TW200713580A - Semiconductor devices - Google Patents
Semiconductor devicesInfo
- Publication number
- TW200713580A TW200713580A TW095133192A TW95133192A TW200713580A TW 200713580 A TW200713580 A TW 200713580A TW 095133192 A TW095133192 A TW 095133192A TW 95133192 A TW95133192 A TW 95133192A TW 200713580 A TW200713580 A TW 200713580A
- Authority
- TW
- Taiwan
- Prior art keywords
- area
- nonactive
- ellipse shape
- semiconductor devices
- layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 4
- 239000012212 insulator Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7823—Lateral DMOS transistors, i.e. LDMOS transistors with an edge termination structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0878—Impurity concentration or distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
- H01L29/4933—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement with a silicide layer contacting the silicon layer, e.g. Polycide gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005263468A JP4791113B2 (ja) | 2005-09-12 | 2005-09-12 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200713580A true TW200713580A (en) | 2007-04-01 |
TWI315912B TWI315912B (zh) | 2009-10-11 |
Family
ID=37568596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095133192A TW200713580A (en) | 2005-09-12 | 2006-09-08 | Semiconductor devices |
Country Status (7)
Country | Link |
---|---|
US (1) | US7652307B2 (zh) |
EP (1) | EP1763083B1 (zh) |
JP (1) | JP4791113B2 (zh) |
KR (1) | KR100749230B1 (zh) |
CN (1) | CN100454580C (zh) |
DE (1) | DE602006012106D1 (zh) |
TW (1) | TW200713580A (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4956351B2 (ja) * | 2007-09-28 | 2012-06-20 | オンセミコンダクター・トレーディング・リミテッド | Dmosトランジスタの製造方法 |
KR101418396B1 (ko) * | 2007-11-19 | 2014-07-10 | 페어차일드코리아반도체 주식회사 | 전력 반도체 소자 |
JP5329118B2 (ja) * | 2008-04-21 | 2013-10-30 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | Dmosトランジスタ |
JP2010278312A (ja) * | 2009-05-29 | 2010-12-09 | Sanyo Electric Co Ltd | 半導体装置 |
KR101800371B1 (ko) * | 2011-05-27 | 2017-11-23 | 삼성전자주식회사 | 반도체 장치 |
CN102637743B (zh) * | 2012-05-02 | 2015-04-29 | 杭州士兰微电子股份有限公司 | 一种功率器件及其制造方法 |
US9536944B2 (en) * | 2012-12-04 | 2017-01-03 | Denso Corporation | Semiconductor device and method of manufacturing same |
JP2016092032A (ja) * | 2014-10-29 | 2016-05-23 | サンケン電気株式会社 | 半導体装置 |
WO2018123968A1 (ja) * | 2016-12-28 | 2018-07-05 | 株式会社ツーセル | 生体組織損傷の修復剤および当該修復剤の製造方法 |
US11049967B2 (en) * | 2018-11-02 | 2021-06-29 | Texas Instruments Incorporated | DMOS transistor having thick gate oxide and STI and method of fabricating |
KR102291317B1 (ko) * | 2019-07-24 | 2021-08-18 | 주식회사 키 파운드리 | 채널 길이 조정이 용이한 반도체 소자 및 그 제조방법 |
KR102233049B1 (ko) | 2019-07-24 | 2021-03-26 | 주식회사 키 파운드리 | 채널 길이 조정이 용이한 반도체 소자 및 그 제조방법 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4348600A (en) * | 1978-02-14 | 1982-09-07 | Motorola, Inc. | Controlled current source for I2 L to analog interfaces |
NL8204105A (nl) * | 1982-10-25 | 1984-05-16 | Philips Nv | Halfgeleiderinrichting. |
US5512774A (en) * | 1988-02-08 | 1996-04-30 | Kabushiki Kaisha Toshiba | Dielectrically isolated substrate and semiconductor device using the same |
JPH05121738A (ja) * | 1991-10-24 | 1993-05-18 | Fuji Electric Co Ltd | Misfetを有する半導体装置 |
EP0571027A1 (en) | 1992-05-21 | 1993-11-24 | Koninklijke Philips Electronics N.V. | Semiconductor device comprising a lateral DMOST with breakdown voltage raising zones and provisions for exchanging charge with the back gate region |
JP3203858B2 (ja) * | 1993-02-15 | 2001-08-27 | 富士電機株式会社 | 高耐圧mis電界効果トランジスタ |
BE1007657A3 (nl) | 1993-10-14 | 1995-09-05 | Philips Electronics Nv | Halfgeleiderinrichting met een snelle laterale dmost voorzien van een hoogspanningsaanvoerelektrode. |
KR950021600A (ko) * | 1993-12-09 | 1995-07-26 | 가나이 쯔또무 | 반도체 집적회로장치 및 그 제조방법 |
DE69427904T2 (de) * | 1994-05-31 | 2002-04-04 | Stmicroelectronics S.R.L., Agrate Brianza | Integrierte Halbleiterdiode |
JP3356586B2 (ja) * | 1995-06-01 | 2002-12-16 | 日本電気株式会社 | 高耐圧横型mosfet半導体装置 |
JPH09120995A (ja) * | 1995-08-22 | 1997-05-06 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
US5708287A (en) * | 1995-11-29 | 1998-01-13 | Kabushiki Kaisha Toshiba | Power semiconductor device having an active layer |
JPH1050985A (ja) * | 1996-07-31 | 1998-02-20 | Denso Corp | Mis構造を有する半導体装置 |
JP3473460B2 (ja) * | 1998-11-20 | 2003-12-02 | 富士電機株式会社 | 横型半導体装置 |
KR100332625B1 (ko) * | 1999-11-10 | 2002-04-17 | 곽정소 | 에피층을 이용한 반도체 집적회로의 저항구조 |
KR100535062B1 (ko) * | 2001-06-04 | 2005-12-07 | 마츠시타 덴끼 산교 가부시키가이샤 | 고내압 반도체장치 |
JP2003101017A (ja) * | 2001-09-27 | 2003-04-04 | Mitsubishi Electric Corp | 半導体装置 |
JP2003303961A (ja) | 2002-04-09 | 2003-10-24 | Sanyo Electric Co Ltd | Mos半導体装置 |
JP2005085975A (ja) * | 2003-09-09 | 2005-03-31 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2005093696A (ja) | 2003-09-17 | 2005-04-07 | Matsushita Electric Ind Co Ltd | 横型mosトランジスタ |
US20050145922A1 (en) * | 2003-12-30 | 2005-07-07 | Joseph Farley | EEPROM and flash EEPROM |
JP4839578B2 (ja) * | 2004-04-26 | 2011-12-21 | 富士電機株式会社 | 横形半導体装置 |
-
2005
- 2005-09-12 JP JP2005263468A patent/JP4791113B2/ja not_active Expired - Fee Related
-
2006
- 2006-09-07 US US11/516,733 patent/US7652307B2/en active Active
- 2006-09-08 TW TW095133192A patent/TW200713580A/zh not_active IP Right Cessation
- 2006-09-11 KR KR1020060087349A patent/KR100749230B1/ko not_active IP Right Cessation
- 2006-09-12 DE DE602006012106T patent/DE602006012106D1/de active Active
- 2006-09-12 CN CNB2006101272193A patent/CN100454580C/zh not_active Expired - Fee Related
- 2006-09-12 EP EP06019023A patent/EP1763083B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100749230B1 (ko) | 2007-08-13 |
CN1933179A (zh) | 2007-03-21 |
EP1763083A3 (en) | 2008-05-28 |
EP1763083B1 (en) | 2010-02-03 |
CN100454580C (zh) | 2009-01-21 |
JP2007080919A (ja) | 2007-03-29 |
TWI315912B (zh) | 2009-10-11 |
EP1763083A2 (en) | 2007-03-14 |
JP4791113B2 (ja) | 2011-10-12 |
DE602006012106D1 (de) | 2010-03-25 |
KR20070030142A (ko) | 2007-03-15 |
US7652307B2 (en) | 2010-01-26 |
US20070057321A1 (en) | 2007-03-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200713580A (en) | Semiconductor devices | |
EP3514826A3 (en) | Differentiated voltage threshold metal gate structures for advanced integrated circuit structure fabrication | |
MY195186A (en) | Nitride Structures Having Low Capacitance Gate Contacts Integrated with Copper Damascene Structures | |
TW200507267A (en) | Semiconductor diode with reduced leakage | |
WO2008099863A1 (ja) | 半導体,半導体装置及び相補型トランジスタ回路装置 | |
TW200518338A (en) | Semiconductor device and making thereof | |
TW200711057A (en) | SOI device with more immunity from substrate voltage | |
TW200620676A (en) | Thin film transistor and its manufacturing method | |
JP2010157636A5 (zh) | ||
TW200644155A (en) | Semiconductor device having trench structures and method | |
EP2263254A4 (en) | TWO GATE LATERALDIFFUSIONS MOS TRANSISTOR | |
JP2007531281A5 (zh) | ||
TW200707738A (en) | Substrate backgate for trigate FET | |
ATE375008T1 (de) | Feldeffekttransistorstruktur und herstellungsverfahren | |
TW200518206A (en) | Metal-oxide-semiconductor device formed in silicon-on-insulator | |
TW200524070A (en) | Metal contact structure and method of manufacture | |
TW200737488A (en) | Low voltage triggering silicon controlled rectifier and circuit thereof | |
FR3021457B1 (fr) | Composant, par exemple transistor nmos, a region active a contraintes en compression relachees, et condensateur de decouplage associe | |
JP2015015329A5 (zh) | ||
TW200509359A (en) | Electrostatic discharge protection circuit, semiconductor circuit and fabrication thereof | |
DE602008005779D1 (de) | Festkörpermikroanemometer und herstellungsverfahren dafür | |
KR900005595A (ko) | 역전압으로부터 모놀리딕 구조를 보호하는 활성 다이오드 | |
TW201143025A (en) | Electrostatic discharge protection device and electrostatic discharge protection circuit | |
JP2019511113A5 (zh) | ||
WO2006132704A3 (en) | High voltage igbt semiconductor device and method of manufacture |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |