TW201634615A - 可以濕式去除的含矽阻劑下層膜形成組成物 - Google Patents
可以濕式去除的含矽阻劑下層膜形成組成物 Download PDFInfo
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- TW201634615A TW201634615A TW104137923A TW104137923A TW201634615A TW 201634615 A TW201634615 A TW 201634615A TW 104137923 A TW104137923 A TW 104137923A TW 104137923 A TW104137923 A TW 104137923A TW 201634615 A TW201634615 A TW 201634615A
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- HADKRTWCOYPCPH-UHFFFAOYSA-M trimethylphenylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C1=CC=CC=C1 HADKRTWCOYPCPH-UHFFFAOYSA-M 0.000 description 1
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- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
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- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
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Abstract
提供一種用來形成阻劑下層膜的阻劑下層膜形成組成物,該阻劑下層膜係可使用作為硬式遮罩並可藉由使用硫酸/過氧化氫等的藥液的濕式蝕刻之方法而去除。
本發明的微影用阻劑下層膜形成組成物,其特徵係包含(A)成分與(B)成分,(A)成分係包含水解性矽烷、該水解物、或該水解縮合物,該水解性矽烷係包含式(1):【化1】R1aR2bSi(R3)4-(a+b) 式(1)〔式(1)中,R1係表示式(2):
□所表示的有機基且藉由Si-C鍵而與矽原子鍵結,R3係表示烷氧基、醯氧基、或鹵素基,a係表示1的整數,b係表示0~2的整數,a+b係表示1~3的整數〕所表示的水解性矽烷;(B)成分係包含具有烷氧基甲基或羥基甲基的環構造的交聯性化合物、或具有環氧基或嵌段異氰酸酯基的交聯性化合物。
Description
本發明為有關在半導體裝置製造的微影步驟中,用來形成使用於光阻劑的下層的下層膜的微影用阻劑下層膜形成組成物。
作為半導體基板與光阻劑之間的下層膜,使用以含有矽或鈦等的金屬元素而成的硬式遮罩係為已知之膜(參考專利文獻1及專利文獻2)。此時,阻劑與硬式遮罩,其構成成分上具有很大的差異,因此該等之藉由乾蝕刻被去除的速度係大部分取決於使用於乾蝕刻的氣體種類。然後,藉由適當地選擇氣體種類,可在不伴隨著光阻劑之膜厚大寬度減少之情況下,藉由乾蝕刻來去除硬式遮罩。如此般地,在近年的半導體裝置的製造中,為了達成以抗反射效果為首的各種效果,故於半導體基板與光阻劑之間配置阻劑下層膜。
該等的下層膜於基板之加工後必須予以去
除。又,形成於基板上的下層膜若產生問題時,亦有將下層膜去除後進行再加工之情形。因此係以藉由氟氣體的乾蝕刻、或藉由氫氟酸或緩衝氫氟酸等的濕式蝕刻來進行下層膜之去除。然而,該去除方法亦會對於基板造成大的傷害。
於此,要求著一種對於基板之傷害為更少並可藉由使用硫酸/過氧化氫等的藥液的濕式蝕刻來去除的下層膜。
作為能滿足此要求的材料,已提案著一種組合含矽化合物與3價以上的醇而成的阻劑下層膜形成組成物,該含矽化合物係藉由使用酸作為觸媒並將水解性矽化合物予以水解縮合而得(參考專利文獻3)。
[專利文獻1]日本特開平11-258813號公報
[專利文獻2]日本特開2007-163846號公報
[專利文獻3]日本特開2010-085912號公報
本發明之目的為提供一種用來形成阻劑下層膜的微影用阻劑下層膜形成組成物,該阻劑下層膜係可使用作為硬式遮罩。
所提供的用來形成阻劑下層膜的阻劑下層膜形成組成物係前述阻劑下層膜之去除不僅可使用以往的藉由氟氣體的乾蝕刻之方法、或藉由氫氟酸或緩衝氫氟酸等的濕式蝕刻之方法,亦可使用藉由對於基板之傷害為更少的硫酸/過氧化氫等的藥液的濕式蝕刻之方法而予以去除的阻劑下層膜。
作為本發明之第1觀點為一種微影用阻劑下層膜形成組成物,其特徵係包含(A)成分與(B)成分,(A)成分係包含水解性矽烷、該水解物、或該水解縮合物,該水解性矽烷係包含式(1):【化1】R1 aR2 bSi(R3)4-(a+b) 式(1)〔式(1)中,R1係表示式(2):
(式(2)中,R4係表示伸烷基、環狀伸烷基、伸烯基、伸芳基、硫原子、氧原子、氧羰基、醯胺基、第2級胺基、或
該等之組合,R5係表示氫原子、碳原子數1~10的烷基、碳原子數6~40的芳基、碳原子數2~10的烯基、烷氧基烷基、硫原子、羰基、醯基、或該等之組合,R6係表示碳原子數1~10的烷基,n1係表示1≦n1≦5,n2係表示0≦n2≦4,k1部分係表示與矽原子之鍵結)所表示的有機基且藉由Si-C鍵而與矽原子鍵結,R2係表示烷基、芳基、鹵化烷基、鹵化芳基、烷氧基芳基、烯基、或具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、胺基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結,R3係表示烷氧基、醯氧基、或鹵素基,a係表示1的整數,b係表示0~2的整數,a+b係表示1~3的整數〕所表示的水解性矽烷;(B)成分係包含具有烷氧基甲基或羥基甲基的環構造的交聯性化合物、或具有環氧基或嵌段異氰酸酯基的交聯性化合物。
作為第2觀點如上述第1觀點記載之阻劑下層膜形成組成物,其中,該水解性矽烷係式(1)所表示的水解性矽烷與其他的水解性矽烷之組合,其他的水解性矽烷係由式(3)及式(4)所表示的水解性矽烷所構成之群選出之至少1種的水解性矽烷,【化3】R7 cSi(R8)4-c 式(3)
(式(3)中,R7係表示烷基、芳基、鹵化烷基、鹵化芳基、烯基、醯氧基烷基、或具有脲基、環氧基、丙烯醯基、甲基丙烯醯基、巰基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結,R8係表示烷氧基、醯氧基、或鹵素基,c係表示0~3的整數);【化4】〔R9 dSi(R10)3-d〕2Ye 式(4)(式(4)中,R9係表示烷基且藉由Si-C鍵而與矽原子鍵結,R10係表示烷氧基、醯氧基、或鹵素基,Y係表示伸烷基或伸芳基,d係表示0或1的整數,e係表示0或1的整數)。
作為第3觀點為一種阻劑下層膜形成組成物,其特徵係包含水解性矽烷之水解縮合物來作為下層膜形成聚合物,所述水解性矽烷係由第1觀點記載之式(1)所表示的水解性矽烷與第2觀點記載之式(3)所表示的水解性矽烷之組合所構成。
作為第4觀點如上述第1觀點至第3觀點中任一項記載之阻劑下層膜形成組成物,其中,包含上述(A)成分、上述(B)成分與進而的下述(C)成分,(C)成分係包含水解性矽烷、該水解物、或該水解縮合物,該水解性矽烷係式(5)所表示的水解性矽烷、式(5)所表示的水解性矽烷與式(3)所表示的水解性矽烷之組合、或式(5)所表示的水解性矽烷、式(3)所表示的水解性矽烷
與式(4)所表示的水解性矽烷之組合,【化5】R11 aR12 bSi(R13)4-(a+b) 式(5)(式(5)中,R11係表示具有醯氧基、磺醯胺基、或t-丁基酯基的有機基且藉由Si-C鍵而與矽原子鍵結,R12係表示烷基、芳基、鹵化烷基、鹵化芳基、烷氧基芳基、烯基、或具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、胺基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結,R13係表示烷氧基、醯氧基、或鹵素基,a係表示1的整數,b係表示0~2的整數,a+b係表示1~3的整數)。
作為第5觀點如上述第1觀點至第4觀點中任一項記載之阻劑下層膜形成組成物,其中,(B)成分的烷氧基甲基係甲氧基甲基。
作為第6觀點如上述第1觀點至第5觀點中任一項記載之阻劑下層膜形成組成物,其中,進而包含酸。
作為第7觀點為一種阻劑下層膜之形成方法,其特徵係包含將如第1觀點至第6觀點中任一項記載之阻劑下層膜形成組成物塗佈於半導體基板上並燒成而形成下層膜之步驟。
作為第8觀點為一種半導體裝置之製造方法,其特徵係包含下述步驟:將如第1觀點至第6觀點中任一項記載之阻劑下層膜形成組成物塗佈於半導體基板上並燒成來形成阻劑下層膜之步驟;於前述下層膜之上塗佈阻劑組成物
來形成阻劑膜之步驟;曝光前述阻劑膜之步驟;於曝光後將阻劑顯影來得到阻劑圖型之步驟;藉由前述阻劑圖型來蝕刻阻劑下層膜之步驟;及藉由圖型化後的阻劑下層膜來加工半導體基板之步驟。
作為第9觀點為一種半導體裝置之製造方法,其特徵係包含下述步驟:於半導體基板上形成有機下層膜之步驟;於其上塗佈如第1觀點至第6觀點中任一項記載之阻劑下層膜形成組成物並燒成來形成阻劑下層膜之步驟;於前述阻劑下層膜之上塗佈阻劑組成物來形成阻劑膜之步驟;曝光前述阻劑膜之步驟;於曝光後將阻劑顯影來得到阻劑圖型之步驟;藉由前述阻劑圖型來蝕刻阻劑下層膜之步驟;藉由圖型化後的阻劑下層膜來蝕刻有機下層膜之步驟;及藉由圖型化後的有機下層膜來加工半導體基板之步驟。
作為第10觀點如上述第9觀點記載之半導體裝置之製造方法,其中,包含在半導體基板之加工後以藥液來將圖型化後的阻劑下層膜及/或圖型化後的有機下層膜去除之步驟。
作為第11觀點如上述第10觀點記載之半導體裝置之製造方法,其中,進行去除的藥液係硫酸與過氧化氫之混合水溶液。
本發明的微影用阻劑下層膜形成組成物可使
用於半導體裝置之製造。
又,用來形成本發明的阻劑下層膜的微影用阻劑下層膜形成組成物可作為硬式遮罩來使用,進而依據所使用的曝光的光波長而可作為抗反射膜來使用。
又,前述阻劑下層膜不僅可使用以往的藉由氟氣體的乾蝕刻之方法、或藉由氫氟酸或緩衝氫氟酸等的濕式蝕刻之方法,亦可使用藉由對於基板之傷害為更少的硫酸/過氧化氫等的藥液的濕式蝕刻之方法而予以去除。
本發明為一種微影用阻劑下層膜形成組成物,其特徵係包含「(A)成分」與「(B)成分」;(A)成分係包含「水解性矽烷」、「該水解物」、或「該水解縮合物」,該水解性矽烷係包含式(1)所表示的水解性矽烷;(B)成分係「包含具有烷氧基甲基或羥基甲基的環構造的交聯性化合物」、或「具有環氧基或嵌段異氰酸酯基的交聯性化合物」。
本發明的阻劑下層膜形成組成物係包含「式(1)所表示的水解性矽烷、該水解物、或該水解縮合物」與「溶劑」。然後,可含有作為任意成分的酸、水、醇、硬化觸媒、酸產生劑、其他的有機聚合物、吸光性化合物、及界面活性劑等。
本發明的阻劑下層膜形成組成物中的固體成
分,例如0.1~50質量%、或0.1~30質量%、0.1~25質量%。在此,所謂的固體成分係指從阻劑下層膜形成組成物之全成分中除去溶劑成分者。
固體成分中所佔有的水解性矽烷、該水解物、及該水解縮合物的比例為20質量%以上,例如50~100質量%、60~99質量%、70~99質量%。
然後,上述水解性矽烷、該水解物、及該水解縮合物亦可以該等之混合物形態使用。可使用水解性矽烷進行水解所得之水解物經縮合之縮合物。得到水解縮合物時,將水解未完全結束的部分水解物或矽烷化合物混合於水解縮合物中亦可使用該混合物。該縮合物係具有聚矽氧烷結構的聚合物。該聚矽氧烷包含式(1)所表示的水解性矽烷、或式(1)所表示的水解性矽烷與其他的水解性矽烷(例如式(3)的水解性矽烷)之水解縮合物。又,式(1)所表示的水解性矽烷、或由式(1)所表示的水解性矽烷與式(3)所表示的水解性矽烷之組合所構成的水解性矽烷的水解物的水解縮合物(聚矽氧烷)中,可添加式(1)所表示的水解性矽烷、或由式(1)所表示的水解性矽烷與式(3)所表示的水解性矽烷所構成的水解性矽烷。
式(1)中,R1係表示式(2)所表示的有機基且藉由Si-C鍵而與矽原子鍵結。R2係表示烷基、芳基、鹵化烷基、鹵化芳基、烷氧基芳基、烯基、或具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、胺基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結。R3係表示
烷氧基、醯氧基、或鹵素基。a係表示1的整數,b係表示0~2的整數,a+b係表示1~3的整數。
式(2)中,R4係表示伸烷基、環狀伸烷基、伸烯基、伸芳基、硫原子、氧原子、氧羰基、醯胺基、第2級胺基、或該等之組合,R5係表示氫原子、碳原子數1~10的烷基、碳原子數6~40的芳基、碳原子數2~10的烯基、烷氧基烷基、硫原子、羰基、醯基、或該等之組合,R6係表示碳原子數1~10的烷基,n1係表示1≦n1≦5,n2係表示0≦n2≦4,k1部分係表示與矽原子之鍵結。
作為上述烷基,可舉例具有直鏈或分枝的碳原子數1~10的烷基,例如甲基、乙基、n-丙基、i-丙基、n-丁基、i-丁基、s-丁基、t-丁基、n-戊基、1-甲基-n-丁基、2-甲基-n-丁基、3-甲基-n-丁基、1,1-二甲基-n-丙基、1,2-二甲基-n-丙基、2,2-二甲基-n-丙基、1-乙基-n-丙基、n-己基、1-甲基-n-戊基、2-甲基-n-戊基、3-甲基-n-戊基、4-甲基-n-戊基、1,1-二甲基-n-丁基、1,2-二甲基-n-丁基、1,3-二甲基-n-丁基、2,2-二甲基-n-丁基、2,3-二甲基-n-丁基、3,3-二甲基-n-丁基、1-乙基-n-丁基、2-乙基-n-丁基、1,1,2-三甲基-n-丙基、1,2,2-三甲基-n-丙基、1-乙基-1-甲基-n-丙基及1-乙基-2-甲基-n-丙基等。該等的例亦可適用於上述鹵化烷基的烷基部分。
又亦可使用環狀烷基,例如作為碳原子數1~10的環狀烷基,可舉例環丙基、環丁基、1-甲基-環丙
基、2-甲基-環丙基、環戊基、1-甲基-環丁基、2-甲基-環丁基、3-甲基-環丁基、1,2-二甲基-環丙基、2,3-二甲基-環丙基、1-乙基-環丙基、2-乙基-環丙基、環己基、1-甲基-環戊基、2-甲基-環戊基、3-甲基-環戊基、1-乙基-環丁基、2-乙基-環丁基、3-乙基-環丁基、1,2-二甲基-環丁基、1,3-二甲基-環丁基、2,2-二甲基-環丁基、2,3-二甲基-環丁基、2,4-二甲基-環丁基、3,3-二甲基-環丁基、1-n-丙基-環丙基、2-n-丙基-環丙基、1-i-丙基-環丙基、2-i-丙基-環丙基、1,2,2-三甲基-環丙基、1,2,3-三甲基-環丙基、2,2,3-三甲基-環丙基、1-乙基-2-甲基-環丙基、2-乙基-1-甲基-環丙基、2-乙基-2-甲基-環丙基及2-乙基-3-甲基-環丙基等。然後,進而亦可使用雙環基。
作為上述伸烷基,可舉例來自於上述烷基的伸烷基。例如甲基時,舉例如亞甲基;乙基時,舉例如伸乙基;丙基時,例如伸丙基。
作為上述烯基,可舉例碳原子數2~10的烯基,例如乙烯基、1-丙烯基、2-丙烯基、1-甲基-1-乙烯基、1-丁烯基、2-丁烯基、3-丁烯基、2-甲基-1-丙烯基、2-甲基-2-丙烯基、1-乙基乙烯基、1-甲基-1-丙烯基、1-甲基-2-丙烯基、1-戊烯基、2-戊烯基、3-戊烯基、4-戊烯基、1-n-丙基乙烯基、1-甲基-1-丁烯基、1-甲基-2-丁烯基、1-甲基-3-丁烯基、2-乙基-2-丙烯基、2-甲基-1-丁烯基、2-甲基-2-丁烯基、2-甲基-3-丁烯基、3-甲基-1-丁烯基、3-甲基-2-丁烯基、3-甲基-3-丁烯基、1,1-二甲基-2-丙
烯基、1-i-丙基乙烯基、1,2-二甲基-1-丙烯基、1,2-二甲基-2-丙烯基、1-環戊烯基、2-環戊烯基、3-環戊烯基、1-己烯基、2-己烯基、3-己烯基、4-己烯基、5-己烯基、1-甲基-1-戊烯基、1-甲基-2-戊烯基、1-甲基-3-戊烯基、1-甲基-4-戊烯基、1-n-丁基乙烯基、2-甲基-1-戊烯基、2-甲基-2-戊烯基、2-甲基-3-戊烯基、2-甲基-4-戊烯基、2-n-丙基-2-丙烯基、3-甲基-1-戊烯基、3-甲基-2-戊烯基、3-甲基-3-戊烯基、3-甲基-4-戊烯基、3-乙基-3-丁烯基、4-甲基-1-戊烯基、4-甲基-2-戊烯基、4-甲基-3-戊烯基、4-甲基-4-戊烯基、1,1-二甲基-2-丁烯基、1,1-二甲基-3-丁烯基、1,2-二甲基-1-丁烯基、1,2-二甲基-2-丁烯基、1,2-二甲基-3-丁烯基、1-甲基-2-乙基-2-丙烯基、1-s-丁基乙烯基、1,3-二甲基-1-丁烯基、1,3-二甲基-2-丁烯基、1,3-二甲基-3-丁烯基、1-i-丁基乙烯基、2,2-二甲基-3-丁烯基、2,3-二甲基-1-丁烯基、2,3-二甲基-2-丁烯基、2,3-二甲基-3-丁烯基、2-i-丙基-2-丙烯基、3,3-二甲基-1-丁烯基、1-乙基-1-丁烯基、1-乙基-2-丁烯基、1-乙基-3-丁烯基、1-n-丙基-1-丙烯基、1-n-丙基-2-丙烯基、2-乙基-1-丁烯基、2-乙基-2-丁烯基、2-乙基-3-丁烯基、1,1,2-三甲基-2-丙烯基、1-t-丁基乙烯基、1-甲基-1-乙基-2-丙烯基、1-乙基-2-甲基-1-丙烯基、1-乙基-2-甲基-2-丙烯基、1-i-丙基-1-丙烯基、1-i-丙基-2-丙烯基、1-甲基-2-環戊烯基、1-甲基-3-環戊烯基、2-甲基-1-環戊烯基、2-甲基-2-環戊烯基、2-甲基-3-環戊烯基、2-甲基-4-環戊烯基、2-甲基-5-
環戊烯基、2-亞甲基-環戊基、3-甲基-1-環戊烯基、3-甲基-2-環戊烯基、3-甲基-3-環戊烯基、3-甲基-4-環戊烯基、3-甲基-5-環戊烯基、3-亞甲基-環戊基、1-環己烯基、2-環己烯基及3-環己烯基等。
作為上述伸烯基,可舉例來自於上述烯基的伸烯基。
作為上述芳基,可舉例碳原子數6~40的芳基,例如苯基、o-甲基苯基、m-甲基苯基、p-甲基苯基、o-氯苯基、m-氯苯基、p-氯苯基、o-氟苯基、p-巰基苯基、o-甲氧基苯基、p-甲氧基苯基、p-胺基苯基、p-氰基苯基、α-萘基、β-萘基、o-聯苯基、m-聯苯基、p-聯苯基、1-蒽基、2-蒽基、9-蒽基、1-菲基、2-菲基、3-菲基、4-菲基及9-菲基。該等的例亦可適用於上述鹵化芳基及烷氧基芳基的芳基部分。
作為上述伸芳基,可舉例來自於上述芳基的伸芳基。
又可舉例該等的為經氟、氯、溴、或碘等的鹵素原子所取代的有機基。
使用硫原子可形成硫鍵(sulfide bond)。使用氧原子可形成醚鍵。使用氧羰基可形成酯鍵。使用醯胺基可形成醯胺鍵。使用2級胺基可形成胺基。該等的官能基可與上述示例組合而形成各自的鍵結。
作為上述具有環氧基的有機基,可舉例環氧丙氧基甲基、環氧丙氧基乙基、環氧丙氧基丙基、環氧丙
氧基丁基、環氧基環己基等。
作為上述具有丙烯醯基的有機基,可舉例丙烯醯基甲基、丙烯醯基乙基、丙烯醯基丙基等。
作為上述具有甲基丙烯醯基的有機基,可舉例甲基丙烯醯基甲基、甲基丙烯醯基乙基、甲基丙烯醯基丙基等。
作為上述具有巰基的有機基,可舉例乙基巰基、丁基巰基、己基巰基、辛基巰基等。
作為上述具有胺基的有機基,可舉例胺基甲基、胺基乙基、胺基丙基等。
作為上述具有氰基的有機基,可舉例氰基乙基、氰基丙基等。
作為上述烷氧基烷基係烷氧基所取代的烷基,可舉例如甲氧基甲基、乙氧基甲基、乙氧基乙基、乙氧基甲基等。
作為上述烷氧基,可舉例具有碳原子數1~20的直鏈、分枝、環狀的烷基部分的烷氧基,例如甲氧基、乙氧基、n-丙氧基、i-丙氧基、n-丁氧基、i-丁氧基、s-丁氧基、t-丁氧基、n-戊氧基、1-甲基-n-丁氧基、2-甲基-n-丁氧基、3-甲基-n-丁氧基、1,1-二甲基-n-丙氧基、1,2-二甲基-n-丙氧基、2,2-二甲基-n-丙氧基、1-乙基-n-丙氧基、n-己氧基、1-甲基-n-戊氧基、2-甲基-n-戊氧基、3-甲基-n-戊氧基、4-甲基-n-戊氧基、1,1-二甲基-n-丁氧基、1,2-二甲基-n-丁氧基、1,3-二甲基-n-丁氧基、2,2-二甲基-
n-丁氧基、2,3-二甲基-n-丁氧基、3,3-二甲基-n-丁氧基、1-乙基-n-丁氧基、2-乙基-n-丁氧基、1,1,2-三甲基-n-丙氧基、1,2,2-三甲基-n-丙氧基、1-乙基-1-甲基-n-丙氧基及1-乙基-2-甲基-n-丙氧基等,又作為環狀的烷氧基,例如環丙氧基、環丁氧基、1-甲基-環丙氧基、2-甲基-環丙氧基、環戊氧基、1-甲基-環丁氧基、2-甲基-環丁氧基、3-甲基-環丁氧基、1,2-二甲基-環丙氧基、2,3-二甲基-環丙氧基、1-乙基-環丙氧基、2-乙基-環丙氧基、環己氧基、1-甲基-環戊氧基、2-甲基-環戊氧基、3-甲基-環戊氧基、1-乙基-環丁氧基、2-乙基-環丁氧基、3-乙基-環丁氧基、1,2-二甲基-環丁氧基、1,3-二甲基-環丁氧基、2,2-二甲基-環丁氧基、2,3-二甲基-環丁氧基、2,4-二甲基-環丁氧基、3,3-二甲基-環丁氧基、1-n-丙基-環丙氧基、2-n-丙基-環丙氧基、1-i-丙基-環丙氧基、2-i-丙基-環丙氧基、1,2,2-三甲基-環丙氧基、1,2,3-三甲基-環丙氧基、2,2,3-三甲基-環丙氧基、1-乙基-2-甲基-環丙氧基、2-乙基-1-甲基-環丙氧基、2-乙基-2-甲基-環丙氧基及2-乙基-3-甲基-環丙氧基等。該等的例亦可適用於上述烷氧基芳基的烷氧基部分。
作為上述醯氧基,可舉例碳原子數2~20的醯氧基,例如甲基羰氧基、乙基羰氧基、n-丙基羰氧基、i-丙基羰氧基、n-丁基羰氧基、i-丁基羰氧基、s-丁基羰氧基、t-丁基羰氧基、n-戊基羰氧基、1-甲基-n-丁基羰氧基、2-甲基-n-丁基羰氧基、3-甲基-n-丁基羰氧基、1,1-二
甲基-n-丙基羰氧基、1,2-二甲基-n-丙基羰氧基、2,2-二甲基-n-丙基羰氧基、1-乙基-n-丙基羰氧基、n-己基羰氧基、1-甲基-n-戊基羰氧基、2-甲基-n-戊基羰氧基、3-甲基-n-戊基羰氧基、4-甲基-n-戊基羰氧基、1,1-二甲基-n-丁基羰氧基、1,2-二甲基-n-丁基羰氧基、1,3-二甲基-n-丁基羰氧基、2,2-二甲基-n-丁基羰氧基、2,3-二甲基-n-丁基羰氧基、3,3-二甲基-n-丁基羰氧基、1-乙基-n-丁基羰氧基、2-乙基-n-丁基羰氧基、1,1,2-三甲基-n-丙基羰氧基、1,2,2-三甲基-n-丙基羰氧基、1-乙基-1-甲基-n-丙基羰氧基、1-乙基-2-甲基-n-丙基羰氧基、苯基羰氧基、及甲苯磺醯基羰氧基等。
作為上述鹵素基,可舉例氟、氯、溴、碘等。該等的例亦可適用於上述鹵化烷基及鹵化芳基的鹵素基部分。
上述式(1)所表示的水解性矽烷可示例如下述。
上述式(1)所表示的水解性矽烷的示例中,T係烷基,舉例如上述烷基之示例,例如以甲基、乙基為較佳。
本發明中,水解性矽烷係可將式(1)所表示的水解性矽烷與其他的水解性矽烷組合使用,其他的水解性矽烷係可使用由式(3)所表示的水解性矽烷及式(4)所表示的水解性矽烷所構成之群選出之至少1種的水解性矽烷。
式(3)中,R7係表示烷基、芳基、鹵化烷基、鹵化芳基、烯基、醯氧基烷基、或具有脲基、環氧基、丙烯醯基、甲基丙烯醯基、巰基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結,R8係表示烷氧基、醯氧基、或鹵素基,c係表示0~3的整數。
式(4)中,R9係表示烷基且藉由Si-C鍵而與矽原子鍵結,R10係表示烷氧基、醯氧基、或鹵素基,Y係表示伸烷基或伸芳基,d係表示0或1的整數,e係表示0或1的整數。
作為在上述式(3)及式(4)中特定義的烷基、芳基、鹵化烷基、鹵化芳基、烯基、具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、或氰基的有機基、烷氧基、醯氧基、及鹵素基,可舉例上述所示例者。
又,作為醯氧基烷基,可舉例如上述的醯氧基與烷基之組合,例如乙醯氧基甲基、乙醯氧基乙基、乙醯氧基丙基等。
作為式(3)所表示的水解性矽烷,可舉例如四
甲氧基矽烷、四氯矽烷、四乙醯氧基矽烷、四乙氧基矽烷、四n-丙氧基矽烷、四異丙氧基矽烷、四n-丁氧基矽烷、甲基三甲氧基矽烷、甲基三氯矽烷、甲基三乙醯氧基矽烷、甲基三丙氧基矽烷、甲基三丁氧基矽烷、甲基三戊氧基矽烷、甲基三苯氧基矽烷、甲基三苯甲氧基矽烷、甲基三乙氧基矽烷、環氧丙氧基甲基三甲氧基矽烷、環氧丙氧基甲基三乙氧基矽烷、α-環氧丙氧基乙基三甲氧基矽烷、α-環氧丙氧基乙基三乙氧基矽烷、β-環氧丙氧基乙基三甲氧基矽烷、β-環氧丙氧基乙基三乙氧基矽烷、α-環氧丙氧基丙基三甲氧基矽烷、α-環氧丙氧基丙基三乙氧基矽烷、β-環氧丙氧基丙基三甲氧基矽烷、β-環氧丙氧基丙基三乙氧基矽烷、γ-環氧丙氧基丙基三甲氧基矽烷、γ-環氧丙氧基丙基三乙氧基矽烷、γ-環氧丙氧基丙基三丙氧基矽烷、γ-環氧丙氧基丙基三丁氧基矽烷、γ-環氧丙氧基丙基三苯氧基矽烷、α-環氧丙氧基丁基三甲氧基矽烷、α-環氧丙氧基丁基三乙氧基矽烷、β-環氧丙氧基丁基三乙氧基矽烷、γ-環氧丙氧基丁基三甲氧基矽烷、γ-環氧丙氧基丁基三乙氧基矽烷、δ-環氧丙氧基丁基三甲氧基矽烷、δ-環氧丙氧基丁基三乙氧基矽烷、(3,4-環氧基環己基)甲基三甲氧基矽烷、(3,4-環氧基環己基)甲基三乙氧基矽烷、β-(3,4-環氧基環己基)乙基三甲氧基矽烷、β-(3,4-環氧基環己基)乙基三乙氧基矽烷、β-(3,4-環氧基環己基)乙基三丙氧基矽烷、β-(3,4-環氧基環己基)乙基三丁氧基矽烷、β-(3,4-環氧基環己基)乙基三苯
氧基矽烷、γ-(3,4-環氧基環己基)丙基三甲氧基矽烷、γ-(3,4-環氧基環己基)丙基三乙氧基矽烷、δ-(3,4-環氧基環己基)丁基三甲氧基矽烷、δ-(3,4-環氧基環己基)丁基三乙氧基矽烷、環氧丙氧基甲基甲基二甲氧基矽烷、環氧丙氧基甲基甲基二乙氧基矽烷、α-環氧丙氧基乙基甲基二甲氧基矽烷、α-環氧丙氧基乙基甲基二乙氧基矽烷、β-環氧丙氧基乙基甲基二甲氧基矽烷、β-環氧丙氧基乙基乙基二甲氧基矽烷、α-環氧丙氧基丙基甲基二甲氧基矽烷、α-環氧丙氧基丙基甲基二乙氧基矽烷、β-環氧丙氧基丙基甲基二甲氧基矽烷、β-環氧丙氧基丙基乙基二甲氧基矽烷、γ-環氧丙氧基丙基甲基二甲氧基矽烷、γ-環氧丙氧基丙基甲基二乙氧基矽烷、γ-環氧丙氧基丙基甲基二丙氧基矽烷、γ-環氧丙氧基丙基甲基二丁氧基矽烷、γ-環氧丙氧基丙基甲基二苯氧基矽烷、γ-環氧丙氧基丙基乙基二甲氧基矽烷、γ-環氧丙氧基丙基乙基二乙氧基矽烷、γ-環氧丙氧基丙基乙烯基二甲氧基矽烷、γ-環氧丙氧基丙基乙烯基二乙氧基矽烷、乙基三甲氧基矽烷、乙基三乙氧基矽烷、乙烯基三甲氧基矽烷、乙烯基三氯矽烷、乙烯基三乙醯氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三乙醯氧基矽烷、甲氧基苯基三甲氧基矽烷、甲氧基苯基三乙氧基矽烷、甲氧基苯基三乙醯氧基矽烷、甲氧基苯基三氯矽烷、甲氧基苄基三甲氧基矽烷、甲氧基苄基三乙氧基矽烷、甲氧基苄基三乙醯氧基矽烷、甲氧基苄基三氯矽烷、甲氧基苯乙基三甲氧基矽烷、甲氧基苯乙基三
乙氧基矽烷、甲氧基苯乙基三乙醯氧基矽烷、甲氧基苯乙基三氯矽烷、乙氧基苯基三甲氧基矽烷、乙氧基苯基三乙氧基矽烷、乙氧基苯基三乙醯氧基矽烷、乙氧基苯基三氯矽烷、乙氧基苄基三甲氧基矽烷、乙氧基苄基三乙氧基矽烷、乙氧基苄基三乙醯氧基矽烷、乙氧基苄基三氯矽烷、異丙氧基苯基三甲氧基矽烷、異丙氧基苯基三乙氧基矽烷、異丙氧基苯基三乙醯氧基矽烷、異丙氧基苯基三氯矽烷、異丙氧基苄基三甲氧基矽烷、異丙氧基苄基三乙氧基矽烷、異丙氧基苄基三乙醯氧基矽烷、異丙氧基苄基三氯矽烷、t-丁氧基苯基三甲氧基矽烷、t-丁氧基苯基三乙氧基矽烷、t-丁氧基苯基三乙醯氧基矽烷、t-丁氧基苯基三氯矽烷、t-丁氧基苄基三甲氧基矽烷、t-丁氧基苄基三乙氧基矽烷、t-丁氧基苄基三乙醯氧基矽烷、t-丁氧基二苄基三氯矽烷、甲氧基萘基三甲氧基矽烷、甲氧基萘基三乙氧基矽烷、甲氧基萘基三乙醯氧基矽烷、甲氧基萘基三氯矽烷、乙氧基萘基三甲氧基矽烷、乙氧基萘基三乙氧基矽烷、乙氧基萘基三乙醯氧基矽烷、乙氧基萘基三氯矽烷、γ-氯丙基三甲氧基矽烷、γ-氯丙基三乙氧基矽烷、γ-氯丙基三乙醯氧基矽烷、3,3,3-三氟丙基三甲氧基矽烷、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、γ-巰基丙基三甲氧基矽烷、γ-巰基丙基三乙氧基矽烷、β-氰基乙基三乙氧基矽烷、氯甲基三甲氧基矽烷、氯甲基三乙氧基矽烷、二甲基二甲氧基矽烷、苯基甲基二甲氧基矽烷、二甲基二乙氧基矽烷、苯基甲基二乙氧基矽烷、γ-氯丙基甲基二甲
氧基矽烷、γ-氯丙基甲基二乙氧基矽烷、二甲基二乙醯氧基矽烷、γ-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、γ-甲基丙烯醯氧基丙基甲基二乙氧基矽烷、γ-巰基丙基甲基二甲氧基矽烷、γ-巰基甲基二乙氧基矽烷、甲基乙烯基二甲氧基矽烷、甲基乙烯基二乙氧基矽烷、乙醯氧基甲基三甲氧基矽烷、乙醯氧基乙基三甲氧基矽烷、乙醯氧基丙基三甲氧基矽烷、乙醯氧基甲基三乙氧基矽烷、乙醯氧基乙基三乙氧基矽烷、乙醯氧基丙基三乙氧基矽烷等。
作為式(4)所表示的水解性矽烷,可舉例如亞甲基雙三甲氧基矽烷、亞甲基雙三氯矽烷、亞甲基雙三乙醯氧基矽烷、伸乙基雙三乙氧基矽烷、伸乙基雙三氯矽烷、伸乙基雙三乙醯氧基矽烷、伸丙基雙乙氧基矽烷、伸丁基雙三甲氧基矽烷、伸苯基雙三甲氧基矽烷、伸苯基雙三乙氧基矽烷、伸苯基雙甲基二乙氧基矽烷、伸苯基雙甲基二甲氧基矽烷、伸萘基雙三甲氧基矽烷、雙三甲氧基二矽烷、雙三乙氧基二矽烷、雙乙基二乙氧基二矽烷、雙甲基二甲氧基二矽烷等。
又,作為式(3)所表示的水解性矽烷,亦可示例如下述的水解性矽烷。
上述式(3)所表示的水解性矽烷的示例中,T為烷基,舉例如上述烷基之示例,例如以甲基、乙基為較佳。
上述式(3)所表示的水解性矽烷的示例中,R可示例如下。
本發明中所使用的(A)成分可示例如下。
又,本發明為一種阻劑下層膜形成組成物,其特徵係包含上述(A)成分、上述(B)成分與進而的下述(C)成分,(C)成分係包含水解性矽烷、該水解物、或該水解縮合物,該水解性矽烷係式(5)所表示的水解性矽烷、式(5)所表示的水解性矽烷與式(3)所表示的水解性矽烷之組合、或式(5)所表示的水解性矽烷、式(3)所表示的水解性矽烷與式(4)所表示的水解性矽烷之組合。
式(5)中,R11係表示具有醯氧基、磺醯胺基、或t-丁基酯基的有機基且藉由Si-C鍵而與矽原子鍵結。R12係表示烷基、芳基、鹵化烷基、鹵化芳基、烷氧基芳基、烯基、或具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、胺基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結。R13係表示烷氧基、醯氧基、或鹵素
基。a係表示1的整數,b係表示0~2的整數,a+b係表示1~3的整數。
作為在上述式(5)中特定義的烷基、芳基、鹵化烷基、鹵化芳基、烷氧基芳基、烯基、或具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、胺基、或氰基的有機基、烷氧基、醯氧基、鹵素基,可舉例上述所示例者。
又,具有醯氧基、磺醯胺基、或t-丁基酯基的有機基中,有機基係烷基、苯基,可舉例上述所示例者,舉例如醯氧基烷基、苯基磺醯胺烷基、雙環t-丁基酯基、二t-丁基酯烷基、醯氧基苄基等。
本發明中所使用的(C)成分可示例如下。
上述水解性矽烷的水解縮合物(聚有機矽氧烷)可得到重量平均分子量1000~1000000、或1000~100000的縮合物。該等的分子量係藉由GPC分析以聚苯乙烯換算所得的分子量。
GPC之測定條件,可使用例如GPC裝置(商品名HLC-8220GPC、東曹(股)製)、GPC管柱(商品名Shodex KF803L、KF802、KF801、昭和電工製)、管柱溫度為40℃,洗提液(溶出溶劑)為四氫呋喃、流量(流速)為1.0ml/min,標準試樣可使用聚苯乙烯(昭和電工(股)製)進行測定。
烷氧基甲矽烷基、醯氧基甲矽烷基、或鹵化甲矽烷基之水解時,每1莫耳的水解性基以使用0.5~100莫耳的水,較佳為1~10莫耳的水。
又,每1莫耳的水解性基可使用0.001~10莫耳的水解觸媒,較佳為0.001~1莫耳的水解觸媒。
進行水解與縮合之際之反應溫度,通常為20~80℃。
水解可以是進行完全水解,亦可以是進行部分水解。即,水解縮合物中可殘留水解物或單體。
使水解並縮合之際可利用觸媒。
作為水解觸媒,可舉例金屬螯合化合物、有機酸、無機酸、有機鹼、無機鹼。
作為水解觸媒的金屬螯合化合物,可舉例如三乙氧基‧單(乙醯丙酮(acetylacetonato))鈦、三-n-丙氧基‧單(乙醯丙酮)鈦、三-i-丙氧基‧單(乙醯丙酮)鈦、三-n-丁氧基‧單(乙醯丙酮)鈦、三-sec-丁氧基‧單(乙醯丙酮)鈦、三-t-丁氧基‧單(乙醯丙酮)鈦、二乙氧基‧雙(乙醯丙酮)鈦、二-n-丙氧基‧雙(乙醯丙酮)鈦、二-i-丙氧基‧雙(乙醯丙酮)鈦、二-n-丁氧基‧雙(乙醯丙酮)鈦、二-sec-丁氧基‧雙(乙醯丙酮)鈦、二-t-丁氧基‧雙(乙醯丙酮)鈦、單乙氧基‧參(乙醯丙酮)鈦、單-n-丙氧基‧參(乙醯丙酮)鈦、單-i-丙氧基‧參(乙醯丙酮)鈦、單-n-丁氧基‧參(乙醯丙酮)鈦、單-sec-丁氧基‧參(乙醯丙酮)鈦、單-t-丁氧基‧參(乙醯丙酮)鈦、肆(乙醯丙酮)鈦、三乙氧
基‧單(乙醯乙酸乙酯(Ethyl Acetoacetate))鈦、三-n-丙氧基‧單(乙醯乙酸乙酯)鈦、三-i-丙氧基‧單(乙醯乙酸乙酯)鈦、三-n-丁氧基‧單(乙醯乙酸乙酯)鈦、三-sec-丁氧基‧單(乙醯乙酸乙酯)鈦、三-t-丁氧基‧單(乙醯乙酸乙酯)鈦、二乙氧基‧雙(乙醯乙酸乙酯)鈦、二-n-丙氧基‧雙(乙醯乙酸乙酯)鈦、二-i-丙氧基‧雙(乙醯乙酸乙酯)鈦、二-n-丁氧基‧雙(乙醯乙酸乙酯)鈦、二-sec-丁氧基‧雙(乙醯乙酸乙酯)鈦、二-t-丁氧基‧雙(乙醯乙酸乙酯)鈦、單乙氧基‧參(乙醯乙酸乙酯)鈦、單-n-丙氧基‧參(乙醯乙酸乙酯)鈦、單-i-丙氧基‧參(乙醯乙酸乙酯)鈦、單-n-丁氧基‧參(乙醯乙酸乙酯)鈦、單-sec-丁氧基‧參(乙醯乙酸乙酯)鈦、單-t-丁氧基‧參(乙醯乙酸乙酯)鈦、肆(乙醯乙酸乙酯)鈦、單(乙醯丙酮)參(乙醯乙酸乙酯)鈦、雙(乙醯丙酮)雙(乙醯乙酸乙酯)鈦、參(乙醯丙酮)單(乙醯乙酸乙酯)鈦、等的鈦螯合化合物;三乙氧基‧單(乙醯丙酮)鋯、三-n-丙氧基‧單(乙醯丙酮)鋯、三-i-丙氧基‧單(乙醯丙酮)鋯、三-n-丁氧基‧單(乙醯丙酮)鋯、三-sec-丁氧基‧單(乙醯丙酮)鋯、三-t-丁氧基‧單(乙醯丙酮)鋯、二乙氧基‧雙(乙醯丙酮)鋯、二-n-丙氧基‧雙(乙醯丙酮)鋯、二-i-丙氧基‧雙(乙醯丙酮)鋯、二-n-丁氧基‧雙(乙醯丙酮)鋯、二-sec-丁氧基‧雙(乙醯丙酮)鋯、二-t-丁氧基‧雙(乙醯丙酮)鋯、單乙氧基‧參(乙醯丙酮)鋯、單-n-丙氧基‧參(乙醯丙酮)鋯、單-i-丙氧基‧參(乙醯丙酮)鋯、單-n-丁氧基‧參(乙醯丙酮)鋯、單-sec-丁氧
基‧參(乙醯丙酮)鋯、單-t-丁氧基‧參(乙醯丙酮)鋯、肆(乙醯丙酮)鋯、三乙氧基‧單(乙醯乙酸乙酯)鋯、三-n-丙氧基‧單(乙醯乙酸乙酯)鋯、三-i-丙氧基‧單(乙醯乙酸乙酯)鋯、三-n-丁氧基‧單(乙醯乙酸乙酯)鋯、三-sec-丁氧基‧單(乙醯乙酸乙酯)鋯、三-t-丁氧基‧單(乙醯乙酸乙酯)鋯、二乙氧基‧雙(乙醯乙酸乙酯)鋯、二-n-丙氧基‧雙(乙醯乙酸乙酯)鋯、二-i-丙氧基‧雙(乙醯乙酸乙酯)鋯、二-n-丁氧基‧雙(乙醯乙酸乙酯)鋯、二-sec-丁氧基‧雙(乙醯乙酸乙酯)鋯、二-t-丁氧基‧雙(乙醯乙酸乙酯)鋯、單乙氧基‧參(乙醯乙酸乙酯)鋯、單-n-丙氧基‧參(乙醯乙酸乙酯)鋯、單-i-丙氧基‧參(乙醯乙酸乙酯)鋯、單-n-丁氧基‧參(乙醯乙酸乙酯)鋯、單-sec-丁氧基‧參(乙醯乙酸乙酯)鋯、單-t-丁氧基‧參(乙醯乙酸乙酯)鋯、肆(乙醯乙酸乙酯)鋯、單(乙醯丙酮)參(乙醯乙酸乙酯)鋯、雙(乙醯丙酮)雙(乙醯乙酸乙酯)鋯、參(乙醯丙酮)單(乙醯乙酸乙酯)鋯等的鋯螯合化合物;參(乙醯丙酮)鋁、參(乙醯乙酸乙酯)鋁等的鋁螯合化合物等。
作為水解觸媒的有機酸,可舉例如乙酸、丙酸、丁酸、戊酸、己酸、庚酸、辛酸、壬酸、癸酸、草酸、馬來酸、甲基丙二酸、己二酸、癸二酸、棓酸、丁酸、苯六甲酸、花生四烯酸、2-乙基己酸、油酸、硬脂酸、亞油酸、亞麻酸、水楊酸、苯甲酸、對-胺基苯甲酸、對-甲苯磺酸、苯磺酸、單氯乙酸、二氯乙酸、三氯乙酸、三氟乙酸、甲酸、丙二酸、磺酸、酞酸、富馬酸、
檸檬酸、酒石酸等。
作為水解觸媒的無機酸,可舉例如鹽酸、硝酸、硫酸、氟酸、磷酸等。
作為水解觸媒的有機鹼,可舉例如吡啶、吡咯、哌嗪、吡咯烷、哌啶、甲基吡啶、三甲基胺、三乙基胺、單乙醇胺、二乙醇胺、二甲基單乙醇胺、單甲基二乙醇胺、三乙醇胺、二氮雜雙環辛烷、二氮雜雙環壬烷、二氮雜雙環十一烯、四甲基銨氫氧化物、四乙基銨氫氧化物、四丙基銨氫氧化物、四丁基銨氫氧化物、三甲基苯基銨氫氧化物、苄基三甲基銨氫氧化物、苄基三乙基銨氫氧化物等。
作為水解觸媒的無機鹼,可舉例如氨、氫氧化鈉、氫氧化鉀、氫氧化鋇、氫氧化鈣等。該等的觸媒之中,較佳為有機鹼、無機鹼,亦可同時使用該等的1種或2種以上。
作為水解時所使用的有機溶劑,可舉例如n-戊烷、i-戊烷、n-己烷、i-己烷、n-庚烷、i-庚烷、2,2,4-三甲基戊烷、n-辛烷、i-辛烷、環己烷、甲基環己烷等的脂肪族烴系溶劑;苯、甲苯、二甲苯、乙基苯、三甲基苯、甲基乙基苯、n-丙基苯、i-丙基苯、二乙基苯、i-丁基苯、三乙基苯、二-i-丙基苯、n-戊基萘、三甲基苯等的芳香族烴系溶劑;甲醇、乙醇、n-丙醇、i-丙醇、n-丁醇、i-丁醇、sec-丁醇、t-丁醇、n-戊醇、i-戊醇、2-甲基丁醇、sec-戊醇、t-戊醇、3-甲氧基丁醇、n-己醇、2-甲基
戊醇、sec-己醇、2-乙基丁醇、sec-庚醇、庚醇-3、n-辛醇、2-乙基己醇、sec-辛醇、n-壬醇、2,6-二甲基庚醇-4、n-癸醇、sec-十一烷醇、三甲基壬醇、sec-十四烷醇、sec-十七烷醇、酚、環己醇、甲基環己醇、3,3,5-三甲基環己醇、苄醇、苯基甲基甲醇、雙丙酮醇、甲酚等的一元醇系溶劑;乙二醇、丙二醇、1,3-丁二醇、2,4-戊二醇、2-甲基-2,4-戊二醇、2,5-己二醇、2,4-庚二醇、2-乙基-1,3-己二醇、二乙二醇、二丙二醇、三乙二醇、三丙二醇、甘油等的多元醇系溶劑;丙酮、甲基乙基酮、甲基-n-丙基酮、甲基-n-丁基酮、二乙基酮、甲基-i-丁基酮、甲基-n-戊基酮、乙基-n-丁基酮、甲基-n-己基酮、二-i-丁基酮、三甲基壬酮、環己酮、甲基環己酮、2,4-戊二酮、丙酮基丙酮、二丙酮醇、苯乙酮、葑酮等的酮系溶劑;乙基醚、i-丙基醚、n-丁基醚、n-己基醚、2-乙基己基醚、環氧乙烷、1,2-環氧丙烷、二氧雜環戊烷、4-甲基二氧雜環戊烷、二噁烷、二甲基二噁烷、乙二醇單甲基醚、乙二醇單乙基醚、乙二醇二乙基醚、乙二醇單-n-丁基醚、乙二醇單-n-己基醚、乙二醇單苯基醚、乙二醇單-2-乙基丁基醚、乙二醇二丁基醚、二乙二醇單甲基醚、二乙二醇單乙基醚、二乙二醇二乙基醚、二乙二醇單-n-丁基醚、二乙二醇二-n-丁基醚、二乙二醇單-n-己基醚、乙氧基三二醇、四乙二醇二-n-丁基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單丙基醚、丙二醇單丁基醚、丙二醇單甲基醚乙酸酯、二丙二醇單甲基醚、二丙二醇單乙基醚、二
丙二醇單丙基醚、二丙二醇單丁基醚、三丙二醇單甲基醚、四氫呋喃、2-甲基四氫呋喃等的醚系溶劑;碳酸二乙酯、乙酸甲酯、乙酸乙酯、γ-丁內酯、γ-戊內酯、乙酸n-丙酯、乙酸i-丙酯、乙酸n-丁酯、乙酸i-丁酯、乙酸sec-丁酯、乙酸n-戊酯、乙酸sec-戊酯、乙酸3-甲氧基丁酯、乙酸甲基戊酯、乙酸2-乙基丁酯、乙酸2-乙基己酯、乙酸苄酯、乙酸環己酯、乙酸甲基環己酯、乙酸n-壬酯、乙醯乙酸甲酯、乙醯乙酸乙酯、乙酸乙二醇單甲基醚、乙酸乙二醇單乙基醚、乙酸二乙二醇單甲基醚、乙酸二乙二醇單乙基醚、乙酸二乙二醇單-n-丁基醚、乙酸丙二醇單甲基醚、乙酸丙二醇單乙基醚、乙酸丙二醇單丙基醚、乙酸丙二醇單丁基醚、乙酸二丙二醇單甲基醚、乙酸二丙二醇單乙基醚、二乙酸乙二醇、乙酸甲氧基三二醇、丙酸乙酯、丙酸n-丁酯、丙酸i-戊酯、草酸二乙酯、草酸二-n-丁酯、乳酸甲酯、乳酸乙酯、乳酸n-丁酯、乳酸n-戊酯、丙二酸二乙酯、酞酸二甲酯、酞酸二乙酯等的酯系溶劑;N-甲基甲醯胺、N,N-二甲基甲醯胺、N,N-二乙基甲醯胺、乙醯胺、N-甲基乙醯胺、N,N-二甲基乙醯胺、N-甲基丙醯胺、N-甲基吡咯烷酮(NMP)等的含氮系溶劑;二甲基硫、二乙基硫、噻吩、四氫噻吩、二甲亞碸、環丁碸、1,3-丙磺內酯等的含硫系溶劑等。該等的溶劑可使用1種或組合2種以上使用。
特別是,就溶液的保存安定性的觀點而言,較佳為丙酮、甲基乙基酮、甲基-n-丙基酮、甲基-n-丁基
酮、二乙基酮、甲基-i-丁基酮、甲基-n-戊基酮、乙基-n-丁基酮、甲基-n-己基酮、二-i-丁基酮、三甲基壬酮、環己酮、甲基環己酮、2,4-戊二酮、丙酮基丙酮、二丙酮醇、苯乙酮、葑酮等的酮系溶劑。
本發明中所使用的(B)成分係「包含具有烷氧基甲基或羥基甲基的環構造的交聯性化合物」、或「具有環氧基或嵌段異氰酸酯基的交聯性化合物」。烷氧基甲基方面,較佳可使用甲氧基甲基。
作為該交聯性化合物,可舉例三聚氰胺系、取代尿素系、或該等之聚合物系等。較佳為具有至少2個交聯形成取代基的交聯劑,如甲氧基甲基化甘脲、丁氧基甲基化甘脲、甲氧基甲基化三聚氰胺、丁氧基甲基化三聚氰胺、甲氧基甲基化苯併胍胺、丁氧基甲基化苯併胍胺、甲氧基甲基化尿素、丁氧基甲基化尿素、甲氧基甲基化硫代尿素、或甲氧基甲基化硫代尿素等的化合物。又,亦可使用該等化合物的縮合物。
更,作為上述交聯劑,可使用耐熱性為高的交聯劑。作為耐熱性高的交聯劑,較佳可使用分子內含有具有芳香族環(例如,苯環、萘環)的交聯形成取代基的化合物。
該化合物可舉例如具有下述式(6)所表示的部分構造的化合物、或具有下述式(7)所表示的重複單位的聚合物或低聚物。
式(6)中,R17及R18係分別表示氫原子、碳原子數1~10的烷基、或碳原子數6~20的芳基,n7係表示1~4的整數,n8係表示1~(5-n7)的整數,n7+n8係表示2~5的整數。式(7)中,R19係表示氫原子或碳原子數1~10的烷基,R20係表示碳原子數1~10的烷基,n9係表示1~4的整數,n10係表示0~(4-n9),n9+n10係表示1~4的整數。低聚物及聚合物為重複單位構造之數可使用2~100、或2~50之範圍。該等烷基或芳基,可舉例上述所示例者。
式(6)所表示的化合物、式(7)所表示的聚合物及低聚物如下述所示例。
上述化合物可以旭有機材工業(股)、本州化學工業(股)之製品而取得。例如上述交聯劑中,式(6-21)所表示的化合物可以旭有機材工業(股)、商品名TM-BIP-A而取得。
(B)成分的交聯性化合物之添加量,依所使用的塗佈溶劑、所使用的基底基板、所要求的溶液黏度、所要求的膜形狀等而有所變動,相對於全固體成分為0.001~80質量%,較佳為0.01~50質量%,更佳為0.05~40質量%。該等交聯劑可藉由自縮合而引起交聯反應,但本發明的上述聚合物中若存在交聯性取代基時,可與該等交聯性取代基引起交聯反應。
更,使用於本發明的阻劑下層膜形成組成物
中可包含用來促進加熱反應的酸性化合物。前述酸性化合物可舉例如樟腦磺酸、檸檬酸、p-甲苯磺酸、吡啶鎓-p-甲苯磺酸、三氟甲磺酸、水楊酸、磺柳酸、吡啶鎓-磺柳酸、4-氯苯磺酸、吡啶鎓-4-氯苯磺酸、4-羥基苯磺酸、吡啶鎓-4-羥基苯磺酸、苯二磺酸、吡啶鎓-苯二磺酸、苯甲酸、羥基苯甲酸、1-萘磺酸、及吡啶鎓-1-萘磺酸等。該等的交聯觸媒係可僅使用一種,又,亦可組合二種以上來使用。前述交聯觸媒係相對於縮合物(聚有機矽氧烷)100質量份可以0.01~10質量份、或可以0.05~5質量份、或0.1~3質量份、或0.3~2質量份、或0.5~1質量份來使用。
進而使用於本發明的阻劑下層膜形成組成物中可含有有機聚合物化合物。藉由添加有機聚合物化合物,可調整從本發明的微影用下層膜形成組成物所形成的阻劑下層膜的乾蝕刻速度(每單位時間的膜厚之減少量)、衰減係數及折射率等。
作為有機聚合物化合物並無特別限制,可使用各種的有機聚合物。可使用縮聚合物及加成聚合聚合物等。可使用聚酯、聚苯乙烯、聚醯亞胺、丙烯酸聚合物、甲基丙烯酸聚合物、聚乙烯基醚、酚酚醛、萘酚酚醛、聚醚、聚醯胺、聚碳酸酯等的加成聚合聚合物及縮聚合物。較佳可使用具有作為吸光部位發揮作用的苯環、萘環、蒽環、三嗪環、喹啉環、及喹喔啉環等的芳香環構造的有機聚合物。
作為如此般的有機聚合物化合物,可舉例如包含丙烯酸苄酯、甲基丙烯酸苄酯、丙烯酸苯酯、丙烯酸萘酯、甲基丙烯酸蒽酯、甲基丙烯酸蒽甲酯、苯乙烯、羥基苯乙烯、苄基乙烯基醚及N-苯基馬來醯亞胺等的加成聚合性單體作為其構造單位的加成聚合聚合物、或酚酚醛及萘酚酚醛等的縮聚合物。
在使用加成聚合聚合物作為有機聚合物化合物時,該聚合物化合物可以是均聚物亦可以是共聚物。在加成聚合聚合物的製造中來使用加成聚合性單體。作為如此般的加成聚合性單體,可舉例丙烯酸酸、甲基丙烯酸、丙烯酸酯化合物、甲基丙烯酸酯化合物、丙烯醯胺化合物、甲基丙烯醯胺化合物、乙烯基化合物、苯乙烯化合物、馬來醯亞胺化合物、馬來酸酐、丙烯腈等。
作為丙烯酸酯化合物,可舉例、丙烯酸甲酯、丙烯酸乙酯、丙烯酸正己酯、丙烯酸異丙酯、丙烯酸環己酯、丙烯酸苄酯、丙烯酸苯酯、蒽基丙烯酸甲酯、丙烯酸2-羥乙酯、丙烯酸3-氯-2-羥丙酯、丙烯酸2-羥丙酯、丙烯酸2,2,2-三氟乙酯、丙烯酸2,2,2-三氯乙酯、丙烯酸2-溴乙酯、丙烯酸4-羥丁酯、丙烯酸2-甲氧基乙酯、丙烯酸四氫糠酯、2-甲基-2-金剛烷基丙烯酸酯、5-丙烯醯氧基-6-羥基降莰烯-2-羧酸-6-內酯、3-丙烯醯氧基丙基三乙氧基矽烷及丙烯酸縮水甘油酯等。
作為甲基丙烯酸酯化合物,可舉例甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸正己酯、甲基丙烯
酸異丙酯、甲基丙烯酸環己酯、甲基丙烯酸苄酯、甲基丙烯酸苯酯、甲基丙烯酸蒽甲酯、甲基丙烯酸2-羥乙酯、甲基丙烯酸2-羥丙酯、甲基丙烯酸2,2,2-三氟乙酯、甲基丙烯酸2,2,2-三氯乙酯、甲基丙烯酸2-溴乙酯、甲基丙烯酸4-羥丁酯、甲基丙烯酸2-甲氧基乙酯、甲基丙烯酸四氫糠酯、甲基丙烯酸2-甲基-2-金剛烷基酯、5-甲基丙烯醯氧基-6-羥基降莰烯-2-羧酸-6-內酯、3-甲基丙烯醯氧基丙基三乙氧基矽烷、甲基丙烯酸縮水甘油酯、甲基丙烯酸2-苯乙酯、甲基丙烯酸羥苯酯及甲基丙烯酸溴苯酯等。
作為丙烯醯胺化合物,可舉例丙烯醯胺、N-甲基丙烯醯胺、N-乙基丙烯醯胺、N-苄基丙烯醯胺、N-苯基丙烯醯胺、N,N-二甲基丙烯醯胺及N-蒽基丙烯醯胺等。
作為甲基丙烯醯胺化合物,可舉例甲基丙烯醯胺、N-甲基甲基丙烯醯胺、N-乙基甲基丙烯醯胺、N-苄基甲基丙烯醯胺、N-苯基甲基丙烯醯胺、N,N-二甲基甲基丙烯醯胺及N-蒽基丙烯醯胺等。
作為乙烯基化合物,可舉例乙烯基醇、2-羥基乙基乙烯基醚、甲基乙烯基醚、乙基乙烯基醚、苄基乙烯基醚、乙烯基乙酸、乙烯基三甲氧基矽烷、2-氯乙基乙烯基醚、2-甲氧基乙基乙烯基醚、乙烯基萘及乙烯基蒽等。
作為苯乙烯化合物,可舉例苯乙烯、羥基苯乙烯、氯苯乙烯、溴苯乙烯、甲氧基苯乙烯、氰基苯乙烯
及乙醯苯乙烯等。
作為馬來醯亞胺化合物,可舉例馬來醯亞胺、N-甲基馬來醯亞胺、N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苄基馬來醯亞胺及N-羥基乙基馬來醯亞胺等。
使用縮聚合物作為聚合物時,作為如此般的聚合物,可舉例如二醇化合物與二羧酸化合物的縮聚合物。作為二醇化合物,可舉例二乙二醇、六亞甲二醇、丁二醇等。作為二羧酸化合物,可舉例琥珀酸、己二酸、對苯二甲酸、馬來酸酐等。又,可舉例如聚均苯四醯亞胺、聚(p-苯二甲醯對苯二胺)、聚對苯二甲酸丁二酯、聚對苯二甲酸乙二酯等的聚酯、聚醯胺、聚醯亞胺。
在有機聚合物化合物中含有羥基時,該羥基係可與聚有機矽氧烷形成交聯反應。
作為有機聚合物化合物,可以使用重量平均分子量例如為1000~1000000、或3000~300000、或5000~200000、或10000~100000的聚合物化合物。
有機聚合物化合物係可僅使用一種、或可組合二種以上來使用。
在使用有機聚合物化合物時,作為該比例,相對於縮合物(聚有機矽氧烷)100質量份為1~200質量份、或5~100質量份、或10~50質量份、或20~30質量份。
進而本發明的阻劑下層膜形成組成物中可含
有酸產生劑。作為酸產生劑可舉例熱酸產生劑或光酸產生劑。特別是光酸產生劑在阻劑的曝光時產生酸。因此,可以調整下層膜的酸性度。此者是用於使下層膜的酸性度上層的阻劑之酸性度一致的方法之一。又,藉由調整下層膜的酸性度,可以調整在上層所形成的阻劑的圖型形狀。
作為本發明的阻劑下層膜形成組成物中所含的光酸產生劑,可舉例鎓鹽化合物、磺醯亞胺化合物、及二磺醯基重氮甲烷化合物等。
作為鎓鹽化合物,可舉例如二苯基錪(Iodonium)六氟磷酸酯、二苯基錪三氟甲烷磺酸酯、二苯基錪九氟正丁烷磺酸酯、二苯基錪全氟正辛烷磺酸酯、二苯基錪樟腦磺酸酯、雙(4-tert-丁基苯基)錪樟腦磺酸酯及雙(4-tert-丁基苯基)錪三氟甲烷磺酸酯等錪鹽化合物、及三苯基鋶六氟銻酸酯、三苯基鋶九氟正丁烷磺酸酯、三苯基鋶樟腦磺酸酯及三苯基鋶三氟甲烷磺酸酯等鋶鹽化合物等。
作為磺醯亞胺化合物,可舉例如N-(三氟甲磺醯氧基)琥珀醯亞胺、N-(九氟正丁烷磺醯氧基)琥珀醯亞胺、N-(樟腦磺醯氧基)琥珀醯亞胺及N-(三氟甲磺醯氧基)萘醯亞胺等。
作為二磺醯基重氮甲烷化合物,可舉例如雙(三氟甲基磺醯基)重氮甲烷、雙(環己基磺醯基)重氮甲烷、雙(苯基磺醯基)重氮甲烷、雙(p-甲苯磺醯基)重氮甲烷、雙(2,4-二甲基苯磺醯基)重氮甲烷、及甲基磺醯基-p-
甲苯磺醯基重氮甲烷等。
光酸產生劑係可僅使用一種、或可組合二種以上來使用。使用光酸產生劑時,作為該比例,相對於縮合物(聚有機矽氧烷)100質量份為0.01~5質量份、或0.1~3質量份、或0.5~1質量份。
進而本發明的阻劑下層膜形成組成物中可含有界面活性劑。界面活性劑係將本發明的阻劑下層膜形成組成物塗佈於基板上時,對於抑制針孔及條痕(stration)等的產生是有效的。
作為本發明的阻劑下層膜形成組成物中所含的界面活性劑,可舉例如聚氧乙烯月桂醚、聚氧乙烯硬脂基醚、聚氧乙烯鯨蠟醚、聚氧乙烯油基醚等的聚氧乙烯烷基醚類、聚氧乙烯辛基酚醚、聚氧乙烯壬基酚醚等的聚氧乙烯烷基烯丙基醚類、聚氧乙烯‧聚氧丙烯嵌段共聚物類、去水山梨醇單月桂酸酯、去水山梨醇單棕櫚酸酯、去水山梨醇單硬脂酸酯、去水山梨醇單油酸酯、去水山梨醇三油酸酯、去水山梨醇三硬脂酸酯等的去水山梨醇脂肪酸酯類、聚氧乙烯去水山梨醇單月桂酸酯、聚氧乙烯去水山梨醇單棕櫚酸酯、聚氧乙烯去水山梨醇單硬脂酸酯、聚氧乙烯去水山梨醇三油酸酯、聚氧乙烯去水山梨醇三硬脂酸酯等的聚氧乙烯去水山梨醇脂肪酸酯類等的非離子系界面活性劑、商品名F-top EF301、EF303、EF352((股)Tochem Products製)、商品名Megafac F171、F173、R-08、R-30、R-30N、R-40LM(DIC(股)製)、Fluorad FC430、
FC431(住友3M(股)製)、商品名Asahi Guard AG710,Surflon S-382、SC101、SC102、SC103、SC104、SC105、SC106(旭硝子(股)製)等的氟界面活性劑、及有機矽氧烷聚合物KP341(信越化學工業(股)製)等。該等的界面活性劑可單獨使用、或亦可二種以上的組合來使用。使用界面活性劑時,作為該比例,相對於縮合物(聚有機矽氧烷)100質量份為0.0001~5質量份、或0.001~1質量份、或0.01~0.5質量份。
又,本發明的阻劑下層膜形成組成物中可添加流變調整劑及接著輔助劑等。流變調整劑係對於使下層膜形成組成物的流動性提昇是有效的。接著輔助劑係對於使半導體基板或阻劑與下層膜的密著性提昇是有效的。
又,本發明的阻劑下層膜形成組成物中作為添加劑可添加雙酚S、或雙酚S衍生物。雙酚S、或雙酚S衍生物,相對於聚有機矽氧烷100質量份為0.01~20質量份、或0.01~10質量份、或0.01~5質量份。
較佳的雙酚S、或雙酚S衍生物可示例如下。
作為本發明的阻劑下層膜形成組成物中所使用的溶劑,只要是可溶解前述固體成分即可,無特別限制可為使用。作為如此般的溶劑,可舉例如甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯、丙二醇、丙二醇單甲基醚、丙二醇單乙基醚、甲基異丁基甲醇、丙二醇單丁基醚、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、丙二醇單丙基
醚乙酸酯、丙二醇單丁基醚乙酸酯、甲苯、二甲苯、甲基乙基酮、環戊酮、環己酮、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸甲酯、丙酮酸甲酯、丙酮酸乙酯、乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丙基醚、乙二醇單丁基醚、乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、乙二醇單丙基醚乙酸酯、乙二醇單丁基醚乙酸酯、二乙二醇二甲基醚、二乙二醇二乙基醚、二乙二醇二丙基醚、二乙二醇二丁基醚丙二醇單甲基醚、丙二醇二甲基醚、丙二醇二乙基醚、丙二醇二丙基醚、丙二醇二丁基醚、乳酸乙酯、乳酸丙酯、乳酸異丙酯、乳酸丁酯、乳酸異丁酯、甲酸甲酯、甲酸乙酯、甲酸丙酯、甲酸異丙酯、甲酸丁酯、甲酸異丁酯、甲酸戊酯、甲酸異戊酯、乙酸甲酯、乙酸乙酯、乙酸戊酯、乙酸異戊酯、乙酸己酯、丙酸甲酯、丙酸乙酯、丙酸丙酯、丙酸異丙酯、丙酸丁酯、丙酸異丁酯、丁酸甲酯、丁酸乙酯、丁酸丙酯、丁酸異丙酯、丁酸丁酯、丁酸異丁酯、羥基乙酸乙酯、2-羥基-2-甲基丙酸乙酯、3-甲氧基-2-甲基丙酸甲酯、2-羥基-3-甲基丁酸甲酯、甲氧基乙酸乙酯、乙氧基乙酸乙酯、3-甲氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-甲氧基丙酸乙酯、3-甲氧基丁基乙酸酯、3-甲氧基丙基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、3-甲基-3-甲氧基丁基丁酸酯、乙醯乙酸甲酯、甲苯、
二甲苯、甲基乙基酮、甲基丙基酮、甲基丁基酮、2-庚酮、3-庚酮、4-庚酮、環己酮、N,N-二甲基甲醯胺、N-甲基乙醯胺、N,N-二甲基乙醯胺、N-甲基吡咯烷酮、4-甲基-2-戊醇、及γ-丁內酯等。該等的溶劑可單獨、或可二種以上的組合來使用。
以下,對於本發明的阻劑下層膜形成組成物之使用進行說明。
使用本發明的阻劑下層膜形成組成物,藉由塗佈法於基板上形成阻劑下層膜、或介隔著基板上的有機下層膜藉由塗佈法於其上形成阻劑下層膜,並於該阻劑下層膜上形成阻劑膜(例如光阻劑、電子束阻劑)。然後,藉由曝光與顯影來形成阻劑圖型,使用該阻劑圖型對阻劑下層膜進行乾蝕刻來進行圖型的轉印,藉由該圖型進行基板的加工或離子注入、或將有機下層膜藉由蝕刻來轉印圖型,並藉由該有機下層膜進行基板的加工或離子注入。更,包含之後以硫酸與過氧化氫的混合水溶液或氨與過氧化氫的混合水溶液等的藥液來將阻劑下層膜進行濕式蝕刻之步驟。
為了形成微細的圖型、且防止圖型坍塌(pattern collapse),故阻劑膜厚有變薄的傾向。由於阻劑的薄膜化,如果用於對其下層所存在的膜來轉印圖型的乾蝕刻的蝕刻速度不高於上層的膜則無法轉印圖型。本發明中,於基板上介隔著有機下層膜、或無介隔著或有機下層膜,於其上被覆本發明的阻劑下層膜(含有無機系矽系化合物),並於其上依序來被覆阻劑膜(有機阻劑膜)。有機系
成分的膜與無機系成分的膜係依蝕刻氣體的選擇而使乾蝕刻速度差異很大,有機系成分的膜係採用氧系氣體則乾蝕刻速度變高,無機系成分的膜係採用含鹵氣體則乾蝕刻速度變高。
例如,形成阻劑圖型,用含鹵氣體將其下層所存在的本發明的阻劑下層膜進行乾蝕刻,從而於阻劑下層膜上轉印圖型,並藉由轉印到該阻劑下層膜的圖型,使用含鹵氣體來進行基板加工。或者,使用已轉印圖型的阻劑下層膜,用氧系氣體將其下層的有機下層膜進行乾蝕刻,從而於有機下層膜上進行轉印圖型,藉由該轉印圖型的有機下層膜,使用含鹵氣體來進行基板加工。
然後,本發明的阻劑下層膜,不是藉由矽烷醇基的縮合反應使矽氧烷的縮合反應而成的交聯膜,而是由包含矽烷化合物的水解性有機矽烷、該水解物、或該水解縮合物與交聯劑進行交聯而成的交聯膜。此下層膜與阻劑係具有適度的反射率,並具有於基板加工時等的耐蝕刻性,具有可充分作為硬式遮罩之機能。
另一方面,由於不是藉由以濕式蝕刻所無法分解的矽氧烷的縮合反應,而是由包含矽烷化合物的水解性有機矽烷、該水解物、或該水解縮合物與交聯劑而成的交聯膜,故可形成能夠以濕式蝕刻來分解、去除的阻劑下層膜。
在此,藉由旋轉器、塗布機等的適當的塗佈方法,於半導體裝置之製造中所使用的基板(例如矽晶圓基板、矽/二氧化矽被覆基板、氮化矽基板、玻璃基板、
ITO基板、聚醯亞胺基板、及低介電率材料(low-k材料)被覆基板等的)之上,塗佈本發明的阻劑下層膜形成組成物,之後藉由燒成從而形成阻劑下層膜。作為燒成的條件,從燒成溫度80℃~250℃、燒成時間0.3~60分鐘中適當選擇。較佳為燒成溫度150℃~250℃、燒成時間0.5~2分鐘。在此,作為所形成的下層膜的膜厚,例如為10~1000nm、或20~500nm、或30~300nm、或50~100nm。
接著,於該阻劑下層膜之上形成例如光阻劑的層。光阻劑的層之形成係藉由周知的方法,即可將光阻劑組成物溶液塗佈在下層膜上及燒成而來進行。作為光阻劑的膜厚,例如為50~10000nm、或100~2000nm、或200~1000nm。
本發明中,於基板上進行有機下層膜成膜後,可於其上進行本發明的阻劑下層膜成膜,並進而於其上被覆光阻劑。據此,即使是光阻劑的圖型寬度變窄,為了防止圖型坍塌故較薄地被覆光阻劑時,也可藉由選擇適當的蝕刻氣體來進行基板的加工。例如可將對於光阻劑而言為充分快的蝕刻速度的氟氣體作為蝕刻氣體來加工本發明的阻劑下層膜、或可將對於本發明的阻劑下層膜而言為充分快的蝕刻速度的氧系氣體作為蝕刻氣體來加工有機下層膜、進而對於有機下層膜而言為充分快的蝕刻速度的氟氣體作為蝕刻氣體來進行基板的加工。
作為在本發明的阻劑下層膜之上所形成的光
阻劑,只要能對曝光時所使用的光進行感光者即可無特別限定。可任意使用負型光阻劑及正型光阻劑。例如有:由酚醛樹脂與1,2-萘醌二疊氮磺酸酯所構成的正型光阻劑;由具有藉由酸而分解並使鹼溶解速度上昇之基的黏合劑、與光酸產生劑所構成的化學增幅型光阻劑;由藉由酸而分解並使光阻劑的鹼溶解速度上昇的低分子化合物、鹼可溶性黏合劑、與光酸產生劑所構成的化學增幅型光阻劑;由具有藉由酸而分解並使鹼溶解速度上昇之基的黏合劑、藉由酸而分解並使光阻劑的鹼溶解速度上昇的低分子化合物、與光酸產生劑所構成的化學增幅型光阻劑等。可舉例如Shipley公司製商品名APEX-E、住友化學工業(股)製商品名PAR710、及信越化學工業(股)製商品名SEPR430等。又,可舉例如Proc.SPIE,Vol.3999,330-334(2000)、Proc.SPIE,Vol.3999,357-364(2000)、或Proc.SPIE,vol.3999,365-374(2000)中所記載般的含氟原子聚合物系光阻劑。
接著,通過特定的遮罩來進行曝光。曝光時可使用KrF準分子雷射(波長248nm)、ArF準分子雷射(波長193nm)及F2準分子雷射(波長157nm)等使用。曝光後,因應所需亦可進行曝光後加熱(post exposure bake)。曝光後加熱可從加熱溫度70℃~150℃、加熱時間0.3~10分鐘中適當選擇的條件下來進行。
又,本發明中,作為阻劑可改變成光阻劑而使用電子束微影用阻劑、或EUV微影用阻劑。作為電子
束阻劑可使用負型、正型皆可。例如有:由酸產生劑、與具有藉由酸而分解並使鹼溶解速度變化之基的黏合劑所構成的化學增幅型阻劑;由鹼可溶性黏合劑、酸產生劑、與藉由酸而分解並使阻劑的鹼溶解速度變化的低分子化合物所構成的化學增幅型阻劑;由酸產生劑、具有藉由酸而分解並使鹼溶解速度變化之基的黏合劑、與藉由酸而分解並使阻劑的鹼溶解速度變化的低分子化合物所構成的化學增幅型阻劑;由具有藉由電子束而分解並使鹼溶解速度變化之基的黏合劑所構成的非化學增幅型阻劑;由具有藉由電子束而被切斷並使鹼溶解速度變化之部位的黏合劑所構成的非化學增幅型阻劑等。即使是使用該等的電子束阻劑,亦與使用電子束作為照射源的光阻劑為相同地可得到阻劑圖型。
接著,藉由顯影液(例如鹼顯影液)來進行顯影。據此,例如使用正型光阻劑時,曝光的部分的光阻劑被去除,而形成光阻劑的圖型。
作為顯影液,可舉例如氫氧化鉀、氫氧化鈉等的鹼金屬氫氧化物的水溶液、四甲基氫氧化銨、四乙基氫氧化銨、膽鹼等的四級氫氧化銨的水溶液、乙醇胺、丙基胺、乙二胺等的胺水溶液等的鹼性水溶液。進而,該等的顯影液中亦可添加界面活性劑等。作為顯影的條件係從溫度5~50℃、時間10~600秒中適宜選擇。
又,本發明中作為顯影液可使用有機溶劑。曝光後藉由顯影液(溶劑)來進行顯影。據此,例如使用正
型光阻劑時,未曝光的部分的光阻劑被去除而形成光阻劑的圖型。
作為顯影液,可舉例如乙酸甲酯、乙酸丁酯、乙酸乙酯、乙酸異丙酯、乙酸戊酯、乙酸異戊酯、甲氧基乙酸乙酯、乙氧基乙酸乙酯、丙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、乙二醇單丙基醚乙酸酯、乙二醇單丁基醚乙酸酯、乙二醇單苯基醚乙酸酯、二乙二醇單甲基醚乙酸酯、二乙二醇單丙基醚乙酸酯、二乙二醇單乙基醚乙酸酯、二乙二醇單苯基醚乙酸酯、二乙二醇單丁基醚乙酸酯、二乙二醇單乙基醚乙酸酯、2-甲氧基丁基乙酸酯、3-甲氧基丁基乙酸酯、4-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-乙基-3-甲氧基丁基乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、丙二醇單丙基醚乙酸酯、2-乙氧基丁基乙酸酯、4-乙氧基丁基乙酸酯、4-丙氧基丁基乙酸酯、2-甲氧基戊基乙酸酯、3-甲氧基戊基乙酸酯、4-甲氧基戊基乙酸酯、2-甲基-3-甲氧基戊基乙酸酯、3-甲基-3-甲氧基戊基乙酸酯、3-甲基-4-甲氧基戊基乙酸酯、4-甲基-4-甲氧基戊基乙酸酯、丙二醇二乙酸酯、甲酸甲酯、甲酸乙酯、甲酸丁酯、甲酸丙酯、乳酸乙酯、乳酸丁酯、乳酸丙酯、碳酸乙酯、碳酸丙酯、碳酸丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯、丙酮酸丁酯、乙醯乙酸甲酯、乙醯乙酸乙酯、丙酸甲酯、丙酸乙酯、丙酸丙酯、丙酸異丙酯、2-羥基丙酸甲酯、2-羥基丙酸乙酯、甲基-3-甲氧基丙酸酯、乙基-3-甲氧基丙酸酯、
乙基-3-乙氧基丙酸酯、丙基-3-甲氧基丙酸酯等。進而,該等的顯影液中亦可添加界面活性劑等。作為顯影的條件係從溫度5~50℃、時間10~600秒中適當選擇。
然後,將以如此般之方式所形成的光阻劑(上層)的圖型作為保護膜來進行本發明的阻劑下層膜(中間層)之去除,接著,將圖型化後的光阻劑及本發明的阻劑下層膜(中間層)所構成的膜作為保護膜來進行有機下層膜(下層)的去除。最後,將圖型化後的本發明的阻劑下層膜(中間層)及有機下層膜(下層)作為保護膜來進行半導體基板的加工。
首先,藉由乾蝕刻將光阻劑所去除的部分本發明的阻劑下層膜(中間層)除去,使半導體基板露出。對於本發明的阻劑下層膜的乾蝕刻,可使用四氟甲烷(CF4)、全氟環丁烷(C4F8)、全氟丙烷(C3F8)、三氟甲烷、一氧化碳、氬氣、氧氣、氮氣、六氟化硫、二氟甲烷、三氟化氮及三氟化氯、氯氣、三氯化硼及二氯化硼等的氣體。對於阻劑下層膜的乾蝕刻,以使用鹵素系氣體為較佳。藉由鹵素系氣體的乾蝕刻中,難以去除基本上由有機物質所構成的光阻劑。相對於此,包含大量矽原子的本發明的阻劑下層膜可藉由鹵素系氣體來迅速地去除。因此,可抑制伴隨著阻劑下層膜的乾蝕刻而導致光阻劑的膜厚的減少。然後,其結果是將可以薄膜的形式來使用光阻劑。阻劑下層膜的乾蝕刻係以藉由氟氣體為較佳,作為氟氣體,可舉例如四氟甲烷(CF4)、全氟環丁烷(C4F8)、全氟丙
烷(C3F8)、三氟甲烷、及二氟甲烷(CH2F2)等。
之後,將圖型化後的光阻劑及本發明的阻劑下層膜所構成的膜作為保護膜來進行有機下層膜的去除。有機下層膜(下層)係以藉由氧系氣體的乾蝕刻來進行為較佳。這是由於包含大量矽原子的本發明的阻劑下層膜難以在藉由氧系氣體的乾蝕刻中被去除之緣故。
之後,進行半導體基板的加工。半導體基板的加工係以藉由氟氣體的乾蝕刻來進行為較佳。
最後,進行阻劑下層膜的去除。對於阻劑下層膜的去除大多係以乾蝕刻或濕式蝕刻來進行,特別是阻劑下層膜(中間層)的乾蝕刻係以藉由氟氣體為較佳。作為氟氣體,例如四氟甲烷(CF4)、全氟環丁烷(C4F8)、全氟丙烷(C3F8)、三氟甲烷、及二氟甲烷(CH2F2)等。又,在阻劑下層膜(中間層)的濕式蝕刻中所使用的藥液,可舉例氫氟酸、緩衝氫氟酸、硫酸/過氧化氫、氨/過氧化氫等的藥液。
又,可以於光阻劑的形成前,於本發明的阻劑下層膜的上層形成有機系的抗反射膜。作為於此所使用的抗反射膜組成物無特別限制,可從迄今為止在微影製程中所慣用者中任意地選擇來使用,又,可以藉由慣用方法例如用旋轉器、塗布機的塗佈及燒成來進行抗反射膜的形成。
又,塗佈有本發明的阻劑下層膜形成組成物的基板,可以是於該表面上具有以CVD法等所形成的有
機系或無機系的抗反射膜,亦可於其上形成由本發明的阻劑下層膜形成組成物所成的下層膜。
由本發明的阻劑下層膜形成組成物所形成的阻劑下層膜,又依據在微影製程中所使用的光的波長,而有時對於該光具有吸收之情形。然後,如此般之情形時,可以作為具有防止來自基板反射光之效果的抗反射膜而發揮機能。進而,由本發明的阻劑下層膜形成組成物所形成的阻劑下層膜,亦可使用作為如下:用於防止基板與光阻劑之相互作用的層;具有防止光阻劑中所使用的材料或於光阻劑曝光時所生的物質之對基板有不良作用的機能的層;具有防止於加熱燒成時由基板所生成的物質之對上層光阻劑之擴散的機能的層;使因為半導體基板電介質層而導致的光阻劑層的毒化效果減少的阻障層等。
又,由阻劑下層膜形成組成物所形成的阻劑下層膜,可適用在雙重金屬鑲嵌製程中所使用的形成通孔的基板,作為可以無間隙地填充孔洞的填埋材來使用。又,亦可作為用於使具有凹凸的半導體基板的表面平坦化的平坦化材來使用。
又,作為EUV阻劑的下層膜,除了作為硬式遮罩的功能以外亦可使用於以下之目的。作為不與EUV阻劑混雜、可防止於EUV曝光(波長13.5nm)時不佳的曝光之光(例如上述的UV或DUV(ArF光、KrF光))的來自基板或界面的反射之EUV阻劑的下層抗反射膜,可使用上述阻劑下層膜形成組成物。可於EUV阻劑的下層有效
的防止反射。使用作為EUV阻劑下層膜時,製程係可與光阻劑用下層膜相同地進行。
(4-(三甲氧基甲矽烷基)苄基乙酸酯之合成)
在具備有磁攪拌器300mL的三頸燒瓶中,加入乙酸鈉30.0g、N-甲基吡咯烷酮(以下亦稱為NMP)150.0g,並在油浴中加熱至130℃。於此滴入(p-氯甲基)苯基三甲氧基矽烷90.25g,並加熱攪拌4小時。將所得的溶液回復到室溫下,移至分液漏斗後加入甲苯300g、水90g並洗淨有機層。洗淨係重複進行3次後,於有機層中加入硫酸鎂並使其乾燥後,過濾並用蒸發來去除溶劑而可得到粗產物。之後,藉由減壓蒸餾進行純化而可得到作為目標物的4-(三甲氧基甲矽烷基)苄基乙酸酯60g。
1H-NMR(500MHz、DMSO-d6):2.08ppm(s、3H)、3.54ppm(s、9H)、5.10ppm(s、2H)、7.42ppm(d、2H)、7.58ppm(d、2H)
(合成例1)
在具備有攪拌機、迴流冷卻器、滴入漏斗及溫度計的500mL的四頸燒瓶中,裝入水75g,在反應溫度20℃下,滴入4-甲氧基苄基三甲氧基矽烷50g(在全矽烷中為100mol%)的甲苯75g溶液。滴入結束後,以相同溫度反應2小時,靜置後進行分液並回收油層。接著,以5%碳酸氫鈉水溶液來洗淨。接著,將該甲苯溶液移至在具備有攪拌機、蒸餾塔、冷卻器及溫度計的500mL的四頸燒瓶中,並放入油浴中緩慢地加熱來餾除甲苯。甲苯餾除後進而提昇溫度,以200℃熟成2小時。之後,移至在具備有攪拌機、迴流冷卻器、滴入漏斗及溫度計的300mL的四頸燒瓶中,依序添加乙腈210g、碘化鈉78.24g(0.522莫耳)、三甲基氯矽烷56.7g(0.522莫耳),以70℃迴流24小時。迴流後,滴入水69.0g並進而以70℃迴流6小時後。之後,冷卻至室溫並添加亞硫酸氫鈉水溶液來還元游離的碘。進而用15%食鹽水洗淨2次並回收油層。添加丙二醇單甲基醚100.0g,在減壓下以40℃濃縮而可得到水解縮合物的20%丙二醇單甲基醚溶液。所得的聚合物(相當於式(A-1))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw3800。
(合成例2)
在具備有攪拌機、迴流冷卻器、滴入漏斗及溫度計的500mL的四頸燒瓶中,裝入水74g,在反應溫度20℃下,
滴入4-甲氧基苄基三甲氧基矽烷36.3g(在全矽烷中為70mol%)、苯基三甲氧基矽烷12.7g(在全矽烷中為30mol%)的甲苯74g溶液。滴入結束後,以相同溫度反應2小時,靜置後進行分液並回收油層。接著,以5%碳酸氫鈉水溶液來洗淨。接著,將該甲苯溶液移至在具備有攪拌機、蒸餾塔、冷卻器及溫度計的500mL的四頸燒瓶中,並放入油浴中緩慢地加熱來餾除甲苯。甲苯餾除後進而提昇溫度,以200℃熟成2小時。之後,移至在具備有攪拌機、迴流冷卻器、滴入漏斗及溫度計的500mL的四頸燒瓶中,依序添加乙腈200g、碘化鈉81.1g(0.541莫耳、三甲基氯矽烷58.8g(0.542莫耳),以70℃迴流24小時。迴流後,滴入水67g並進而以70℃迴流6小時後。之後,冷卻至室溫並添加亞硫酸氫鈉水溶液來還元游離的碘。進而用15%食鹽水洗淨2次並回收油層。添加丙二醇單甲基醚120g,在減壓下以40℃濃縮而可得到水解縮合物的20%丙二醇單甲基醚溶液。所得的聚合物(相當於式(A-2))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw4800。
(合成例3)
在具備有攪拌機、迴流冷卻器、滴入漏斗及溫度計的500mL的四頸燒瓶中,裝入水71g,在反應溫度20℃下,滴入4-甲氧基苄基三甲氧基矽烷25.9g(在全矽烷中為50mol%)、苯基三甲氧基矽烷21.2g(在全矽烷中為
50mol%)的甲苯71g溶液。滴入結束後,以相同溫度反應2小時,靜置後進行分液並回收油層。接著,以5%碳酸氫鈉水溶液來洗淨。接著,將該甲苯溶液移至在具備有攪拌機、蒸餾塔、冷卻器及溫度計的500mL的四頸燒瓶中,並放入油浴中緩慢地加熱來餾除甲苯。甲苯餾除後進而提昇溫度,以200℃熟成2小時。之後,移至在具備有攪拌機、迴流冷卻器、滴入漏斗及溫度計的300mL的四頸燒瓶中,依序添加乙腈200g、碘化鈉81.1g(0.541莫耳、三甲基氯矽烷58.8g(0.542莫耳),以70℃迴流24小時。迴流後,滴入水67g並進而以70℃迴流6小時後。之後,冷卻至室溫並添加亞硫酸氫鈉水溶液來還元游離的碘。進而用15%食鹽水洗淨2次並回收油層。之後,添加丙二醇單甲基醚120g,在減壓下以40℃濃縮而可得到水解縮合物的20%丙二醇單甲基醚溶液。所得的聚合物(相當於式(A-2))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw5300。
(合成例4)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入5.06g的35質量%四甲基銨氫氧化物水溶液、44.19g的異丙醇來調製反應溶劑。又,調製12.0g(在全矽烷中為70mol%)的(4-(1-乙氧基乙氧基)苯基)三甲氧基矽烷、3.56g(在全矽烷中為30mol%)的苯基三甲氧基矽烷、7.78g的異丙醇的混合溶液。藉由磁攪拌器一邊攪拌反應
溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並於反應液中添加乙酸乙酯90mL來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水47g將剩餘的有機層水洗3次。在所得的有機層中添加丙二醇單甲基醚30g,減壓餾除乙酸乙酯、異丙醇、甲醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(A-3))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw4000。
(合成例5)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入5.06g的35質量%四甲基銨氫氧化物水溶液、44.19g的異丙醇來調製反應溶劑。又,調製12.0g(在全矽烷中為20mol%)的(4-(1-乙氧基乙氧基)苯基)三甲氧基矽烷、20.7g(在全矽烷中為50mol%)的苯基三甲氧基矽烷、6.3g的(在全矽烷中為22mol%)的甲基三甲氧基矽烷、6.5g的N-3-(三甲氧基甲矽烷基)-丙基-[1,1’-聯苯]-2,2’-二羧醯亞胺(在全矽烷中為8mol%)、7.78g的異丙醇的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,用利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並於反應液中添加乙酸乙酯90g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水47g將剩餘的
有機層水洗3次。在所得的有機層中添加丙二醇單甲基醚30g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(A-4))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1800。
尚,N-3-(三甲氧基甲矽烷基)-丙基-[1,1’-聯苯]-2,2’-二羧醯亞胺係相當於下述化合物(4-1-1),依據定法可用下述反應式來合成。
(合成例6)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入5.90g的35質量%四甲基銨氫氧化物水溶液、48.53g的異丙醇來調製反應溶劑。又,調製10.0g(在全矽烷中的50mol%)的(4-(1-乙氧基乙氧基)苯基)三甲氧基矽烷、5.54g(在全矽烷中的40mol%)的苯基三甲氧基矽烷、1.55g(在全矽烷中的10mol%)的乙醯氧基丙基三甲氧基矽烷的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在
室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並在反應液中添加乙酸乙酯102g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水52g將剩餘的有機層水洗3次。在所得的有機層中添加丙二醇單甲基醚36g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(A-5))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1800。
(比較合成例1)
將苯基三甲氧基矽烷5.95g(在全矽烷中的30mol%)、甲基三甲氧基矽烷12.48g(在全矽烷中的~70mol%)、丙酮27.64g裝入100mL的燒瓶中,藉由磁攪拌器一邊攪拌混合溶液,一邊將0.01mol/L的鹽酸5.41g滴入於混合溶液中。添加後,將燒瓶移至於已調整成85℃的油浴中,並在加溫迴流下使其反應240分鐘。之後,將反應溶液冷卻至室溫,於反應溶液中添加丙二醇單甲基醚44g,減壓餾除反應副產物的甲醇、乙醇、水、鹽酸並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(8-1))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1200。
(添加劑1之合成)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入6.17g的35質量%四甲基銨氫氧化物水溶液、42.60g的異丙醇來調製反應溶劑。又,調製10.13g(在全矽烷中的70mol%)的苯基三甲氧基矽烷、4.87g(在全矽烷中的30mol%)的乙醯氧基丙基三甲氧基矽烷的混合物。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並於反應液中添加乙酸乙酯90g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水45g將剩餘的有機層水洗3次。在所得的有機層中添加丙二醇單甲基醚30g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(C-1))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1,500。
(添加劑2之合成)
除了將在添加劑1中添加的6.17g的35質量%四甲基銨氫氧化物水溶液替代為6.02g、苯基三甲氧基矽烷替代為7.07g(在全矽烷中的50mol%)、乙醯氧基丙基三甲氧基矽烷替代為7.93g(在全矽烷中的50mol%)以外,以相同的操作可得到聚合物(相當於式(C-1))的丙二醇單乙基醚溶液。此者之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw=1,600。
(添加劑3之合成)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入5.12g的35質量%四甲基銨氫氧化物水溶液、42.59g的異丙醇來調製反應溶劑。又,調製8.42g(在全矽烷中的70mol%)的苯基三甲氧基矽烷、6.58g(在全矽烷中的30mol%)的N-(3-(三甲氧基甲矽烷基)丙基)苯磺醯胺的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後、利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並於反應液中添加乙酸乙酯90g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水45g將剩餘的有機層水洗3次。於所得的有機層中添加丙二醇單甲基醚31g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(C-2))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1800。
(添加劑4之合成)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入5.14g的35質量%四甲基銨氫氧化物水溶液、21.30g的異丙醇、21.30g的四氫呋喃來調製反應溶劑。又,調製8.45g(在全矽烷中的70mol%)的苯基三甲氧基矽烷、6.55g(在全矽烷中的30mol%)的5-(三乙氧基甲矽烷基)降莰烷-2-羧酸-t-丁基酯的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並於反應液中添加乙酸乙酯90g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水45g將剩餘的有機層水洗3次。在所得的有機層中添加丙二醇單甲基醚30g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(C-3))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1800。
(添加劑5之合成)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入5.15g的35質量%四甲基銨氫氧化物水溶液、21.30g的異丙醇、21.30g的四氫呋喃來調製反應溶劑。又,調製10.93g(在全矽烷中的70mol%)的5-(三乙氧基甲
矽烷基)降莰烯、4.07g(在全矽烷中的30mol%)的3-乙醯氧基丙基三甲氧基矽烷的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫並於反應液中添加乙酸乙酯90g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而用水45g將剩餘的有機層水洗3次。於所得的有機層中添加丙二醇單甲基醚27g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(式(相當於C-4))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1800。
(添加劑6之合成)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入4.40g的35質量%四甲基銨氫氧化物水溶液、22.61g的異丙醇、22.61g的四氫呋喃來調製反應溶劑。又,調製9.35g(在全矽烷中的70mol%)的苯基三甲氧基矽烷、6.58g(在全矽烷中的30mol%)的二t-丁基2-(3-三乙氧基甲矽烷基)丙基丙二酸酯的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫於反應液中添加乙酸乙酯89g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的
水層。進而將剩餘的有機層用水48g水洗3次。於所得的有機層中添加丙二醇單甲基醚28g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(C-5))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1600。
(添加劑7之合成)
在具備有攪拌子、溫度計、冷卻管的300mL的燒瓶中,加入4.42g的35質量%四甲基銨氫氧化物水溶液、19.34g的異丙醇、19.34g的四氫呋喃來調製反應溶劑。又,調製9.38g(在全矽烷中的70mol%)的苯基三甲氧基矽烷、4.24g(在全矽烷中的30mol%)的4-(三甲氧基甲矽烷基)苄基乙酸酯的混合溶液。藉由磁攪拌器一邊攪拌反應溶劑,一邊在室溫下將混合溶液滴入於反應溶劑中。添加後,利用油浴維持在40℃同時使其反應240分鐘後,冷卻至室溫於反應液中添加乙酸乙酯82g來作稀釋。添加0.2mol%鹽酸來作中和,並去除已分離成2層的水層。進而將剩餘的有機層,用水41g水洗3次。於所得的有機層中添加丙二醇單甲基醚28g,減壓餾除乙酸乙酯、異丙醇、反應副產物的甲醇、乙醇、水並濃縮後可得到水解縮合物(聚合物)丙二醇單甲基醚溶液。所得的聚合物(相當於式(C-6))之藉由GPC分析以聚苯乙烯換算所得的重量平均分子量為Mw1600。
(阻劑下層膜形成組成物之調製)
依表1~3所表示的比例,混合上述合成例1~6、比較合成例1、添加劑合成例1~7所得的矽含有聚合物、交聯性化合物、硬化觸媒、添加劑、溶劑,藉由用0.1μm氟樹脂製的過濾器進行過濾,分別調製阻劑下層膜形成組成物的溶液。
表1、2中,四甲氧基甲基甘脲簡稱為PL-LI、吡啶鎓-p-甲苯磺酸簡稱為PyPTS、(3-三乙氧基甲矽烷基丙基)-4,5-二氫咪唑簡稱為IMIDTEOS、丙二醇單甲基醚乙酸酯簡稱為PGMEA、丙二醇單甲基醚簡稱為PGME。其他可使用羥甲基化合物的商品名TM-BIP-A(旭有機材工業(股)製)、具有環氧環己烷構造的環氧基樹脂的商品名Epolead GT-401(Daicel工業(股)製)、嵌段異氰酸酯化合物的商品名VESTANAT1358(EVONIK公司製)。
各添加量係以質量份來表示。聚合物的添加量並非聚合物溶液的質量而是聚合物的質量。
(耐溶劑性之評價)
藉由旋轉塗佈法於矽晶圓上塗佈阻劑下層膜材料,並在215℃的加熱板上使其燒成1分鐘。之後,於商品名
OK73稀釋劑(東京應化工業(股)製、成分係丙二醇單甲基醚70%+丙二醇單甲基醚乙酸酯30%)中浸漬1分鐘,並調查於前後塗膜的膜厚的變化。若膜厚的變化為1nm以下時為良好以記號(○),若膜厚的變化超過2nm時為不良以記號(×)。
(耐顯影液性之評價)
藉由旋轉塗佈法將阻劑下層膜材料塗佈於矽晶圓上,用215℃的加熱板上燒成1分鐘。之後,於2.38質量%氫氧化四甲銨水溶液中浸漬1分鐘,並測定浸漬前後的膜厚。若於浸漬前後塗膜的膜厚的變化為1nm以下時為良好以記號(○),若塗膜的膜厚的變化超過2nm時為不良以記號(×)。
(濕式去除性評價)
將以上述所得的矽含有膜形成用組成物所成膜的矽含有膜,以50℃ 30秒鐘浸漬於用3比1的方式所混合的96%硫酸與35%過氧化氫水的硫酸過水中,來確認剝離性能。濕式去除性之評價結果於表4中以埃(Å)/min來表示。
(有機下層膜(A層)形成組成物之調製)
於氮氣下,在100mL四頸燒瓶中添加咔唑(6.69g、0.040mol、東京化成工業(股)製)、9-茀酮(7.28g、0.040mol、東京化成工業(股)製)、對甲苯磺酸一水合物(0.76g、0.0040mol、東京化成工業(股)製),裝入1,4-二噁烷(6.69g、關東化學(股)製)攪拌,昇溫至100℃並使其溶解而開始聚合。24小時後放冷至60℃後,添加三氯甲烷(34g、關東化學(股)製)來作稀釋,並放入甲醇(168g、關
東化學(股)製)使其再沈澱。將所得的沈澱物進行過濾,用減壓乾燥機以80℃、乾燥24小時,可得到作為目標的聚合物(相當於式(9-1),以下簡稱為PCzFL)9.37g。
PCzFL的1H-NMR的測定結果係如以下般。
1H-NMR(400MHz,DMSO-d6):δ 7.03-7.55(br,12H),δ 7.61-8.10(br,4H),δ 11.18(br,1H)
藉由PCzFL的GPC以聚苯乙烯換算所測定的重量平均分子量Mw為2800,多分散度Mw/Mn為1.77。
於所得的樹脂20g中,混合作為交聯劑的四甲氧基甲基甘脲(三井Cytec(股)製、商品名Powder link 1174)3.0g、作為觸媒的對甲苯磺酸吡啶鹽0.30g、作為界面活性劑的Megafac商品名R-30(DIC(股)製)0.06g,並使其溶解於丙二醇單甲基醚乙酸酯88g中來作為溶液。之後,使用孔徑0.10μm的聚乙烯製微濾器進行過濾,進而使用孔徑0.05μm的聚乙烯製微濾器進行過濾,來調製多層膜之微影製程中所使用的有機下層膜(A層)形成組成物的溶液。
(阻劑圖型化評價)
將上述式所得的有機下層膜(A層)形成組成物塗佈於矽晶圓上,在加熱板上以205℃烘烤60秒鐘,可得到膜厚200nm的有機下層膜(A層)。於其上,塗佈實施例1~16、比較例1~3所得的Si含有阻劑下層膜(B層)形成組成物,並在加熱板上以215℃烘烤60秒鐘,可得到Si含有阻劑下層膜(B層)。Si含有阻劑下層膜(B層)的膜厚係80nm。
藉由旋轉器,於B層之上分別塗佈市售的光阻劑溶液(信越化學工業(股)製、商品名SEPR430),在加熱板上以100℃加熱1分鐘,形成550nm的光阻劑膜(C層)。
通過設定以形成160nm的線寬/間距圖型的遮罩,並用NIKON公司製、KrF曝光機S-205C(波長248nm)進行曝光。以110℃進行90秒鐘曝光後加熱後,使用作為光阻劑用顯影液的2.38%四甲基銨氫氧化物水溶液(東京應化工業(股)製、商品名NMD-3)來進行60秒鐘混拌(puddle)顯影。對於所得的光阻劑圖型,以不產生大的圖型剝離或底切、線寬底部的粗大(基腳)者評價為良好。
提供一種可使用於半導體裝置之製造中的微影用阻劑下層膜形成組成物。提供一種用於形成可作為硬式遮罩的阻劑下層膜的微影用阻劑下層膜形成組成物。又,提供一種用於形成可作為抗反射膜的阻劑下層膜的微影用阻劑下層膜形成組成物。
由本發明的阻劑下層膜形成組成物所得的阻劑下層膜,由於能以硫酸/過氧化氫等的藥液來進行分解,故可用濕式蝕刻予以去除。
Claims (11)
- 一種微影用阻劑下層膜形成組成物,其特徵係包含(A)成分與(B)成分,(A)成分係包含水解性矽烷、該水解物、或該水解縮合物,該水解性矽烷係包含式(1):【化1】R1 aR2 bSi(R3)4-(a+b) 式(1)〔式(1)中,R1係表示式(2):
- 如請求項1之阻劑下層膜形成組成物,其中,該水解性矽烷係式(1)所表示的水解性矽烷與其他的水解性矽烷之組合,其他的水解性矽烷係由式(3)及式(4)所表示的水解性矽烷所構成之群選出之至少1種的水解性矽烷,【化3】R7 cSi(R8)4-c 式(3)(式(3)中,R7係表示烷基、芳基、鹵化烷基、鹵化芳基、烯基、醯氧基烷基、或具有脲基、環氧基、丙烯醯基、甲基丙烯醯基、巰基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結,R8係表示烷氧基、醯氧基、或鹵素基,c係表示0~3的整數);【化4】〔R9 dSi(R10)3-d〕2Ye 式(4)(式(4)中,R9係表示烷基且藉由Si-C鍵而與矽原子鍵結, R10係表示烷氧基、醯氧基、或鹵素基,Y係表示伸烷基或伸芳基,d係表示0或1的整數,e係表示0或1的整數)。
- 一種阻劑下層膜形成組成物,其特徵係包含水解性矽烷之水解縮合物來作為下層膜形成聚合物,所述水解性矽烷係由請求項1之式(1)所表示的水解性矽烷與請求項2之式(3)所表示的水解性矽烷之組合所構成。
- 如請求項1至請求項3中任一項之阻劑下層膜形成組成物,其中,包含上述(A)成分、上述(B)成分與進而的下述(C)成分,(C)成分係包含水解性矽烷、該水解物、或該水解縮合物,該水解性矽烷係式(5)所表示的水解性矽烷、式(5)所表示的水解性矽烷與式(3)所表示的水解性矽烷之組合、或式(5)所表示的水解性矽烷、式(3)所表示的水解性矽烷與式(4)所表示的水解性矽烷之組合,【化5】R11 aR12 bSi(R13)4-(a+b) 式(5)(式(5)中,R11係表示具有醯氧基、磺醯胺基、或t-丁基酯基的有機基且藉由Si-C鍵而與矽原子鍵結,R12係表示烷基、芳基、鹵化烷基、鹵化芳基、烷氧基芳基、烯基、或具有環氧基、丙烯醯基、甲基丙烯醯基、巰基、胺基、或氰基的有機基、或該等之組合且藉由Si-C鍵而與矽原子鍵結,R13係表示烷氧基、醯氧基、或鹵素基,a係表示1 的整數,b係表示0~2的整數,a+b係表示1~3的整數)。
- 如請求項1至請求項4中任一項之阻劑下層膜形成組成物,其中,(B)成分的烷氧基甲基係甲氧基甲基。
- 如請求項1至請求項5中任一項之阻劑下層膜形成組成物,其中,進而包含酸。
- 一種阻劑下層膜之形成方法,其特徵係包含將如請求項1至請求項6中任一項之阻劑下層膜形成組成物塗佈於半導體基板上並燒成而形成下層膜之步驟。
- 一種半導體裝置之製造方法,其特徵係包含下述步驟:將如請求項1至請求項6中任一項之阻劑下層膜形成組成物塗佈於半導體基板上並燒成來形成阻劑下層膜之步驟;於前述下層膜之上塗佈阻劑組成物來形成阻劑膜之步驟;曝光前述阻劑膜之步驟;於曝光後將阻劑顯影來得到阻劑圖型之步驟;藉由前述阻劑圖型來蝕刻阻劑下層膜之步驟;及藉由圖型化後的阻劑下層膜來加工半導體基板之步驟。
- 一種半導體裝置之製造方法,其特徵係包含下述步驟:於半導體基板上形成有機下層膜之步驟;於其上塗佈如請求項1至請求項6中任一項之阻劑下層膜形成組成物並燒成來形成阻劑下層膜之步驟;於前述阻劑下層膜之上塗佈阻劑組成物來形成阻劑膜之步驟;曝光前述阻劑膜之步驟;於曝光後將阻劑顯影來得到阻劑圖型之步驟;藉由前述阻劑圖型來蝕刻阻劑下層膜之步驟;藉由圖型化後的阻劑下層膜來蝕刻有機下層膜之步驟;及藉由圖型化後 的有機下層膜來加工半導體基板之步驟。
- 如請求項9之半導體裝置之製造方法,其中,包含在半導體基板之加工後以藥液來將圖型化後的阻劑下層膜及/或圖型化後的有機下層膜去除之步驟。
- 如請求項10之半導體裝置之製造方法,其中,進行去除的藥液係硫酸與過氧化氫之混合水溶液。
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2015
- 2015-11-06 WO PCT/JP2015/081345 patent/WO2016080217A1/ja active Application Filing
- 2015-11-06 JP JP2016560146A patent/JP6660023B2/ja active Active
- 2015-11-06 US US15/522,493 patent/US11815815B2/en active Active
- 2015-11-06 SG SG11201703607RA patent/SG11201703607RA/en unknown
- 2015-11-06 CN CN201580056230.2A patent/CN107077072B/zh active Active
- 2015-11-06 KR KR1020177009451A patent/KR102439087B1/ko active IP Right Grant
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI753081B (zh) * | 2017-01-11 | 2022-01-21 | 日商大賽璐股份有限公司 | 阻劑去除用組成物 |
TWI657319B (zh) * | 2017-03-31 | 2019-04-21 | 日商信越化學工業股份有限公司 | 光阻下層膜材料、圖案形成方法及光阻下層膜形成方法 |
US10416563B2 (en) | 2017-03-31 | 2019-09-17 | Shin-Etsu Chemical Co., Ltd. | Resist underlayer film composition, patterning process, and method for forming resist underlayer film |
Also Published As
Publication number | Publication date |
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JP6660023B2 (ja) | 2020-03-04 |
SG11201703607RA (en) | 2017-06-29 |
KR102439087B1 (ko) | 2022-09-01 |
TWI691560B (zh) | 2020-04-21 |
WO2016080217A1 (ja) | 2016-05-26 |
JPWO2016080217A1 (ja) | 2017-08-31 |
US20170371242A1 (en) | 2017-12-28 |
CN107077072B (zh) | 2021-05-25 |
CN107077072A (zh) | 2017-08-18 |
KR20170086467A (ko) | 2017-07-26 |
US11815815B2 (en) | 2023-11-14 |
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