected to the inspection table via the mounting frame. The attachment position inspection device according to claim 1, wherein the attachment position inspection device is attached to a table.
PCT/JP2015/073566 2014-12-16 2015-08-21 Bonding position inspection device WO2016098389A1 (en)

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