WO2008129865A1 - 慣性力センサ - Google Patents

慣性力センサ Download PDF

Info

Publication number
WO2008129865A1
WO2008129865A1 PCT/JP2008/000911 JP2008000911W WO2008129865A1 WO 2008129865 A1 WO2008129865 A1 WO 2008129865A1 JP 2008000911 W JP2008000911 W JP 2008000911W WO 2008129865 A1 WO2008129865 A1 WO 2008129865A1
Authority
WO
WIPO (PCT)
Prior art keywords
section
axis
force sensor
inertia force
spindle
Prior art date
Application number
PCT/JP2008/000911
Other languages
English (en)
French (fr)
Inventor
Jirou Terada
Ichirou Satou
Takami Ishida
Takashi Imanaka
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007105611A external-priority patent/JP2008261771A/ja
Priority claimed from JP2007105612A external-priority patent/JP2008261772A/ja
Priority claimed from JP2007230960A external-priority patent/JP2009063392A/ja
Priority claimed from JP2008030245A external-priority patent/JP2009192234A/ja
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to US12/593,752 priority Critical patent/US20100126270A1/en
Publication of WO2008129865A1 publication Critical patent/WO2008129865A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

　慣性力センサは、錘部と、錘部に結合する第１の固定部と、第１の固定部を介して錘部に結合する第２の固定部と、錘部の第１面に設けられた第１の電極と、第１の電極に対向する第２の電極と、弾性変形することにより錘部を変位させる第１と第２の弾性部とを備える。第１の弾性部は、錘部をＸ軸に沿って変位させてＹ軸やＺ軸に沿っては変位させない。第２の弾性部は、第１の固定部をＹ軸に沿って変位させてＸ軸やＺ軸に沿っては変位させない。この慣性力センサは大きな検出感度で加速度を検出することができる。
PCT/JP2008/000911 2007-04-13 2008-04-09 慣性力センサ WO2008129865A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/593,752 US20100126270A1 (en) 2007-04-13 2008-04-09 Inertia force sensor

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2007-105611 2007-04-13
JP2007105611A JP2008261771A (ja) 2007-04-13 2007-04-13 慣性力センサ
JP2007-105612 2007-04-13
JP2007105612A JP2008261772A (ja) 2007-04-13 2007-04-13 慣性力センサ
JP2007230960A JP2009063392A (ja) 2007-09-06 2007-09-06 慣性力センサ
JP2007-230960 2007-09-06
JP2008030245A JP2009192234A (ja) 2008-02-12 2008-02-12 センサ
JP2008-030245 2008-02-12

Publications (1)

Publication Number Publication Date
WO2008129865A1 true WO2008129865A1 (ja) 2008-10-30

Family

ID=39875395

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000911 WO2008129865A1 (ja) 2007-04-13 2008-04-09 慣性力センサ

Country Status (2)

Country Link
US (1) US20100126270A1 (ja)
WO (1) WO2008129865A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161958A1 (ja) * 2010-06-25 2011-12-29 パナソニック株式会社 慣性力検出素子とそれを用いた慣性力センサ
US20120227489A1 (en) * 2010-01-29 2012-09-13 Takashi Imanaka Angular velocity sensor

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008035683A1 (ja) * 2006-09-21 2010-01-28 パナソニック株式会社 角速度センサ
JP2008076265A (ja) * 2006-09-22 2008-04-03 Matsushita Electric Ind Co Ltd 慣性力センサ
JPWO2011161917A1 (ja) * 2010-06-25 2013-08-19 パナソニック株式会社 加速度センサ
US9003882B1 (en) * 2010-11-03 2015-04-14 Georgia Tech Research Corporation Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS device
CN103250028A (zh) * 2010-12-28 2013-08-14 松下电器产业株式会社 角速度传感器
JP5761350B2 (ja) * 2011-08-01 2015-08-12 株式会社村田製作所 振動子および振動ジャイロ
US20140238129A1 (en) * 2011-10-24 2014-08-28 Panasonic Corporation Angular velocity sensor and detection element used in same
JP6031682B2 (ja) * 2011-11-22 2016-11-24 パナソニックＩｐマネジメント株式会社 角速度センサとそれに用いられる検出素子
US20150135833A1 (en) * 2012-03-09 2015-05-21 Panasonic Corporation Inertial force sensor
WO2014068846A1 (ja) * 2012-10-31 2014-05-08 パナソニック株式会社 アクチュエータ
WO2015075908A1 (ja) * 2013-11-19 2015-05-28 パナソニックＩｐマネジメント株式会社 角速度センサ素子およびそれを用いた角速度センサ
KR101673362B1 (ko) * 2015-12-14 2016-11-07 현대자동차 주식회사 가속도 센서 및 그 제조 방법
TW201728905A (zh) * 2016-02-03 2017-08-16 智動全球股份有限公司 加速度計
JP6400621B2 (ja) * 2016-03-16 2018-10-03 株式会社東芝 角速度取得装置及び角速度取得用の電子部品
TWI607206B (zh) * 2016-11-15 2017-12-01 中原大學 感應三軸應力之電子裝置及其三軸應力感應器
JP6571065B2 (ja) * 2016-12-08 2019-09-04 株式会社東芝 振動装置

Citations (4)

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JPS6293668A (ja) * 1985-10-21 1987-04-30 Hitachi Ltd 角速度・加速度検出器
JPH06123631A (ja) * 1992-10-13 1994-05-06 Nippondenso Co Ltd 力学量センサ
JPH08313551A (ja) * 1995-05-18 1996-11-29 Aisin Seiki Co Ltd 静電容量型加速度センサ
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ

Family Cites Families (5)

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CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US5734105A (en) * 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
US7302847B2 (en) * 2004-08-17 2007-12-04 Nippon Soken, Inc. Physical quantity sensor having movable portion
JP4525452B2 (ja) * 2005-04-27 2010-08-18 パナソニック株式会社 多軸加速度センサ
JP4874067B2 (ja) * 2006-02-07 2012-02-08 セイコーインスツル株式会社 角速度センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293668A (ja) * 1985-10-21 1987-04-30 Hitachi Ltd 角速度・加速度検出器
JPH06123631A (ja) * 1992-10-13 1994-05-06 Nippondenso Co Ltd 力学量センサ
JPH08313551A (ja) * 1995-05-18 1996-11-29 Aisin Seiki Co Ltd 静電容量型加速度センサ
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120227489A1 (en) * 2010-01-29 2012-09-13 Takashi Imanaka Angular velocity sensor
US8991248B2 (en) * 2010-01-29 2015-03-31 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor
WO2011161958A1 (ja) * 2010-06-25 2011-12-29 パナソニック株式会社 慣性力検出素子とそれを用いた慣性力センサ
US20130091948A1 (en) * 2010-06-25 2013-04-18 Panasonic Corporation Angular velocity detection device and angular velocity sensor including the same
US20150204897A1 (en) * 2010-06-25 2015-07-23 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same
US9164119B2 (en) 2010-06-25 2015-10-20 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same
JP5906394B2 (ja) * 2010-06-25 2016-04-20 パナソニックＩｐマネジメント株式会社 慣性力検出素子とそれを用いた慣性力センサ
US9835641B2 (en) 2010-06-25 2017-12-05 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same

Also Published As

Publication number Publication date
US20100126270A1 (en) 2010-05-27

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