WO1996037943A1 - Actionneur electromagnetique plat - Google Patents
Actionneur electromagnetique plat Download PDFInfo
- Publication number
- WO1996037943A1 WO1996037943A1 PCT/JP1996/001149 JP9601149W WO9637943A1 WO 1996037943 A1 WO1996037943 A1 WO 1996037943A1 JP 9601149 W JP9601149 W JP 9601149W WO 9637943 A1 WO9637943 A1 WO 9637943A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- magnetic field
- movable plate
- movable
- electromagnetic actuator
- static magnetic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
Definitions
- the present invention relates to a planar electromagnetic actuator that has been downsized using semiconductor manufacturing technology, and more particularly to a technique for reducing the cost of a planar electromagnetic actuator.
- the inventors of the present invention have previously proposed ultra-small Brahna-type electromagnetic actuators utilizing semiconductor manufacturing technology.
- planar-type galvano mirrors Japanese Patent Application No. 5-32050
- Japanese Patent Application No. 6-9882 Japanese Patent Application No. 6-9882
- This electromagnetic actuator is composed of a silicon substrate with a plate-shaped movable portion and a tone-ymber structure that pivotally supports the movable portion at the center position of the movable portion so that the movable portion can swing up and down with respect to the silicon substrate.
- the shaft support is integrally formed.
- a flat coil made of a copper thin film that generates a magnetic field when energized is provided on a peripheral portion of an upper surface of the movable portion.
- a permanent magnet as a pair of static magnetic field generating means is provided around the movable portion so that a static magnetic field acts on a flat coil portion on the opposite side of the movable portion parallel to the axial direction of the shaft support portion.
- a pair of permanent magnets is arranged above and below each of the opposite sides of the movable portion, and the static magnetic field generated between the pair of permanent magnets is configured to cross the drive coil in a predetermined direction.
- Such an electromagnetic actuator operates by passing a current through a planar coil. That is, on both sides of the movable part, a static magnetic field is formed by the permanent magnet in a direction crossing the plane coil along the plane of the movable part, and when a current flows through the plane coil in the static magnetic field, the plane coil In accordance with the current and magnetic flux densities, the following equation (1) is applied to both ends of the movable part in the direction according to the left-hand rule of framing of current, magnetic flux, and force. The magnetic force acts to rotate the movable part.
- F i X B ⁇ ⁇ ⁇ (1)
- F the magnetic force
- i the current flowing through the drive coil
- B the magnetic flux density
- the rotation angle of the movable part is proportional to the current flowing through the plane coil, the rotation angle of the movable part can be controlled by controlling the current flowing through the plane coil.
- the reflection direction of the laser beam incident on the mirror in a plane perpendicular to the axis of the shaft support can be freely controlled, and the displacement angle of the mirror Can be used as a galvanomirror that scans laser light by continuously and repeatedly operating.
- the movable portion integrally formed on the silicon substrate is composed of a frame-shaped outer movable plate and a flat inner movable plate disposed in the frame of the outer movable plate.
- the shaft support portion includes a first torsion bar that supports the outer movable plate and a second torsion bar that is orthogonal to the first torsion bar and axially orthogonally supports the inner movable plate with respect to the outer movable plate. .
- drive coils are arranged on the upper surfaces of the outer and inner movable plates, respectively.
- a permanent magnet for driving the outer movable plate and a permanent magnet for driving the inner movable plate are separately provided.
- a pair of permanent magnets are arranged above and below each of the four sides of the movable part as in the above-mentioned prior application, or Permanent magnets are arranged on each of the four sides, and permanent magnets facing each other are paired to generate magnetic fields orthogonal to the movable part. That is, the conventional structure required at least four permanent magnets, in other words, two pairs of static magnetic field generating means.
- the present invention has been made in view of the above circumstances, and has a simple structure and an inexpensive manufacturing cost by generating static magnetic fields that are orthogonal to each other with respect to a movable portion using only a pair of static magnetic field generating means.
- the purpose is to provide an electromagnetic actuator.
- a movable portion including a frame-shaped outer movable plate and an inner movable plate disposed inside the outer movable plate, and the outer movable plate are pivotally supported on the semiconductor substrate.
- the first torsion bar and a shaft support portion formed of a second torsion bar having an axial direction orthogonal to the first torsion bar and rotatably supporting the inner movable plate are formed integrally with the first torsion bar.
- a driving coil provided on each peripheral portion of the moving plate and the inner movable plate; and a magnetic field generating means for applying a static magnetic field to the driving coil, wherein the movable portion is driven by a magnetic force generated by flowing a current through the driving coil.
- a pair of the static magnetic field generating means are arranged in a diagonal direction of one of the movable parts so as to sandwich the movable part. From one of the magnetic field generating means Static magnetic field directed towards traverses the movable portion obliquely. When the vector component of the static magnetic field is decomposed, two static magnetic field components orthogonal to each side of the movable part are obtained. Therefore, it is possible to apply a magnetic force to the outer movable plate and the inner movable plate by the two static magnetic field components, respectively.
- the pair of static magnetic field generating means be fixed to a yoke made of a magnetic material disposed so as to surround the movable portion.
- the pair of static magnetic field generating means is a permanent magnet in which an N pole and an S pole are arranged to face each other.
- the structure can be simplified as compared with the case where an electromagnet or the like is used.
- the permanent magnet may be a rare earth magnet.
- a reflecting mirror was provided on the center surface of the inner movable plate of the movable portion to form a galvano mirror.
- a movable portion provided with the reflection mirror, a scanner main body including a shaft support portion and a drive coil, a yoke made of a frame-shaped magnetic material surrounding the scanner main body, A permanent magnet fixed to the yoke with the scanner main body interposed therebetween in one diagonal direction of the scanner main body is disposed on an insulating substrate, and the insulating substrate is electrically connected to the drive coil. Electrical terminal pins.
- FIG. 1 is a configuration diagram showing an embodiment of an electromagnetic factory according to the present invention.
- FIG. 2 is an enlarged view of the scanner main body of the embodiment.
- FIG. 3 is an explanatory diagram of the operation of the present embodiment.
- FIG. 4 is an explanatory view of the effect of the yoke
- (A) is a state diagram of the magnetic field without the yoke
- (B) is a state diagram of the magnetic field with the yoke.
- FIG. 1 shows a configuration of an embodiment in which the electromagnetic actuator according to the present invention is applied to a galvanomirror.
- a galvano mirror 1 which is an electromagnetic actuator of the present embodiment is a scanner in which a movable portion and a shaft support portion are integrally formed on a semiconductor substrate, for example, a silicon substrate, in the center of an insulating substrate 2.
- the main body 10 is arranged on the insulating substrate 2 at an angle of about 45 ° with respect to the insulating substrate 2 as shown in FIG.
- a frame-shaped yoke 3 made of, for example, pure iron which is a magnetic material is provided around the upper surface of the insulating substrate 2. Inside the two sides of the yoke 3 facing each other, a pair of permanent magnets 4 and 5 are provided as static magnetic field generating means.
- the S and N poles of the permanent magnets 4 and 5 face each other, and a static magnetic field is generated across the scanner body 10 from one permanent magnet 4 (or 5) toward the other permanent magnet 5 (or 4). And so on. In this embodiment, a static magnetic field is generated from the permanent magnet 4 toward the permanent magnet 5.
- the plane coils 15A and 15B of the scanner main body 10 described later in detail are connected to the respective bonding rods and heads 7a to 7d via conductors 8a to 8d.
- the outer movable plate 1 to be described later is connected via the connector pins 6a and 6b, with the connector pins 6a, 6b and 6c, 6d as pairs, one of which is a positive pole and the other is a negative pole.
- the 2A flat coil 15A is configured to be energized, and to the inner movable plate 12B, which will be described later, a flat coil 15B via connector pins 6c and 6d.
- the scanner main body 10 includes a silicon substrate 11 having a frame-shaped outer movable plate 12 ⁇ and a flat inner movable plate 12B.
- Moving part consisting of The first torsion bars 13A and 13A which are formed orthogonally and support the outer movable plate 12A and the second torsion bars 13B and 13B which support the inner movable plate 12B with respect to the outer movable plate 12A.
- the thickness of the movable portion is made thinner than the thickness of the silicon substrate 11 so that the movable portion can swing around the shaft support portion.
- a planar coil 15A as a drive coil of a copper thin film (schematically indicated by one line in the figure) is formed by using an electrode coil method or the like, and the first torsion bars 13A, 13A Are electrically connected to a pair of outer electrode terminals 14A, 14A on the silicon substrate 11 via one of the terminals.
- a planar coil 15B (shown schematically by a single line in the figure) as a drive coil is formed on the peripheral edge of the upper surface of the inner movable plate 12B in the same manner as the planar coil 15A.
- a total reflection mirror 16 is formed at the center of the upper surface of the inner movable plate 12B by, for example, aluminum evaporation.
- the pair of outer electrode terminals 14A, 14A and the inner electrode terminals 14B, 14B are formed by an electrode coil method or the like as in the case of the planar coils 15A, 15B.
- the magnetic field generated by the permanent magnet 4 crosses the scanner body 10 on the insulating substrate 2 and travels to the permanent magnet 5.
- the magnetic field H, the transverse component magnetic field H, and the vertical component field H 2 is present perpendicular to each other in the plane of the scanner main body 10.
- the transverse component magnetic field H is in a direction perpendicular to the axial direction of the first torsion bars 13A, 13A that supports the outer movable plate 12A
- the longitudinal component magnetic field H2 is the inner movable plate 12B.
- the direction is orthogonal to the axial direction of the second tone chambers 13B, 13B that are supported.
- the connector pin is attached to the flat coil 15A of the outer movable plate 12A.
- a magnetic force F is generated based on the expression (1) by the action of the current and the lateral component magnetic field H, and the outer movable plate 12A is driven.
- the flat surface coil 15 B of the inner movable plate 12 B when a current flows through the connector pin 6 c, 6 d, by the action of this current and the longitudinal component magnetic field H 2, the ( Based on the equation (1), a magnetic force F is generated to drive the inner movable plate 12B.
- the outer movable plate 12A and the inner movable plate 12B can be driven only by the pair of permanent magnets 4 and 5, and as in the conventional case, the outer movable plate 12A and the inner movable plate are driven separately. There is no need to provide a magnet. For this reason, the number of parts in the electromagnetic actuator can be reduced and the structure can be simplified, and the manufacturing cost of the electromagnetic actuator can be reduced.
- an electromagnet may be used as the static magnetic field generating means.
- wiring for energization is required.
- a rare-earth magnet by using a rare-earth magnet, a large magnetic field H can be obtained, and the magnetic force can be increased.
- the electromagnetic actuator is applied to a planar galvano mirror is described, but the present invention is not limited to this.
- a pair of static magnetic field generating means is arranged in a diagonal direction of a movable portion having two movable plates which are supported at right angles to each other.
- the two movable plates can be driven only by the generating means, reducing the number of parts in the electromagnetic actuator and simplifying the structure, and significantly reducing the manufacturing cost of the electromagnetic actuator. it can. Further, since the yoke is provided, the efficiency of the static magnetic field generating means can be increased, and the driving force of the movable portion can be increased.
- the present invention can achieve simplification, low cost, and the like of equipment for applying this kind of ultra-small planar electromagnetic actuator, and has great industrial applicability.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Micromachines (AREA)
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/776,457 US5912608A (en) | 1995-05-26 | 1996-04-26 | Planar type electromagnetic actuator |
DE69615321T DE69615321T2 (de) | 1995-05-26 | 1996-04-26 | Flaches elektromagnetisches betätigungsorgan |
EP96912255A EP0778657B1 (en) | 1995-05-26 | 1996-04-26 | Planar electromagnetic actuator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7128056A JP2987750B2 (ja) | 1995-05-26 | 1995-05-26 | プレーナ型電磁アクチュエータ |
JP7/128056 | 1995-05-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996037943A1 true WO1996037943A1 (fr) | 1996-11-28 |
Family
ID=14975400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1996/001149 WO1996037943A1 (fr) | 1995-05-26 | 1996-04-26 | Actionneur electromagnetique plat |
Country Status (6)
Country | Link |
---|---|
US (1) | US5912608A (ja) |
EP (1) | EP0778657B1 (ja) |
JP (1) | JP2987750B2 (ja) |
KR (1) | KR100402264B1 (ja) |
DE (1) | DE69615321T2 (ja) |
WO (1) | WO1996037943A1 (ja) |
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JP2657769B2 (ja) * | 1994-01-31 | 1997-09-24 | 正喜 江刺 | 変位検出機能を備えたプレーナー型ガルバノミラー及びその製造方法 |
-
1995
- 1995-05-26 JP JP7128056A patent/JP2987750B2/ja not_active Expired - Fee Related
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1996
- 1996-04-26 KR KR1019970700457A patent/KR100402264B1/ko not_active IP Right Cessation
- 1996-04-26 DE DE69615321T patent/DE69615321T2/de not_active Expired - Lifetime
- 1996-04-26 US US08/776,457 patent/US5912608A/en not_active Expired - Lifetime
- 1996-04-26 WO PCT/JP1996/001149 patent/WO1996037943A1/ja active IP Right Grant
- 1996-04-26 EP EP96912255A patent/EP0778657B1/en not_active Expired - Lifetime
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60107017A (ja) * | 1983-11-16 | 1985-06-12 | Hitachi Ltd | 光偏向素子 |
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US5912608A (en) | 1999-06-15 |
DE69615321D1 (de) | 2001-10-25 |
DE69615321T2 (de) | 2002-07-04 |
JP2987750B2 (ja) | 1999-12-06 |
EP0778657B1 (en) | 2001-09-19 |
JPH08322227A (ja) | 1996-12-03 |
EP0778657A4 (en) | 1998-02-04 |
KR100402264B1 (ko) | 2004-02-05 |
EP0778657A1 (en) | 1997-06-11 |
KR970705220A (ko) | 1997-09-06 |
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