WO2016098389A1 - Dispositif d'inspection de position de collage - Google Patents

Dispositif d'inspection de position de collage Download PDF

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Publication number
WO2016098389A1
WO2016098389A1 PCT/JP2015/073566 JP2015073566W WO2016098389A1 WO 2016098389 A1 WO2016098389 A1 WO 2016098389A1 JP 2015073566 W JP2015073566 W JP 2015073566W WO 2016098389 A1 WO2016098389 A1 WO 2016098389A1
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WIPO (PCT)
Prior art keywords
inspection
substrate
bonded
optical measurement
hole
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PCT/JP2015/073566
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English (en)
Japanese (ja)
Inventor
智 小塩
隼 三島
渉史 川合
誠剛 臼井
Original Assignee
日東電工株式会社
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Publication of WO2016098389A1 publication Critical patent/WO2016098389A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Definitions

  • the present invention relates to a pasting position inspection apparatus.
  • Image display devices such as a liquid crystal display (LCD), a plasma display (PDP), and an electroluminescence display (ELD) are attracting attention for their excellent performance. For this reason, a display panel manufacturing technique, which is one of the essential components for an image display apparatus, has attracted more and more attention.
  • LCD liquid crystal display
  • PDP plasma display
  • ELD electroluminescence display
  • an optical film for example, a polarizing film
  • an optical element for example, a liquid crystal cell
  • Patent Document 1 proposes an apparatus that can realize such an inspection function.
  • the display panel inspection apparatus in Patent Document 1 includes a light transmission unit 14 on which the display panel 40 is placed and glass substrates 41 and 42 of the display panel 40 on which the display panel 40 is placed.
  • the positioning part 15 for positioning two sides and the distance from the peripheral edge of the glass substrates 41 and 42 brought into contact with the positioning part 15 to the peripheral edge of the polarizing plates 44 and 45 attached to the glass substrates 41 and 42 are measured.
  • An inspection table 11 having a distance measuring member 16 is provided. At the time of measurement, as shown in FIG.
  • Patent Document 1 since the display panel inspection apparatus described in Patent Document 1 measures the sticking position of the polarizing plate by mechanically pressing the measuring rod from the side, it can measure only three corners in contact with the side frame. The accuracy may deviate from the target accuracy.
  • the present invention has been made in view of such a situation, and the inspection accuracy of the pasting position on the substrate of the rectangular bonded material bonded so that the four sides are parallel to the four sides of the rectangular substrate, respectively.
  • An object of the present invention is to provide a sticking position inspection apparatus capable of improving the quality.
  • the present invention provides a bonding position on a substrate of a rectangular bonded material bonded so that the four sides are parallel to the four sides of the rectangular substrate.
  • a pasting position inspection apparatus for inspecting a substrate an inspection table on which a mounting area for mounting a substrate on which the bonded material is bonded is formed, and four corners of the substrate and the bonded material are attached to the inspection table.
  • Four optical measurement units that optically measure the distance between the edge of the bonded object and the edge of the substrate parallel to the edge of the bonded object at the four corners,
  • a sticking position inspection apparatus that is connected to four optical measurement units and includes a measurement result display unit that displays distances measured by the four optical measurement units as measurement results.
  • the four optical measurement units allow the edges of the bonded product (for example, a polarizing film) and the edges of the substrate (for example, a glass substrate) to be parallel to the edges of the bonded material at the four corners. Since the distance between each can be optically measured, the inspection accuracy of the pasting position on the substrate of the rectangular bonded product bonded so that the four sides are parallel to the four sides of the rectangular substrate can be improved. It is possible to provide a sticking position inspection device that can be improved.
  • the inspection table is attached to the front surface in the front-rear direction so as to be openable and closable, and further provided with a cover that opens the placement area when opened and shields the placement area when closed.
  • the mounting area on the inspection table four inspection holes penetrating in the front-rear direction are formed so that the four corners of the substrate and the bonded object are respectively located within the range of the four inspection holes, and four optical measurements are made.
  • Each of the units is attached to the rear surface in the front-rear direction of the inspection table, and is configured to face each of the four inspection holes.
  • the optical measurement unit By installing the optical measurement unit on the rear surface of the inspection table, it is possible to prevent interference with the optical measurement unit when the substrate to which the bonded object is attached is placed on or taken out of the inspection table. Then, by installing a cover that can be opened and closed on the front surface of the inspection table, the cover can be closed during the inspection process, and the measurement of the attachment position of the bonded object by the optical measurement unit can be made more accurate.
  • each of the four optical measurement units is disposed so as to face one of the four inspection holes, and the inspection hole of the substrate and the bonded object is interposed through the inspection hole.
  • a light source is provided so as to irradiate light on a portion within the range, and when the light source emits light, an imaging unit that images the substrate and the bonded object with light reflected by the substrate and the bonded object, and the imaging unit The distance between the edge of the bonded object and the edge of the substrate parallel to the edge is calculated from the image captured by the imaging means connected to the measurement result display unit, and the distance is displayed as the measurement result.
  • Image processing means for transmitting to the unit.
  • the image of the substrate and the bonded object can be imaged by the light from the light source using the imaging means, and the distance between the edge of the bonded object and the edge of the substrate is accurately measured. Will be able to.
  • the imaging means is installed on the side facing the inspection hole across the light source.
  • one of the four inspection holes is a circular hole
  • the other two inspection holes adjacent to the circular hole are perpendicular to each other in the longitudinal direction and the extension line is the circular hole.
  • the inspection hole located diagonally to the circular hole is formed obliquely with respect to the other two inspection holes, and the extension line is a long hole passing through the circular hole.
  • a rail mechanism is provided in the vicinity of each inspection hole that becomes a hole, and the optical measurement unit that faces the inspection hole that is a long hole slides in a corresponding rail mechanism so that it can move along the longitudinal direction of the corresponding inspection hole. Configure to be able to be attached.
  • the optical measurement unit can be moved to an appropriate position according to the size of the substrate and the bonded object, various substrates having different sizes can be measured by the same application position inspection apparatus. Become.
  • the inspection table includes a rail mechanism in the vicinity of the inspection hole that becomes a circular hole, and the optical measurement unit that faces the inspection hole that becomes the circular hole moves within the range of the circular hole. It is slidably attached to the rail mechanism so that it can.
  • the optical measurement unit in the vicinity of the circular hole can be moved to the optimum measurement position according to the attachment position of the bonded object on the substrate.
  • the inspection table further includes a drive unit that is installed corresponding to each rail mechanism and that drives the corresponding optical measurement unit so as to move along the rail mechanism.
  • a control unit that controls the drive unit to move to a position is further provided.
  • the optical measurement unit can be automatically moved to a position according to the substrate size by the drive unit, so that the inspection efficiency can be improved.
  • the cover is attached to the examination table via a hinge so as to be openable and closable.
  • one of the inspection table and the cover is provided with a slide rail, the other is provided with a slider, and the cover is attached so that the slider can slide relative to the slide rail. It is configured to be openable and closable with respect to the examination table.
  • an attachment frame is installed on the front surface of the inspection table so as to face the inspection table and to be spaced from the front surface of the inspection table by a predetermined distance. It can be attached to the inspection table via the mounting frame.
  • FIG. 1A is a front view showing a sticking position inspection apparatus according to an embodiment of the present invention, and shows a state where a cover is opened.
  • FIG. 1B is a front view showing the sticking position inspection apparatus in the embodiment of the present invention, and shows a state in which the cover is closed.
  • FIG. 2 is a front view showing the sticking position inspection apparatus in a state where the substrate is placed.
  • FIG. 3 is a side view showing the sticking position inspection apparatus in the embodiment of the present invention.
  • FIG. 4 is an explanatory view of the inspection table of the sticking position inspection device as viewed from the rear side.
  • FIG. 5 is an explanatory view showing the structure of the optical measurement unit of the sticking position inspection apparatus.
  • FIG. 1A is a front view showing a sticking position inspection apparatus according to an embodiment of the present invention, and shows a state where a cover is opened.
  • FIG. 1B is a front view showing the sticking position inspection apparatus in the embodiment of the present invention, and shows a state in which the cover is closed
  • FIG. 6 is an explanatory view showing an image of a substrate on which a bonded object imaged by annular illumination is attached.
  • FIG. 7A is a flowchart showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
  • FIG. 7B is a flowchart showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
  • FIG. 8A is an explanatory view showing a conventional display panel inspection apparatus.
  • FIG. 8B is an explanatory view showing a conventional display panel inspection apparatus.
  • the inspection target is a structure in which a rectangular bonded object F is bonded to the substrate C so that the four sides are parallel to the four sides of the rectangular substrate C.
  • FIG. 1A and 1B are front views showing a sticking position inspection apparatus according to an embodiment of the present invention.
  • FIG. 1A shows a state where the cover 7 is opened
  • FIG. 1B shows a state where the cover 7 is closed.
  • FIG. 2 is a front view showing the sticking position inspection apparatus in a state where the substrate C is placed.
  • FIG. 3 is a side view showing the sticking position inspection apparatus.
  • FIG. 4 is an explanatory view of the inspection table 6 viewed from the rear side.
  • the sticking position inspection apparatus is attached to the front surface of the inspection table 6 mainly through a support frame 5, an inspection table 6 supported by the support frame 5, and a hinge 9.
  • the support frame 5 is for supporting each other member, and extends downward from the base, the support leg in contact with the ground, and extends upward from the back surface of the base to a predetermined height. And a support plate.
  • the inspection table 6 includes a plate-shaped inspection table main body, a long positioning plate 60 installed on the front surface of the inspection table main body so that the longitudinal direction is in the horizontal direction, and the longitudinal direction is the longitudinal direction of the positioning plate 60.
  • a long positioning plate 61 installed on the front surface of the inspection table main body along the direction perpendicular to the direction, and four inspection holes 62, 63, 64 formed in the inspection table main body and penetrating in the front-rear direction.
  • 65 four sets of linear guides 66, 67, 68, 69 (69-1, 69-2) installed on the rear surface of the inspection table main body, and four sets of adjustment motors 66 installed on the rear surface of the inspection table main body.
  • the inspection table main body places both the positioning plates 60 and 61 together with the substrate C on which the bonded material F is pasted, and divides a placement area for positioning.
  • the plate-shaped inspection table main body is used to place the substrate C on which the bonded object F is attached, and as a whole between the front portion of the base of the support frame 5 and the upper portion of the rear support plate in a tilted posture.
  • Each of the long positioning plates 60 and 61 is in surface contact with two adjacent sides of the substrate C, and positions the substrate C on which the bonded material F is adhered to the inspection table main body. To do.
  • one inspection hole 62 (the inspection hole on the lower right in FIG. 1A) is a circular hole, and is an extension of both positioning plates 60, 61 of the inspection table body.
  • the other inspection holes 63 and 64 (inspection holes on the lower left and upper right in FIG. 1A) that are formed in a portion near the crossing position and are adjacent to the circular hole are perpendicular to each other in the longitudinal direction.
  • the extension line is a long hole that passes through the circular hole 62, and the inspection hole 65 (the upper left inspection hole in FIG. 1A) at a position diagonal to the circular hole is relative to the other inspection holes 63 and 64.
  • the elongated line is an elongated hole that is formed obliquely and passes through the circular hole.
  • four sets of linear guides 66, 67, 68, 69 are installed in the vicinity of the four inspection holes 62, 63, 64, 65 on the rear surface of the inspection table main body, respectively, and four optical measurements described later.
  • Each of the units 8 is attached to four sets of linear guides 66, 67, 68, 69 so as to be movable along the longitudinal direction of each of the inspection holes 62, 63, 64, 65.
  • ′, 67 ′, 68 ′, and 69 ′ are installed on the rear surface of the inspection table main body in correspondence with the four linear guides 66, 67, 68, and 69, respectively. , 63, 64, 65 to move along the longitudinal direction.
  • the slide rail of the linear guide 66 corresponding to the inspection hole 62 that is a circular hole is installed along the horizontal direction below the inspection hole 62, and one end of the slide rail serves as an output shaft of the adjustment motor 66 ′. It is connected. Further, the slider of the linear guide 66 is slidably provided on the slide rail, and one optical measurement unit 8 is attached to the slider of the linear guide 66.
  • the imaging range thereof faces the inspection hole 62, and the inspection hole. It is in the range of 62.
  • the slide rail of the linear guide 67 corresponding to the inspection hole 63 which is a long hole is installed horizontally below the inspection hole 63, and one end thereof is connected to the output shaft of the adjustment motor 67 '. Further, the slider of the linear guide 67 is slidably provided on the slide rail, and another optical measurement unit 8 is attached to the slider of the linear guide 67, and its imaging range is opposed to the inspection hole 63. It is within the formation range of the inspection hole 63.
  • the slide rail of the linear guide 68 corresponding to the inspection hole 64 which is a long hole is installed on one of the left and right sides of the inspection hole 64 so that the longitudinal direction thereof is parallel to the longitudinal direction of the inspection hole 64, and one end of the slide rail. It is connected to the output shaft of the adjustment motor 68 '. Further, the slider of the linear guide 68 is slidably provided on the slide rail, and another optical measurement unit 8 is attached to the slider of the linear guide 68, and the imaging range thereof faces the inspection hole 64. In the range where the inspection hole 64 is formed.
  • the linear guide 69 corresponding to the inspection hole 65 which is a long hole, includes a first linear guide portion 69-1 and a second linear guide portion 69-2.
  • the slide rail of the first linear guide portion 69-1 is installed horizontally above the inspection hole 65, and one end of the slide rail is connected to the output shaft of one of the adjustment motors 69-1 '. ing.
  • the slider of the first linear guide portion 69-1 is slidably provided on this slide rail.
  • one end of the slide rail of the second linear guide portion 69-2 is attached to the slider of the first linear guide portion 69-1, and the other end is the other adjustment motor 69-2 'of the adjustment motor 69'. Connected to the output shaft.
  • the slide rail of the second linear guide portion 69-2 is configured such that its longitudinal direction is perpendicular to the horizontal direction and parallel to the rear surface of the inspection table main body, and the second linear guide portion 69-2.
  • the slider is slidably provided on the slide rail of the second linear guide portion 69-2.
  • the optical measurement unit 8 is attached to the slider of the second linear guide portion 69-2, and its imaging range is opposite to the inspection hole 65 and is within the range of the inspection hole 65.
  • Adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2') are servo motors and are connected to a control unit (not shown).
  • the adjustment motors 66 ', 67', 68 'and 69' are controlled by the control unit based on the parameters input by the operator, thereby controlling the linear guides so that the optical measuring units 8 are moved to desired positions. Actuate to move to.
  • the cover 7 is attached to the front face through a hinge 9 so as to be openable and closable when viewed in the front-rear direction of the inspection table 6. As shown in FIG. 1A, when the cover 7 is opened, the placement area of the inspection table 6 is opened. And as shown to FIG. 1B, when the cover 7 is closed, the mounting area
  • the four optical measurement units 8 are respectively installed on the rear surface when viewed in the front-rear direction of the inspection table 6 and are configured to face the corresponding inspection holes as described above.
  • the four corners of the substrate C and the bonded material F are within the range of the four inspection holes 62, 63, 64, and 65, respectively.
  • the four optical measuring units 8 are respectively opposed to the four corners of the substrate C and the bonded product F, and at the four corners, the edge of the bonded product F and the bonded product F through inspection holes. The distance between the edge of the substrate C and the edge of the substrate C is measured optically (see FIG. 6).
  • FIG. 5 is an explanatory view showing the structure of the optical measurement unit 8 of the sticking position inspection apparatus.
  • each of the four optical measurement units 8 includes a mounting bracket 80, an annular light source 81, a CCD camera 82, and an image processing means 83.
  • the mounting bracket 80 is fixed to the slider of the corresponding linear guide (see reference numerals 66, 67, 68, and 69 (69-1 and 69-2)). Can move.
  • An annular light source 81 is attached to the mounting bracket 80, and its light emitting surface faces a corresponding inspection hole (see reference numerals 62, 63, 64, 65) in the inspection table main body, and the substrate C and Light is irradiated to a portion of the bonded product F in the range where the inspection hole is formed.
  • the CCD camera 82 is attached to the mounting bracket 80 via a holder, and is installed on the opposite side of the corresponding inspection hole with the annular light source 81 interposed therebetween.
  • the lens that is the imaging end of the camera 82 faces the substrate C and the bonded object F through the center hole of the annular light source 81 and the corresponding inspection hole.
  • the CCD camera 82 uses the light emitted from the annular light source 81 and reflected by the substrate C and the bonded product F in the direction of the lens to image the substrate C and the bonded product F. An image signal is generated, and the image signal is transmitted to the image processing means 83.
  • the image processing means 83 is connected to the CCD camera 82, the control unit, the display unit RD, and the like, and uses the image signal from the CCD camera 82 and the edge of the bonded material F and the bonded material F.
  • the distance between the edges of the substrate C parallel to the edges is calculated, and the calculated results are transmitted to the display unit RD.
  • the operation panel SD includes an operation button for the operator to turn on and off the sticking position inspection device, and a touch-type panel for the operator to input various parameters.
  • the display unit RD is connected to the image processing unit 83, the operation panel SD, and the like, and displays an image from the image processing unit 83, a measurement result, and parameters input by the operator from the operation panel SD.
  • the control unit includes adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2'), annular light source 81, CCD camera 82, image processing means 83, operation panel SD, display unit RD. 1) the operation of receiving and storing parameters input by the operator using the operation panel SD, and 2) the adjustment motors 66 ′ according to the input parameters of 1) above, 67 ', 68', 69 '(69-1', 69-2 '), 3) receiving and storing information from the image processing means 83, 4) pre-stored The operation of controlling the operation of the annular light source 81, the CCD camera 82 and the image processing means 83 based on the control program, and 5) the display unit RD so as to display the various parameters 1) and 3) and other information. To control work and To do.
  • FIG. 6 is an explanatory view showing an image of a substrate on which a bonded object is imaged by annular illumination.
  • 7A and 7B are flowcharts showing the operation of the sticking position inspection apparatus in the embodiment of the present invention.
  • step S10 After the operator turns on the sticking position inspection device with the operation panel SD in step S10, the process proceeds to step S11. In step S ⁇ b> 11, the operator sets the substrate C on which the bonded material F is attached to the placement area on the inspection table 6.
  • the CCD camera 82 is switched to the operating state by the control of the control unit, images the substrate C and the bonded material F set in the placement area, and displays the captured image on the display unit RD.
  • step S12 the operator inputs the target value to which the optical measurement unit 8 moves by operating the panel SD while viewing the image displayed on the display unit RD, and the substrate C and the bonded object.
  • the position of each optical measurement unit 8 is adjusted so that the edge of F falls within the imaging range.
  • step S13 the edge of the bonding thing F parallel to the edge of the board
  • substrate C Determine whether the distance between can be measured. If it is determined in step S13 that measurement cannot be performed, the process returns to step S12.
  • step S13 determines whether the measurement can be performed. If it is determined in step S13 that the measurement can be performed, the process proceeds to step S14, where the control unit generates a recipe D1 that matches the size of the substrate C, and this recipe D1 and each optical corresponding to the recipe D1.
  • the respective positions of the measuring unit 8 are stored correspondingly.
  • step S15 finish the recipe creation.
  • step S14 the process returns to step S11 to set a substrate C of another size on which the bonded material F is pasted in the placement area on the inspection table 6, and repeat steps S12 to S14. , Dn and the position of each optical measurement unit 8 corresponding to the recipe D2, D3,.
  • step S21 the operator positions the substrate C on which the bonded material F is attached to the placement area on the inspection table 6.
  • step S22 the operator determines whether or not a recipe Di matching the size of the substrate C to be measured is stored in the pasting position inspection apparatus.
  • step S22 If it is determined in step S22 that the recipe Di matched to the size of the substrate C measured is not stored in the sticking position inspection apparatus, the process proceeds to step S23 ′ and returns to the “recipe creation flow”. Recipe Di is created by performing the operation of step S15.
  • step S22 if it is determined in step S22 that the recipe Di matching the size of the substrate C measured in step S22 is stored in the pasting position inspection apparatus, in step S23, the operator displays the response displayed on the operation panel SD. This recipe is selected by touching the recipe Di to be performed, and the process proceeds to step S24.
  • step S24 the control unit reads the target position data of each optical measurement unit 8 in accordance with the recipe Di. And after the process of step S24 is completed, it progresses to step S25.
  • step S25 the control unit transmits a drive instruction to each adjustment motor 66 ', 67', 68 ', 69' based on the control program in accordance with the read target position data of each optical measurement unit 8, and each adjustment is performed.
  • Each optical measurement unit 8 is adjusted to the target position by rotating the motors 66 ', 67', 68 ', 69' by a predetermined amount.
  • step S26 the control unit issues an instruction to the annular light source 81 and the CCD camera 82 of each optical measurement unit 8 to cause the annular light source 81 to emit light and control the CCD camera 82 to perform an imaging operation.
  • step S27 the control unit transmits the image captured by the CCD camera 82 to the image processing unit 83, and the image processing unit 83 performs the CCD processing in the width direction and the vertical direction of the substrate C as shown in FIG. Control is performed so as to calculate a distance L1 and a distance L2 between the edge of the substrate C and the edge of the bonded object F parallel to the edge of the substrate C from the image data from the camera 82. And after the process of step S27 is completed, it progresses to step S28.
  • step S28 the control unit stores the calculation results (distances L1, L2) of the image processing means 83 and controls the calculation results of the image processing means 83 to be transmitted to the display unit RD.
  • step S28 the process proceeds to step S29, the sticking position inspection device is turned off, and the quality inspection is terminated.
  • the four optical measuring units 8 allow the substrate C (for example, a glass substrate) parallel to the edge of the bonded object F (for example, a polarizing film) and the edge of the bonded object F at four corners. Since the distance between each of the edges of the rectangular substrate F can be optically measured, the rectangular bonded object F bonded on the substrate C so that the four sides are parallel to the four sides of the rectangular substrate C, respectively.
  • a sticking position inspection apparatus capable of improving the inspection accuracy of the sticking position in the case is obtained.
  • the substrate interferes with the optical measurement unit when the substrate with the bonded material is placed on or taken out of the inspection table. Can be prevented.
  • the cover By installing a cover that can be opened and closed on the front surface of the inspection table, the cover can be closed during the inspection process, and the measurement of the attachment position of the bonded object by the optical measurement unit can be made more accurate.
  • each optical measurement unit 8 is slidably installed on the rear surface of the inspection table 6 via the linear guides 66, 67, 68, 69.
  • the present invention is not limited to this.
  • One or more of the optical measurement units 8 may be immediately attached to the rear surface of the inspection table 6.
  • the adjustment motors 66 ', 67', 68 ', 69' (69-1 ', 69-2') can be omitted.
  • the first linear guide portion 69-1 and the second linear guide portion 69- are used as means for moving the optical measurement unit 8 near the inspection hole 65 along the longitudinal direction of the inspection hole 65.
  • the present invention is not limited to this, and a linear guide whose longitudinal direction of the slide rail coincides with the longitudinal direction of the inspection hole 65 is installed in the vicinity of the inspection hole 65.
  • the optical measurement unit 8 near the inspection hole 65 may be attached to the slider of this linear guide.
  • an adjustment motor having an output shaft connected to the slide rail of the corresponding linear guide is provided, and the position of each optical measurement unit 8 is automatically adjusted by the adjustment motor.
  • the present invention is not limited to this, and the adjustment motor may be omitted and the position of each optical measurement unit 8 may be manually adjusted.
  • each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ are installed on the rear surface of the inspection table 6.
  • a mounting frame facing the inspection table 6 and spaced from the front surface of the inspection table 6 by a predetermined distance is installed on the front surface of the inspection table 6, and each linear guide 66, 67, 68, 69 and each adjustment motor 66 ', 67'. 68 ', 69' may be mounted on the mounting frame, and each optical measuring unit 8 may be installed on the corresponding linear guide slider. That is, each optical measurement unit 8, each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ can be installed on the front surface of the inspection table 6.
  • the inspection holes 62, 63, 64, 65 formed in the inspection table 6 and the cover 7 attached to the inspection table 6 can be omitted.
  • each optical measurement unit 8 each linear guide 66, 67, 68, 69 and each adjustment motor 66 ′, 67 ′, 68 ′, 69 ′ are installed on the rear surface of the inspection table 6.
  • the installation of the linear guides 66, 67, 68, 69 and the adjustment motors 66 ', 67', 68 ', 69', etc. is omitted, the inspection table 6 faces the inspection table 6 on the front surface of the inspection table 6, and the inspection table 6
  • the inspection holes 62, 63, 64, 65 formed in the inspection table 6 and the cover 7 attached to the inspection table 6 can be omitted.
  • the cover 7 is attached to the inspection table 6 via a hinge, but is not limited to this.
  • One of the inspection table 6 and the cover 7 is provided with a slide rail, the other is provided with a slider, and the cover 7 is configured to be openable and closable with respect to the inspection table 6 by attaching the slider to the slide rail. You can also.

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  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

Dans la présente invention, l'invention concerne un dispositif d'inspection de position de collage pour inspecter des positions de collage, sur un substrat rectangulaire, d'un article collé rectangulaire qui a été collé de façon à avoir quatre côtés parallèles aux quatre côtés du substrat. Ce dispositif d'inspection de position de collage comprend : une table d'inspection sur laquelle est formée une région de placement pour placer, sur cette dernière, un substrat sur lequel un article collé a été collé ; quatre unités de mesure optique qui sont montées sur la table d'inspection, font face à quatre coins du substrat et quatre coins de l'article collé, et mesurent optiquement des distances entre des bords latéraux de l'article collé et des bords latéraux du substrat parallèles aux bords latéraux de l'article collé, au niveau des quatre coins ; et une unité d'affichage de résultat de mesure qui est reliée aux quatre unités de mesure optique et affiche, en tant que résultat de mesure, les distances mesurées respectivement par les quatre unités de mesure optique. Grâce à cette configuration, il est possible d'améliorer la précision d'inspection de positions de collage, sur un substrat rectangulaire, d'un article collé rectangulaire qui a été collé de façon à avoir quatre côtés parallèles aux quatre côtés du substrat.
PCT/JP2015/073566 2014-12-16 2015-08-21 Dispositif d'inspection de position de collage WO2016098389A1 (fr)

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CN201420799553.3U CN204301688U (zh) 2014-12-16 2014-12-16 贴合位置检查装置
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CN107036535B (zh) * 2017-05-25 2019-07-09 大连船舶重工集团有限公司 矩形板材对角线精度检测工装
CN109323654B (zh) * 2018-11-14 2023-10-27 张家港康得新光电材料有限公司 一种检测装置及检测方法
CN110208285A (zh) * 2019-06-14 2019-09-06 苏州精濑光电有限公司 一种检测设备
CN112461796A (zh) * 2019-09-09 2021-03-09 合肥欣奕华智能机器有限公司 掩膜板贴合状态检测设备及压合机
CN110928235B (zh) * 2019-11-18 2021-04-06 广东利元亨智能装备股份有限公司 工件贴合方法、装置、电子设备及工件贴合***
CN111784648A (zh) * 2020-06-19 2020-10-16 巨轮(广州)智能装备有限公司 软资材贴合精度检测方法、装置、设备以及存储介质
CN114355640A (zh) * 2021-12-31 2022-04-15 深圳市深科达智能装备股份有限公司 偏光片贴合检测设备、***及方法

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CN204301688U (zh) 2015-04-29
KR102405735B1 (ko) 2022-06-07
JP2016114588A (ja) 2016-06-23

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