WO2006112211A1 - 伝熱シート、放熱構造体および伝熱シートの使用方法 - Google Patents
伝熱シート、放熱構造体および伝熱シートの使用方法 Download PDFInfo
- Publication number
- WO2006112211A1 WO2006112211A1 PCT/JP2006/304865 JP2006304865W WO2006112211A1 WO 2006112211 A1 WO2006112211 A1 WO 2006112211A1 JP 2006304865 W JP2006304865 W JP 2006304865W WO 2006112211 A1 WO2006112211 A1 WO 2006112211A1
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- WIPO (PCT)
- Prior art keywords
- heat transfer
- transfer sheet
- heat
- heating element
- sheet
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/20—Graphite
- C01B32/21—After-treatment
- C01B32/22—Intercalation
- C01B32/225—Expansion; Exfoliation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
Definitions
- the present invention relates to a heat transfer sheet.
- Heat sinks such as heat sinks are used to cool CPUs and other heat generators used in computers. However, if the adherence between the heat generator and the heat sink is poor, the heat conduction between the two becomes poor. , Leading to a decrease in cooling performance.
- a sheet having thermal conductivity and capable of improving the adhesion between the heating element and the heat dissipation element is disposed.
- the present invention relates to a heat transfer sheet that is used between a heat generating element that is covered and a heat dissipating member such as a heat sink, a method for using the heat transfer sheet, and a heat dissipating structure that includes the heat transferring sheet.
- Graphite sheets are used as sheets used by being sandwiched between a heating element and a heat sink.
- the graph sheet is disposed between the heating element and the heat sink, and is attached in a state of being pressed between the heating element and the heat sink. Then, the unevenness existing on the surface of the heating element or heat sink bites into the graph eye sheet, and it is possible to prevent gaps between the heating element and the graph eye sheet and between the graph eye sheet and the heat sink.
- the thermal resistance of the part can be reduced, and the cooling efficiency can be improved.
- the force that sandwiches the Graphite sheet between the heating element and the heat sink depends on the force to attach the heat sink to the heating element. However, if a large stress is applied to the CPU, the internal chip will be deformed. In the past, what had been around 5MPa has dropped to about 2MPa. When the force to attach the heat sink to the heating element is reduced, the unevenness existing on the surface of the heating element and the heat sink cannot sufficiently penetrate into the graph eye sheet, so there is a gap between the heating element and the heat sink and the graph eye sheet. A large number of remaining parts are attached, resulting in a problem that the thermal resistance increases and the cooling efficiency decreases.
- Patent Document 1 JP 2004-363432 A
- the present invention can increase the adhesion when sandwiched between a heat generator and a heat radiator even with a small mounting pressure, and a heat transfer sheet that can be reused and its use. It is an object of the present invention to provide a heat radiating structure including a method of use and a heat transfer sheet that can be applied. Means for solving the problem
- the heat transfer sheet of the first invention is arranged between a heat generating body and a heat radiating member, a member formed by expanded graphite, the force of density, is less than L.OMgZm 3 Features.
- the heat transfer sheet of the second invention has a compression rate of 50% or more and a recovery rate of 5% or more when compressed and compressed with a pressure of 34.3 MPa from the thickness direction in the first invention. It is characterized by that.
- the heat dissipating structure of the third invention is attached to the heating element and dissipates heat from the heating element.
- a structure comprising a radiator and a sheet disposed between the radiator and the heating element, wherein the sheet is the heat transfer sheet according to claim 1 or 2. To do.
- the method of using the heat transfer sheet of the fourth invention is a method of using a heat transfer sheet made of expanded graphite, wherein a heat transfer sheet having a force density smaller than l.OMgZm 3 is used as a heating element and a heat dissipation element. It is characterized in that it is used under the condition that the applied pressure from the thickness direction is 2.0MPa or less.
- the method of using the heat transfer sheet of the fifth invention is the method of using the heat transfer sheet made of expanded graphite in the fourth invention, wherein the heat transfer sheet having a strength density of 0.9 MgZm 3 or less is heated. It is arranged between the body and the radiator and is used under the condition that the applied pressure applied from the thickness direction is 1.5 MPa or less.
- the heat radiating body is a heat transfer device that has only a heat radiating function that releases or supplies the heat of the heat transfer sheet to gas, liquid, and other members by radiation, convection, heat conduction, etc. It is a concept that includes a heat absorption function that absorbs the heat of the sheet, and a sheet that has both a heat dissipation function and a heat absorption function.
- the force density is low, if the pressure is sandwiched between the heat generating element and the heat radiating element, the pressure is easily compressed even if the applied pressure is small, and the adhesiveness between the two increases. Therefore, since the thermal resistance from the heat generating element to the heat radiating element is reduced, the effect of cooling the heat generating element can be enhanced.
- the second invention since it has high compressibility, it is possible to keep the strength density below a predetermined density even when used multiple times, and to maintain high adhesion to the heating element and heat radiator. It can be kept. Accordingly, the thermal resistance can be kept small even after being used multiple times, so that reusability can be improved. And since it can be reused, the heat transfer sheet of the present invention can contribute to resource saving.
- the third invention since the force density of the sheet is low, if the pressure is sandwiched between the heat generator and the heat radiator, the sheet is easily compressed even if the applied pressure is small, and the adhesiveness between the two is high. Become. Therefore, since the thermal resistance from the heat generating element to the heat radiating element is reduced, the effect of cooling the heat generating element can be enhanced.
- the bulk density of the heat transfer sheet can be kept below a predetermined density even after being used a plurality of times, so that the adhesion to the heating element and the heat dissipation element can be kept high. it can. Therefore, since the heat resistance of the heat transfer sheet can be kept small even when used multiple times, the reusability can be improved.
- the force that sandwiches the heat transfer sheet between the heating element and the radiator in other words, the force applied to the heating element can be greatly reduced compared to the conventional case, the load of stress applied to the heating element can be suppressed, Damage to the heating element can be suppressed.
- the fifth aspect of the present invention it is possible to further increase the adhesion between the heat transfer sheet, the heating element, and the heat radiating member while maintaining reusability.
- the heat transfer sheet of the present invention is used for cooling a heating element such as a CPU of a computer, a substrate of a mobile phone, a DVD recorder or a server, and a heating element and a heat sink such as a fan. It is characterized in that the thermal resistance is reduced, that is, the heat conductivity is improved, when it is used in a state where it is placed between the heating element and the heat dissipation element and is pressurized.
- the thermal resistance is a value obtained by dividing the temperature difference between two spaced points by the amount of heat generated by the heating element in a member that receives heat from the heating element. This is the value obtained by subtracting the temperature at point A from the temperature, that is, the value obtained by dividing the temperature difference between point A and point B by the amount of heat generated by the heating element.
- the heat transfer sheet of the present invention is a sheet of expanded graphite formed by immersing natural graphite or cache graphite in a liquid such as sulfuric acid or nitric acid and then performing a heat treatment at 400 ° C or higher. It is formed so that its thickness is 0.05 to 5.0 mm and smaller than the force density force Sl.OMg / m 3 .
- Expanded graphite has a worm-like or fibrous shape, that is, its axial length is longer than the radial length. For example, its axial length is about lmm and the radial length is The length is about 300 m.
- the expanded graphite is entangled as described above.
- a binder eg, about 5%
- a phenol resin or a rubber component may be mixed. May be.
- the method for forming the heat transfer sheet of the present invention is not particularly limited as described above.
- the expanded graphite sheet in which the expanded graphite force as described above is also formed has an improved thermal conductivity in the plane direction with an increase in the force density, but has a reduced flexibility.
- the strength density of expanded graphite sheets is adjusted according to the application, and those used as heat transfer sheets usually have a high strength density with emphasis on thermal conductivity (for example, 1.3 Mg / m2). 3 )), while those used as heat insulating materials such as walls and electromagnetic shielding materials are configured to have a low bulk density (for example, l.OMg / m 3 or less).
- the heat transfer sheet of the present invention is configured with emphasis on flexibility rather than thermal conductivity, and is usually used as a heat insulating material or electromagnetic wave shielding material, and has a lower bulk density than l.OMgZm 3. It is characterized by being a Zhang black ship seat.
- the expanded black lead sheet with a strength density of l.OMgZm 3 or more is less flexible and the adhesion between the heating element and the heat sink becomes worse, but the bulk density is less than l.OMgZm 3.
- the force density is preferably 0.9 MgZm 3 or less. The reason will be described later.
- FIG. 1 (A) is a diagram showing an example of the usage state of the heat transfer sheet 1 of the present invention, and (B) is a diagram showing a position at which temperature measurement is performed in the example.
- symbol H indicates a heating element such as a CPU of the computer
- symbol 2 indicates a heat sink as a heat radiator
- symbol F indicates a heat dissipation fan attached to the heat sink 2.
- the heat transfer sheet 1 of the present invention is arranged in a state of being sandwiched between a heating element H and a heat sink 2. Then, if the heat sink 2 is fixed to the heating element H by the fixing member S such as a clamp, the heat transfer sheet 1 is pressed while being sandwiched between the heating element H and the heat sink 2.
- the heat transfer sheet 1 of the present invention has a strength density smaller than l.OMg / m 3 , Compressed by being pressurized while sandwiched between sinks 2. Then, the heat transfer sheet 1 is reduced in thickness. As the thickness is reduced, the adhesion between the heat transfer sheet 1 and the heating element H and the heat sink 2 is improved. The reason for this is that since there is a space between the expanded graphites constituting the heat transfer sheet 1 where the strength density of the heat transfer sheet 1 is small, the heat transfer sheet 1 is in the process of being compressed. This is because the expanded graphite force located on the surface of the heating element penetrates into the irregularities present on the surface of the heating element H and the surface of the heat sink 2.
- the thermal resistance between the heating element H and the heat transfer sheet 1 and the thermal resistance between the heat transfer sheet 1 and the heat sink 2 are both reduced.
- the heat transfer sheet 1 has a bulk density of be Gushi smaller than l.OMg / m 3, since the thickness direction of the thermal conductivity 5WZ (m'K) degree are secured, also the heating element H force heatsink Heat resistance up to 2 can be reduced, improving heat transfer. Therefore, the efficiency of cooling the heating element H by the heat transfer sheet 1 and the heat sink 2 can be increased.
- the heat transfer sheet 1 has a thermal conductivity in the plane direction of about 5O to 200WZ (m * K), which is larger than the thermal conductivity in the thickness direction.
- the temperature distribution in the surface direction can be kept almost uniform. Therefore, it is possible to prevent heat spots from being formed on the heat transfer sheet 1, the heating element H, and the heat sink 2.
- the heat transfer sheet 1 is only disposed between the heating element H and the heat sink 2, it is easily replaced when the heat transfer sheet 1 needs to be replaced. Workability is also improved.
- the heat transfer sheet 1 can be disposed between the heating element H and the heat sink 2, the heat transfer sheet 1 and the heat sink 2 may not be separated.
- the heat transfer sheet 1 may be attached to the heat sink 2 with an agent or the like.
- the specific procedure for attaching the heat dissipation structure to the heating element H is as follows. First, the heat transfer sheet 1 is placed on the heating element H, and then the heat sink 2 is placed on the heat transfer sheet 1. Then, if the heat generating element H is installed, for example, if it is a CPU, the heat generating element H, the heat transfer sheet 1 and the heat sink 2 are sandwiched and fixed by the base and the fixing member S. Can be attached to. Furthermore, if it is desired to improve the heat dissipation performance of the heat dissipation structure, the heat dissipation structure may be constituted by the heat transfer sheet 1, the heatsink 2, and the fan F that are simply attached to the upper surface of the heatsink 2.
- the fan F or the like has only a heat dissipation function, and the cold water jacket or the like has only a heat absorption function. Combine the heat transfer sheet 1 and the heat dissipation structure.
- the compression rate is 50% or more and the restoration rate is 5% or more. If adjusted, the force density after the pressure is removed is kept below 1.0 Mg / m 3 even after multiple compressions. As a result, even after multiple uses, the heat transfer sheet 1 is kept in high contact with the heating element H and the heat sink 2 when pressed in a state of being sandwiched between the heating element H and the heat sink 2. In addition, the thermal resistance can be kept small even when used multiple times, and the reusability can be improved.
- the compression rate force is 5% or more when the pressure is compressed for the first time with a force of 34.3MPa in the thickness direction, and the recovery rate is adjusted to 6% or more, the pressure can be increased more reliably.
- the force of density in later l.OMg / m 3 less state for example, can be kept 0.9 m g / m 3 of less than state, reusability can be further enhanced.
- the heat transfer sheet 1 When the heat transfer sheet 1 is first compressed and compressed from the thickness direction at a pressure of 34.3 MPa, if the compression ratio is less than 50%, the adhesion to the heating element H and the heat sink 1 is good. In addition, if the restoration rate is less than 5%, it is not preferable because the adhesiveness with the heating element H and the heat sink 1 cannot be kept high when reused and cannot be reused. .
- the heat sink 2 is fixed to the heating element H so that the pressure applied to the heat transfer sheet 1 is 2.0 MPa or less, preferably 1.5 MPa or less, the heat transfer sheet 1 after the pressure is removed. force of density can be kept held while less than l.OMg / m 3 to Runode, it is possible to improve the reusability of the heat transfer sheet 1, and the arc suppressing damage to the heating element H I'll do it.
- the heat transfer sheet 1 having a force density of 0.9 Mg / m 3 or less is used, and the heat sink 2 is fixed to the heating element H so that the pressure applied to the heat transfer sheet 1 is 1.5 MPa or less.
- the force density after the pressure is removed can be maintained at 0.9 Mg / m 3 or less, and the adhesion between the heat transfer sheet 1 and the heating element H and the heat sink 2 is improved.
- resilience can be maintained. Therefore, while maintaining the reusability of the heat transfer sheet 1, the adhesion between the heat transfer sheet 1, the heating element H and the heat sink 2 can be further increased, and the thermal resistance can be lowered.
- heat transfer sheet 1 with a force density of 0.8 Mg / m 3 or less, and fix heat sink 2 to heating element H with fixing member S so that the pressure applied to heat transfer sheet 1 is less than l.OMPa. If the pressure is removed, the force density after the pressure is removed can be kept at 0.8 Mg / m 3 or less, and the adhesion between the heat transfer sheet 1 and the heating element H and the heat sink 2 is further improved. It is possible to improve the recovery performance and maintain the recoverability.
- the heat transfer sheet 1 is treated so that the total amount of impurities such as sulfur and iron contained is 1 ppm or less, particularly sulfur is 1 ppm or less, the member to which the heat transfer sheet 1 is attached N Degradation of the device can be prevented more reliably.
- a resin film such as polyethylene terephthalate is interposed between the heat transfer sheet 1 and the heating element H, between the heat sink 2 or between the heating element H and the heat sink 2. You may attach in the state pinched
- the resin film to be used is not particularly limited as long as the thermal conductivity in the thickness direction is about the same as that of the heat transfer sheet 1 and has a heat resistance of about 100 ° C. Nah ...
- the heat transfer sheet of the present invention is compressed and compressed from the thickness direction with a pressing force of 34.3 MPa.
- the compression rate and decompression rate were investigated.
- the compression rate is evaluated by the ratio of the thickness during pressure compression to the thickness before pressure compression, and the recovery rate is the value when the pressure after pressure compression is removed with respect to the thickness before pressure compression.
- the thickness was evaluated as a percentage.
- the restoration rate decreases as the compression rate increases as a whole.
- the rate of change S of the restoration rate decreases.
- the compression rate is between 55 and 75%, the restoration rate is maintained almost constant regardless of the change in the compression rate.
- the heat transfer sheet of the present invention is made by using a CPU (Intel Celeron Prossessor 2 GHz) and a heat sink (Intel Celero n genuine product, aluminum The temperature difference between the CPU internal temperature and the heat sink temperature when the CPU was operated with a constant amount of information (heat generation) was measured.
- a CPU Intel Celeron Prossessor 2 GHz
- a heat sink Intel Celero n genuine product, aluminum
- Heat transfer sheet used for the measurement, the force of density, 0.1, 0.5, 0.8 are of 1.0 Mg / m 3 thickness 0.5 mm, in the heat transfer sheet of the force of density, the pressure (CPU applied The pressure at which the heat sink was attached was changed to 0.1, 0.5, 1.0, 2.0, and 5.0 MPa, and the change in temperature difference was investigated.
- the smaller the temperature difference the better the heat transfer of the heat transfer sheet, in other words, the heat resistance is lower. This means that the smaller the temperature difference, the worse the heat transfer of the heat transfer sheet, in other words, the greater the thermal resistance.
- the temperature difference tends to decrease as the applied pressure increases, and the temperature difference becomes substantially constant when the applied pressure exceeds a certain value. It can be confirmed that In other words, it can be confirmed that the temperature difference cannot be reduced even if the pressing force is increased beyond the pressing force at which the temperature difference becomes substantially constant.
- the applied pressure at which the temperature difference becomes almost constant decreases as the force density becomes smaller. If the pressure density is 2.0 MPa or more, it can be confirmed that the temperature difference becomes almost constant at all force densities.
- the force density is 0.8 Mg / m 3 or less, it is considered that the temperature difference can be made almost constant if the applied pressure is l.OMPa or more, especially 1.5 MPa or more.
- the measurement is conducted by sandwiching a 0.5mm thick heat transfer sheet between the CPU and the heat sink and mounting the heat transfer sheet so that the l.OMPa pressure is applied.
- the temperature difference was set to 0.1, 0.5, 0.8, 1.0, 1.2, 1.8, 2.0 Mg / m 3 .
- Example 4 Compared with the results of Example 2, if the applied pressure is reduced from l.OMPa, the force density at which the thermal efficiency changes rapidly can be expected to be reduced, while the applied pressure is greater than 1.0 MPa. In any case, it can be considered that the force density at which the thermal efficiency changes rapidly does not change much.
- the measurement was repeated 4 times by sandwiching a heat transfer sheet with a thickness of 0.5 mm and a bulk density of 0.1, 0.5, 0.8, 1.0 Mg / m 3 between the CPU and the heat sink, and removing the temperature difference each time.
- a heat transfer sheet with a thickness of 0.5 mm and a bulk density of 0.1, 0.5, 0.8, 1.0 Mg / m 3 between the CPU and the heat sink, and removing the temperature difference each time. was measured.
- Fig. 4 (B) it can be confirmed that the temperature difference shows almost the same value every time regardless of the force density. In other words, it can be confirmed that the heat transfer performance of the heat transfer sheet is affected by the force density before first mounting between the CPU and the heat sink, and the pressure applied when mounting between the CPU and the heat sink. .
- the heat transfer sheet of the present invention is suitable as a member for transferring heat generated from a CPU such as a computer or a mobile phone, a DVD recorder, or the like to a heat radiating body such as a heat sink or a fan.
- FIG. 1 (A) is a diagram showing an example of a usage state of the heat transfer sheet 1 of the present invention, and (B) is a diagram showing a position at which temperature measurement is performed in the example. It is.
- FIG. 2 (A) is a diagram showing the relationship between the compressibility and the recovery rate and the bulk density when the heat transfer sheet of the present invention is compressed and compressed from the thickness direction at a pressure of 34.3 MPa. B) is a diagram showing the relationship between the compression rate and the decompression rate.
- FIG. 3 is a diagram showing the relationship between the heat transfer property and the applied pressure of the heat transfer sheet of the present invention for each force density.
- FIG. 4 (A) is a diagram showing the relationship between bulk density and heat transfer when a constant pressure is applied to the heat transfer sheet of the present invention, and (B) is the number of pressurizations and heat transfer.
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Abstract
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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KR1020097026421A KR101052752B1 (ko) | 2005-03-31 | 2006-03-13 | 방열구조체 및 전열시트의 사용방법 |
US11/886,738 US20090301697A1 (en) | 2005-03-31 | 2006-03-13 | Heat-Transfer Sheet, Heat Transfer System, and Method of Using Heat-Transfer Sheet |
KR1020097026420A KR101061805B1 (ko) | 2005-03-31 | 2006-03-13 | 방열구조체 |
EP06715588.7A EP1865552B1 (en) | 2005-03-31 | 2006-03-13 | Heat transfer sheet, radiation structure and method for using heat transfer sheet |
NO20075425A NO20075425L (no) | 2005-03-31 | 2007-10-25 | Varmeoverforingssjikt, utstralestrukstur og fremgangsmate for a anvende varmeoverfoingssjikt |
Applications Claiming Priority (2)
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JP2005-100622 | 2005-03-31 | ||
JP2005100622A JP4299261B2 (ja) | 2005-03-31 | 2005-03-31 | 伝熱シート、放熱構造体および伝熱シートの使用方法 |
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WO2006112211A1 true WO2006112211A1 (ja) | 2006-10-26 |
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PCT/JP2006/304865 WO2006112211A1 (ja) | 2005-03-31 | 2006-03-13 | 伝熱シート、放熱構造体および伝熱シートの使用方法 |
Country Status (7)
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US (1) | US20090301697A1 (ja) |
EP (1) | EP1865552B1 (ja) |
JP (2) | JP4299261B2 (ja) |
KR (3) | KR101068416B1 (ja) |
NO (1) | NO20075425L (ja) |
TW (1) | TWI320844B (ja) |
WO (1) | WO2006112211A1 (ja) |
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WO2013140741A1 (ja) * | 2012-03-19 | 2013-09-26 | パナソニック株式会社 | 熱伝導体およびそれを用いた電子機器 |
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TWI601249B (zh) | 2013-05-22 | 2017-10-01 | Kaneka Corp | Cooling structure |
WO2015045641A1 (ja) | 2013-09-26 | 2015-04-02 | 株式会社カネカ | グラファイトシート、その製造方法、配線用積層板、グラファイト配線材料、および配線板の製造方法 |
KR20160002427U (ko) * | 2013-11-05 | 2016-07-11 | 그라프텍 인터내셔널 홀딩스 인코포레이티드 | 흑연 물품 |
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- 2006-03-13 KR KR1020097026420A patent/KR101061805B1/ko active IP Right Grant
- 2006-03-13 EP EP06715588.7A patent/EP1865552B1/en active Active
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Also Published As
Publication number | Publication date |
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TW200638018A (en) | 2006-11-01 |
KR101068416B1 (ko) | 2011-09-29 |
JP2006286684A (ja) | 2006-10-19 |
KR20100017859A (ko) | 2010-02-16 |
KR20070118099A (ko) | 2007-12-13 |
JP2008153704A (ja) | 2008-07-03 |
EP1865552A1 (en) | 2007-12-12 |
JP4299261B2 (ja) | 2009-07-22 |
TWI320844B (en) | 2010-02-21 |
KR101052752B1 (ko) | 2011-07-29 |
JP5114255B2 (ja) | 2013-01-09 |
NO20075425L (no) | 2007-10-25 |
EP1865552A4 (en) | 2008-07-02 |
US20090301697A1 (en) | 2009-12-10 |
EP1865552B1 (en) | 2022-06-15 |
KR20100017858A (ko) | 2010-02-16 |
KR101061805B1 (ko) | 2011-09-05 |
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