TWI823981B - 切割膜基材用樹脂組成物、切割膜基材及切割膜 - Google Patents

切割膜基材用樹脂組成物、切割膜基材及切割膜 Download PDF

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Publication number: TWI823981B
Authority: TW; Taiwan
Prior art keywords: dicing film; resin; base material; ethylene; film base
Prior art date: 2018-08-08

Application number

TW108128323A

Other languages

English (en)

Chinese (zh)

Other versions

TW202018033A (zh

Inventor

中野重則

佐久間雅巳

髙岡樹

Original Assignee

日商三井陶氏聚合化學股份有限公司

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2018-08-08

Filing date

2019-08-08

Publication date

2023-12-01

2019-08-08 Application filed by 日商三井陶氏聚合化學股份有限公司 filed Critical 日商三井陶氏聚合化學股份有限公司

2020-05-16 Publication of TW202018033A publication Critical patent/TW202018033A/zh

2023-12-01 Application granted granted Critical

2023-12-01 Publication of TWI823981B publication Critical patent/TWI823981B/zh

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- C08L23/02—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers not modified by chemical after-treatment
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- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
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- C08J5/18—Manufacture of films or sheets
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L23/00—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers
- C08L23/02—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L23/04—Homopolymers or copolymers of ethene
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
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- C08L23/02—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L23/04—Homopolymers or copolymers of ethene
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- C08L23/0807—Copolymers of ethene with unsaturated hydrocarbons only containing more than three carbon atoms
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- C08L23/02—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L23/04—Homopolymers or copolymers of ethene
- C08L23/08—Copolymers of ethene
- C08L23/0846—Copolymers of ethene with unsaturated hydrocarbons containing other atoms than carbon or hydrogen atoms
- C08L23/0869—Acids or derivatives thereof
- C08L23/0876—Neutralised polymers, i.e. ionomers
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
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- C08L33/02—Homopolymers or copolymers of acids; Metal or ammonium salts thereof
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
- C09J7/24—Plastics; Metallised plastics based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/241—Polyolefin, e.g.rubber
- C09J7/243—Ethylene or propylene polymers
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/29—Laminated material

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Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
Health & Medical Sciences (AREA)
Medicinal Chemistry (AREA)
Polymers & Plastics (AREA)
Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Materials Engineering (AREA)
Dicing (AREA)
Laminated Bodies (AREA)
Compositions Of Macromolecular Compounds (AREA)

TW108128323A 2018-08-08 2019-08-08 切割膜基材用樹脂組成物、切割膜基材及切割膜 TWI823981B (zh)

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JP2023066585A (ja) *	2021-10-29	2023-05-16	タキロンシーアイ株式会社	半導体製造テープ用基材フィルム
JP2023066587A (ja) *	2021-10-29	2023-05-16	タキロンシーアイ株式会社	半導体製造テープ用基材フィルム
WO2023176620A1 (ja) *	2022-03-14	2023-09-21	三井・ダウポリケミカル株式会社	バックグラインドフィルム基材用樹脂組成物、バックグラインドフィルム基材およびバックグラインドフィルム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2000345129A (ja) *	1999-03-30	2000-12-12	Toyo Chem Co Ltd	半導体ウエハ用シート
TW201202382A (en) *	2010-03-31	2012-01-16	Furukawa Electric Co Ltd	Wafer processing tape

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH097976A (ja)	1995-06-23	1997-01-10	Furukawa Electric Co Ltd:The	半導体ウエハ固定用粘着テープ
WO2008153149A1 (ja) *	2007-06-14	2008-12-18	Du Pont-Mitsui Polychemicals Co., Ltd.	澱粉質系材料配合樹脂組成物
JP4934620B2 (ja)	2008-03-25	2012-05-16	古河電気工業株式会社	ウエハ加工用テープ
JP2010182761A (ja)	2009-02-04	2010-08-19	Furukawa Electric Co Ltd:The	半導体ウエハ加工用フィルム及びその基材フィルム
JP2011040449A (ja) *	2009-08-07	2011-02-24	Du Pont Mitsui Polychem Co Ltd	ダイシングテープ用基材、ダイシングテープ、半導体装置の製造方法
CN102337089B (zh) *	2010-07-07	2014-01-29	古河电气工业株式会社	晶片加工用胶带和使用其的半导体加工方法
KR101742647B1 (ko) *	2011-12-26	2017-06-01	듀폰-미츠이 폴리케미칼 가부시키가이샤	레이저 다이싱용 필름 기재, 레이저 다이싱용 필름 및 전자부품의 제조방법
JP6472972B2 (ja) *	2013-10-23	2019-02-20	三井・デュポンポリケミカル株式会社	ダイシングテープ基材用樹脂組成物およびダイシングテープ基材
JP6264126B2 (ja)	2014-03-20	2018-01-24	日立化成株式会社	ウエハ加工用テープ
JP6554708B2 (ja) *	2015-11-20	2019-08-07	三井・ダウポリケミカル株式会社	ダイシングフィルム基材用樹脂組成物、ダイシングフィルム基材およびダイシングフィルム
CN110178203B (zh) *	2016-12-27	2023-05-23	三井—陶氏聚合化学株式会社	切割膜基材及切割膜

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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2000345129A (ja) *	1999-03-30	2000-12-12	Toyo Chem Co Ltd	半導体ウエハ用シート
TW201202382A (en) *	2010-03-31	2012-01-16	Furukawa Electric Co Ltd	Wafer processing tape

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CN112236469A (zh)	2021-01-15
KR102483810B1 (ko)	2023-01-03
CN112236469B (zh)	2023-07-14
KR20210029792A (ko)	2021-03-16
WO2020031928A1 (ja)	2020-02-13
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Publication	Publication Date	Title
TWI823981B (zh)	2023-12-01	切割膜基材用樹脂組成物、切割膜基材及切割膜
JP6247733B2 (ja)	2017-12-13	レーザーダイシング用フィルム基材、レーザーダイシング用フィルム、及び電子部品の製造方法
JP6617215B2 (ja)	2019-12-11	ダイシングシート
TWI498215B (zh)	2015-09-01	A laminated film, and a thin film for manufacturing a semiconductor thereof
TW201500513A (zh)	2015-01-01	黏著片材
JP7252380B2 (ja)	2023-04-04	ダイシング用基体フィルム
JP6472972B2 (ja)	2019-02-20	ダイシングテープ基材用樹脂組成物およびダイシングテープ基材
US10438831B2 (en)	2019-10-08	Base film for dicing sheets and dicing sheet
JP2020531308A (ja)	2020-11-05	低温熱積層を使用してタイルを形成する方法
JP6667671B2 (ja)	2020-03-18	ダイシングフィルム基材およびダイシングフィルム
US20170121570A1 (en)	2017-05-04	Base film for dicing sheets and dicing sheet
WO2023074153A1 (ja)	2023-05-04	半導体製造テープ用基材フィルム
JP2013185148A (ja)	2013-09-19	粘着シート
WO2023074152A1 (ja)	2023-05-04	半導体製造テープ用基材フィルム
TW202402543A (zh)	2024-01-16	背面研磨薄膜基材用樹脂組成物、背面研磨薄膜基材及背面研磨薄膜
US20100151222A1 (en)	2010-06-17	Multilayer composite foil
JP2022167401A (ja)	2022-11-04	バックグラインド工程用フィルム
JP2022093019A (ja)	2022-06-23	複層フィルム、粘着フィルム及び半導体製造工程用粘着フィルム